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Mucous membrane pemphigoid (MMP), previously called cicatricial pemphigoid, is a rare subepidermal immunobullous disorder that primarily affects the mucous membranes (1,2). MMP is divided into two major subtypes, anti-BP180-type MMP and anti-laminin-332 (previously called laminin 5 or epiligrin) MMP. Anti-laminin-332 MMP is known to be associated with malignant tumors (3), which may cause overexpression of autoantibodies and induce autoimmunity to laminin-332 (4). MMP primarily affects the mucous membranes, and widespread skin lesions are rare. In MMP, circumscribed skin lesions have been previously reported as occurring on the head, neck, and upper trunk (5). We report a case of anti-laminin-332 MMP presenting with symmetrical skin lesions characteristic of MMP on the weight-bearing areas of the gluteal region. A 66-year-old Japanese man presented with a month-long history of multiple erosions and blisters on the mucous membranes and skin, with conjunctival hyperemia, nasal obstruction, oral pain, and hoarseness of voice. Three days before the first visit, he was diagnosed with gastric cancer with liver metastasis by gastrointestinal endoscopy and abdominal ultrasound examination for tarry stool. Physical examination demonstrated erosions and tense bullae on the conjunctivae, tongue, and lips (Figure 1, a,b), as well as erosive erythematous skin lesions on the nape, right index finger, both legs, and symmetric lesions on the gluteal region (Figure 1, c). His body weight was 86 kg. Laboratory examinations showed slight liver dysfunction and elevation of C-reactive protein levels. Histopathologic examination of the skin lesions demonstrated subepidermal blisters with lymphocytic and eosinophilic infiltrates (Figure 1, d,e). Direct immunofluorescence (IF) revealed linear deposits of IgG and C3, but not IgA, along the basement membrane zone (BMZ) (Figure 1, f,g). An IgG subclass study showed IgG1 and IgG4 deposits. Indirect IF on normal human skin revealed weak positivity for IgA anti-keratinocyte cell surface antibodies and IgG anti-BMZ antibodies, which were bound to the dermal side of 1 mol/L NaCl-split skin (Figure 1, h). IgG immunoblot analyses of both normal human epidermal and dermal extracts showed negative results (including BP230, BP180, 290 kDa type VII collagen, and 200 kDa laminin-γ1). Immunoprecipitation using radio-labeled cultured keratinocyte lysate demonstrated positive reactivity with laminin-332 (Figure 1, i). We established the diagnosis of anti-laminin-332 MMP. We started treatment with oral minocycline (200 mg/day) and niacinamide (900 mg/day) with topical corticosteroids without any effect after 2 weeks of therapy. Administration of oral prednisolone (40 mg/day) with topical corticosteroids and alprostadil ointment on the skin lesions, as well as beclometasone dipropionate powder on the oral lesions resulted in significant improvement of mucocutaneous lesions within 10 days. Although the gastric cancer and liver metastasis initially responded to chemotherapy with fluorouracil and cisplatin, the patient succumbed to multiple organ failure 9 months after the initial visit. Anti-laminin-332 antibodies were originally detected by immunoprecipitation, as in our case. Immunoblotting of purified human laminin-332 have been subsequently developed, which detects the 165/145 kDa α3, 140 kDa β3, and 105 kDa γ2 subunits of laminin-332 in various patterns (6). Today, the ELISA system uses laminin-332 preparations as adjunct diagnostic tools in MMP (7). Occasionally, a wide spectrum of autoantibodies is detected in MMP, for example, MMP with IgG antibodies to both BP180 and laminin-332, which were considered to be developed via epitope spreading. Detection of circulating IgA autoantibodies against the skin have also been reported in MMP (8). However, the pathogenic significance and mechanisms of coexistence of IgG anti-laminin-332 antibodies and IgA anti-keratinocyte cell surface antibodies found in our case are currently unknown. It is generally considered that IgG1 antibodies activate complements and are pathogenic in MMP, while IgG4 antibodies behave as blocking antibodies and are protective. In our case, direct IF revealed IgG1 and IgG4 deposits; the same was reported in a previous case report (9). The pathogenic roles of autoantibodies with different IgG subclasses need to be analyzed in further studies. Conjunctival mucosal lesions in MMP may occur by rubbing of the eyes due to irritation. Blinking subjects the conjunctivae to repeated friction. Vocal cords vibrate during breathing and speaking. The tongue moves while eating and drinking; in particular, the tip of the tongue gets into frequent contact with the inner sides of the incisor teeth. In the present case, characteristic symmetrical skin lesions were seen on the weight-bearing areas of the gluteal region on bony prominences which receive mechanical stresses in the sitting position. These skin lesions were subjected to repeated stretch and pressure stresses, but no ischemic changes were observed, such as decubitus ulcers. Therefore, the symmetrical skin lesions in the gluteal region as well as the ocular and oral mucosal lesions seen in our patient might have resulted from the same mechanism of pathogenesis. We reported a case of anti-laminin-332 MMP presenting with symmetrical gluteal skin lesions, probably induced by mechanical stress. MMP primarily affects the mucous membranes, and widespread skin lesions are rare. Our case emphasizes that clinicians need to specifically check for the presence of skin lesions on weight-bearing parts of the body during examination of patients with suspected MMP.

