31 results on '"Matthew J. Burch"'
Search Results
2. Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition
- Author
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Alex Belianinov, Matthew J. Burch, Anton Ievlev, Songkil Kim, Michael G. Stanford, Kyle Mahady, Brett B. Lewis, Jason D. Fowlkes, Philip D. Rack, and Olga S. Ovchinnikova
- Subjects
helium ion microscopy ,focused ion beam induced deposition ,3D nano-printing ,direct-write nanofabrication ,Mechanical engineering and machinery ,TJ1-1570 - Abstract
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques.
- Published
- 2020
- Full Text
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3. Implications of gnomonic distortion on electron backscatter diffraction and transmission Kikuchi diffraction
- Author
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Chris M. Fancher, Matthew J. Burch, Srikanth Patala, and Elizabeth C. Dickey
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Histology ,Pathology and Forensic Medicine - Abstract
The effect of gnomonic distortion on orientation indexing of electron backscatter diffraction patterns is explored through simulation of electron diffraction patterns for sample-to-detector geometries associated with transmission Kikuchi diffraction (TKD) and electron backscatter diffraction (EBSD). Simulated data were analysed by computing a similarity index for both Hough transformed data and simulated patterns to determine the sensitivity of each method for detecting subtle differences in the effect of gnomonic distortions on electron diffraction patterns. These results indicate that the increased gnomonic distortions in electron diffraction patterns for a TKD geometry enhance the sensitivity for detecting subtle differences in interband angles. Additionally, the utilisation of a Hough transform-based indexing approach further enhances the sensitivity.
- Published
- 2022
4. Structures of Partially Fluorinated Bottlebrush Polymers in Thin Films
- Author
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Kunlun Hong, Matthew J. Burch, Dongsook Chang, Bobby G. Sumpter, Matthias Lorenz, Jan-Michael Y. Carrillo, and Olga S. Ovchinnikova
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Contact angle ,chemistry.chemical_classification ,Molecular dynamics ,Materials science ,Polymers and Plastics ,Chemical engineering ,chemistry ,Process Chemistry and Technology ,Organic Chemistry ,Side chain ,Fluorinated Polymers ,Polymer ,Thin film - Abstract
We performed multiscale molecular dynamics (MD) simulations of bottlebrush polymers with fluorinated side chains to investigate the influence of the bottlebrush architecture on the spatial distribu...
- Published
- 2019
5. Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition
- Author
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Olga S. Ovchinnikova, Songkil Kim, Philip D. Rack, Jason D. Fowlkes, Michael G. Stanford, Matthew J. Burch, Anton V. Ievlev, Kyle Mahady, Brett B. Lewis, and Alex Belianinov
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Materials science ,Ion beam ,direct-write nanofabrication ,lcsh:Mechanical engineering and machinery ,02 engineering and technology ,3D nano-printing ,01 natural sciences ,Focused ion beam ,Article ,Sputtering ,0103 physical sciences ,Deposition (phase transition) ,focused ion beam induced deposition ,lcsh:TJ1-1570 ,Electrical and Electronic Engineering ,Electron beam-induced deposition ,010302 applied physics ,business.industry ,Mechanical Engineering ,021001 nanoscience & nanotechnology ,Ion source ,Nanolithography ,Control and Systems Engineering ,helium ion microscopy ,Optoelectronics ,0210 nano-technology ,business ,Beam (structure) - Abstract
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques.
- Published
- 2020
6. Chemical Phenomena of Atomic Force Microscopy Scanning
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Matthew J. Burch, Joshua C. Agar, Petro Maksymovych, Olga S. Ovchinnikova, Chance Brown, Anton V. Ievlev, Gabriel Velarde, Lane W. Martin, and Sergei V. Kalinin
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010302 applied physics ,Chemical process ,Inert ,Atomic force microscopy ,Nanotechnology ,02 engineering and technology ,Chemical interaction ,021001 nanoscience & nanotechnology ,01 natural sciences ,Silicone oil ,Analytical Chemistry ,Characterization (materials science) ,Secondary ion mass spectrometry ,chemistry.chemical_compound ,chemistry ,0103 physical sciences ,0210 nano-technology ,Nanoscopic scale - Abstract
Atomic force microscopy is widely used for nanoscale characterization of materials by scientists worldwide. The long-held belief of ambient AFM is that the tip is generally chemically inert but can be functionalized with respect to the studied sample. This implies that basic imaging and scanning procedures do not affect surface and bulk chemistry of the studied sample. However, an in-depth study of the confined chemical processes taking place at the tip-surface junction and the associated chemical changes to the material surface have been missing as of now. Here, we used a hybrid system that combines time-of-flight secondary ion mass spectrometry with an atomic force microscopy to investigate the chemical interactions that take place at the tip-surface junction. Investigations showed that even basic contact mode AFM scanning is able to modify the surface of the studied sample. In particular, we found that the silicone oils deposited from the AFM tip into the scanned regions and spread to distances exceeding 15 μm from the tip. These oils were determined to come from standard gel boxes used for the storage of the tips. The explored phenomena are important for interpreting and understanding results of AFM mechanical and electrical studies relying on the state of the tip-surface junction.
