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The glow-to-arc transition is a critical phenomenon in plasma discharges, commonly leading to detrimental effects. The physical mechanisms triggering this transition remain poorly understood. The advent of a discharge called Hyper-Power Impulse Magnetron has opened possibilities. Hyper-Power Impulse Magnetron allows the glow mode to be maintained over long periods (1 ms) and at high-current densities (>5 A . cm − 2 ), which has unveiled certain features in the glow-to-arc transition. This work focuses on a graphite target that transits easily in the arc regime. The high-speed video-camera analysis revealed specific properties of graphite in ExB discharges, and the statistical study of the arc transition revealed differences from other refractory target materials. The early stage of cathodic spot formation, observed as bright dots, will be presented and analyzed within the known "ecton" and "vaporization" models for spot formation. This experimental study highlights the role of luminous spot formation prior to arc transition, with possible optimization on the stability of magnetron discharges. [ABSTRACT FROM AUTHOR]

Glow discharges are known to be limited for running at high current densities (typically below 0.1 A ⋅ c m − 2 ). Magnetically enhanced plasmas overcome this limitation, reaching up to two orders of magnitude higher current densities. However, the highest reported discharge current density hardly reaches 10 A ⋅ c m − 2 even in high power impulse magnetron sputtering (HiPIMS). Here, we report on the long (∼1 ms) pulsed operation of the magnetron in helium with an over-dense current (∼30 A ⋅ c m − 2 , usual for arcs) while preserving the glow mode. This regime defying the arcs was called hyper power impulse magnetron (HyPIM) because the power injected per pulse is several times higher than in HiPIMS for the same average power and pulse duration. HyPIM operation mode is distinguished from HiPIMS by the limited pulse voltage and is unsuitable for thin film deposition but may interest plasma switches. These huge currents were obtained for two cathode materials, molybdenum (Mo) and tungsten (W). Different experimental diagnostics bring insights into the physical phenomena governing the HyPIM plasma. A discussion on the role played by the metal atoms on the current unveils the origin of such exceptional glow current all along the pulse and the key role of the helium metastable atoms. A schematic of the kinetic steps of the HyPIM discharge is proposed. [ABSTRACT FROM AUTHOR]

Conventional magnetron discharge is a widely used technology for many applications. In the last decade, the high current density sputtering regime has been an interesting alternative for tailoring thin film properties. In this paper, we focused on the electrical characterization of the helium magnetron plasma operated at average gas pressure (5 Pa) with a molybdenum target. Optical emission spectroscopy diagnostics also supports this study by providing information on electron density evolution. The analysis of the plasma–surface interaction zone on the target unveiled the physical mechanisms associated with the high current density range (6 A cm−2), corresponding to different discharge regimes. The self-sputtering yield plays a key role in high-power impulse magnetron sputtering discharge operated with helium. The electron density is highly dependent on the presence of a metal. [ABSTRACT FROM AUTHOR]