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2. On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves.

Author

Marinushkin, Pavel S., Levitsky, Alexey A., Zograf, Fyodor G., and Bakhtina, Valentina A.

Subjects
MICROELECTROMECHANICAL systems, FINITE element method, SOUND waves, LAMB waves, PIEZOELECTRIC materials, ELECTROMECHANICAL effects
Abstract

Copyright of Informacije MIDEM: Journal of Microelectronics, Electronic Components & Materials is the property of MIDEM Society and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

Published
2020
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3. Разработка и применение компонентов МЭМС

Author

Levitskiy, Alexey A. and Marinushkin, Pavel S.

Subjects
microgyroscopes, SCREAM-технология, pedestrian navigation, пешеходная навигация, microelectromechanical resonators, микрогироскопы, inertial navigation, microelectromechanical systems (MEMS), навигация, SCREAM technology, микроэлектромеханические системы (МЭМС), микроэлектромеханические резонаторы
Abstract

This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented Представлены результаты исследований, связанных с созданием компонентов микроэлектромеханических систем (МЭМС). Рассмотрены конструктивные варианты и технологии изготовления компонентов МЭМС на базе кремниевых микроструктур. Обсуждаются результаты исследований экспериментальных образцов. Рассмотрены пути дальнейшего развития исследований по созданию перспективных компонентов МЭМС

Published
2015

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