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Suspended micro-structures based on complex oxides relies on surface micro-machining processes such as those based on sacrificial layers. These processes prevent to physically access the microstructures from both sides, as substantial part of the substrate is not removed. In this work, we develop a bulk micromachining protocol of a commonly used substrate employed in oxide thin film deposition. We realize suspended oxide thin film devices by fabricating pass-through holes across SrTiO3(100) or SrTiO3(110) substrates. Careful calibration of anisotropic etching rates allows controlling the final geometry of the aperture in the substrate in a predictable way. As demonstrators of possible device geometries, we present clamped membranes and trampolines of (La,Sr)MnO3, a conductive magnetic oxide, and a suspended trampoline resonator carved from the SrTiO3 substrate itself. Reported protocols can be readily extended to a broad variety of other complex oxides so to extend the application of membranes technology beyond those of commercially-available silicon compounds.

Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with outstanding performances in term of mechanical Q factor and sensitivity to external perturbations. Broadening the functionalities of MEMS by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials and silicon-based compounds is challenging. An alternative approach is fabricating MEMS based on complex heterostructures made of materials inherently showing a variety of physical properties such as transition metal oxides. Here, we report on the integration of a high-Tc superconductor YBa2Cu3O7 (YBCO) with high Q factor micro-bridge resonator made of a single-crystal LaAlO3 (LAO) thin film. LAO resonators are tensile strained, with a stress of 345 MPa, show Q factor in the range of tens of thousands, and have low roughness. The topmost YBCO layer deposited by Pulse Laser Deposition shows a superconducting transition starting at 90 K with zero resistance below 78 K. This result opens new possibilities towards the development of advanced transducers, such as bolometers or magnetic field detectors, as well as basic science experiments in solid state physics, material science, and quantum opto-mechanics., Comment: 5 pages, 4 figures

EuTiO3 (ETO) is a well-known complex oxide mainly investigated for its magnetic properties and its incipient ferro-electricity. In this work, we demonstrate the realization of suspended micro-mechanical structures, such as cantilevers and micro-bridges, from 100 nm-thick single-crystal epitaxial ETO films deposited on top of SrTiO3(100) substrates. By combining profile analysis and resonance frequency measurements of these devices, we obtain the Young's modulus, strain, and strain gradients of the ETO thin films. Moreover, we investigate the ETO anti-ferro-distorsive transition by temperature-dependent characterizations, which show a non-monotonic and hysteretic mechanical response. Comparison between experimental and literature data allows us to weight the contribution from thermal expansion and softening to the tuning slope, while a full understanding of the origin of such a wide hysteresis is still missing. We also discuss the influence of oxygen vacancies on the reported mechanical properties by comparing stoichiometric and oxygen-deficient samples., Comment: 8 pages, 5 figures; 7 Supplementary Material sections

The release process for the fabrication of freestanding oxide microstructures relies on appropriate, controllable and repeatable wet etching procedures. SrTiO3 is among the most employed substrates for oxide thin films growth and can be decomposed in HF:water solution. Such process is strongly anisotropic and is affected by local defects and substrate cut-plane. We analyze the etching behavior of SrTiO3 substrates having (100), (110), and (111) cut-planes during immersion in a 5% HF:water solution. The etching process over the three substrates is compared in terms of pitting, anisotropy, macroscopic etch rate and underetching effects around HF-resistant (La,Sr)MnO3 thin film micropatterns. The release of targeted structures, such as the reported (La,Sr)MnO3 freestanding microbridges, depends on the substrate crystallographic symmetry and on the in-plane orientation of the structures themselves along the planar directions. By comparing the etching evolution at two different length scales, we distinguish two regimes for the propagation of the etching front: an intrinsic one, owning to a specific lattice direction, and a macroscopic one, resulting from the mixing of different etching fronts. We report the morphologies of the etched SrTiO3 surfaces and the geometries of the underetched regions as well as of the microbridge clamping zones. The reported analysis will enable the design of complex MEMS devices by allowing to model the evolution of the etching process required for the release of arbitrary structures made of oxide thin films deposited on top of STO., Comment: 6 pages, 3 figures, 1 table, 4 supporting sections

