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The future Athena observatory will feature optics with unprecedented collecting area enabled by silicon pore optics technology. In order to achieve the telescope effective area requirements at 1 keV and 7 keV, thin film coatings of iridium with a low-density overcoat are deposited onto the mirror substrates. Assembling the coated silicon pore optics plates into mirror modules for the Athena optics requires wet chemical processing and thermal annealing. While iridium appears to be compatible with the post-coating processes, previous studies have shown degradation of the low-density material. The overcoat layer is particularly critical for the low-energy telescope performance, so several candidate materials (boron carbide, silicon carbide and carbon) have been studied to identify a compatible thin film design. We present the characterisation of x-ray mirror performance using x-ray reflectometry, as well as the measurements of residual film stress with stylus profilometry. Furthermore, we evaluate the effects of post-coating treatment in order to recommend the most suitable overcoat material for the telescope.

Athena is the European Space Agency's next flagship x-ray telescope, scheduled for launch in the 2030s. Its 2.5-m diameter mirror will be segmented and comprise more than 600 individual Silicon Pore Optics (SPO) grazing-incidence-angle imagers, called mirror modules. Arranged in concentric annuli and following a Wolter-Schwartzschild design, the mirror modules are made of several tens of primary-secondary mirror pairs, each mirror made of mono-crystalline silicon, coated to increase the collective area of the system, and shaped to bring the incoming photons to a common focus 12 m away. Aiming to deliver a half-energy width of 5", and an effective area of about 1.4 m2 at 1 keV, the Athena mirror requires several hundred m2 of super-polished surfaces with a roughness of about 0.3 nm and a thickness of just 110 μm. SPO, using the highest-grade double-side polished 300 mm wafers commercially available, were invented for this purpose and have been consistently developed over the last several years to enable next-generation x-ray telescopes like Athena. SPO makes it possible to manufacture cost-effective, high-resolution, large-area x-ray optics by using all the advantages that mono-crystalline silicon and the mass production processes of the semiconductor industry provide. Ahead of important programmatic milestones for Athena, we present the status of the technology, and illustrate not only recent x-ray results but also the progress made on the environmental testing, manufacturing and assembly aspects of the technology.

The next generation x-ray observatory ATHENA (advanced telescope for high energy astrophysics) requires an optics with unprecedented performance. It is the combination of low mass, large effective area and good angular resolution that is the challenge of the x-ray optics of such a mission. ATHENA is the second large class mission in the science programme of ESA, and is currently in a reformulation process, following a design-to-cost approach to meet the cost limit of an ESA L-class mission. The silicon pore optics (SPO) is the mission enabler being specifically developed for ATHENA, in a joint effort by industry, research institutions and ESA. All aspects of the optics are being addressed, from the mirror plates and their coatings, over the mirror modules and their assembly into the ATHENA telescope, to the facilities required to build and test the flight optics, demonstrating performance, robustness, and programmatic compliance. The SPO technology is currently being matured to the level required for the adoption of the ATHENA mission, i.e., the start of the mission implementation phase. The monocrystalline silicon material and pore structure of the SPO provide these optics with excellent thermal and mechanical properties. Benefiting from technology spin-in from the semiconductor industry, the equipment, processes, and materials used to produce the SPO are highly sophisticated and optimised.

The thin film deposition technology for fabrication of the mirror optics for the Advanced Telescope for HighEnergy Astrophysics (ATHENA) has been established. Numerous coating process parameters impact the quality of the thin films. Defining a margin within the coating process parameter space, where the deposited thin film performs similar in X-ray reflectivity is key to avoid unforeseen risks within the coating process for the ATHENA flight optics production. In this work, we investigate the coating process parameter influence on the thin film properties with a focus on micro roughness, deposition rate and residual film stress when deposited under various process conditions. The thin films were produced by varying the following three coating process parameters: discharge power, discharge voltage and working gas pressure. The thin films were characterized using X–ray reflectometry at 3.4–10.0 keV. A main result of this work is that the residual stress of single layer iridium and boron carbide films can be reduced by a factor of approximately two, by increasing the working gas pressure while maintaining a high film quality.

The mirror modules composing Athena’s X-ray optics are made with the Silicon Pore Optics (SPO) technology. SPO is produced as stacks of 38 mirror plates, which are paired to form X-ray Optics Units (XOUs) following a modified Wolter I geometry. In the current design, a mirror module is composed of two confocal XOUs glued in between a pair of brackets that freeze the configuration and provide interfaces to the mirror structure. Mirror modules are assembled at the XPBF2 beamline of PTB at the synchrotron radiation facility BESSY II, using dedicated jigs. In this paper we present the latest developments regarding the assembly of confocal mirror modules for Athena with an emphasis on alignment tolerances and gluing accuracy.