In this study, an inexpensive and abundant FeOx-based catalyst was developed as a three-way catalyst (TWC). The deactivation associated with the fusion and aggregation of metallic iron under high-temperature reducing conditions was solved by the formation of FeOx-ZrO2 nanostructures. Furthermore, high dispersibility of FeOx in the nanostructures and multiple pores were successfully formed using a supercritical CO2 drying. As a result, the oxygen storage capacity of the FeOx increased dramatically and high stability was obtained. In a TWC reactivity evaluation, the FeZr-TWC showed a high performance similar to that of the commercially available CeO2-based TWC. Even after aging treatment for 20 h at 1000 °C under a 10 vol% steam condition, an NOx (T80, NOx) conversion of greater than 80% was successfully achieved, whereas it was not achieved by the standard TWC. Therefore, the FeZr nanostructures are expected to have sufficient capacity to replace the conventional CeO2-based TWCs.

The cost reduction of hydrogen stations is a must in order to spread fuel cell vehicles. Generally, the PSA device in the hydrogen station occupies 30% of the construction cost. We have already proposed the cost reduction by replacing the PSA and CO shift converter with a membrane reactor to which CO2 selective facilitated transport membrane is built in 2011. Although the CO2 facilitated transport membrane achieved the CO2/H2 selectivity of 100 or more even if the operation temperature was 160°C, the durability was poor. Therefore, it is necessary to improve the heat resistance and the rate of reaction between carrier and CO2 furthermore so that it can be adopted for the membrane reactor. In order to improve the membrane performance at 160°C by keeping high water content of membrane, graphite rubbish was added to the membrane as it was expected to function as grain for water absorption. As a result, the CO2 selectivity of the membrane improved more than that of the previous membrane by 3 times.

Fiberoptic bronchoscopy revealed an ectopic tracheal bronchus to the right upper lobe arising 3 cm above the carina. An endobronchial blocker (COOPDECH™, Osaka, Japan) was positioned in the proximal right intermediate bronchus, blocking the middle and inferior lobes. Although the right upper lobe was ventilated, it did not obstruct the surgical field via a right anterior thoracotomy. The patient was ventilated using pressure-control ventilation with inspiratory pressure 20 cm H2O, positive end-expiratory pressure (PEEP) 6 cm H2O, and tidal volume 500 mL at an FIO2 1.0 after collapse of the right middle and lower lobes. The femoral artery was cannulated with a 20-Fr arterial cannula and the femoral vein with a 28-Fr venous cannula positioned into the right atrium with the tip in the superior vena cava to establish CPB. An antegrade cardioplegia cannula was inserted into the ascending aorta with a flexible cross-clamp subsequently applied. The heart was arrested initially by using antegrade cold blood cardioplegia. Myocardial protection was provided using mild systemic hypothermia (341C), and antegrade cold blood cardioplegia was given throughout the procedure at 30-minute intervals.

The hydrogen station in Japan is only 17 points though Toyota began to sell FCV from 15th November, 2014. The main reasons for which the spread of HS is late are a high construction cost and the indefinitely of spread prospect of FCV. However, it became clear that FCV in Japan spreads surely because the order for FCV exceeded 1000 from release in one week. The remaining problem is to reduce the cost of construction of 300 million yen. Therefore, we proposed membrane reactor composed of the reformer and the CO2 facilitated transport membrane to reduce the construction cost. It is necessary to achieve heat resistance of 160°C so that it is adopted for the membrane reactor. Therefore, we aim to optimize the operating condition (humidity, partial pressure of CO2 and differential pressure) of NDP to obtain the indicator of the heat resistance improvement at first. As a result, it is clear that the optimum operating condition of NDP is 80% of relative humidity, 200kPaG of the differential pressure and 40kPaG of the CO2 partial pressure.

Hydrogen of hydrogen station for FCV is usually produced by the reforming reaction, followed by the water gas shift reaction. The reformed gas contains a large amount of CO2, and this decreases the power efficiency although it does not influence the PEFC performance. The CO2 removal technology from the reformed gas is an important factor to improve the FCV performance. We developed a membrane for selective CO2 separation containing carbonate salt as a CO2 carrier. The support material of the CO2 carrier for a selective CO2 separation membrane should have water solubility, mechanical strength and heat resistance. We evaluated three support materials, PVA, AQN and NDP. The PVA membrane was broken at high temperature region though it showed good CO2 permeance at low temperature region. The AQN membrane had low CO2 permeance in all temperature regions. Although the NDP membrane had CO2 permeance at high temperature region, it should be improved further to increase the CO2 permeance.