Strain engineering is one of the most effective approaches to manipulate the physical state of materials, control their electronic properties, and enable crucial functionalities. Because of their rich phase diagrams arising from competing ground states, quantum materials are an ideal playground for on-demand material control, and can be used to develop emergent technologies, such as adaptive electronics or neuromorphic computing. It was recently suggested that complex oxides could bring unprecedented functionalities to the field of nanomechanics, but the possibility of precisely controlling the stress state of materials is so far lacking. Here we demonstrate the wide and reversible manipulation of the stress state of single-crystal WO3 by strain engineering controlled by catalytic hydrogenation. Progressive incorporation of hydrogen in freestanding ultra-thin structures determines large variations of their mechanical resonance frequencies and induces static deformation. Our results demonstrate hydrogen doping as a new paradigm to reversibly manipulate the mechanical properties of nanodevices based on materials control., Comment: 6 pages, 4 figures, 9 supplementary sections

Emacs Lisp (Elisp) is the Lisp dialect used by the Emacs text editor family. GNU Emacs can currently execute Elisp code either interpreted or byte-interpreted after it has been compiled to byte-code. In this work we discuss the implementation of an optimizing compiler approach for Elisp targeting native code. The native compiler employs the byte-compiler's internal representation as input and exploits libgccjit to achieve code generation using the GNU Compiler Collection (GCC) infrastructure. Generated executables are stored as binary files and can be loaded and unloaded dynamically. Most of the functionality of the compiler is written in Elisp itself, including several optimization passes, paired with a C back-end to interface with the GNU Emacs core and libgccjit. Though still a work in progress, our implementation is able to bootstrap a functional Emacs and compile all lexically scoped Elisp files, including the whole GNU Emacs Lisp Package Archive (ELPA). Native-compiled Elisp shows an increase of performance ranging from 2.3x up to 42x with respect to the equivalent byte-code, measured over a set of small benchmarks., Comment: 8 pages, 1 figure

SrIrO3, the three-dimensional member of the Ruddlesden-Popper iridates, is a paramagnetic semimetal characterised by a the delicate interplay between spin-orbit coupling and Coulomb repulsion. In this work, we study the anisotropic magnetoresistance (AMR) of SrIrO3 thin films, which is closely linked to spin-orbit coupling and probes correlations between electronic transport, magnetic order and orbital states. We show that the low-temperature negative magnetoresistance is anisotropic with respect to the magnetic field orientation, and its angular dependence reveals the appearance of a fourfold symmetric component above a critical magnetic field. We show that this AMR component is of magnetocrystalline origin, and attribute the observed transition to a field-induced magnetic state in SrIrO3., Comment: 4 pges, 4 figures, and supplemental material

We explore the superconducting phase diagram of the two-dimensional electron system at the LaAlO3/SrTiO3 interface by monitoring the frequencies of the cavity modes of a coplanar waveguide resonator fabricated in the interface itself. We determine the phase diagram of the superconducting transition as a function of temperature and electrostatic gating, finding that both the superfluid density and the transition temperature follow a dome shape, but that the two are not monotonically related. The ground state of this 2DES is interpreted as a Josephson junction array, where a transition from long- to short-range order occurs as a function of the electronic doping. The synergy between correlated oxides and superconducting circuits is revealed to be a promising route to investigate these exotic compounds, complementary to standard magneto-transport measurements., Comment: 5 pages, 4 figures and 10 pages of supplementary material