The European Space Agency ATHENA mission is an x-ray observatory that will study the formation of galaxy clusters and the growth of black holes within the energy range of 0.5 to 10 keV. Due for launch in early 2030s, ATHENA will use silicon pore optic (SPO) mirror modules to create the x-ray mirror. The first confocal SPO mirror module (MM) was entered into a preliminary environmental test program for the ATHENA mission. The objective of this program was to determine whether particulate contamination causes loss of effective area for silicon pore optics. The confocal MM under test was manufactured by cosine measurement systems and first tested at MPE’s PANTER x-ray test facility in July 2019. After this campaign, it was contaminated with a total of 2000 ppm in two 1000-ppm-level contamination periods. After each 1000-ppm contamination step, x-ray measurements were made to determine the effective area. The pre- and post-contamination effective area measurements, and the contamination of the optic, were carried out at the PANTER facility. The paper provides an overview of the contamination testing carried out at PANTER, and the corresponding results for each contamination level. We find no measurable degradation in effective area on a 5% level. We also look into the possibilities and limitations for the determination of the effective area within our facility. In future campaigns we plan to reach a 2% accuracy for the determination of the effective area for similar type optics.

Silicon Pore Optics (SPO) have been chosen as the X-ray optics technology for the European Space Agency's Athena mission. Although in principle SPO can be used to realize classical Wolter-I or Wolter-Schwarzschild systems, technological and manufacturing considerations introduce constraints that lead to a system where some of the parameters of the optics are altered with respect to the classical description. In this paper we describe some of the constraints and how they affect the way one goes about designing optics based on SPO. Further we present ray-tracing results that show how these constraints do not impact the performance goals of a large mission like Athena.

As part of the manufacturing process of mirror modules for the Athena X-ray telescope, Silicon Pore Optics plates are assembled into mirror module stacks. The plates that form each stack are held together by direct bonding, relying on van der Waals forces and covalent bonds for adhesion. One way to increase the strength of the covalent bonds is through annealing of the mirror stacks. It is of critical importance to the mission to ensure compatibility between the reflective coating and any post-coating processing of the plates. We present our findings of the impact of annealing on the X-ray re ectance of coated mirrors relevant for the Athena mission. These are Ir single layers, as well as Ir/B4C, Ir/SiC, and Ir/C bilayers. We investigate the effect on the performance of the coatings after annealing at atmospheric pressure and at a low vacuum using X-ray reflectometry. B4C is found to suffer degradation from annealing under atmospheric conditions but not when annealed in vacuum. All other materials investigated are robust to atmospheric annealing.

The European Space Agency (ESA) is developing the Athena (Advanced Telescope for High ENergy Astrophysics) X-ray telescope, an L-class mission in their current Cosmic Vision cycle for long-term planning of space science missions. Silicon Pore Optics (SPO) are a new type of X-ray optics enabling future X-ray observatories such as Athena and are being developed at cosine with ESA as well as academic and industrial partners. These high-performance, modular, lightweight yet stiff, high-resolution X-ray optics shall allow missions to reach unprecedented combination of large effective area, good angular resolution and low mass. As the development of the Athena mission progresses, it is necessary to validate the SPO technology under launch conditions. To this end, ruggedisation and environmental testing studies are being conducted to ensure mechanical stability and optical performance of the optics before, during and after launch. In this paper, we report on the results of our completed environmental testing campaigns on mirror modules of middle radius (about 700 mm) of curvature. In these campaigns, each mirror module is first integrated then submitted to sine and random vibration tests, as well as shock tests, all in accordance with the upcoming Ariane launch vehicle and the mission requirements. Additionally, the mirror modules are characterized with X-ray before and after each test to verify the optical performance remains unchanged.

We have designed and modeled a novel optical system composed of a Laue lens coupled to an x-ray tube that produces a focused beam in an energy range near 100 keV (λ = 12.4 picometer). One application of this system is radiation therapy where it could enable treatment units that are considerably simpler and lower in cost than present technologies relying on linear accelerators. The Laue lens is made of Silicon Laue components which exploit the silicon pore optics technology. The lens concentrates photons to a small region thus allowing high dose rates at the focal area with very much lower dose rates at the skin and superficial regions. Monte Carlo simulations with Geant4 indicate a dose deposition rate of 0.2 Gy min−1 in a cylindrical volume of 0.7 mm diameter and 10 mm length, and a dose ratio of 72 at the surface (skin) compared to the focus placed 10 cm within a water phantom. Work is ongoing to newer generation crystal technologies to increase dose rate.

