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We report measured Tc of superconducting Ti/Au bilayer strips with a width W varying from 5 to 50 µm. The strips were fabricated based on a Ti/Au bilayer that consists of a 41-nm-thick Ti layer to which a 280-nm-thick Au layer was added. We find that the Tc drops as W decreases and the declining trend almost perfectly follows Tc/ [mK] = - 738.4 [μ m] 2/ W2+ 91.0 , where Tc(W= ∞) of 91 mK is consistent with the intrinsic Tc of the bilayer. The result is interpreted as a consequence of the lateral inverse proximity effect originated in normal-metal microstructures, namely Au overhangs that exist at the edges of the Ti/Au bilayer. The Tc shift from the intrinsic Tc should be anticipated in addition to the longitudinal proximity effect from superconducting Nb leads when one designs Ti/Au TESs.

We demonstrate multiplexed readout of 43 transition edge sensor (TES) bolometers operating at 90 mK using a frequency division multiplexing (FDM) readout chain with bias frequencies ranging from 1 to 3.5 MHz and a typical frequency spacing of 32 kHz. We improve the previously reported performance of our FDM system by two important steps. First, we replace the coplanar wires with microstrip wires, which minimize the cross talk from mutual inductance. From the measured electrical cross talk (ECT) map, the ECT of all pixels is carrier leakage dominated. Only five pixels show an ECT level higher than 1%. Second, we reduce the thermal response speed of the TES detectors by a factor of 20 by increasing the heat capacity of the TES, which allows us to bias all TES detectors below 50% in transition without oscillations. We compare the current–voltage curves and noise spectra of the TESs measured in single-pixel mode and multiplexing mode. We also compare the noise equivalent power (NEP) and the saturation power of the bolometers in both modes, where 38 pixels show less than 10% difference in NEP and 5% difference in saturation power when measured in the two different modes. The measured noise spectrum is in good agreement with the simulated noise based on measured parameters from an impedance measurement, confirming that our TES is dominated by phonon noise.

Large arrays of transition edge sensors (TESs) are the baseline for a number of future space observatories. For instance, the X-ray integral field unit (X-IFU) instrument on board the ATHENA space telescope will consist of $$\sim$$ ∼ 3000 TESs with high energy resolution ($$2\,{\mathrm{eV}}$$ 2 eV at X-ray energies up to 7 keV). In this contribution we report on the development of an X-ray TES array as a backup detector technology for X-IFU. The baseline readout technology for this mission is time domain multiplexing where the detectors are DC biased. Specifically, we report on the characterization of four different Ti/Au TESs with the following dimensions ($$\hbox {L}\times \hbox {W}$$ L × W ): $$30\times 15$$ 30 × 15 , $$30\times 30$$ 30 × 30 , $$50\times 25$$ 50 × 25 and $$50\times 50\,\mu \hbox {m}^2$$ 50 × 50 μ m 2 , all of which are coupled to a $$2.3\,\mu \hbox {m}$$ 2.3 μ m thick Au absorber of area $$240\times 240\,\mu \hbox {m}^2$$ 240 × 240 μ m 2 . We have performed our characterization using our standard frequency domain multiplexing readout connecting only pixels at low frequencies, where nonlinear effects due to the AC biasing are negligible. Promising energy resolution has been obtained, for instance $$1.78\pm 0.10\,\hbox {eV}$$ 1.78 ± 0.10 eV and $$1.75\pm 0.10\,\hbox {eV}$$ 1.75 ± 0.10 eV at 5.9 keV for the $$50\times 25$$ 50 × 25 and $$50\times 50\,\mu \hbox {m}^2$$ 50 × 50 μ m 2 detectors respectively. Uniformity over a kilo-pixel array (of detectors with the same geometry) has been also studied, confirming the high quality of our fabrication process.

We present a characterization of the sensitivity of TES X-ray micro-calorimeters to environmental conditions under frequency-domain multiplexing (FDM) readout. In the FDM scheme, each TES in a readout chain is in series with a LC band-pass filter and AC biased with an independent carrier at MHz range. Using TES arrays, cold readout circuitry and warm electronics fabricated at SRON and SQUIDs produced at VTT Finland, we characterize the sensitivity of the detectors to bias voltage, bath temperature and magnetic field. We compare our results with the requirements for the Athena X-IFU instrument, showing the compliance of the measured sensitivities. We find in particular that FDM is intrinsically insensitive to the magnetic field because of TES design and AC readout., Comment: This paper has been accepted for publication in Journal of Low Temperature Physics

