1. Valley splitting by extended zone effective mass approximation incorporating strain in silicon.
- Author
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Noborisaka, Jinichiro, Hayashi, Toshiaki, Fujiwara, Akira, and Nishiguchi, Katsuhiko
- Subjects
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ANNEALING of metals , *FIELD-effect transistors , *METAL oxide semiconductor field , *METAL oxide semiconductor field-effect transistors , *SHEAR strain , *METAL oxide semiconductor capacitors , *SILICON - Abstract
We propose a main mechanism of large valley splitting experimentally observed at the interface of buried oxide (BOX)/silicon-on-insulator (SOI) structures. Silicon metal-oxide-semiconductor field effect transistors fabricated on a SIMOX (001) substrate, which is a kind of the SOI substrate, that is annealed at high temperatures for a long time are known to exhibit large valley splitting, but the origin of this splitting has long been unknown. Extended zone effective-mass approximation predicts that strain significantly affects valley splitting. In this study, we analyzed valley splitting based on this theory and found that the shear strain along [110] of approximately 5% near the BOX interface is a promising source for large valley splitting. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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