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An optical biosensor system using surface-plasmon field-enhanced fluorescence has been developed, which allows high sensitivity and fast measurement available. Intensity of fluorophores in SPFS is highly dependent upon the distance from metal surface. The resonant evanescent electric field excites fluorophores within the penetration area. On the other hand, fluorescence quenching in close proximity to a metal surface interfere with the excitation. We have developed a new technology for fluorescent nanoparticles that could receive the energy from metal surface effectively. This enables technology of detecting strong and stable SPFS signals, as well as homogeneous assay method that allows us to eliminate binding/free separation process for unreacted fluorescent particles. A rate assay method has also been employed, which resolves affect from diffusion-limited access, in order to realize a fast surface immunoreaction in a microchannel. Taking advantage of these two developments, as eliminating an enzyme response process such as CLEIA, our system reaches much faster reaction time of 2 minutes to detect thyroid stimulating hormone (TSH) of canine serum sample at 0.1ng/mL. We believe our system with these new technologies is a powerful tool for in-vitro diagnosis which meets various clinical requirements.

This paper describes the fabrication and performance of CMOS transistors featuring flash lamp annealing (FLA) for 45 nm node. We show, for the first time, applying FLA prior to spike RTA as S/D annealing is effective to enhance the channel stress in PFET with epitaxially grown SiGe (eSiGe) S/D. In NFET, FLA recovers the damaged layer in S/D extension caused by implantation and suppresses the transient enhanced diffusion (TED). These improvements result in 11% and 8% higher saturation drive current, and IDSAT=750muA/mum and 1160muA/mum for IOFF=100 nAmum at Vdd=lV in PFET and NFET, respectively. We also report the pattern density dependence of performance gain from FLA technique.

The effect of stress memorization technique (SMT) in performance and power reduction is maximized by choosing the appropriate stressor with large stress change by spike RTA. 30% mobility enhancement and 60% reduction of gate leakage have been achieved simultaneously. Stress distribution in channel region for SMT is confirmed to be uniform, hence layout dependency is minimized and performance is maximized in aggressively scaled CMOS with dense gate pitch rule (190 nm) in 45 nm technology node.

A method of generating three-dimensional image data by transmitting beams to an object from a transmitting part and detecting beams reflected from the object by using a two-dimensional sensor array having a plurality of sensors. The method includes the steps of: (a) storing detection signals obtained by the plurality of sensors during a predetermined period after transmission; (b) obtaining image data about at least one measured point included in the object on the basis of a detection signal output from at least one of the plurality of sensors at a time point obtained from relationship between a distance from the transmission part to at least one of the plurality of sensors through the at least one measured point and a transmission velocity of the beams passing through the object; and (c) obtaining image data by repeating step (b) while changing the time point.

An optical deflecting apparatus comprises a first generator for generating a first surface acoustic wave which advances to intersect an optical path of a guided optical wave advancing inside of an optical waveguide and diffracts and deflects the guided optical wave, and a second generator for generating a second surface acoustic wave which advances to intersect the optical path of the guided and diffracted optical wave and diffracts and deflects the guided and diffracted optical wave in a direction that amplifies the deflection caused by the diffraction. The first and second surface acoustic wave generators are formed to continuously change the frequencies of the first and second surface acoustic waves and the directions of advance thereof while satisfying the conditions of k1+k1=k2 and k2+k2=k3 wherein k1 and k2 respectively denote wave vectors of the guided optical wave before and after being diffracted by the first surface acoustic wave, k3 denotes the wave vector of the guided optical wave after being diffracted by the second surface acoustic wave, and k1 and k2 respectively denote wave vectors of the first and second surface acoustic waves.