The Athena mission, under study and preparation by ESA as its second Large-class science mission, requires the largest X-ray optics ever flown, building on a novel optics technology based on mono crystalline silicon. Referred to as Silicon Pore Optics technology (SPO), the optics is highly modular and benefits from technology spin-in from the semiconductor industry. The telescope aperture of about 2.5 meters is populated by around 700 mirror modules, accurately co-aligned to produce a common focus. The development of the SPO technology is a joint effort by European industrial and research entities, working together to address the challenges to demonstrate the imaging performance, robustness and efficient series production of the Athena optics. A technology development plan was established and is being regularly updated to reflect the latest developments, and is fully funded by the ESA technology development programmes. An industrial consortium was formed to ensure coherence of the individual technology development activities. The SPO technology uses precision machined mirror plates produced using the latest generation top quality 12 inch silicon wafers, which are assembled into rugged stacks. The surfaces of the mirror plates and the integral support structure is such, that no glue is required to join the individual mirror plates. Once accurately aligned with respect to each other, the surfaces of the mirror plates merge in a physical bonding process. The resultant SPO mirror modules are therefore very accurate and stable and can sustain the harsh conditions encountered during launch and are able to tolerate the space environment expected during operations. The accommodation of the Athena telescope is also innovative, relying on a hexapod mechanism to align the optics to the selected detector instruments located in the focal plane. System studies are complemented by dedicated technology development activities to demonstrate the capabilities before the adoption of the Athena mission.

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

Athena will be the largest space-based x-ray telescope to be flown by the European Space Agency: its large 2.6 m diameter lens will use a revolutionary new modular technology, Silicon Pore Optics (SPO). The lens will consist of several hundreds of smaller x-ray lenslets, called mirror modules, which each consist of about 70 mirror pairs. Those mirror modules are arranged in circles in a large optics structure and will focus x-ray photons with an energy of 0.5 to 10 keV at a distance of 12 m onto the detectors of Athena. The point-spread function (PSF) of the optic shall achieve a half-energy width (HEW) of 5” at an energy of 1 keV, with an effective area of about 1.4 m2, corresponding to several hundred m2 of super-polished mirrors with a roughness of about 0.3 nm and a thickness of only 150 μm. SPO using the highest grade double-side polished 300 mm wafers commercially available, have been invented to enable such telescopes. SPO allows the cost-effective production of high-resolution, large area, x-ray optics, by using all the advantages that mono-crystalline silicon and the mass production processes of the semi-conductor industry provide. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will present the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

The ATHENA (Advanced Telescope for High ENergy Astrophysics) mission studies and technology preparation are continuing to progress. The optics for this future space observatory is based on the Silicon Pore Optics (SPO), and is being evolved in a joint effort by industry, research institutions and ESA. The SPO technology uses the superb properties of monocrystalline Silicon, and spins in technologies developed for the semiconductor industry, benefiting from excellent materials, processes and equipment. In a holistic approach the technical and programmatic challenges of the ATHENA optics are being addressed simultaneously. A comprehensive Technology Development Plan (TDP) was defined and is being implemented to develop this novel X-ray optics technology. The performance, environmental compatibility and serial automated production and testing are being addressed in parallel, aiming at the demonstration of the required technology readiness for the Athena Mission Adopt ion Review (MAR) expected in 2022.

The thin film coating technology for the European Space Agency mission, Advanced Telescope for High-Energy Astrophysics (Athena) has been established. The X-ray optics of the Athena telescope is based on Silicon Pore Optics (SPO) technology which is enhanced by the thin film coatings deposited on the reflective surface of the SPO plates. In this work, we present a literature study of the coating process parameter space and provide an overview of the thin film properties with a focus on micro roughness, chemical composition and wear resistance when deposited under various process conditions. We determined, that the thin film density depends strongly on the mobility of the adatoms on the substrate surface. Some coating process parameters, which have a significant impact on the adatom mobility are the discharge voltage, the working gas pressure and the substrate temperature.

The development of high-quality thin film coatings for the Athena X-ray optics is progressing, following the commissioning of an industrial scale coating facility. The assembly of silicon pore optics into mirror modules for the Athena telescope requires wet-chemical exposure of coated mirror plates to prepare bonding areas for stacking, as well as an annealing step to improve bond strength. It is therefore critical to evaluate how these post-coating processes could affect the mirror coating performance and stability. We present X-ray reflectometry characterization of iridium thin films deposited on photoresist patterned Silicon Pore Optics plates to investigate the compatibility with the stacking process steps for the manufacturing of the Athena optics.

