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6. Optical and electrical diagnostics of industrial plasma reactors: measuring the relevant physical quantities to assist process development

8. A Reconfigurable Source of Entangled Frequency bins

9. High Brightness programmable source of frequency-bin qubits.

10. Cycling process in remote plasma source for selective etching with nanometric control

11. III-V/Ge Heterostructure Plasma Etching and Passivation With a Single Plasma Process for Low-Damage Multijunction Solar Cell Fabrication

12. Comparative Study of Low Damage Plasma Etching Processes on the Integrity of AlGaN Layers Integrated in GaN HEMT During Gate Opening

14. Multijunction Solar Cell Electrical Isolation and Passivation with a Single Plasma Process

15. Influence of the Cl2 etching on the Al2O3/GaN metal–oxide–semiconductor interface.

18. Multijunction Solar Cell Electrical Isolation and Passivation with a Single Plasma Process

24. Plasma etching processes for the fabrication of a low-loss SiN micro-resonator and low power threshold of parametric oscillations

25. Development and optimization of the Smart Etch concept for SiN spacer etching with high selectivity over Si and SiO2

27. Etching Mechanisms of Si Containing Materials in Remote Plasma Source using NF3 based Gas Mixture

28. III-V/Ge Heterostructure Etching for Through Cell Via Contact Multijunction Solar Cell

29. Characterization of Plasma Induced Damage, Strain and Sidewall Roughness on InP Patterns and Their Impact on Luminescence

30. Optimization of H2 thermal annealing process for the fabrication of ultra-low loss Sub-Micron Silicon-on-Insulator rib Waveguides

31. Low-Loss Silicon Technology for High-Q Bright Quantum Sources

32. Low-Loss Silicon Technology for High-Q Bright Quantum Sources

36. HBr/O2 plasma treatment followed by a bake for photoresist linewidth roughness smoothing.

37. Optimization of optical performances in sub-micron silicon-on-insulator rib and strip waveguides by thermal annealing under H2

38. Anisotropic and Low Damage III-V/Ge Heterostructures via Etching for Multijunction Photovoltaic Cell Fabrication

39. New trends in Plasma Technologies

40. Dry strip efficiency and blisters formation mechanism during High Dose Implant Stripping

41. Ultra-high selective etching in remote plasmas: application to smart etch processes

42. Etching Mechanisms of SiN and SiO2 in NF3/NH3 downstream plasma

43. An atomic force microscopy-based method for line edge roughness measurement.

45. Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopy.

46. Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists.

47. Chlorine-based etching of InP laser : effect of plasma chemistry on sidewall roughness and damages

48. Development of plasma etching processes for the integration of III-V semicondutors as trigate nMOSFET’s channels

49. Processes Plasma etching of InP using Cl2/CH4/Ar for hybrid photonic integration on silicon

50. Development of plasma etching processes for the integration of III-V materials on Si for photonic and CMOS applications

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