We developed a novel membrane reactor consisted of a CO shift catalyst and a membrane for selective CO2 separation. First, we successfully developed novel facilitated transport membranes with excellent performances exceeding our target values, i.e. CO2 permeance of 1x10-4 mol/(m2skPa) and CO2/H2 selectivity of 100 at 160 oC. The developed membrane maintained high performances for more than 400 hours. Second, we developed CO shift catalysts, which had high activity for the CO shift reaction at 160 oC. Among the catalysts developed in this study, precious metal-based catalysts had quite high activities. By combining the developed membrane and catalyst, a membrane reactor-type CO converter was fabricated. By using the CO converter, CO and CO2 concentrations in feed gas (14.8 and 7.4 %, respectively) were drastically reduced. Observed CO and CO2 concentrations at the feed-side exit of the CO converter were 5 ppm and 0.3 %, respectively.

Consistent with the hypothesis that pulmonary epithelial apoptosis is the key to the acute exacerbation of idiopathic pulmonary fibrosis (IPF), we conducted serological identification of Ags by recombinant expression cloning (SEREX) analysis using type II alveolar cell carcinoma (A549) cell lines to identify disease-related Abs. In a survey of Abs to the recombinant autoantigens identified by SEREX analysis, five Abs were identified as novel candidates for the acute exacerbation of IPF. Abs to annexin 1 were detected in 47 and 53% of the sera and bronchoalveolar lavage materials from patients with acute exacerbation of IPF. Some identical TCR Vβ genes were identified in sequential materials obtained at 1–3 mo in all 10 acute exacerbation IPF cases, suggesting that some infiltrating CD4-positive T cells sharing limited epitopes expand by Ag-driven stimulation during disease extension. The CDR3 region of these identical TCR Vβ genes showed high homology with the N-terminal portion of annexin 1, including in the HLA-DR ligand epitopes predicted by TEPITOPE analysis. By Western blotting analysis and observation of the CD4-positive T cell responses in bronchoalveolar lavage samples, the N-terminal portion of annexin 1 was cleaved and found to induce marked proliferative responses of CD4-positive T cells in three patients. Our study demonstrates that annexin 1 is an autoantigen that raises both Ab production and T cell response in patients with acute exacerbation of IPF, and that the N-terminal portion of annexin 1 plays some role in the pathogenesis of acute exacerbation in IPF patients.

Many hospitals have introduced the Clinical Path (Path) to improve medical procedures. A Path is a way to manage care and check lists for a certain disease, providing a useful tool for hospital management. Paths can help hospitals reduce the duration of hospitalization and variations in care of patients while increasing hospital revenue. Nowadays, Paths are made by each hospital and there is no standard format. Benchmark testing between Paths used by different hospitals is important for evaluating medical practices, in order to develop and improve more effective practices. However, as the formats used in Paths are not standardized, benchmark testing of Paths is no easy task. To start benchmark testing of Paths, we compare medication in Paths and introduce description rules of medication in XML. Based on these, we developed a prototype system that enables us to compare the difference of medications in Paths prescribed between multiple of hospitals.

Objective: To assess the effectiveness and safety of thrombolytic treatment for acute pulmonary thromboembolism (APTE), especially in the hemodynamically stable patients with right ventricular afterload stress. Methods and Results: In a total of 221 patients with APTE, the association between thrombolytic treatment and the clinical outcomes were investigated. Thrombolysis was given to 121 patients (Thrombolytic Group), and the remaining 100 patients were treated with anticoagulation alone (Anticoagulation Group). In both patients with prolonged shock and patients who were hemodynamically stable without right ventricular afterload stress, the rate of death and recurrence of APTE in Anticoagulation Group were similar to those in Thrombolytic Group. In patients with right ventricular afterload stress, better outcomes were observed in Thrombolytic Group than in Anticoagulation Group, although the difference did not reach statistical significance. There was no significant difference in the rate of major bleeding episode between these two groups. Conclusion: Our results suggested that performing thrombolytic treatment in APTE patients with right ventricular afterload stress should be considered even in Japan.

