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This paper reviews the inherent change in the observed mechanical behavior of electronic components, structures, and multimaterials as a result of the ongoing miniaturization. In general, the size of microstructures is no longer negligible with respect to the component size in micro and submicron applications. Additionally, surface layers start to play a more prominent role in the mechanical response. Microstructural effects, macroscopically triggered gradient effects, and surface effects jointly appear and constitute the various size effects that can be observed. Classical continuum mechanics theories fail to describe these phenomena, and higher-order multiscale theories are required to arrive at an appropriate prediction of the mechanical behavior of miniaturized structures. [DOI: 10.1115/1.1939007]

The fundamental performance characteristics of a 5 mm x 7 mm sized planar parametric transformer fabricated by the wire-electric discharge machine are investigated. An excellent voltage regulation which is less than 0.9 % at the rated value is obtained, when the supply frequency f is equal to 500 kHz. The capability of a multi-output-type parametric transformer is clarified.

Surface micromachined comb drive and microengine fluence thresholds and failure modes were investigated in x-ray, electron, and proton total-dose environments. Very high fluence levels were necessary to induce motion degradation or lockup for normal device biasing or operation. For the abnormal biasing of ungrounded or partially grounded dice, significantly lower fault thresholds were observed, but still in a medium or high fluence range.