- Published
- 2018
7. Molecular reorganization in bulk bottlebrush polymers: direct observation via nanoscale imaging
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Jan-Michael Y. Carrillo, Olga S. Ovchinnikova, Dongsook Chang, Bobby G. Sumpter, Kunlun Hong, Alex Belianinov, Anton V. Ievlev, Matthew J. Burch, Yuewen Xu, and Nikolay Borodinov
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Flexibility (engineering) ,chemistry.chemical_classification ,Materials science ,Computation ,Rational design ,Nanotechnology ,02 engineering and technology ,Polymer ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Amorphous solid ,Visualization ,Molecular dynamics ,chemistry ,General Materials Science ,0210 nano-technology ,Nanoscopic scale - Abstract
Bottlebrush polymers are important for a variety of applications ranging from drug delivery to electronics. The functional flexibility of the branched sidechains has unique assembly properties when compared to linear block polymer systems. However, reports of direct observation of molecular reorganization have been sparse. This information is necessary to enhance the understanding of the structure-property relationships in these systems and yield a rational design approach for novel polymeric materials. In this work, we report direct visualization of bottlebrush molecular organization and the formation of nematic-type ordering in an amorphous polymer bottlebrush system, captured with plasma etching and helium ion microscopy. By observing the unperturbed structure of this material at high resolution and quantifying image features, we were able to qualitatively link experimental results with structures predicted by coarse-grained molecular dynamics simulations. The direct visualization and computation workflow developed in this work can be applied to a broad variety of polymers with different architectures, linking imaging results with other, independent channels of information for better understanding and control of these classes of materials.
- Published
- 2018
8. Helium Ion Microscopy for Imaging and Quantifying Porosity at the Nanoscale
- Author
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Holland Hysmith, Olga S. Ovchinnikova, Matthew J. Burch, Philip D. Rack, Kyle Mahady, Anton V. Ievlev, and Alex Belianinov
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Work (thermodynamics) ,Nanoporous ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Analytical Chemistry ,chemistry ,Desorption ,Data analysis ,0210 nano-technology ,Porosity ,Absorption (electromagnetic radiation) ,Nanoscopic scale ,Helium - Abstract
Nanoporous materials are key components in a vast number of applications from energy to drug delivery and to agriculture. However, the number of ways to analytically quantify the salient features of these materials, for example: surface structure, pore shape, and size, remain limited. The most common approach is gas absorption, where volumetric gas absorption and desorption are measured. This technique has some fundamental drawbacks such as low sample throughput and a lack of direct surface visualization. In this work, we demonstrate Helium Ion Microscopy (HIM) as a tool for imaging and quantification of pores in industrially relevant SiO2 catalyst supports. We start with the fundamental principles of ion-sample interaction, and build on this knowledge to experimentally observe and quantify surface pores by using the HIM and image data analytics. We contrast our experimental results to gas absorption and demonstrate full statistical agreement between two techniques. The principles behind the theoretical, ...