Hitachi Group has been dedicating a great effort to research and development of low NOx combustion technologies in response to global environment protection. For pulverized coal combustion, we firstly developed a unique low-NOx burner, HT-NR, based on the theory of “In-Flame NOx reduction”. For this sophisticated and proven design, and our continuous contribution to low-NOx combustion technology, we were awarded the JSME (Japan Society of Mechanical Engineers) Medal as well as the highest prize from Director-General of the Environment Agency. Our further effort has led to the development of the second-generation low-NOx burner, HT-NR2, which enhances NOx decomposition capability. The HR-NR2 burner system has been applied to both domestic and foreign boilers, and has received high reputation from all users. Complying with the increasing need of higher efficiency, easier maintenance, and lower cost, the third generation low-NOx burner, HT-NR3 with more simplified structure, was developed to realize the concept of a wider and shorter flame for extremely low NOx combustion. Its excellent performance was confirmed in an actual plant

Objective There are many reports on the diagnosis and management of acute pulmonary embolism (APE), but there have been no investigations concerning the actual conditions in which recent developments in diagnostic imaging techniques and therapies have been applied in clinical practice. The present study was designed to investigate the changes in diagnostic imaging techniques and therapies for APE. Methods and Patients Three hundred and nine APE patients diagnosed during January 1994-October 1997 (Group 1) were compared with 257 APE patients diagnosed during November 1997-October 2000 (Group 2) in terms of the diagnostic imaging techniques and therapies for APE. Results Compared with Group 1, pulmonary angiography and contrast-enhanced computed tomography were more frequently performed for diagnosis in Group 2 [45.3% vs 56.8% (p=0.0069) and 13.9% vs 57.6% (p

High-quality SiO 2 films have been fabricated at a substrate temperature of 300°C by utilizing a novel deposition method refered to as radical-shower CVD (RS-CVD), in which the substrates and material gases are completely separated from the plasma. On this account, SiO 2 deposition is achievable without plasma damage and excessive decomposition of the material gases. The electrical characteristics of RS-CVD SiO 2 films are comparable to those of thermal SiO 2 . Furthermore, the compact parallel-plate structure of RS-CVD is suitable for large-area deposition.

Component effects such as a cocation and the zeolite support structure and the preparation condition effect of metal-loaded zeolites for the catalytic activity of direct NOx decomposition were examined using an experimental method. Regarding the cocation effect, the theoretical calculations were performed using a density functional method. The experimental results indicated that ZSM-5 was the best support of all of the zeolite tested such as ZSM-5, ZSM-11, SAPO-5, Y, and MOR. It was also experimentally found that the addition of a cocation such as Ca or Ni to Cu ion-exchanged ZSM-5 zeolite (Cu/ZSM-5) could prevent the catalyst from deactivation caused by O2 or H2O in the reaction gas. Regarding the cocation effect of Ca or Ni on Cu/ZSM-5, the theoretical calculations showed that the addition of these cocations increased the catalytic activity by promoting the desorption of oxygen yielded from NO decomposition and maintained NO adsorption on the catalyst under the coexistence of H2O. These results of the calculations supported the experimental results.

The unusually muscular pulmonary arteries normally present in cattle and swine residing at low altitude are associated with a rapid development of severe pulmonary hypertension when those animals are moved to high altitude. Because these species lack collateral ventilation, they appear to have an increased dependence on hypoxic vasoconstriction to maintain normal ventilation-perfusion balance, which, in turn, maintains thickened arterial walls. The only other species known to lack collateral ventilation is the coati, which, similarly, has thick-walled pulmonary arteries. We tested the hypothesis that coatis will develop severe high-altitude pulmonary hypertension by exposing six of these animals ( Nasua narica) to a simulated altitude of 4,900 m for 6 wk. After the exposure, pulmonary arterial pressures were hardly elevated, right ventricular hypertrophy was minimal, there was no muscularization of pulmonary arterioles, and, most surprising of all, there was a decrease in medial thickness of muscular pulmonary arteries. These unexpected results break a consistent cross-species pattern in which animals with thick muscular pulmonary arteries at low altitude develop severe pulmonary hypertension at high altitude.

The CuO/ZnO heterocontact is made by stacking CuO and ZnO porous ceramics and its catalytic activity for CO oxidation reaction is evaluated as a function of applied bias. Its catalytic activity is strongly depend on the dc applied bias and when the reverse bias (CuO-, ZnO+) is applied to the heterocontact, the amount of the produced \hboxCO2 from the catalytic interface rapidly increases, while it decreases when forward bias is applied. The magnitude of the enhancement of the catalytic activity by reverse applied bias is extremely large (30% for −2.0 V at 320°C), comparing with the results in the gradient composition CuO/ZnO heterocontact. The p-i-n structure is suggested as to the electronic structure of the CuO-ZnO contact interfaces and supposing p-i-n structure, the surface Fermi level position of CuO and ZnO are guessed to move as a function of applied bias. The catalytic reaction over CuO make a large contribute to the whole catalytic reaction at the CuO/ZnO heterocontact and it would be modified by the applied voltage dependent surface Fermi level position of CuO. The working mechanisms of such phenomena are qualitatively discussed by the electronic theory of catalyst proposed by Wolkenstein.

