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1. Photoluminescence characterization of few-nanocrystals electronic devices

Author

F. Demangeot, Gérard Benassayag, M. Carrada, Arnaud Arbouet, Caroline Bonafos, M A F van den Boogaart, S. Schamm, Alain Claverie, Jürgen Brugger, Vincent Paillard, L M Doeswijk, C. Dumas, Jérémie Grisolia, Centre d'élaboration de matériaux et d'études structurales ( CEMES ), Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Nanophysique Magnétisme et Optoélectronique ( LNMO ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ), Microsystems Laboratory ( LMIS1-EPFL ), Ecole Polytechnique Fédérale de Lausanne ( EPFL ), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT), Centre d'élaboration de matériaux et d'études structurales (CEMES), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Nanophysique Magnétisme et Optoélectronique (LNMO), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Université Fédérale Toulouse Midi-Pyrénées, Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie de Toulouse (ICT-FR 2599), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)

Subjects
Photoluminescence, Microscope, Nanostructure, Silicon, Annealing (metallurgy), Biophysics, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Biochemistry, law.invention, law, 0103 physical sciences, [PHYS]Physics [physics], 010302 applied physics, [ PHYS ] Physics [physics], Coulomb blockade, General Chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Ion implantation, chemistry, 0210 nano-technology, Luminescence
Abstract

International audience; Photoluminescence (PL) spectroscopy is demonstrated as a suitable technique to characterize silicon nanocrystals (Si-NCs)-based non-volatile memory devices. The 2D array of Si-NCs forming the floating gate is obtained by low-energy ion implantation in thin oxide followed by annealing. The electrical properties and PL emission are dramatically improved after annealing in oxidizing conditions, which are necessary conditions for oxide healing. Both these elaboration and characterization techniques are currently extended to the production and the study of nanoscale electronic devices, which exploit the Coulomb blockade effect and other quantized charging features at 300 K. The fabrication of such devices requires the fine control of a small number of NCs of about 3 nm in diameter. This could be achieved by 1 keV Si-implantation through stencil masks with window sizes ranging from about 0.1 to 10 μm2, with spacing between apertures in the 1–10 μm range. After mask removal and annealing, PL spectroscopic imaging under a confocal microscope is used to detect the NCs rich areas. The image of the PL intensity is found to mimic the mask geometry. Some changes of the PL energy at maximum intensity are found, that could be attributed to different Si-NCs sizes.

Published
2006
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2. Optical Antenna-Based Fluorescence Correlation Spectroscopy to Probe the Nanoscale Dynamics of Biological Membranes

Author

Valentin Flauraud, Juergen Brugger, Hervé Rigneault, Pamina M. Winkler, Raju Regmi, Jérôme Wenger, Maria F. Garcia-Parajo, Institut de Ciencies Fotoniques [Castelldefels] (ICFO), MOSAIC (MOSAIC), Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), and Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)

Subjects
0301 basic medicine, Microscope, Nanostructure, Materials science, FOS: Physical sciences, Fluorescence correlation spectroscopy, Nanotechnology, 02 engineering and technology, plasmonics, law.invention, living cell membrane, Diffusion, 03 medical and health sciences, Membrane Microdomains, law, optical antenna, General Materials Science, fluorescence correlation spectroscopy (FCS), Physics - Biological Physics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Physical and Theoretical Chemistry, Plasmon, lipid rafts, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Física [Àrees temàtiques de la UPC], Cell Membrane, Biological membrane, 021001 nanoscience & nanotechnology, Lipids, Nanostructures, 3. Good health, Microsecond, Spectrometry, Fluorescence, 030104 developmental biology, Membrane, Biological Physics (physics.bio-ph), Temporal resolution, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Antennas (Electronics), Antenes (Electrònica), [PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph], antennas, 0210 nano-technology, Optics (physics.optics), Physics - Optics
Abstract

International audience; The plasma membrane of living cells is compartmentalized at multiple spatial scales ranging from the nano-to the meso-scale. This non-random organization is crucial for a large number of cellular functions. At the nanoscale, cell membranes organize into dynamic nano-assemblies enriched by cholesterol, sphingolipids and certain types of proteins. Investigating these nano-assemblies known as lipid rafts is of paramount interest in fundamental cell biology. However, this goal requires simultaneous nanometer spatial precision and microsecond temporal resolution which is beyond the reach of common microscopes. Optical antennas based on metallic nanostructures efficiently enhance and confine light into nanometer dimensions, breaching the diffraction limit of light. In this Perspective, we discuss recent progress combining optical antennas with fluorescence correlation spectroscopy (FCS) to monitor microsecond dynamics at nanoscale spatial dimensions. These new developments offer numerous opportunities to investigate lipid and protein dynamics in both mimetic and native biological membranes.