Athena, the largest space-based x-ray telescope to be flown by the European Space Agency, uses a new modular technology to assemble its 2.5 m diameter lens. The lens will consist of several hundreds of smaller x-ray lenslets, called mirror modules, which each consist of up to 76 stacked mirror pairs. Those mirror modules are arranged in circles in a large optics structure and will focus x-ray photons with an energy of 0.5 to 10 keV at a distance of 12 m onto the detectors of Athena. The point-spread function (PSF) of the optic shall achieve a half-energy width (HEW) of 5"at an energy of 1 keV, with an effective area of about 1.4 m2, corresponding to several hundred m2 of super-polished mirrors with a roughness of about 0.3 nm and a thickness of down to 110 μm. This paper will present the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

The X-ray parallel beam facility XPBF 2.0 in the laboratory of the Physikalisch-Technische Bundesanstalt at the synchrotron radiation facility BESSY II provides a parallel beam of very low divergence, and adjustable beam sizes between about 100 μm and at least 5 mm. Further, XPBF 2.0 is equipped with a vacuum chamber with a hexapod system for accurate positioning of all silicon pore optic (SPO) sizes to be investigated, and a vertically movable CCD-based camera system to register the direct and the reflected beam at a sample to CCD distance of 12 m corresponding to the envisaged focal length of ATHENA (Advanced Telescope for High ENergy Astrophysics). Since its installation in 2016, the beamline has been constantly upgraded to improve performance and implementing the changing requirements. To accurately and constantly measure the 12 m distance, between the center of the sample (i.e. mirror module) and the CCD detector, a laser-tracker has been installed. Additionally, the cleanroom, housing the vacuum chamber, was upgraded with a cooling unit keeping the temperature at 20°C. The original phosphor screen in front of the CCD has been replaced with a new phosphor screen with different grain size and material. The next upgrade of the XPBF 2.0 is the installation of a new monochromator mirror to operate the beamline at 1.0 keV instead of 1.6 keV. This paper will present the upgrades of the X-ray parallel beam facility XPBF 2.0 and discuss next steps for characterizing SPOs with synchrotron radiation.

The European Space Agency (ESA) is developing the Athena (Advanced Telescope for High ENergy Astrophysics) X-ray telescope, an L-class mission in their current Cosmic Vision cycle for long-term planning of space science missions. Silicon Pore Optics (SPO) are a new type of X-ray optics enabling future X-ray observatories such as Athena and are being developed at cosine with ESA as well as academic and industrial partners. These high-performance, modular, lightweight yet stiff, high-resolution X-ray optics shall allow missions to reach an unprecedentedly large effective area of several square meters, operating in the 0.2 to 12 keV band with an angular resolution better than 5 arc seconds. As the development of Athena mission progresses, it is necessary to validate the SPO technology under launch conditions. To this end, ruggedisation and environmental testing studies are being conducted to ensure mechanical stability and optical performance of the optics before, during and after launch. At cosine, a facility with shock, vibration, tensile strength, long time storage and thermal testing equipment has been set up to test SPO mirror module components for compliance with the upcoming Ariane launch vehicle and the mission requirements. In this paper, we report on the progress of our ongoing investigations regarding tests on mechanical and thermal stability of mirror module components such as single SPO stacks complete mirror modules of inner (R = 250 mm), middle (R = 737 mm) and outer (R = 1500 mm) radii.

Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

Silicon Pore Optic (SPO) is the X-ray mirror technology selected for the Athena X-ray observatory. The optic is modular; in the current design, it is made of about 700 co-aligned mirror modules. SPO is produced as stacks of 35 mirror plates, which are then paired to form X-ray Optics Units (XOUs) following a modified Wolter I geometry. A mirror module is composed of two confocal XOUs bonded in between a pair of brackets allowing interfacing to the mirror structure. Mirror modules are assembled using the XPBF 2.0 beamline of PTB at the synchrotron radiation facility BESSY II, using pencil beam and dedicated jigs. In this paper we present the challenges and solutions related to making confocal mirror modules.

Silicon Pore Optics is the X-ray mirror technology selected for the European Space Agency's Athena X-ray observatory. We describe the X-ray testing and characterization cycle that the optics are subjected to at the PTB's X-ray Pencil/Paraller Beam Facility (XPBF) 1 and 2 beamlines at the synchrotron radiation facility BESSY II. Individual stacks are measured with a pencil beam to determine their optical quality and the orientation of the optical axis. Using metrics based on X-ray and manufacturing metrology, stacks are then paired in primary-secondary Wolter-I-like systems, that are in turn characterized to determine their optical performance. Finally, four stacks, two primaries and two secondaries, are assembled into a mirror module, that is also characterized, with pencil and wide X-ray beams. At each step models, metrology, and software are combined to arrive at the relevant parameters. We describe the methods used, and illustrate how the performance of imaging pairs can be described in terms of stack-level parameters.

