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Your search keyword '"Otsubo, Hisashi"' showing total 15 results
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15 results on '"Otsubo, Hisashi"'

1. Artificial intelligence measurement in imaging-based overlay metrology for performance boost

Author

Sendelbach, Matthew J., Schuch, Nivea G., Grechin, Sveta, Katz, Shlomit, Maeda, Kei, Hirasawa, Tsumugi, Otsubo, Hisashi, Aoki, Seigo, Takahashi, Atsushi, Miyafuji, Atsushi, Manos, Ofer, Yang, Yu, Levinson, Tal, Trifon, Ran, Yehuda, Dor, Hagaze, Hamode, Lamhot, Yuval, Vardi, Yair, Grauer, Yoav, Safrani, Avner, Kato, Cindy, Yasuhisa, Iwata, Koichi, Imura, Kosuke, Ito, Masanobu, Hayashi, An, Eunjoong, Lan, Nana, Ahn, Simon, and Gutman, Nadav

Published
2024
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9. Construction of an error map of rotary axes on a five-axis machining center by static R-test

Author

80335190, Ibaraki, Soichi, Oyama, Chiaki, Otsubo, Hisashi, 80335190, Ibaraki, Soichi, Oyama, Chiaki, and Otsubo, Hisashi

Abstract

This paper proposes an efficient and automated scheme to calibrate error motions of rotary axes on a five-axis machining center by using the R-test. During a five-axis measurement cycle, the R-test probing system measures the three-dimensional displacement of a sphere attached to the spindle in relative to the machine table. Location errors, defined in ISO 230-7, of rotary axes are the most fundamental error factors in the five-axis kinematics. A larger class of error motions can be modeled as geometric errors that vary depending on the angular position of a rotary axis. The objective of this paper is to present an algorithm to identify not only location errors, but also such position-dependent geometric errors, or “error map, ”

Published
2011

12. Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives.

Author

Kimura, Fumihiko, Horio, Kenichiro, Kono, Daisuke, Matsubara, Atsushi, Ibaraki, Soichi, Otsubo, Hisashi, Tsuboi, Masaru, and Oshita, Isao

Abstract

In order to realize high-speed and high-precision machining, the enhancement of the motion accuracy of NC machine tools is required. It is effective to minimize the friction forces imposed on drive systems to enhance the motion accuracy. From this viewpoint, we developed a high precision machining center using linear motors and hydrostatic guideways for its drive system. The disturbance forces on the developed machining center are measured to evaluate the fundamental motion characteristics. Contouring error trajectories in high-speed circular motions of small radii are also measured for the evaluation of roundness. [ABSTRACT FROM AUTHOR]

Published
2007
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