Published
2017
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3. Planar Optical Nanoantennas Resolve Cholesterol-Dependent Nanoscale Heterogeneities in the Plasma Membrane of Living Cells

Author

Valentin Flauraud, Kyra J. E. Borgman, Maria F. Garcia-Parajo, Hervé Rigneault, Carlo Manzo, Jürgen Brugger, Pamina M. Winkler, Jérôme Wenger, Raju Regmi, MOSAIC (MOSAIC), Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Institut de Ciencies Fotoniques [Castelldefels] (ICFO), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Institució Catalana de Recerca i Estudis Avançats (ICREA), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), and Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)

Subjects
0301 basic medicine, Nanophotonics, 02 engineering and technology, Cell membrane, Diffusion, Plasma, General Materials Science, fluorescence correlation spectroscopy (FCS), Lipid raft, lipid rafts, chemistry.chemical_classification, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 021001 nanoscience & nanotechnology, Condensed Matter Physics, 3. Good health, Sphingomyelins, medicine.anatomical_structure, Membrane, Cholesterol, Biological Physics (physics.bio-ph), Ethanolamines, nanophotonics, lipids (amino acids, peptides, and proteins), 0210 nano-technology, Sphingomyelin, Physics - Optics, Materials science, Optical nanoantenna, FOS: Physical sciences, Bioengineering, Fluorescence correlation spectroscopy, Nanotechnology, CHO Cells, 03 medical and health sciences, Cricetulus, Membrane Microdomains, medicine, Animals, Physics - Biological Physics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Nanoscopic scale, Física [Àrees temàtiques de la UPC], Mechanical Engineering, Biomolecule, Cell Membrane, live cell membrane, General Chemistry, 030104 developmental biology, Spectrometry, Fluorescence, chemistry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optics (physics.optics)
Abstract

Optical nanoantennas can efficiently confine light into nanoscopic hotspots, enabling single-molecule detection sensitivity at biological relevant conditions. This innovative approach to breach the diffraction limit offers a versatile platform to investigate the dynamics of individual biomolecules in living cell membranes and their partitioning into cholesterol-dependent lipid nanodomains. Here, we present optical nanoantenna arrays with accessible surface hotspots to study the characteristic diffusion dynamics of phosphoethanolamine (PE) and sphingomyelin (SM) in the plasma membrane of living cells at the nanoscale. Fluorescence burst analysis and fluorescence correlation spectroscopy performed on nanoantennas of different gap sizes show that, unlike PE, SM is transiently trapped in cholesterol-enriched nanodomains of 10 nm diameter with short characteristic times around 100 μs. The removal of cholesterol led to the free diffusion of SM, consistent with the dispersion of nanodomains. Our results are consistent with the existence of highly transient and fluctuating nanoscale assemblies enriched by cholesterol and sphingolipids in living cell membranes, also known as lipid rafts. Quantitative data on sphingolipids partitioning into lipid rafts is crucial to understand the spatiotemporal heterogeneous organization of transient molecular complexes on the membrane of living cells at the nanoscale. The proposed technique is fully biocompatible and thus provides various opportunities for biophysics and live cell research to reveal details that remain hidden in confocal diffraction-limited measurements.

Published
2017
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4. In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement

Author

Niek F. van Hulst, Maria F. Garcia-Parajo, Pamina M. Winkler, Valentin Flauraud, Juergen Brugger, Hervé Rigneault, Raju Regmi, Jérôme Wenger, Duncan T. L. Alexander, Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), MOSAIC (MOSAIC), Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Institut de Ciencies Fotoniques [Castelldefels] (ICFO), Interdisciplinary Center for Electron Microscopy (CIME) Ecole Polytechnique Fédérale de Lausanne, European Project: 278242,EC:FP7:ERC,ERC-2011-StG_20101014,EXTENDFRET(2012), European Project: 288263,EC:FP7:ICT,FP7-ICT-2011-7,NANO-VISTA(2011), European Project: 670949,H2020,ERC-2014-ADG,LightNet(2016), European Project, Universitat Politècnica de Catalunya. Institut de Ciències Fotòniques, and Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Nanostructure, Fabrication, Bioengineering, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, 7. Clean energy, Fluorescence, Optics, Chemical-mechanical planarization, General Materials Science, Fluorescence enhancement, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Optical nanoantennas, Plasmon, Template stripping, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Física [Àrees temàtiques de la UPC], business.industry, Mechanical Engineering, General Chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Fluorescència, 0104 chemical sciences, Nanolithography, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Electron beam lithography, Plasmonics, Nanometre, 0210 nano-technology, business, antennas, Excitation, Electron-beam lithography
Abstract