To clarify the optimal management and delineate the characteristics of patients with severe left main disease and cardiogenic shock as a result of an acute anterolateral myocardial infarction (left main shock syndrome), we analyzed the course of 13 such patients from September 1989 to June 1997. Of the 13 patients, 7 (53.8%) were managed with emergency coronary angioplasty (group A), 3 (23.1%) were treated with emergency coronary angioplsty following coronary bypass graft surgery (group B) and 3 (23.1%) underwent emergency coronary bypass graft surgery alone (group C). The interval from the beginning of myocardial ischemia to revascularization was 266 +/- 303 min. The degree of diameter stenosis found in the left main coronary artery was 98.1 +/- 1.8%. Overall in-hospital mortality for the 13 patient with left main shock syndrome was 76.9% (group A: 7/7; group B: 1/3; group C: 2/3, NS) and operative mortality was 61.5% (group A: 6/7; group B: 0/3; group C: 2/3, p = 0.03). When all 13 patients were examined together, the presence of ventricular tachycardia (VT) x ventricular fibrillation (Vf) was found to be the most powerful univariate predictor of operative death (p = 0.03). This is, 7 (87.5%) of the 8 patients with VT x Vf at presentation died within 30 postoperative days, and only 1 (20%) of the 5 patients without VT x Vf died (p = 0.03). Age, percent stenosis of the left main or right coronary arteries, the interval from the beginning of myocardial ischemia to revascularization, intubation, systolic pressure, fractional shortning, pulmonary artery pressure, pulmonary capillary wedge pressure, coronary risk factors, pulmonary edema, mitral regurgitation and percutaneous cardiopulmonary support failed to attain univariate significance at the P = .1 level. The postoperative peak CPK level was 15665 +/- 6710 IU/1 in operative death compared to 4733 +/- 2749 IU/1 in operative survival (p = 0.01). In conclusion, emergency coronary angioplasty following coronary bypass graft surgery for left main shock syndrome has been a very successful therapeutic option. Finally, for the entire group of 13 patients with left main shock syndrome, VT x Vf significantly decreased short-term survival.

The states of cobalt loaded on Beta zeolite and their roles in selective catalytic reduction of nitrogen oxide (NO x ) by propane were studied. Raman spectroscopy clearly indicated that Co 3 O 4 was formed on highly loaded samples. Spectroscopic characterization combined with catalytic activity tests showed that highly dispersed cobalt is essential for NO x reduction. Co 3 O 4 promotes NO x reduction at low temperatures, but decreases the selectivity to NO x reduction especially at high temperatures through promotion of propane oxidation by oxygen. At ca. 100% loading, a broad band which cannot be assigned to zeolite framework nor Co 3 O 4 was observed at around 600 cm −1 . The intensity of this band showed a strong dependency on SiO 2 /Al 2 O 3 ratio, and we suggest it is related to Co–O–Co species. This cobalt species was suggested to have high activity towards NO x reduction.

The CuO/ZnO heterocontacts for carbon monoxide (CO) gas sensors were made using CuO ceramics with different histories, and their gas sensing characteristics were evaluated. The CuO/ZnO heterocontact made by the quenched CuO sintered compact showed enhanced CO and CO{sub 2} gas sensitivity, while that made by slowly cooled CuO showed no selective CO gas-sensing characteristics with no CO{sub 2} gas sensitivity. The quenched CuO ceramics were thermodynamically stable but the slowly cooled ones were not; therefore the adsorbed CO molecules on the quenched CuO are thought to be stable and have longer lifetimes. The specific reaction between the adsorbed CO on CuO and adsorbed oxygen on ZnO would be promoted by long lifetime adsorbed CO on CuO and that may be the origin of the enhanced CO gas sensitivity of the quenched-CuO/ZnO heterocontact. The concentrations of cation vacancies of the quenched CuO ceramics can be controlled by controlling the firing temperatures. However, when the CuO ceramics for the CuO/ZnO heterocontact were made by firing and quenching, the ability to be selective in CO gas sensing of the heterocontact was not easily controlled by the control of the defect concentrations of the CuO ceramics.

A 52-year-old man was admitted to the hospital for a left inguinal hernia and it was repaired. Postoperative plain X-ray film showed an abnormal shadow which pressed the ascending colon in his right flank. Computed tomography and drip infusion cholangiography (DIC) demonstrated that the abnormal shadow was a part of an abnormally big and deformed liver which pressed the ascending colon to the left and reached the pelvic cavity. The gallbladder was included in the abnormal part of the liver in the right flank. The hepatic ducts once united to form the common hepatic duct in the abnormal part, then ascended receiving the cystic duct and changing the name into the common bile duct, and flowed into the duodenum. DIC and 99mTc-PMT cholescintigraphy showed the choleric excretory function being in good condition. Because of good liver and choleric excretory function, this anomaly of the liver was not considered to be pathological. Although minor variations in size and form of the liver are not uncommon, true anomaly in the form of the liver like this case is exteremly rare and has not been reported at least in Japan.