- Published
- 2017
9. Chemical Changes in Layered Ferroelectric Semiconductors Induced by Helium Ion Beam
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Olga S. Ovchinnikova, Alex Belianinov, Stephen Jesse, Holland Hysmith, Matthew J. Burch, Marius Chyasnavichyus, Anton V. Ievlev, Michael A. Susner, Vighter Iberi, Peter Maksymovych, and Michael A. McGuire
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Multidisciplinary ,Materials science ,Ion beam ,lcsh:R ,chemistry.chemical_element ,lcsh:Medicine ,Heterojunction ,02 engineering and technology ,Dielectric ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ferroelectricity ,Article ,0104 chemical sciences ,Ion ,chemistry ,Chemical physics ,lcsh:Q ,Irradiation ,0210 nano-technology ,Polarization (electrochemistry) ,lcsh:Science ,Helium - Abstract
Multi-material systems interfaced with 2D materials, or entirely new 3D heterostructures can lead to the next generation multi-functional device architectures. Physical and chemical control at the nanoscale is also necessary tailor these materials as functional structures approach physical limit. 2D transition metal thiophosphates (TPS), with a general formulae Cu1−xIn1+x/3P2S6, have shown ferroelectric polarization behavior with a T c above the room temperature, making them attractive candidates for designing both: chemical and physical properties. Our previous studies have demonstrated that ferroic order persists on the surface, and that spinoidal decomposition of ferroelectric and paraelectric phases occurs in non-stoichiometric Cu/In ratio formulations. Here, we discuss the chemical changes induced by helium ion irradiation. We explore the TPS compound library with varying Cu/In ratio, using Helium Ion Microscopy, Atomic Force Microscopy (AFM), and Time of Flight-Secondary Ion Mass Spectrometry (ToF-SIMS). We correlate physical nano- and micro- structures to the helium ion dose, as well as chemical signatures of copper, oxygen and sulfur. Our ToF-SIMS results show that He ion irradiation leads to oxygen penetration into the irradiated areas, and diffuses along the Cu-rich domains to the extent of the stopping distance of the helium ions.
- Published
- 2017
10. Engineering the thermal conductivity along an individual silicon nanowire by selective helium ion irradiation
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Olga S. Ovchinnikova, Alex Belianinov, Raymond R. Unocic, Dan Liu, Matthew J. Burch, Jie Chen, Hanfang Hao, John T. L. Thong, Liyan Zhu, Daniel S. Pickard, Baowen Li, Yunshan Zhao, and Songkil Kim
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Materials science ,Science ,Nanowire ,FOS: Physical sciences ,General Physics and Astronomy ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,01 natural sciences ,Article ,General Biochemistry, Genetics and Molecular Biology ,Thermal conductivity ,0103 physical sciences ,Thermal ,Irradiation ,010306 general physics ,Helium ,Condensed Matter - Materials Science ,Multidisciplinary ,business.industry ,Scattering ,Materials Science (cond-mat.mtrl-sci) ,General Chemistry ,021001 nanoscience & nanotechnology ,Amorphous solid ,chemistry ,Scattering rate ,Optoelectronics ,0210 nano-technology ,business - Abstract
The ability to engineer the thermal conductivity of materials allows us to control the flow of heat and derive novel functionalities such as thermal rectification, thermal switching and thermal cloaking. While this could be achieved by making use of composites and metamaterials at bulk length-scales, engineering the thermal conductivity at micro- and nano-scale dimensions is considerably more challenging. In this work, we show that the local thermal conductivity along a single Si nanowire can be tuned to a desired value (between crystalline and amorphous limits) with high spatial resolution through selective helium ion irradiation with a well-controlled dose. The underlying mechanism is understood through molecular dynamics simulations and quantitative phonon-defect scattering rate analysis, where the behaviour of thermal conductivity with dose is attributed to the accumulation and agglomeration of scattering centres at lower doses. Beyond a threshold dose, a crystalline-amorphous transition was observed., Manipulating the flow of heat at the nanoscale is difficult because it requires the ability to tune the thermal properties of tiny structures. Here, the authors locally change the thermal conductivity of an individual silicon nanowire by irradiating it with helium ions.
- Published
- 2017
11. Building with ions: towards direct write of platinum nanostructures using in situ liquid cell helium ion microscopy
- Author
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Matthew J. Burch, Alex Belianinov, Raymond R. Unocic, Bobby G. Sumpter, Holland Hysmith, Olga S. Ovchinnikova, David C. Joy, Jacek Jakowski, Anton V. Ievlev, and Vighter Iberi
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Materials science ,Ion beam ,Nucleation ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,Electron ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Secondary electrons ,0104 chemical sciences ,Ion ,chemistry ,Chemical physics ,General Materials Science ,0210 nano-technology ,Platinum ,Field ion microscope ,Helium - Abstract
Direct write with a liquid precursor using an ion beam in situ, allows fabrication of nanostructures with higher purity than using gas phase deposition. Specifically, positively charged helium ions, when compared to electrons, localize the reaction zone to a single-digit nanometer scale. However, to control the interaction of the ion beam with the liquid precursor, as well as enable single digit fabrication, a comprehensive understanding of the radiolytic process, and the role of secondary electrons has to be developed. Here, we demonstrate an approach for directly writing platinum nanostructures from aqueous solution using a helium ion microscope, and discuss possible mechanisms for the beam-induced particle growth in the framework of Born-Oppenheimer and real-time electron dynamics models. We illustrate the nanoparticle nucleation and growth parameters through data analysis of in situ acquired movie data, and correlate these results to a fully encompassing, time-dependent, quantum dynamical simulation that takes into account both quantum and classical interactions. Finally, sub-15 nm resolution platinum structures generated in liquid are demonstrated.
