Search

In the current semiconductor industrial scenario, wafers are rinsed in an overflow rinsing tank while being mounted on several lifters prior to most of its manufacturing processes. However, a major drawback of this overflow rinsing methodology is that some of the processing fluid stagnates due to the generated vortices in the regions between the side and middle lifters which entrap some of the flushed particles that further adhere and deteriorate the surface of the wafers. In this work, the hydrodynamics of the flow field inside the wafer rinsing tank with this original lifter orientation setup was studied and compared through numerical simulation and flow visualization using particle image velocimetry (PIV) method, and a strong agreement was found between them in terms of velocity calculation. A new lifter orientation setup was initiated and it was evidenced by the numerical simulation that with this new setup, the generated vortices which are situated opposite to the lifters tilting direction can be displaced significantly in terms of magnitude and distribution. This work presents a new wafer cleaning concept which shows its great potentials in improvement and implementation to the current in-line wafer batch fabrication process without modifying the original design of the rinsing tank. [ABSTRACT FROM AUTHOR]

A multi-purpose microfluidic device that can be used for both micromixing and micropropulsion operations has always been in demand, as it would simplify the various process flows associated with the current micro-total analysis systems. In this aspect, we propose a biomimetic artificial cilia-based microfluidic device that can efficiently facilitate both mixing and propulsion sequentially at the micro-scale. A rectangular microfluidic device consists of four straight microchannels that were fabricated using the microfabrication technique. An array of artificial cilia was embedded within one of the channel's confinement through the aforementioned technique. A series of image processing and micro-particle image velocimetry technologies were employed to elucidate the micromixing and micropropulsion phenomena. Experiment results demonstrate that, with this proposed microfluidic device, a maximum micromixing efficiency and flow rate of 0.84 and 0.089 μL/min, respectively, can be achieved. In addition to its primary application as a targeted drug delivery system, where a drug needs to be homogeneously mixed with its carrier prior to its administration into the target body, this microfluidic device can be used as a micro-total analysis system for the handling of other biological specimens. [ABSTRACT FROM AUTHOR]