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We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.