Optical nanoantennas have a great potential for enhancing light-matter interactions at the nanometer scale, yet fabrication accuracy and lack of scalability currently limit ultimate antenna performance and applications. In most designs, the region of maximum field localization and enhancement (i.e., hotspot) is not readily accessible to the sample since it is buried into the nanostructure. Moreover, current large-scale fabrication techniques lack reproducible geometrical control below 20 nm. Here, we describe a new nanofabrication technique that applies planarization, etch back and template stripping to expose the excitation hotspot at the surface, providing a major improvement over conventional electron beam lithography methods. We present large flat surface arrays of in-plane nanoantennas, featuring gaps as small as 10 nm with sharp edges, excellent reproducibility and full surface accessibility of the hotspot confined region. The novel fabrication approach drastically improves the optical performance of plasmonic nanoantennas to yield giant fluorescence enhancement factors up to 104-105 times, together with nanoscale detection volumes in the 20 zeptoliter range. The method is fully scalable and adaptable to a wide range of antenna designs. We foresee broad applications by the use of these in-plane antenna geometries ranging from large-scale ultra-sensitive sensor chips, to microfluidics and live cell membrane investigations.

Published
2017
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5. Transient Nanoscopic Phase Separation in Biological Lipid Membranes Resolved by Planar Plasmonic Antennas

Author

Hervé Rigneault, Jérôme Wenger, Valentin Flauraud, Maria F. Garcia-Parajo, Jürgen Brugger, Raju Regmi, Pamina M. Winkler, Institut de Ciencies Fotoniques [Castelldefels] (ICFO), MOSAIC (MOSAIC), Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Institució Catalana de Recerca i Estudis Avançats (ICREA), European Project, European Project: 288263,EC:FP7:ICT,FP7-ICT-2011-7,NANO-VISTA(2011), and Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)

Subjects
0301 basic medicine, Models, Molecular, Materials science, FCS diffusion laws, [PHYS.PHYS.PHYS-BIO-PH]Physics [physics]/Physics [physics]/Biological Physics [physics.bio-ph], Lipid Bilayers, General Physics and Astronomy, FOS: Physical sciences, Fluorescence correlation spectroscopy, Nanotechnology, 02 engineering and technology, Phase Transition, Diffusion, 03 medical and health sciences, Membrane Microdomains, General Materials Science, Physics - Biological Physics, Lipid bilayer, Nanoscopic scale, Lipid raft, Plasmon, Lipid rafts, Física [Àrees temàtiques de la UPC], [SDV.BBM.BS]Life Sciences [q-bio]/Biochemistry, Molecular Biology/Structural Biology [q-bio.BM], General Engineering, Biological membrane, 021001 nanoscience & nanotechnology, Microsecond, 030104 developmental biology, Membrane, Cholesterol, Spectrometry, Fluorescence, Biological Physics (physics.bio-ph), optical nanoantennas, Phosphatidylcholines, Antennas (Electronics), Antenes (Electrònica), lipids (amino acids, peptides, and proteins), 0210 nano-technology, antennas, Optical nano-antennas, Physics - Optics, Biological membranes, Optics (physics.optics)
Abstract