The PANTER X-ray test facility of the Max Planck Institute for Extraterrestrial Physics (MPE) has over 40 years of heritage in testing and calibrating x-ray optics. Having contributed to missions such as XMM-Newton, Chandra, and eROSITA, the facility measures the performance of x-ray optic technologies that will enable future x-ray telescopes to be realised. Over the last year, PANTER has been testing the latest developments in silicon pore optics for ESA’s ATHENA mission, as well as full-shell eROSITA-like optics for the CAS/ESA/MPE Einstein Probe mission. For ATHENA, complete mirror modules for the outer radius of the telescope have been tested. The latest developments in the optics for the mid-radius of the telescope, including the first confocal mirror module, have been measured for performance. The paper will provide an overview of the most recent testing carried out at PANTER, and the alignment and measurement techniques used.

Silicon Pore Optics (SPO) is an enabling technology for future large-area space-based X-ray observatories, such as ESA's Athena mission and NASA's Arcus candidate mission. SPO consist of stacks of thin silicon mirrors, which together provide a large effective area with a relatively low mass. Stacks are produced by custom robots that bend the mirrors into the design shape and stack them. We discuss the latest developments in improving the stacking process. The main challenge is to minimize shape deviations in order to optimize the imaging resolution of the optic. During the stacking process, the shape of each plate is measured directly after it is added to a stack. This metrology allows us to quickly quantify the effect of different stacking recipes, which streamlines the development. We discuss recent improvements in reducing excess meridional curvature. Furthermore, we prepare for mass-production by optimizing the robotics for performance and reproducibility.

We report on a concept for curved diffractive X-ray optics (CDXO). CDXO would enable potential new optical designs for X-ray instruments, such as a two element spectrometer, in which the secondary element of an X- ray mirror pair is patterned with an X-ray grating. A two-element spectrometer design eliminates the grating assembly, resulting in decreased instrument mass and reduced power requirements. In addition, a two-element spectrometer may realize cost/schedule savings by eliminating a separate grating alignment effort, and yield increased effective area over three element designs. We present a raytrace concept study of a two-element spectrometer compact enough to fit within a sounding rocket payload. We also review the progress made in electron-beam lithography (EBL) techniques that would enable curved diffractive X-ray optics to be patterned, and outline a procedure by which the accuracy of the EBL patterning process can be measured interferometrically.

The majority of the ordinary matter in the local Universe has been heated by strong structure formation shocks and resides in a largely unexplored hot, diffuse, X-ray emitting plasma that permeates the halos of galaxies, galaxy groups and clusters, and the cosmic web. We propose a next-generation "Cosmic Web Explorer" that will permit a complete and exhaustive understanding of these unseen baryons. This will be the first mission capable to reach the accretion shocks located several times farther than the virial radii of galaxy clusters, and reveal the out-of-equilibrium parts of the intra-cluster medium which are live witnesses to the physics of cosmic accretion. It will also enable a view of the thermodynamics, kinematics, and chemical composition of the circumgalactic medium in galaxies with masses similar to the Milky Way, at the same level of detail that $Athena$ will unravel for the virialized regions of massive galaxy clusters, delivering a transformative understanding of the evolution of those galaxies in which most of the stars and metals in the Universe were formed. Finally, the proposed X-ray satellite will connect the dots of the large-scale structure by mapping, at high spectral resolution, as much as 100% of the diffuse gas hotter than $10^6$ K that fills the filaments of the cosmic web at low redshifts, down to an over-density of 1, both in emission and in absorption against the ubiquitous cosmic X-ray background, surveying at least 1600 square degrees over 5 years in orbit. This requires a large effective area (~10 m$^2$ at 1 keV) over a large field of view ($\sim1$ deg$^2$), a megapixel cryogenic microcalorimeter array providing integral field spectroscopy with a resolving power $E/\Delta E$ = 2000 at 0.6 keV and a spatial resolution of 5 arcsec in the soft X-ray band, and a low and stable instrumental background ensuring high sensitivity to faint, extended emission., Comment: White paper submitted in response to ESA's Voyage 2050 Call. Accepted for publication in Experimental Astronomy

Mission studies and technology preparation for the ATHENA (Advanced Telescope for High ENergy Astrophysics) [1- 5] mission are continuing to progress. The X-ray optics of this future space observatory are based on the Silicon Pore Optics (SPO) technology [6-58], and is being evolved in a joint effort by industry, research institutions and ESA. The SPO technology benefits from substantial investments made by the semiconductor industry, and spins-in materials, processes and equipment into the development of novel X-ray optics. A comprehensive Technology Development Plan (TDP) is being implemented, funded by ESA and involving a large number of experts in key areas ranging from micro machining of Silicon, over sophisticated automation and robotic systems, to hybrid manufacturing. The performance, environmental compatibility and serial automated production and testing are being addressed in parallel, aiming at the demonstration of the required technology readiness for the ATHENA Mission Adoption Review (MAR) expected by the end of 2021. A formal Technology Readiness Assessment is in place and is being currently exercised in preparation of the ATHENA Mission Formulation review (MFR). The programmatics for the flight model implementation is being defined in detail, and preparations are starting for the design and implementation of the necessary facilities. An overview of the ATHENA optics technology preparation, the technology readiness assessment and the related activities is provided.