- Published
- 2017
12. Microstructure and dielectric properties with CuO additions to liquid phase sintered BaTiO3 thin films
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Matthew J. Burch, Jon Paul Maria, D. T. Harris, Elizabeth C. Dickey, and Edward J. Mily
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010302 applied physics ,Materials science ,Mechanical Engineering ,Sintering ,02 engineering and technology ,Dielectric ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Microstructure ,01 natural sciences ,Ferroelectricity ,Grain size ,Grain growth ,Mechanics of Materials ,visual_art ,0103 physical sciences ,visual_art.visual_art_medium ,General Materials Science ,Ceramic ,Composite material ,Thin film ,0210 nano-technology - Abstract
The refractory nature of BaTiO3 leads to limited densification and grain growth for films processed at low temperatures and a modest nonlinear dielectric response due to a marked sensitivity to physical scale and material quality. Adding liquid-forming sintering aids, common in bulk ceramics, to thin films enhances mass transport, leading to enhanced grain growth at lower temperatures. This work explores the effectiveness of a sputtered CuO buffer layer with BaO–B2O3 (BBO) fluxes to engineer the microstructure of BaTiO3 films. Grain size and homogeneity increase in the presence of even a ∼1 nm CuO layer. In general, grain size increases from 75 to 370 nm with an addition of 2.2% BBO and 8 nm CuO. Room temperature capacitance in fluxed films increases by a factor of 5 over pure films, and ferroelectric phase transitions are clearly observable in dielectric measurements. CuO–BBO proves effective on (0001) Al2O3 and (100) MgO substrates, although all microstructures are notably finer for the latter.
- Published
- 2016
13. Relaxor Ferroelectric Behavior in Barium Strontium Titanate
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Elizabeth C. Dickey, Matthew J. Burch, Ryan Haislmaier, Venkataraman Gopalan, Arnab Sen Gupta, Susan Trolier-McKinstry, and Lauren M. Garten
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010302 applied physics ,Phase transition ,Materials science ,Condensed matter physics ,Electron energy loss spectroscopy ,Mineralogy ,02 engineering and technology ,Dielectric ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ferroelectricity ,Piezoresponse force microscopy ,visual_art ,Phase (matter) ,0103 physical sciences ,Materials Chemistry ,Ceramics and Composites ,visual_art.visual_art_medium ,Ceramic ,Thin film ,0210 nano-technology - Abstract
The development of barium strontium titanate-based tunable dielectrics is currently hindered by high losses in the paraelectric phase. Barium strontium titanate (BST) thin films and ceramics show a range of ferroelectric transition behavior, from normal, diffuse, and relaxor-like ferroelectric responses, depending on the sample preparation route. Rayleigh analysis, the temperature-dependent dielectric response, and the optical second harmonic generation were used to characterize the ferroelectric response of bulk and thin film BST. Ferroelectricity is observed to persist in BST for 30°C above the global phase transition temperature in ceramics and over 50°C in thin films. Piezoresponse force microscopy on BST ceramics with extensive residual ferroelectricity reveals the coexistence of nanoscale polar regions, typical of relaxor ferroelectrics, as well as micrometer scale domain structures. The nature of the phase transition was probed using electron energy loss spectroscopy and found to correlated with the nanoscale A-site chemical inhomogeneity in the samples.