Nanoscale membrane assemblies of sphingolipids, cholesterol, and certain proteins, also known as lipid rafts, play a crucial role in facilitating a broad range of important cell functions. Whereas on living cell membranes lipid rafts have been postulated to have nanoscopic dimensions and to be highly transient, the existence of a similar type of dynamic nanodomains in multicomponent lipid bilayers has been questioned. Here, we perform fluorescence correlation spectroscopy on planar plasmonic antenna arrays with different nanogap sizes to assess the dynamic nanoscale organization of mimetic biological membranes. Our approach takes advantage of the highly enhanced and confined excitation light provided by the nanoantennas together with their outstanding planarity to investigate membrane regions as small as 10 nm in size with microsecond time resolution. Our diffusion data are consistent with the coexistence of transient nanoscopic domains in both the liquid-ordered and the liquid-disordered microscopic phases of multicomponent lipid bilayers. These nanodomains have characteristic residence times between 30 and 150 μs and sizes around 10 nm, as inferred from the diffusion data. Thus, although microscale phase separation occurs on mimetic membranes, nanoscopic domains also coexist, suggesting that these transient assemblies might be similar to those occurring in living cells, which in the absence of raft-stabilizing proteins are poised to be short-lived. Importantly, our work underscores the high potential of photonic nanoantennas to interrogate the nanoscale heterogeneity of native biological membranes with ultrahigh spatiotemporal resolution.

Published
2017
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6. The transition in hydrogen sensing behavior in noncontinuous palladium films

Author

Frédéric Fargier, Thomas Kiefer, Frédéric Favier, Luis Guillermo Villanueva, Jürgen Brugger, Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM ICMMM), and Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Université Montpellier 1 (UM1)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC)

Subjects
Materials science, Physics and Astronomy (miscellaneous), Hydrogen, Annealing (metallurgy), chemistry.chemical_element, Nanotechnology, Percolation threshold, 02 engineering and technology, [CHIM.MATE]Chemical Sciences/Material chemistry, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, chemistry, Electrical resistance and conductance, Chemical physics, Electrical resistivity and conductivity, Electrical conduction, Metallic thin films, 0210 nano-technology, ComputingMilieux_MISCELLANEOUS, Palladium
Abstract

The morphological transition in ultrathin palladium (Pd) films around the percolation threshold and the related transition in hydrogen sensing behavior is investigated. We find that besides the transition from continuous to discontinuous Pd, an intermediate - semicontinuous-state must be considered. It shows hydrogen sensing features of both continuous and discontinuous film types, simultaneously. This study focuses on the discontinuous-semicontinuous transition. Experimental evidence is supported by studying the evolution of the electrical resistance with temperature, under hydrogen exposure and after thermal annealing. The results are highly relevant for the optimization of nanogap based hydrogen sensors.

Published
2010
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7. Discontinuous Palladium Nanostructures for H2 Sensing

Author

Guillermo Villanueva, Juergen Brugger, Frédéric Fargier, Thomas Kiefer, Claire Fournier, Frédéric Favier, Reginald M. Penner, Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM ICMMM), Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Université Montpellier 1 (UM1)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Department of Chemistry [Irvine], University of California [Irvine] (UCI), and University of California-University of California

Subjects
Materials science, Fabrication, Nanostructure, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, [CHIM.MATE]Chemical Sciences/Material chemistry, 010402 general chemistry, 021001 nanoscience & nanotechnology, Microstructure, 7. Clean energy, 01 natural sciences, 0104 chemical sciences, law.invention, chemistry, law, Nano, Resistor, 0210 nano-technology, ComputingMilieux_MISCELLANEOUS, Palladium
Abstract

Various top-down, bottom-up, and hybrid fabrication routes of discontinuous palladium nano and mesostructures can be used for the fabrication of resistor based H2 sensing devices. 1D, 2D, and 3D structures can be achieved using appropriate material templating and self-organization methods. Sensing mechanism is based on reversible gap closing/opening under H2/H2-free atmospheres undergoing the conversion equilibrium between Pd and PdH0.7. Sensing performances depend on device designs and material microstructures and assembling/organizations.

Published
2008
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8. A single nanotrench in a palladium microwire for hydrogen detection

Author

Thomas Kiefer, Oscar Vazquez-Mena, Guillermo Villanueva, Frédéric Favier, Jürgen Brugger, Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM ICMMM), Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Université Montpellier 1 (UM1)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), and financement européen

Subjects
ION-BEAM APPLICATIONS, Materials science, Ion beam, Silicon, Hydrogen, chemistry.chemical_element, Bioengineering, Nanotechnology, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, Focused ion beam, THIN-FILMS, ABSORPTION, General Materials Science, Electrical and Electronic Engineering, Thin film, business.industry, Mechanical Engineering, SENSOR, SWITCHES, [CHIM.MATE]Chemical Sciences/Material chemistry, General Chemistry, LITHOGRAPHY, 021001 nanoscience & nanotechnology, 0104 chemical sciences, chemistry, Mechanics of Materials, Trench, Optoelectronics, 0210 nano-technology, business, Polyimide, Palladium
Abstract