The preparation of large area ITO films for transparent electrodes of liquid crystal display (LCD) devices by a cluster type sputtering system (Anelva C-3500) was carried out. Effects of sputtering pressure and introduced oxygen gas flow rate at a low substrate temperature of 10°C on crystal structure, electrical property and etching properties were measured. Amorphous films could be obtained at a sputtering pressure higher than 2.6 Pa and an introduced oxygen gas flow rate lower than 0.8 sccm. During the measurement of etching properties of these films, an etching rate > 80 nm/s and a uniformity of about ±20% were obtained. The sheet resistance could not be reduced to a practical level for LCD devices even after annealing. To obtain a uniform and high etching rate and a low sheet resistance at a practical level, the parameters should be optimized. Although the film was not completely amorphous, an average value of 27 nm/s and a uniformity of ±23.5% for the etching rate was obtained within an area of 370 × 470 mm on a 400 × 500 mm substrate and an average sheet resistance of about 30 ω/□ was also obtained after annealing.

Selective catalytic reduction of NOx by propane was investigated on Co-Beta to clarify the loaded states of cobalt and their role in catalytic activity. At low ion exchange levels less than 100%, loaded cobalt is highly dispersed, which has a high selectivity for NOx reduction. At ion exchange levels much higher than 100%, Co3O4 appears as identified by Raman spectroscopy, and it contributes to propane oxidation by oxygen and lowers the selectivity especially at high temperatures.

Titanium nitride (TiN) and titanium (Ti) were deposited using a low-pressure and high-density helicon plasma process with titanium tetrachloride (TiCl4). This study aimed to clarify the characteristics of the TiN and Ti deposition processes and the properties of films. The rate-determining process of the TiN film-deposition reaction was changed with the TiCl4 partial pressure. High-deposition rate and excellent bottom coverage was achieved by using high TiCl4 partial pressure, but low film resistivity was not achieved simultaneously. By increasing the RF biased power, an improvement of the bottom coverage and the film resistivity was possible. The Ti film was deposited successfully by helicon plasma with a deposition rate of 4 nm min−1 and a film resistivity of 300 μΩ cm. It was found that synthesizing Ti films by plasma-enhanced chemical vapor deposition (CVD) required higher plasma density. The use of helicon plasma is promising for the deposition of TiN and Ti films. However, the deposited Ti film was an amorphous structure; this would be caused by impurities in this film (30 at% oxygen and 15 at% silicon). These impurities would be suspected to be induced by sputter etching of the quartz glass belljar used for the plasma generation chamber and by desorbing of H2O on the chamber wall.

From multiple regression analysis in the bottom coverage and resistivity of TiN films deposited using tetrakis(diethylamino)titanium (TDEAT), contour maps were calculated as functions of wafer temperature and reactor pressure. High bottom coverage and low resistivity were predicted at low pressure and low temperature with NH3 additives. Films have been deposited below 400°C and total reactor pressures below 133.3 Pa. Especially by adding a little NH3 to TDEAT, bottom coverages of 100% have been accomplished in 4.0 aspect ratio contacts with 300 nm diameter. Film resistivities have been also decreased from 24, 000 μΩ cm to about 10, 000 μΩ cm with 15 sccm NH3.

Basic process characteristics for Cu film deposition to be used in advanced ULSI interconnects have been studied by thermal LPCVD with liquid precursor Cu(hfac)(tmvs) (hexafluoro-acetylacetonate trimethyl-vinylsilane copper). For sufficient productivity in practical use, efforts were concentrated into obtaining high deposition rate with high film qualities of specific resistivity, surface flatness and adhesion. Three process chambers for preheating, TiN-PVD, and Cu-CVD functions were mounted on an ANELVA I-1060 single wafer cluster tool machine, where 6 inch wafers could be processed. Relationships between the deposition rate, specific resistivity, and Cu-CVD process parameters were analyzed using RSM (response surface methodology). Deposition rate over 100 nm/min was obtained at wafer temperature of 200°C, precursor flow rate of 0.67 g/min, carrier N2 flow rate of 400 sccm, and purge Ar flow rate of 125 sccm with specific resistivity of about 1.8 μΩ cm on TiN underlayer. This shows a promising process for future Cu interconnect technology.