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics enabling future X-ray observatories such as ATHENA. SPO is being developed at cosine together with the European Space Agency (ESA) and academic as well as industrial partners. The SPO modules are lightweight, yet stiff, high-resolution X-ray optics, allowing missions to reach a large effective area of several square meters. These properties of the optics are mainly linked to the mirror plates consisting of mono-crystalline silicon. Silicon is rigid, has a relatively low density, a very good thermal conductivity and excellent surface finish, both in terms of figure and surface roughness. For Athena, a large number of mirror plates is required, around 100,000 for the nominal configuration. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular shapes SPO mirror plates in high quality, large quantity and at low cost. Within the last years, several aspects of the SPO mirror plate have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. In view of flight model production, a second source of mirror plates has been added in addition to the first plate supplier. The paper will provide an overview of most recent plate design, metrology and production developments.

Athena, a future high-energy mission, is expected to consist of a large aperture x-ray mirror with a focal length of 12 m. The mirror surface is to be coated with iridium and a low Z overcoat. To define the effective area of the x-ray telescope, the atomic scattering factors of iridium with an energy resolution less than that (2.5 eV) of the x-ray integral field unit are needed. We measured the reflectance of the silicon pore optics mirror plate coated with iridium in the energy range of 9 to 15 keV and that near the iridium L-edges in steps of 10 and 1.5 eV, respectively, at the synchrotron beamline SPring-8. The L3, L2, and L1 edges were clearly detected around 11,215, 12,824, and 13,428 eV, respectively. The measured scattering factors were 1/43 % smaller than the corresponding values reported by Henke et al., likely due to the presence of an overlayer on the iridium coating, and were consistent with those measured by Graessle et al. The angular dependence of the reflectivity measured indicates that the iridium surface was extremely smooth, with a surface roughness of 0.3 nm.

Silicon Pore Optics (SPO) provide high angular resolution with low effective area density as required for the Advanced Telescope for High Energy Astrophysics (Athena). The x-ray telescope consists of several hundreds of SPO mirror modules mounted in a telescope structure. During the development of the SPO technology, specific requirements of a future mass production have been considered right from the beginning. We present an updated analysis of the time and resources required for the Athena flight programme. A preliminary timeline for building and commissioning the required infrastructure, and for flight model production and integration of the mirror modules, is presented.

We present the expected coating performance based on design and simulations, tested coating performance evaluated by means of X-ray reflectometry and short and long term stability of several materials considered as coating options for the X-ray mirrors of the ATHENA mission. As part of this study we also report on the compatibility of the X-ray reflecting coatings to the industrial processes involved in the assembly of mirror modules using Silicon Pore Optics technology.

The development of the X-ray optics for ATHENA (Advanced Telescope for High ENergy Astrophysics)[1-4], the selected second large class mission in the ESA Science Programme, is progressing further, in parallel with the payload preparation and the system level studies. The optics technology is based on the Silicon Pore Optics (SPO) [5-48], which utilises the excellent material properties of Silicon and benefits from the extensive investments made in the semiconductor industry. With its pore geometry the SPO is intrinsically very robust and permits the use of very thin mirrors while achieving good angular resolution. In consequence, the specific mass of the resultant ATHENA optics is very low compared to other technologies, and suitable to cope with the imposed environmental requirements. Further technology developments preparing the ATHENA optics are ongoing, addressing additive manufacturing of the telescope structure, the integration and alignment of the mirror assembly, numerical simulators, coating optimisations, metrology, test facilities, studies of proton reflections and meteorite impacts, etc. A detailed Technology Development Plan was elaborated and is regularly being updated, reflecting the progress and the mission evolution. The required series production and integration of the many hundred mirror modules constituting the ATHENA telescope optics is an important consideration and a leading element in the technology development. The developments are guided by ESA, implemented in industry and supported by research institutions. The many ongoing SPO technology development activities aim at demonstrating the readiness of the optics technology at the review deciding the adoption of ATHENA onto the ESA Science flight programme, currently expected for 2021. Technology readiness levels of 5/6 have to be demonstrated for all critical elements, but also the compliance to cost and schedule constraints for the mission.