- Published
- 2016
14. Low‐Temperature Control of Twins and Abnormal Grain Growth in BaTiO 3
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Elizabeth C. Dickey, Jing Li, D. T. Harris, Jon Paul Maria, and Matthew J. Burch
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Materials science ,Nucleation ,Substrate (electronics) ,Abnormal grain growth ,Grain size ,chemistry.chemical_compound ,Crystallography ,chemistry ,Barium titanate ,Materials Chemistry ,Ceramics and Composites ,Grain boundary ,Crystallite ,Composite material ,Crystal twinning - Abstract
The microstructure of polycrystalline barium titanate (BaTiO3) thin films processed with a liquid-phase can be controlled by the crystallographic orientation of the underlying sapphire substrate. During postdeposition crystallization, the tendency for {111} twin nucleation, which drives subsequent abnormal grain growth, depends upon the specific sapphire facet. Specifically, tilting away from the close-packed c-plane modifies the orientation, morphology, and relative amount of an interfacial BaAl2O4 second phase. These factors control the density of twin formation, and thus overall grain size of the crystallized BaTiO3. As the substrate orientation transitions from c-plane, to r-plane, to a-plane, the twin density is reduced, the average grain size decreases systematically from 270 to 130 nm, and the grain structure becomes overall more homogeneous. This twinning mechanism and abnormal grain growth occur by 900°C, several hundred degrees lower than reported previously.
- Published
- 2015
15. Data Mining for better material synthesis: the case of pulsed laser deposition of complex oxides
- Author
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Ye Cao, Rama K. Vasudevan, Sergei V. Kalinin, Janakiraman Balachandran, Artem Maksov, Matthew J. Burch, Linglong Li, Maxim Ziatdinov, Steven R. Young, Robert M. Patton, and Suhas Somnath
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010302 applied physics ,Condensed Matter - Materials Science ,business.industry ,Software tool ,Materials Science (cond-mat.mtrl-sci) ,FOS: Physical sciences ,General Physics and Astronomy ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Pulsed laser deposition ,Extant taxon ,Crowd sourcing ,0103 physical sciences ,Electronics ,0210 nano-technology ,Process engineering ,business ,Material synthesis - Abstract
The pursuit of more advanced electronics, finding solutions to energy needs, and tackling a wealth of social issues often hinges upon the discovery and optimization of new functional materials that enable disruptive technologies or applications. However, the discovery rate of these materials is alarmingly low. Much of the information that could drive this rate higher is scattered across tens of thousands of papers in the extant literature published over several decades, and almost all of it is not collated and thus cannot be used in its entirety. Many of these limitations can be circumvented if the experimentalist has access to systematized collections of prior experimental procedures and results that can be analyzed and built upon. Here, we investigate the property-processing relationship during growth of oxide films by pulsed laser deposition. To do so, we develop an enabling software tool to (1) mine the literature of relevant papers for synthesis parameters and functional properties of previously studied materials, (2) enhance the accuracy of this mining through crowd sourcing approaches, (3) create a searchable repository that will be a community-wide resource enabling material scientists to leverage this information, and (4) provide through the Jupyter notebook platform, simple machine-learning-based analysis to learn the complex interactions between growth parameters and functional properties (all data and codes available on https://github.com/ORNL-DataMatls). The results allow visualization of growth windows, trends and outliers, and which can serve as a template for analyzing the distribution of growth conditions, provide starting points for related compounds and act as feedback for first-principles calculations. Such tools will comprise an integral part of the materials design schema in the coming decade., 30 pages; 8 figures
- Published
- 2017
16. Noble gas ion beams in materials science for future applications and devices
- Author
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Alex Belianinov, Songkil Kim, Gregor Hlawacek, Shida Tan, Olga S. Ovchinnikova, and Matthew J. Burch
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Focused Ion Beam Induced Deposition ,Beam diameter ,Materials science ,Ion beam analysis ,Scanning electron microscope ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,2D materials ,01 natural sciences ,Nanofabrication ,Ion source ,0104 chemical sciences ,Secondary ion mass spectrometry ,Helium Ion Microscopy ,defect engineering ,Nanolithography ,Ion implantation ,Microscopy ,General Materials Science ,Physical and Theoretical Chemistry ,Atomic physics ,0210 nano-technology - Abstract
Helium ion microscopy (HIM), enabled by a gas field ion source (GFIS), is an emerging imaging and nanofabrication technique compatible with many applications in materials science. The scanning electron microscope (SEM) has become ubiquitous in materials science for high-resolution imaging of materials. However, due to the fundamental limitation in focusing of electron beams, ion-beam microscopy is now being developed (e.g., at 20 kV the SEM beam diameter ranges from 0.5 to 1 nm, whereas the HIM offers 0.35 nm). The key technological advantage of the HIM is in its multipurpose design that excels in a variety of disciplines. The HIM offers higher resolution than the best available SEMs as well as the traditional gallium liquid-metal ion source (LMISs) focused ion beams (FIBs), and is capable of imaging untreated biological or other insulating samples with unprecedented resolution, depth of field, materials contrast, and image quality. GFIS FIBs also offer a direct path to defect engineering via ion implantation, three-dimensional direct write using gaseous and liquid precursors, and chemical-imaging options with secondary ion mass spectrometry. HIM covers a wide range of tasks that otherwise would require multiple tools or specialized sample preparation. In this article, we describe the underlying technology, present materials, relevant applications, and offer an outlook for the potential of FIB technology in processing materials.