We have measured and characterized the thermal crosstalk in two different arrays of transition-edge sensor (TES) X-ray micro-calorimeters with frequency-domain multiplexing (FDM) readout. The TES arrays are fabricated at SRON and are a 8$\times$8 and a 32$\times$32 "kilo-pixel" uniform array. The amount of crosstalk is evaluated as the ratio between the averaged crosstalk signal and the X-ray pulse amplitudes. The crosstalk ratios (CR) for our detectors are compliant with the requirements for future X-ray space missions, such as Athena X-IFU (CR$< 10^{-3}$ for first-neighbour pixels): we measured a nearest-neighbour thermal crosstalk ratio at a level of $10^{-4}$, with a highest crosstalk ratio of $4\times 10^{-4}$ for the kilo-pixel array (worst case, center of array) and $1\times 10^{-4}$ for the 8$\times$8 array, with a margin of improvement achievable by optimizing the Cu metallization and the width of the Si supporting structures (muntins) in the backside of the TES array chip. Based on the measured crosstalk ratios, we have estimated the impact on the spectral resolution by means of noise equivalent power (NEP) considerations and a Monte Carlo simulation, finding an average degradation in quadrature of less than 40~meV, compliant with the < 0.2~eV requirement for Athena X-IFU.

We report on the development and demonstration of a MHz frequency domain multiplexing (FDM) technology to read out arrays of cryogenic transition edge sensor (TES) X-ray microcalorimeters. In our FDM scheme, TESs are AC-biased at different resonant frequencies in the low MHz range through an array of high-$Q$ LC resonators. The current signals of all TESs are summed at superconducting quantum interference devices (SQUIDs). We have demonstrated multiplexing for a readout of 31 pixels using room temperature electronics, high-$Q$ LC filters and TES arrays developed at SRON, and SQUID arrays from VTT. We repeated this on a second setup with 37 pixels. The summed X-ray spectral resolutions $@$ 5.9 keV are $\Delta E_{\rm 31 pix ~MUX}=2.14\pm0.03$ eV and $\Delta E_{\rm 37 pix ~MUX}=2.23\pm0.03$ eV. The demonstrated results are comparable with other multiplexing approaches. There is potential to further improve the spectral resolution and to increase the number of multiplexed TESs, and to open up applications for TES X-ray microcalorimeters., Comment: 6 pages, 3 figures, accepted for publication on Applied physics letters

We are developing X-ray microcalorimeters as a backup option for the baseline detectors in the X-IFU instrument on board the ATHENA space mission led by ESA and to be launched in the early 2030s.5$\times$5 mixed arrays with TiAu transition-edge sensor (TES), which have different high aspect ratios and thus high resistances, have been designed and fabricated to meet the energy resolution requirement of the X-IFU instrument. Such arrays can also be used to optimise the performance of the Frequency Domain Multiplexing (FDM) readout and lead to the final steps for the fabrication of a large detector array. In this work we present the experimental results from tens of the devices with an aspect ratio (length-to-width) ranging from 1-to-1 up to 6-to-1, measured in a single-pixel mode with a FDM readout system developed at SRON/VTT. We observed a nominal energy resolution of about 2.5 eV at 5.9 keV at bias frequencies ranging from 1 to 5 MHz. These detectors are proving to be the best TES microcalorimeters ever reported in Europe, being able to meet not only the requirements of the X-IFU instrument, but also those of other future challenging X-ray space missions, fundamental physics experiments, plasma characterization and material analysis.

We are developing the frequency division multiplexing (FDM) read-out for the superconducting transition-edge sensors arrays of the X-IFU instrument on board of Athena and of the SAFARI instrument on board of SPICA. An essential component of the FDM is the array of narrow band superconducting resonators, each consisting of lithographically made inductors and capacitors. In the standard FDM configuration, the LC resonators are connected in series with the input coil of a low noise two-stage SQUID amplifier. In this work, we have modified the electrical scheme to weakly couple the SQUID amplifier from the LC filters in order to measure their intrinsic properties. We report on the intrinsic losses and on the noise of high-Q superconducting LC resonators, with resonant frequencies ranging between 1 and 5 MHz, measured at temperatures from 70 to 500 mK. The LC resonators show very low losses with values smaller than $$0.5\,\mathrm {m}\Omega $$ at equilibrium temperatures below 100 mK. We demonstrate that the LC resonators noise is thermal between 500 and 70 mK.