In support of future x-ray telescopes ESA is developing new optics for the x-ray regime. To date, mass and volume have made x-ray imaging technology prohibitive to planetary remote sensing imaging missions. And although highly successful, the mirror technology used on ESA’s XMM-Newton is not sufficient for future, large, x-ray observatories, since physical limits on the mirror packing density mean that aperture size becomes prohibitive. To reduce telescope mass and volume the packing density of mirror shells must be reduced, whilst maintaining alignment and rigidity. Structures can also benefit from a modular optic arrangement. Pore optics are shown to meet these requirements. This paper will discuss two pore optic technologies under development, with examples of results from measurement campaigns on samples. One activity has centred on the use of coated, silicon wafers, patterned with ribs, that are integrated onto a mandrel whose form has been polished to the required shape. The wafers follow the shape precisely, forming pore sizes in the sub-mm region. Individual stacks of mirrors can be manufactured without risk to, or dependency on, each other and aligned in a structure from which they can also be removed without hazard. A breadboard is currently being built to demonstrate this technology. A second activity centres on glass pore optics. However an adaptation of micro channel plate technology to form square pores has resulted in a monolithic material that can be slumped into an optic form. Alignment and coating of two such plates produces an x-ray focusing optic. A breadboard 20cm aperture optic is currently being built.

Lightweight X-ray Wolter optics with a high angular resolution will enable the next generation of X-ray telescopes in space. The International X-ray Observatory (IXO) requires a mirror assembly of 3 m2 effective area (at 1.5 keV) and an angular resolution of 5 arcsec. These specifications can only be achieved with a novel technology like Silicon Pore Optics, which is developed by ESA together with a consortium of European industry. Silicon Pore Optics are made of commercial Si wafers using process technology adapted from the semiconductor industry. We present the manufacturing process ranging from single mirror plates towards complete focusing mirror modules mounted in flight configuration. The performance of the mirror modules is tested using X-ray pencil beams or full X-ray illumination. In 2009, an angular resolution of 9 arcsec was achieved, demonstrating the improvement of the technology compared to 17 arcsec in 2007. Further development activities of Silicon Pore Optics concentrate on ruggedizing the mounting system and performing environmental tests, integrating baffles into the mirror modules and assessing the mass production.

Lightweight X-ray Wolter optics with a high angular resolution will enable the next generation of X-ray telescopes in space. The candidate mission ATHENA (Advanced Telescope for High Energy Astrophysics) required a mirror assembly of 1 m2 effective area (at 1 keV) and an angular resolution of 10 arcsec or better. These specifications can only be achieved with a novel technology like Silicon Pore Optics, which is being developed by ESA together with a consortium of European industry. Silicon Pore Optics are made of commercial Si wafers using process technology adapted from the semiconductor industry. We present the recent upgrades made to the manufacturing processes and equipment, ranging from the manufacture of single mirror plates towards complete focusing mirror modules mounted in flight configuration, and results from first vibration tests. The performance of the mirror modules is tested at X-ray facilities that were recently extended to measure optics at a focal distance up to 20 m.

The European Space Agency (ESA) is studying the ATHENA (Advanced Telescope for High ENergy Astrophysics) X-ray telescope, the second L-class mission in their Cosmic Vision 2015 – 2025 program with a launch spot in 2028. The baseline technology for the X-ray lens is the newly developed high-performance, light-weight and modular Silicon Pore Optics (SPO). As part of the technology preparation, ruggedisation and environmental testing studies are being conducted to ensure mechanical stability and optical performance of the optics during and after launch, respectively. At cosine, a facility with shock, vibration, tensile strength, long time storage and thermal testing equipment has been set up in order to test SPO mirror module (MM) materials for compliance with an Ariane launch vehicle and the mission requirements. In this paper, we report on the progress of our ongoing investigations regarding tests on mechanical and thermal stability of MM components like single SPO stacks with and without multilayer coatings and complete MMs of inner (R = 250 mm), middle (R = 737 mm) and outer (R = 1500 mm) radii.

For more than a decade, cosine has been developing silicon pore optics (SPO), lightweight modular X-ray optics made of stacks of bent and directly bonded silicon mirror plates. This technology, which has been selected by ESA to realize the optics of ATHENA, can also be used to fabricate soft gamma-ray Laue lenses where Bragg diffraction through the bulk silicon is exploited, rather than grazing incidence reflection. Silicon Laue Components (SiLCs) are made of stacks of curved, polished, wedged silicon plates, allowing the concentration of radiation in both radial and azimuthal directions. This greatly increases the focusing properties of a Laue lens since the size of the focal spot is no longer determined by the size of the individual single crystals, but by the accuracy of the applied curvature. After a successful proof of concept in 2013, establishing the huge potential of this technology, a new project has been launched in Spring 2017 at cosine to further develop and test this technique. Here we present the latest advances of the second generation of SiLCs made from even thinner silicon plates stacked by a robot with dedicated tools in a class-100 clean room environment.

