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1. Structural and optical properties of rare-earth-doped Y2O3 waveguides grown by pulsed-laser deposition

Author

Pons-Y-Moll, Oliver, Parriere, Jacques, Millon, Eric, Defourneau, Reine Marie, Defourneau, Daniel, Vincent, Brice, Essahlaoui, Abdel, Boudrioua, Azzedine, and Seiler, Wilfrid

Subjects
Waveguides -- Analysis, Thin films -- Research, Thin films -- Properties, Dielectric films -- Research, Dielectric films -- Properties, Yttrium -- Research, Yttrium -- Properties, Physics
Abstract

A study was conducted, using Rutherford backscattering spectroscopy, x-ray diffraction, and atomic force microscopy, to investigate the structural and morphological features of crystalline rare-earth-doped yttrium oxide thin films grown by pulsed-laser deposition (PLD) on SiO2/Si substrates. The result confirms that the PLD of rare-earth-doped yttria at high temperature and low pressure leads to the growth of good quality thin films with a polycrystalline structure and a low-surface roughness.

Published
2002

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