Tungsten trioxide is a versatile material with widespread applications ranging from electrochromic and optoelectronic devices to water splitting and catalysis of chemical reactions. For technological applications, thin films of WO3 are particularly appealing, taking advantage from high surface-to-volume ratio and tunable physical properties. However, the growth of stoichiometric, crystalline thin films is challenging because the deposition conditions are very sensitive to the formation of oxygen vacancies. In this work, we show how background oxygen pressure during pulsed laser deposition can be used to tune the structural and electronic properties of WO3 thin films. By performing X-ray diffraction and low-temperature transport measurements, we find changes in WO3 lattice volume up to 10%, concomitantly with an insulator-to-metal transition as a function of increased level of electron doping. We use advanced ab initio calculations to describe in detail the properties of the oxygen vacancy defect states, and their evolution in terms of excess charge concentration. Our results depict an intriguing scenario where structural, electronic, optical, and transport properties of WO3 single-crystal thin films can all be purposely tuned by a suited control of oxygen vacancies formation during growth.

Relating the band structure of correlated semimetals to their transport properties is a complex and often open issue. The partial occupation of numerous electron and hole bands can result in properties that are seemingly in contrast with one another, complicating the extraction of the transport coefficients of different bands. The 5d oxide SrIrO3 hosts parabolic bands of heavy holes and light electrons in gapped Dirac cones due to the interplay between electron-electron interactions and spin-orbit coupling. We present a multifold approach relying on different experimental techniques and theoretical calculations to disentangle its complex electronic properties. By combining magnetotransport and thermoelectric measurements in a field-effect geometry with first-principles calculations, we quantitatively determine the transport coefficients of different conduction channels. Despite their different dispersion relationships, electrons and holes are found to have strikingly similar transport coefficients, yielding a holelike response under field-effect and thermoelectric measurements and a linear, electronlike Hall effect up to 33 T., Comment: 5 pages, 4 figures

One of the hallmark experiments of quantum transport is the observation of the quantized resistance in a point contact formed with split gates in GaAs/AlGaAs heterostructures. Being carried out on a single material, they represent in an ideal manner equilibrium reservoirs which are connected only through a few electron mode channel with certain transmission coefficients. It has been a long standing goal to achieve similar experimental conditions also in superconductors, only reached in atomic scale mechanically tunable break junctions of conventional superconducting metals, but here the Fermi wavelength is so short that it leads to a mixing of quantum transport with atomic orbital physics. Here we demonstrate for the first time the formation of a superconducting quantum point contact (SQPC) with split gate technology in a superconductor, utilizing the unique gate tunability of the two dimensional superfluid at the LaAlO3/SrTiO3 (LAO/STO) interface. When the constriction is tuned through the action of metallic split gates we identify three regimes of transport: (i) SQPC for which the supercurrent is carried only by a few quantum transport channels. (ii) Superconducting island strongly coupled to the equilibrium reservoirs. (iii) Charge island with a discrete spectrum weakly coupled to the reservoirs. Our experiments demonstrate the feasibility of a new generation of mesoscopic all-superconductor quantum transport devices., Comment: 18 pages

Interfaces between complex oxides constitute a unique playground for 2D electron systems (2DES), where superconductivity and magnetism can arise from combinations of bulk insulators. The 2DES at the LaAlO3/SrTiO3 interface is one of the most studied in this regard, and its origin is determined by both the presence of a polar field in LaAlO3 and the insurgence of point defects, such as oxygen vacancies and intermixed cations. These defects usually reside in the conduction channel and are responsible for a decreased electronic mobility. In this work we use an amorphous WO3 overlayer to control the defect formation and obtain an increased electron mobility and effective mass in WO3/LaAlO3/SrTiO3 heterostructures. The studied system shows a sharp insulator-to-metal transition as a function of both LaAlO3 and WO3 layer thickness. Low-temperature magnetotransport reveals a strong magnetoresistance reaching 900% at 10 T and 1.5 K, the presence of multiple conduction channels with carrier mobility up to 80 000 cm2/Vs and an unusually high effective mass of 5.6 me. The amorphous character of the WO3 overlayer makes this a versatile approach for defect control at oxide interfaces, which could be applied to other heterestrostures disregarding the constraints imposed by crystal symmetry.