Continuing improvement of Silicon Pore Optics (SPO) calls for regular extension and validation of the tools used to model and predict their X-ray performance. In this paper we present an updated geometrical model for the SPO optics and describe how we make use of the surface metrology collected during each of the SPO manufacturing runs. The new geometrical model affords the user a finer degree of control on the mechanical details of the SPO stacks, while a standard interface has been developed to make use of any type of metrology that can return changes in the local surface normal of the reflecting surfaces. Comparisons between the predicted and actual performance of samples optics will be shown and discussed.

While predictions based on the metrology (local slope errors and detailed geometrical details) play an essential role in controlling the development of the manufacturing processes, X-ray characterization remains the ultimate indication of the actual performance of Silicon Pore Optics (SPO). For this reason SPO stacks and mirror modules are routinely characterized at PTB’s X-ray Pencil Beam Facility at BESSY II. Obtaining standard X-ray results quickly, right after the production of X-ray optics is essential to making sure that X-ray results can inform decisions taken in the lab. We describe the data analysis pipeline in operations at cosine, and how it allows us to go from stack production to full X-ray characterization in 24 hours.

In the frame of the development of the Advanced Telescope for High-ENergy Astrophysics (Athena) mission, currently in phase A, ESA is continuing to mature the optics technology and the associated mass production techniques. These efforts are driven by the programmatic and technical requirement of reaching TRL 6 prior to proposing the mission for formal adoption (planned for 2020). A critical part of the current phase A preparation activities is addressing the industrialization of the Silicon Pore Optics mirror plates coating. This include the transfer of the well-established coating processes and techniques, performed at DTU Space, to an industrial scale facility suitable for coating the more than 100,000 mirror plates required for Athena. In this paper, we explain the considerations for the planned coating facility including, requirement specification, equipment and supplier selection, preparing the coating facility for the deposition equipment, designing and fabrication.

We report the latest results on coating design optimisation and optics performance for the present Ir/B4C baseline coating and alternative designs and materials, including bilayers and linear graded multilayers. We make use of X-ray reflectometry (XRR) to test both coating performance and robustness.

The work on the definition and technological preparation of the ATHENA (Advanced Telescope for High ENergy Astrophysics) mission continues to progress. In parallel to the study of the accommodation of the telescope, many aspects of the X-ray optics are being evolved further. The optics technology chosen for ATHENA is the Silicon Pore Optics (SPO), which hinges on technology spin-in from the semiconductor industry, and uses a modular approach to produce large effective area lightweight telescope optics with a good angular resolution. Both system studies and the technology developments are guided by ESA and implemented in industry, with participation of institutional partners. In this paper an overview of the current status of the telescope optics accommodation and technology development activities is provided.

Silicon Pore Optics is a high-energy optics technology, invented to enable the next generation of high-resolution, large area X-ray telescopes such as the ATHENA observatory, a European large (L) class mission with a launch date of 2028. The technology development is carried out by a consortium of industrial and academic partners and focuses on building an optics with a focal length of 12 m that shall achieve an angular resolution better than 5”. So far we have built optics with a focal length of 50 m and 20 m. This paper presents details of the work carried out to build silicon stacks for a 12 m optics and to integrate them into mirror modules. It will also present results of x-ray tests taking place at PTB’s XPBF with synchrotron radiation and the PANTER test facility.

ATHENA (Advanced Telescope for High ENergy Astrophysics) is being studied by the European Space Agency (ESA) as the second large science mission, with a launch slot in 2028. System studies and technology preparation activities are on-going. The optics of the telescope is based on the modular Silicon Pore Optics (SPO), a novel X-ray optics technology significantly benefiting from spin-in from the semiconductor industry. Several technology development activities are being implemented by ESA in collaboration with European industry and institutions. The related programmatic background, technology development approach and the associated implementation planning are presented.

Silicon Pore Optics (SPO) provide high angular resolution with low effective area density as required for the Advanced Telescope for High Energy Astrophysics (Athena). The x-ray telescope consists of several hundreds of SPO mirror modules. During the development of the process steps of the SPO technology, specific requirements of a future mass production have been considered right from the beginning. The manufacturing methods heavily utilise off-the-shelf equipment from the semiconductor industry, robotic automation and parallel processing. This allows to upscale the present production flow in a cost effective way, to produce hundreds of mirror modules per year. Considering manufacturing predictions based on the current technology status, we present an analysis of the time and resources required for the Athena flight programme. This includes the full production process starting with Si wafers up to the integration of the mirror modules. We present the times required for the individual process steps and identify the equipment required to produce two mirror modules per day. A preliminary timeline for building and commissioning the required infrastructure, and for flight model production of about 1000 mirror modules, is presented.