1. Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths < 400 nm
- Author
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Jansson, Erik, Scheuer, Volker, Jordan, Elena, Kostourou, Konstantina, and Mehlstäubler, Tanja E.
- Subjects
Physics - Optics ,Physics - Applied Physics - Abstract
The transparent and conductive properties of indium tin oxide (ITO) thin films, make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths $<$ 400 nm, high scattering and high production temperature limits the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO + anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths $<$ 400 nm and additional wavelengths up to 1000 nm, low scattering and low production temperature $<$ 150 $^{\circ}$C. The transmission, reflection and absorption spectra are simulated and the resistance, transmittance and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 $\pm$ 5 $\Omega/\Box$, transmittance of 80$\%$ and scattering of 0.012 $\pm$ 0.002$\%$ at 370 nm is achieved., Comment: 13 pages, 9 figures
- Published
- 2024