- Published
- 2017
17. Mechanisms for microstructure enhancement in flux-assisted growth of barium titanate on sapphire
- Author
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Jing Li, Matthew J. Burch, Jon Paul Maria, D. T. Harris, and Elizabeth C. Dickey
- Subjects
Materials science ,Mechanical Engineering ,Nucleation ,Dielectric ,Condensed Matter Physics ,Microstructure ,Barium borate ,chemistry.chemical_compound ,Grain growth ,chemistry ,Chemical engineering ,Mechanics of Materials ,Barium titanate ,General Materials Science ,Thin film ,Eutectic system - Abstract
A low-temperature thin-film processing method for BaTiO3 is studied to understand microstructure development in the presence of a liquid-forming phase. The addition of a eutectic barium borate flux is found to prevent nucleation of BaTiO3 during pulsed-laser deposition on sapphire substrates at 400 °C. Subsequent thermal annealing above the flux’s eutectic temperature dramatically enhances the film’s microstructural development and crystallinity. A secondary reaction phase of barium aluminate is identified at the substrate interface in both unfluxed and fluxed films, although it is more pronounced in the fluxed films. This barium aluminate phase in conjunction with the liquid flux serves to nucleate {111} twins in the barium titanate, which subsequently lead to enhanced grain growth. The resulting large-grained and dense thin films result in markedly improved dielectric properties.
- Published
- 2014
18. 3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition
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Brett B. Lewis, Anton V. Ievlev, Songkil Kim, Philip D. Rack, Matthew J. Burch, Olga S. Ovchinnikova, Kyle Mahady, Jason D. Fowlkes, Michael G. Stanford, and Alex Belianinov
- Subjects
Nanostructure ,Materials science ,Ion beam ,business.industry ,chemistry.chemical_element ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Instrumentation ,Deposition (chemistry) ,Helium - Published
- 2018
19. Mapping 180° polar domains using electron backscatter diffraction and dynamical scattering simulations
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Matthew J. Burch, Chris M. Fancher, Srikanth Patala, Marc De Graef, and Elizabeth C. Dickey
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010302 applied physics ,Diffraction ,Materials science ,Polarity (physics) ,Scattering ,business.industry ,Physics::Optics ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Molecular physics ,Ferroelectricity ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Absolute orientation ,Crystal ,Condensed Matter::Materials Science ,Optics ,0103 physical sciences ,Polar ,0210 nano-technology ,business ,Instrumentation ,Electron backscatter diffraction - Abstract
A novel technique, which directly and nondestructively maps polar domains using electron backscatter diffraction (EBSD) is described and demonstrated. Through dynamical diffraction simulations and quantitative comparison to experimental EBSD patterns, the absolute orientation of a non-centrosymmetric crystal can be determined. With this information, the polar domains of a material can be mapped. The technique is demonstrated by mapping the non-ferroelastic, or 180°, ferroelectric domains in periodically poled LiNbO3 single crystals. Further, the authors demonstrate the possibility of mapping polarity using this technique in other polar materials system.