Micro- and nano-electromechanical resonators are a fundamental building block of modern technology, used in environmental monitoring, robotics, medical tools as well as fundamental science. These devices rely on dedicated electronics to generate their driving signal, resulting in an increased complexity and size. Here, we present a new paradigm to achieve high-frequency mechanical actuation based on the metal-insulator transition of VO$\mathrm{_2}$, where the steep variation of its electronic properties enables to realize high-frequency electrical oscillations. The dual nature of this phase change, which is both electronic and structural, turns the electrical oscillations into an intrinsic actuation mechanism, powered by a small DC voltage and capable to selectively excite the different mechanical modes of a microstructure. Our results pave the way towards the realization of micro- and nano-electro-mechanical systems with autonomous actuation from integrated DC power sources such as solar cells or micro-batteries., Comment: Main text: 6 pages, 4 figures Supplemental Material: 16 pages, 7 sections

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays., Comment: 7 pages, 4 figures

Combination of electric fields and Joule self-heating is used to change the oxygen stoichiometry and promote oxygen vacancy drift in a free-standing $\mathrm{(La,Sr)MnO_3}$ thin film microbridge placed in controlled atmosphere. By controlling the local oxygen vacancies concentration, we can reversibly switch our LSMO-based microbridges from metallic to insulating behavior on timescales lower than 1 s and with small applied voltages (<5 V). The strong temperature gradients given by the microbridge geometry strongly confine the motion of oxygen vacancies, limiting the modified region within the free-standing area. Multiple resistive states can be set by selected current pulses that determine different oxygen vacancies profiles within the device . Qualitative analysis of device operation is also provided with the support of Finite Element Analysis., Comment: 5 pages, 3 figures

We investigate the resistive switching behaviour of $\mathrm{VO_2}$ microbridges under current bias as a function of temperature and thermal coupling with the heat bath. Upon increasing the electrical current bias, the formation of the metallic phase can progress smoothly or through sharp jumps. The magnitude and threshold current values of these sharp resistance drops show random behaviour and are dramatically influenced by thermal dissipation conditions. Our results also evidence how the propagation of the metallic phase induced by electrical current in $\mathrm{VO_2}$, and thus the shape of the resulting high-conductivity path, are not predictable. We discuss the origin of the switching events through a simple electro-thermal model based on the domain structure of $\mathrm{VO_2}$ films that can be useful to improve the stability and controllability of future $\mathrm{VO_2}$-based devices., Comment: 6 pages, 4 figures

Superconducting coplanar waveguide (CPW), resonators are powerful and versatile tools used in areas ranging from radiation detection to circuit quantum electrodynamics. Their potential for low intrinsic losses makes them attractive as sensitive probes of electronic properties of bulk materials and thin films. Here we use superconducting MoRe CPW resonators, to investigate the high-frequency (up to 0.3 GHz) and low temperature (down to 3.5 K) permittivity of SrTiO3, a non-linear dielectric on the verge of a ferroelectric transition (quantum paraelectricity). We perform a quantitative analysis of its dielectric properties as a function of external dc bias (up to +-15V), rf power and mode number and discuss our results within the framework of the most recent theoretical models. We also discuss the origin of a fatigue effect that reduces the tunability of the dielectric constant of SrTiO3, which we relate to the presence of oxygen vacancies.

Nucleation processes of mixed-phase states are an intrinsic characteristic of first-order phase transitions, typically related to local symmetry breaking. Direct observation of emerging mixed-phase regions in materials showing a first-order metal-insulator transition (MIT) offers unique opportunities to uncover their driving mechanism. Using photoemission electron microscopy, we image the nanoscale formation and growth of insulating domains across the temperature-driven MIT in NdNiO3 epitaxial thin films. Heteroepitaxy is found to strongly determine the nanoscale nature of the phase transition, inducing preferential formation of striped domains along the terraces of atomically flat stepped surfaces. We show that the distribution of transition temperatures is an intrinsic local property, set by surface morphology and stable across multiple temperature cycles. Our data provides new insights into the MIT of heteroepitaxial nickelates and points to a rich, nanoscale phenomenology in this strongly correlated material.