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2. Run-to-run overlay control of steppers in semiconductor manufacturing systems based on history data analysis and neural network modeling

8. Analytic Model of S/D Series Resistance in Trigate FinFETs With Polygonal Epitaxy

16. The analysis of EUV mask defects using a wafer defect inspection system

17. Characterization of Gate-All-Around Si-NWFET, including Rsd, cylindrical coordinate based 1/f noise and hot carrier effects

29. Behavior and Decomposition Velocity of Pollutants on Various Forms from Domestic Sewage in Small-scale Sewage Treatment Plant by Natural Purification Method

45. High-Temperature Superconducting Meander Line Resonators with YBa2Cu3O7-?Films

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