The hydrogen sensing characteristics of a single nanotrench fabricated by focused ion beam milling (FIB) in an evaporated palladium microwire are presented. In situ atomic force microscopy (AFM) measurements proved that, in the presence of H(2), the trench closes and electrically connects the initially separated parts of the wire due to the increase in volume of the material. Therewith, an electrical current can be switched through the wire. With experiments under various H(2) concentrations and a mathematical model, we describe the closing mechanism of the trench with respect to various parameters, including the substrate material, film thickness, trench size and wire dimensions. Results have been compared with those from equivalent continuous wires. Thin SiO(2) and polyimide (PI) layers on silicon were used to study the effect of substrate elasticity. Sufficient lateral expansion of Pd to close trenches of up to 70 nm in width has only been observed on PI, which we attribute to its advantageous elastic properties. The scale of the response times allowed the observation of two superposing effects: the chemical conversion of Pd to PdH(x) and the mechanical closing of the trench.

Published
2008
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9. Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Author

Luis Guillermo Villanueva, Thomas Kiefer, Frédéric Fargier, Jürgen Brugger, Frédéric Favier, Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM ICMMM), and Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Université Montpellier 1 (UM1)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC)

Subjects
Fabrication, Materials science, Metal-Films, chemistry.chemical_element, Bioengineering, Nanotechnology, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, Nanoclusters, Absorption, Electrochemistry, General Materials Science, Wafer, Stencil lithography, Electrical and Electronic Engineering, Nanoscopic scale, ComputingMilieux_MISCELLANEOUS, Mechanical Engineering, Mesowire Arrays, Segregation, [CHIM.MATE]Chemical Sciences/Material chemistry, General Chemistry, Electrical-Conduction, 021001 nanoscience & nanotechnology, Nanostructures, 0104 chemical sciences, Resins, Synthetic, chemistry, Mechanics of Materials, Microtechnology, Wafer dicing, 0210 nano-technology, Microelectrodes, Nanocrystalline Palladium, Switches, Palladium, Polyimide, Hydrogen
Abstract

Fast hydrogen sensors based on discontinuous palladium (Pd) films on supporting polyimide layers, fabricated by a cost-efficient and full-wafer compatible process, are presented. The films, deposited by electron-beam evaporation with a nominal thickness of 1.5 nm, consist of isolated Pd islands that are separated by nanoscopic gaps. On hydrogenation, the volume expansion of Pd brings initially separated islands into contact which leads to the creation of new electrical pathways through the film. The supporting polyimide layer provides both sufficient elasticity for the Pd nanoclusters to expand on hydrogenation and a sufficiently high surface energy for good adhesion of both film and contacting electrodes. The novel order of the fabrication processes involves a dicing step prior to the Pd deposition and stencil lithography for the patterning of microelectrodes. This allows us to preserve the as-deposited film properties. The devices work at room temperature, show response times of a few seconds and have a low power consumption of some tens of nW.

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10. Nanobiosensors based on individual olfactory receptors