- Published
- 2016
20. Rapid Screening of Nanoporous Structures in SiO2 Catalyst Particles via Helium Ion Microscopy
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Alex Belianinov, Anton V. Ievlev, Olga S. Ovchinnikova, Holland Hysmith, Matthew J. Burch, Kyle Mahady, Philip D. Rack, Lubin Luo, and Sergey Yakovlev
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Materials science ,chemistry ,Nanoporous ,chemistry.chemical_element ,Nanotechnology ,010402 general chemistry ,Ion microscopy ,01 natural sciences ,Instrumentation ,Helium ,0104 chemical sciences ,Catalysis - Published
- 2017
21. Nanofabrication Limits in Layered Ferroelectric Semiconductors via He-ion Beam
- Author
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Michael A. McGuire, Matthew J. Burch, Stephen Jesse, Marius Chyasnavichyus, Anton V. Ievlev, Alex Belianinov, Vighter Iberi, Peter Maksymovych, Michael A. Susner, Olga S. Ovchinnikova, and Holland Hysmith
- Subjects
Nanolithography ,Materials science ,Ion beam ,010405 organic chemistry ,business.industry ,Optoelectronics ,010402 general chemistry ,business ,01 natural sciences ,Instrumentation ,Ferroelectric semiconductors ,0104 chemical sciences - Published
- 2017
22. Ion Beam Induced Current Measurements of Solar Cells with Helium Ion Microscopy
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Stephen Jesse, Matthew J. Burch, Alex Belianinov, Olga S. Ovchinnikova, Cannon Buechley, and Songkil Kim
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Ion beam deposition ,Materials science ,Ion beam ,chemistry ,chemistry.chemical_element ,Atomic physics ,Current (fluid) ,Ion microscopy ,Instrumentation ,Helium - Published
- 2017
23. Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy
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Matthew J. Burch, Scott T. Retterer, Alex Belianinov, Michelle Halsted, and K. Songkil
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0301 basic medicine ,Materials science ,biology ,Biofilm ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,biology.organism_classification ,03 medical and health sciences ,030104 developmental biology ,Chemical engineering ,chemistry ,0210 nano-technology ,Ion microscopy ,Instrumentation ,Geobacter sulfurreducens ,Helium - Published
- 2017
24. Multi-Modal Processing of Graphene Towards Precisely Controlled Fabrication of a Nanoelectronic Device Using the Helium Ion Microscope and the TOF SIMS
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Ivan Vlassiouk, Chance Brown, Xiahan Sang, Matthew J. Burch, Songkil Kim, Anton V. Ievlev, Olga S. Ovchinnikova, Alex Belianinov, Raymond R. Unocic, and Stephen Jesse
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Fabrication ,Materials science ,Graphene ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,law.invention ,Modal ,chemistry ,law ,0210 nano-technology ,Instrumentation ,Helium ,Field ion microscope - Published
- 2017
25. Imaging 180° Polarization Reversal in Ferroelectric Oxides with Electron Backscatter Diffraction
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Chris M. Fancher, Matthew J. Burch, Elizabeth C. Dickey, and Srikanth Patala
- Subjects
Materials science ,0205 materials engineering ,Condensed matter physics ,020502 materials ,02 engineering and technology ,021001 nanoscience & nanotechnology ,0210 nano-technology ,Polarization (waves) ,Instrumentation ,Ferroelectricity ,Electron backscatter diffraction - Published
- 2016
26. Domain Structure of Bulk and Thin-Film Ferroelectrics By Transmission Kikuchi Diffraction
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Matthew J. Burch, Chris M. Fancher, Elizabeth C. Dickey, D. T. Harris, and Jon Paul Maria
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Diffraction ,Crystallography ,Materials science ,Transmission (telecommunications) ,Condensed matter physics ,Structure (category theory) ,Thin film ,Instrumentation ,Domain (software engineering) - Published
- 2015
27. Investigation of Local A-site Chemistry in Barium Strontium Titanate Using Aberration Corrected STEM, EELS and EDS
- Author
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James M. LeBeau, Jing Li, Lauren M. Garten, Jon Paul Maria, Matthew J. Burch, Xiahan Sang, Susan Trolier-McKinstry, and Elizabeth C. Dickey
- Subjects
Strontium ,Materials science ,Electron energy loss spectroscopy ,Inorganic chemistry ,Analytical chemistry ,chemistry.chemical_element ,Barium ,Dielectric ,Ferroelectricity ,chemistry ,Scanning transmission electron microscopy ,Thin film ,Spectroscopy ,Instrumentation - Abstract
Barium strontium titante (BST) is an important dielectric material because of its high tunability (dielectric constant as a function of applied voltage) and low loss, with specific applications in tunable microwave circuits. However, regardless of processing technique, additives, or synthesis temperatures some remnant ferroelectricity is always observed beyond the paraelectric phase transition [1]. One possible explanation for this remnant ferroelectricity, which has been hotly debated, is that the local stoichiometry of the A-site cations (Ba and Sr) is not globally and locally homogeneous. This hypothesis surmises that local areas, which are barium rich, may result in remnant polarization [1]. However, this hypothesis has never been experimentally shown. In this work, we use an aberration corrected scanning transmission electron microscope (STEM), electron energy loss spectroscopy (EELS), and energy dispersive X-ray spectroscopy (EDS) to investigate the local stoichiometry of arguably the bestengineered barium strontium titanate samples ever fabricated [2] in comparison to BST thin films showing some of the best tunability in thin-film form.