We are developing direct decomposition catalysts to decompose the NO x involved in high temperature exhaust gases to N 2 and O 2 without any reductants such as urea and plan to bring this technology into practice in the 21st century. We expect to create very simple deNO x systems using direct decomposition catalysts applicable to a wide range of fields (co-generation, boilers, automobiles and so on) after overcoming the technical difficulties. Perovskite catalyst and zeolite catalyst are the most promising materials for direct decomposition catalysts. This study focuses on seeking and designing novel NO x direct decomposition catalysts having high activities through theoretical studies using computational chemistry and experimental studies using surface-science techniques.

The silicon semiconductor is widely used in various electronic equipments, and the graphite is an indispensable material used in manufacturing process of the silicon semiconductor.

It is known that the reflectivity of aluminum (Al) film deposited by chemical vapor deposition (CVD) decreases with an increase of film thickness as its surface roughens. A thin, smooth film is effective for filling small holes and narrow trenches by confonmal deposition, but a rough surface is not effective. In this study, a real-time monitoring of the CVD-A1 film deposition process has been attempted by measuring the reflected light intensity at the depositing film surface. By finishing the deposition when the monitored reflected light intensity of the He-Ne laser reached the maximum, a film with a very smooth surface could be reproduced. Furthermore, the lower limitation of smooth continuous film thickness was compared for four different cases. Investigated underlayers were Ti and TiN deposited by sputtering (SPT). On these underlayers, CVD-Al film was deposited without exposure to atmosphere or with exposure to atmosphere prior to the deposition, resulting in a total of four deposition conditions. The results showed that Al film deposited on TiN without exposure to atmosphere had the thinnest and the smoothest continuous film among the four. Since the thickness was 60 nm, the filling of 0.12-μm diameter holes or 0.12-μm wide trenches can be expected by this process.

Methane adsorption on Ga ion-exchanged ZSM-5 (Ga-ZSM-5) and In ion-exchanged ZSM-5 (In-ZSM-5) was investigated by temperature-programmed desorption in ultra high vacuum (UHV-TPD) to clarify the difference in the influence of water vapor on the selective catalytic reduction of NOx by methane. Methane was adsorbed on Ga-ZSM-5 and In-ZSM-5, and the adsorption heats of methane were estimated to be − 98 kJ/mol and − 132 kJ/mol for Ga-ZSM-5 and In-ZSM-5, respectively. The amount of methane adsorbed on Ga-ZSM-5 decreased considerably after the preadsorption of water, while little decrease was observed on In-ZSM-5. These results suggest that one of the reasons that the suppression of HC-SCR activity by water vapor is less severe on In-ZSM-5 than on Ga-ZSM-5, may be that competitive water adsorption is much more inhibiting to methane adsorption on Ga-ZSM-5 than it is on In-ZSM-5.

Adsorbed species during the reaction of selective catalytic reduction of NOx by hydrocarbons (HC-SCR) on Cu ion-exchanged ZSM-5 (Cu-ZSM-5) were investigated by in situ FT-IR using isotopes as well as gas phase analysis. No oxygen-containing species was observed by IR and no reaction proceeded in the presence of gaseous O2 and C2H4 below 473 K, at which HC-SCR occurs. However, an extra NOx species (tentatively assigned to organic nitrite or nitrate species), other than inorganic NOx species derived from O2 and NO, appeared very rapidly in IR at 1670 cm−1 at room temperature, in the presence of adsorbed NO2 species, gaseous C2H4 and NO. Afterwards, a carbonyl species (1677 cm−1) was formed gradually at room temperature. When the extra NOx species was observed, N2 and N2O evolved even at room temperature, therefore, the extra NOx species is considered to be related to HC-SCR. In the O2 + C2H4 + NO reaction at 473 K, no nitrogen-containing species, except for quite a small amount of nitrile (2168 cm−1), was o...

The decomposition mechanism of NO on Cu-ZSM-5 catalyst models was investigated using ab initio molecular orbital calculations with Huzinaga's MIDI-P basis set [see S. Huzinaga, Gaussian Basic Sets for Molecular Calculations, Elsevier, Amsterdam, 1984]. Two reaction routes were assumed for each model and the geometry of all molecules was optimized.

The microstructure of a mechanically alloyed (MA) Ti-45 mol%Al powder, in the as-milled state as well as after heat treatment, was investigated using analytical transmission electron microscopy (TEM/EDS). A new method for preparing the TEM samples was employed which resolved the microstructure of the MA powders, whose particle sizes were more than 10 μm in diameter. The MA powder milled for 720 ks was composed of nanocrystals, of which the grain size was approximately 20 nm, and consisted of an Al supersaturated α-Ti (HCP) phase and a small amount of α 2 (DO 19 ) phase. No evidence was observed for the existence of other phases, such as carbides, oxides or an amorphous phase. When the MA powder was heated up to the consolidation temperature, 1173 K, a massive transformation of the α phase to a non-equilibrium γ (γ M :Ll 0 ) phase took place, followed by decomposition of the γ M to equilibrium γ grains, α 2 and Ti 2 AlC particles. The orientation relationship between γ M and α 2 strongly suggested that the η M nucleated at the α/α 2 interface boundary. The massive transformation, therefore, has an important role in the formation of the (α 2 +γ) microduplex structure in titanium aluminide compacts made by mechanical alloying.