Author

O. Ruiz, Vladimir Akimov, Josep Samitier, Santiago A. Rodríguez-Seguí, Abdelhamid Errachid, Marie-Annick Persuy, Joan Bausells, Laura Fumagalli, Jasmina Vidic, Mateu Pla-Roca, Jeanne Grosclaude, Eleonora Alfinito, Yanxia Hou, Lino Reggiani, C. Martelet, Giorgio Ferrari, Ignacio Casuso Paramo, Alexey P. Soldatkin, Iryna Benilova, Roland Salesse, Edith Pajot-Augy, Gabriel Gomila, Guillermo Villanueva, Cecilia Pennetta, Nicole Jaffrezic-Renault, Marco Sampietro, V., Akimov, Alfinito, Eleonora, J., Bausell, I. V., Benilova, I. C., Paramo, A., Errachid, G., Ferrari, L., Fumagalli, G., Gomila, J., Grosclaude, Y., Hou, N., JAFFREZIC RENAULT, C., Martelet, E., PAJOT AUGY, Pennetta, Cecilia, M. A., Persuy, M., PLA ROCA, Reggiani, Lino, S., RODRIGUEZ SEGUI, O., Ruiz, R., Salesse, J., Samitier, M., Sampietro, A. P., Soldatkin, J., Vidic, G., Villanueva, Dipartimento di Ingegneria dell'Innovazione, Università del Salento [Lecce], Instituto de Microelectrònica de Barcelona (IMB-CNM), Centro Nacional de Microelectronica [Spain] (CNM)-Consejo Superior de Investigaciones Científicas [Madrid] (CSIC), Ampère (AMPERE), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Institut National de Recherche pour l’Agriculture, l’Alimentation et l’Environnement (INRAE), Lab NanoBioEngn, Universitat de Barcelona (UB), Department of Electronics, University of Barcelona, lab. Nanobioenginyeria, Institut de Bioenginyeria de Catalunya (IBEC), Unité de recherche Virologie et Immunologie Moléculaires (VIM (UR 0892)), Institut National de la Recherche Agronomique (INRA), Chimie pour la Reconnaissance et l’Etude d’Assemblages Biologiques (CREAB), SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé (SYMMES), Institut de Chimie du CNRS (INC)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Sciences Analytiques (SA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC), Centre de génie électrique de Lyon (CEGELY), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon, Neurobiologie de l'Olfaction et de la Prise Alimentaire (NOPA), Politecn Milan, Dipartimento Elettron & Informaz, Institute of Molecular Biology and Genetics, National Academy of Sciences of Ukraine (NASU), Microsystems Laboratory (LMIS1-EPFL), Ecole Polytechnique Fédérale de Lausanne (EPFL), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université de Lyon-Université de Lyon-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Politecnico di Milano [Milan] (POLIMI), Centro Nacional de Microelectronica [Spain] (CNM)-Consejo Superior de Investigaciones Científicas [Spain] (CSIC), Ampère, Unité de recherche Virologie et Immunologie Moléculaires (VIM), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-École Centrale de Lyon (ECL)

Subjects
Olfactory system, electronic nose, Odorant binding, Nanotechnology, 02 engineering and technology, 01 natural sciences, Molecular recognition, [CHIM]Chemical Sciences, Olfactory receptor, Surface plasmon resonance, odorant, ComputingMilieux_MISCELLANEOUS, biology, sezele, nanotechnology, Chemistry, 010401 analytical chemistry, olfactory receptors, NeutrAvidin, Self-assembled monolayer, 021001 nanoscience & nanotechnology, biosensors, 0104 chemical sciences, Surfaces, Coatings and Films, nanosomes, electrochemical impedance spectroscopy, rhodopsin, Hardware and Architecture, Microcontact printing, Signal Processing, immobilization, biology.protein, 0210 nano-technology, nanobiosensor, Biosensor
Abstract

International audience; The animal olfactory system represents the gold standard of biosensors, due to its ability to identify and discriminate thousands of odorant compounds with very low thresholds. Using olfactory receptors (ORs) as sensing elements instead of chemical sensors, biosensors would benefit the naturally optimized molecular recognition of odorants to develop a new generation of bioelectronic noses. The purpose of SPOT-NOSED European project was the development of nanobiosensors based on single ORs anchored between nanoelectrodes, to mimic the performances of natural olfactory system. Nanobiosensors arrays could then increase odorant sensitivity or widen the odorant detection spectrum. ORs were expressed in yeasts plasmic membrane, and their functionality tested in whole yeasts. Then, nanosomes bearing the ORs were prepared from S. cerevisiae, and Surface Plasmon Resonance was performed on nanosomes for quantitative evaluation of OR response to odorant stimulation. ORs retain full activity and discrimination power in immobilized nanosomes, thus allowing their use in the fabrication of the nanobiosensors. Nanoelectrodes were fabricated using conventional photolithography and focused ion beam milling, with sizes in adequation with the nanosomes. ORs borne by nanosomes were specifically immobilized onto conducting substrates via mixed Self Assembled Monolayers, neutravidin and specific antibody to the ORs. The process was optimized by microcontact printing, and the anchored nanovesicles visualized by Atomic Force Microscopy. A transimpedance preamplifier suited for low-noise wide-bandwidth measurements was designed to be directly connected to the nanoelectrodes. Electrochemical Impedancemetric Spectroscopy detected significant changes upon electrodes functionalization, grafting of ORs carried by nanosomes, and ORs conformational change induced by odorant binding.

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