1. Silicon Nitride Metalenses for Close-to-One Numerical Aperture and Wide-Angle Visible Imaging
- Author
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Ming Yuan Xie, Jian-Wen Dong, Wen Sheng Ruan, Siyuan Yu, Zhi Bin Fan, Xiao-Ning Pang, Zengkai Shao, Yujie Chen, and Fu Li Zhao
- Subjects
Fabrication ,Optical fiber ,Materials science ,business.industry ,Physics::Optics ,General Physics and Astronomy ,Metamaterial ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,law.invention ,Numerical aperture ,010309 optics ,Lens (optics) ,Semiconductor ,Nanolithography ,law ,0103 physical sciences ,Miniaturization ,Optoelectronics ,0210 nano-technology ,business - Abstract
Silicon nitride (SiN) is one of the emerging semiconductor materials that are used in both linear and nonlinear all-optical integrated devices. Its excellent dielectric properties, high material stability, and dispersion controllability are attractive to on-chip optical communications, optical signal processing, and even imaging devices. However, a large-aperture SiN metalens with high numerical aperture (NA) is limited by the low refractive index and nanofabrication technologies, particular in the visible spectrum. Here, we experimentally realize the visible-spectrum SiN divergent metalenses by fabricating the 695-nm-thick hexagonal arrays with a minimum space of 42 nm between adjacent nanopillars. A micro-size divergent metalens with NA∼0.98 and subwavelength resolution enables objects to be shrunk as small as a single-mode fiber core. Another centimeter-size SiN divergent metalens with over half a billion nanopillars, made by using the mature CMOS-compatible fabrication process, exhibits high-quality wide-angle imaging. Our findings may open a new door for the miniaturization of optical lenses in the fields of optical fibers, microendoscopes, and smart phones, as well as the applications in all-sky telescopes, large-angle beam shaping, and near-eye imaging.
- Published
- 2018