Catalysts for selective catalytic reduction of NO x by hydrocarbons (HC-SCR) have been reviewed from the patent literature. The problems to be solved for practical applications of the HC-SCR process and the method to solve them found in the patent literature are discussed. 198 references cited.

Mark formation mechanisms and R/W characteristics of two kinds of exchange-coupled magneto-optical disks, consisting of a read layer and a write layer, were investigated using an RAY tester and a polarizing microscope. In one of the disks (a regular-mode disk), marks recorded in the read layer were transcribed to the write layer; the opposite was the case in the other disk (an inverse-mode disk). In the case of the regular-mode disks, the characteristics of the carrier levels in relation to the writing power showed two stages, corresponding to ring domains and full domains. The ring domains appeared when the write power was low, and were caused by the static magnetic field near the T c radius in the write layer. The full domains appeared when the write power was high, because the anisotropic field in the reading layer decreased sufficiently. Only one stage was observed in inverse-mode disks. This is because the marks, which were formed by the Curie-point writing process in the write layer, were transcribed to the read layer.

A computer simulation method, based on the Landau–Lifshitz–Gilbert equation was developed in order to investigate the dynamics of magneto‐optical recording and the mark writing process for the rare earth‐transition metal amorphous magneto‐optical layer was subsequently analyzed. It was found that the writing process depends sensitively on the spot radius of the irradiation laser. This result is discussed considering the reverse magnetized domain shrinking force, due to radial direction variation of wall energy density in a cylindrical domain model and the characteristics of the magnetic parameters. The writing process is especially affected by the temperature dependence of parameters in the region near the Curie temperature.

The adsorption properties of oxygen and methane on Ga-ZSM-5 and Cu-ZSM-5 catalysts were examined by a TPD method to clarify the extraordinary selectivity of HC-SCR using methane on Ga-ZSM-5. It was observed that Ga-ZSM-5 did not adsorb oxygen but adsorbed methane dissociatively, while on Cu-ZSM-5 oxygen was dissociatively adsorbed and reacted with adsorbed ethylene.

1987年1月∼1991年12月の5年間に秋田大学医学部附属病院皮膚科を受診した白癬新患患者につき疫学的および菌学的調査を行い, 前回(1979∼83年)および前々回(1972∼76年)の調査と比較して以下の成績を得た。1)患者総数は, この5年間で691人(延例数にして864例)で, 男性376人, 女性315人で男女比は1.2:1であった。3回の調査で, 女性の割合が徐々に増加していた。年齢別では男女共50歳代が最も多かった。2)疾患別では足白癬496例(57.4%), 手白癬38例(4.4%), 爪白癬140例(16.2%), 体部白癬103例(11.9%), 股部白癬72例(8.3%), 頭部浅在性白癬9例, ケルスス禿瘡4例, 白癬菌性毛瘡2例であった。3)培養陽性株数は502株でTrichophyton rubrum 328株(65.3%), Trichophyton mentagrophytes 156株(31.1%), Microsporum canis 11株(2.2%), Trichophyton violaceum, Trichophyton verrucosum, Epidermophyton floccosum各々2株, Trichophyton tonsurans 1株であった。4)ケルスス禿瘡を除くと, 各疾患においていずれもT. rubrumが原因菌の第1位を占めていた。5)過去2回と今回の調査で分離菌の変遷をみるとM. canisが引続き増加傾向にあり, E. floccosumは前回に比べ大幅に減少していた。6)今回の調査でT. rubrumとT. mentagrophytesの比率は白癬全体では2.10, 足白癬では1.28であった。いずれも前回の調査と比べて上昇していた。

Optical enhancement conditions and read/write characteristics for exchange-coupled double-layer magnetooptic (MO) disks were investigated. It was found that the figure of merit (R(1/2)·? K ) for an MO disk with a thick (60 nm) magnetic layer is comparable to that of a conventional MO disk with a thin (20 nm) magnetic layer. The write noise level of the thick-magnetic-layer MO disk is markedly lower (2 to 5 dB) than that of the conventional disk. An exchange-coupled double-layer (GdFeCo 30 nm/TbFeCo 30 nm) MO disk, with a large Kerr rotation, moderate reflectivity and low noise level, is suitable for use as a high-performance medium. This MO disk has a C/N ratio of 45 dB at a wave-length of 680 nm, and a mark length of 0.67 pm when polycarbonate substrate with a track pitch of 1.2 ?m is used.