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The temperature dependence of optical properties of magneto-optic garnet Ce:YIG was analyzed for the athermal operation of the Mach-Zehnder interferometer (MZI) optical isolator composed of an SOI-based waveguide with a Ce:YIG upper cladding layer. By measuring the wavelength shift of transmittance due to temperature changes, the temperature dependences of the refractive index and magneto-optic coefficient of Ce:YIG were characterized to be 2.5×10-4 K-1 and 13 deg/cm/K, respectively. We discuss the design of an athermal waveguide optical isolator.