- Published
- 2014
28. Interface Evolution of Flux-Grown BaTiO3 Thin Films on Sapphire Substrates
- Author
-
Elizabeth C. Dickey, Matthew J. Burch, Jing Li, Jon Paul Maria, and D. T. Harris
- Subjects
Materials science ,business.industry ,Interface (Java) ,Sapphire ,Flux ,Optoelectronics ,Thin film ,business ,Instrumentation - Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
- Published
- 2013
29. In-Situ Heating Studies of Flux Grown Barium Titanate Thin Films
- Author
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Ryan M. White, Elizabeth C. Dickey, Matthew J. Burch, Jing Li, Jon Paul Maria, D. T. Harris, and Ali Moballegh
- Subjects
In situ ,chemistry.chemical_compound ,Materials science ,Flux (metallurgy) ,chemistry ,Barium titanate ,Analytical chemistry ,Sapphire ,Electron ,Thin film ,Porosity ,Instrumentation ,Pulsed laser deposition - Abstract
To investigate the effects of BBO addition, ex situ studies were performed by depositing BaTiO3 (0% and 5% BBO) via pulsed laser deposition onto sapphire substrates. The thin films were annealed for 1 hr. at 900° C and then thinned mechanically (cross section view) to electron transparency. Materials with 5% BBO addition exhibited highly dense films with moderately sized (121 nm), well-formed grains, as shown in figure 2a. This was contrasted by materials with 0% flux addition, shown in figure 1a, which had smaller grains (56 nm) than the material with 5% BBO and more significant porosity.
- Published
- 2012
30. Ultra-high tunability in polycrystalline Ba1−xSrxTiO3 thin films
- Author
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Elizabeth C. Dickey, Jing Li, Matthew J. Burch, Peter G. Lam, D. T. Harris, Jon Paul Maria, and B. J. Rogers
- Subjects
Permittivity ,Crystallinity ,Materials science ,Physics and Astronomy (miscellaneous) ,Annealing (metallurgy) ,Mineralogy ,Dielectric ,Crystallite ,Thin film ,Composite material ,Sputter deposition ,Grain size - Abstract
Ba0.7Sr0.3TiO3 thin polycrystalline films with an ultra-high capacitance tunability approaching 5:1 at 175 kV/cm were made possible by a flux-assisted synthesis approach. In this process, a small volume fraction of a low melting temperature glass is added during low-temperature sputter deposition. Subsequent annealing activates the liquid phase, which in turn provides the mass transport needed to approach full density, to increase grain size, and to improve crystallinity, and, in so doing, achieves a stronger non-linear dielectric response. Ba0.7Sr0.3TiO3 films with 0%, 1%, 4%, and 7% BaO-3B2O3 flux exhibited grain sizes of 25 nm, 28 nm, 48 nm, and 56 nm, and dielectric tunabilities of 25%, 33%, 64%, and 80% respectively. These values represent substantial improvements when compared to conventionally processed tunable dielectric films.
- Published
- 2014
31. Realizing strain enhanced dielectric properties in BaTiO3 films by liquid phase assisted growth
- Author
-
Matthew J. Burch, Jon F. Ihlefeld, Elizabeth C. Dickey, Peter G. Lam, Jing Li, Jon Paul Maria, and D. T. Harris
- Subjects
Permittivity ,Phase transition ,Grain growth ,chemistry.chemical_compound ,Materials science ,Physics and Astronomy (miscellaneous) ,chemistry ,Ferroelectric ceramics ,Barium titanate ,Multiferroics ,Dielectric ,Composite material ,Thermal expansion - Abstract
The addition of a liquid-forming flux to barium titanate thin films promotes densification and grain growth, improves nonlinear dielectric properties, and allows residual strain to be sustained in polycrystalline films without cracking at thicknesses relevant to device fabrication. Relative tuning, an excellent indicator of crystalline quality and an important material property for tunable microwave devices, increases from 20% to 70%. Films exhibit 0.15% residual differential thermal expansion mismatch strain, resulting in a shift to the paraelectric-ferroelectric phase transition of 50 °C. This result is in excellent agreement with theory, demonstrating the ability to tune ferroic transitions without epitaxial approaches.
- Published
- 2013
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