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3. A new device for measuring particle deposition rate.

Author

Pecault, Isabelle Tovena

Subjects
PARTICLES (Nuclear physics), INDUSTRIAL contamination, PARTICULATE matter, ATMOSPHERIC fluorides
Abstract

Particle deposition in cleanrooms is a primary concern for industries manufacturing critical products with surfaces highly susceptible to particulate contamination. Limited research has been conducted to measure the deposited particles in cleanrooms. In the context of ISO 14644-3:2005, this paper describes the measurement of particle deposition in real-time by an innovative device: CLEAPART-100. CLEAPART-100 detects the same contamination events that are detected by airborne particle counters. [ABSTRACT FROM AUTHOR]

Published
2016

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