1. Observation of voids formed by annealing in LiNbO3 implanted with Cu ions
- Author
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Yukinori Saito, Syouhei Taniguchi, J. Yamanaka, K. Ijima, N. Mitsui, and Angel Yi-Jung Ho
- Subjects
Nuclear and High Energy Physics ,Void (astronomy) ,Ion implantation ,Materials science ,Transmission electron microscopy ,Annealing (metallurgy) ,Scanning transmission electron microscopy ,Analytical chemistry ,Nanoparticle ,Spectroscopy ,Microstructure ,Instrumentation - Abstract
Cu ions were implanted into LiNbO 3 an energy of 3 MeV, and the absorption in the visible region was measured at each stage of annealing. The absorption peak produced by Cu ion implantation was gradually reduced by annealing at relatively low temperatures approximately 200 °C. The types of changes in the microstructure that occur in these process is of interest. The cross section of the implanted layer was inspected by scanning transmission electron microscope (STEM). Cu nanoparticles were observed in the as-implanted samples. Voids were observed in the sample annealed in air at temperatures of 200 °C or higher. The spectrum obtained by energy dispersive X-ray spectroscopy (EDX) shows small Cu signal around these voids. These results indicate that Cu atoms in the nanoparticles were made to diffuse into the matrix at high temperatures, leaving voids in the implanted layer.
- Published
- 2007
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