We have characterized and mapped the electrical cross talk (ECT) of a frequency division multiplexing (FDM) system with a transition edge sensor (TES) bolometer array, which is intended for space applications. By adding a small modulation at 120 Hz to the AC bias voltage of one bolometer and measuring the cross talk response in the current noise spectra of the others simultaneously, we have for the first time mapped the ECT level of 61 pixels with a nominal frequency spacing of 32 kHz in a 61 × 61 matrix and a carrier frequency ranging from 1 MHz to 4 MHz. We find that about 94% of the pixels show an ECT level of less than 0.4%. Only the adjacent pixels reach this level, and the ECT for the rest of the pixels is less than 0.1%. We also observe higher ECT levels, up to 10%, between some of the pixels, which have bundled long, parallel coplanar wires connecting TES bolometers to inductor-capacitor filters. In this case, the high mutual inductances dominate. To mitigate this source of ECT, the coplanar wires should be replaced by microstrip wires in the array. Our study suggests that an FDM system can have a relatively low ECT level, e.g., around 0.4% if the frequency spacing is 30 kHz. Our results successfully demonstrate a low electrical cross talk for a space FDM technology.

Transition Edge Sensors (TESs) are the selected technology for future spaceborne X-ray observatories, such as Athena, Lynx, and HUBS. These missions demand thousands of pixels to be operated simultaneously with high energy-resolving power. To reach these demanding requirements, every aspect of the TES design has to be optimized. Here we present the experimental results of tests on different devices where the coupling between the x-ray absorber and the TES sensor is varied. In particular, we look at the effects of the diameter of the coupling stems and the distance between the stems and the TES bilayer. Based on measurements of the AC complex impedance and noise, we observe a reduction in the excess noise as the spacing between the absorber stem and the bilayer is decreased. We identify the origin of this excess noise to be internal thermal fluctuation noise between the absorber stem and the bilayer. Additionally, we see an impact of the coupling on the superconducting transition in the appearance of kinks. Our observations show that these unwanted structures in the transition shape can be avoided with careful design of the coupling geometry. Also the stem diameter appears to have a significant impact on the smoothness of the TES transition. This observation is still poorly understood, but is of great importance for both AC and DC biased TESs., Comment: 9 pages, 8 figures

We demonstrate multiplexing readout of 60 transition edge sensor (TES) bolometers operating at 90 mK using a frequency division multiplexing readout chain with bias frequencies ranging from 1 to 3.5 MHz and with a typical frequency spacing of 32 kHz. The readout chain starts with a two-stage SQUID amplifier and has a noise level of 9.5 pA/ √{ Hz } . We compare current-voltage curves and noise spectra of TESs measured in a single-pixel mode and in a multiplexing mode. We also map the noise equivalent power (NEP) and the saturation power of the bolometers in both modes, where there are 43 pixels that do not show more than 10% difference in NEP and 5% in saturation power when measured in single pixel and multiplex modes. We have read out a TES with an NEP of 0.45 aW/ √{ Hz } in the multiplexing-mode, which demonstrates the capability of reading out ultra-low noise TES bolometer arrays for space applications.

Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of $\mathrm{\Delta }E 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with (length × width) 140 × 30 $\mu$ m $^2$ TiAu TESs, which have a 2.3 $\mu$ m thick Au absorber for X-ray photons. The pixels have a typical normal resistance $R_{\mathrm{n}}$ = 121 m $\Omega$ and a critical temperature $T_{\mathrm{c}}\sim$ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instrument's energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1 $\;\times\; 10^{-3}$ when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV).

The SAFARI instrument is a spectrometer on board SPICA, using ~4000 TES bolometers with an unprecedented sensitivity. We are currently optimizing an FDM readout prototype for SAFARI, which is capable of reading out 160 pixels with the bias frequency range 1-4 MHz and 16 kHz spacing. We present our latest results with emphasis on the noise and cross-talk performance of this system. The measured readout noise is discussed in various configurations. We also present a method for mapping out the electrical cross-talk between the pixels in the array and elaborate on the measured data and analysis.

We are developing an x-ray imaging spectrometer for Super DIOS satellite mission, a future x-ray observatory, planned by JAXA, to be launched in 2030’s. Super DIOS will reveal the nature of the missing baryon in the warm-hot intergalactic medium because of its fine energy and angular resolution, large effective area and large field of view. A main detector on-board Super DIOS consists of a transition-edge sensor (TES) microcalorimeter array of over 30,000 pixels working at a temperature below 100 mK and it poses a considerable technical difficulty to the readout. A microwave superconducting quantum interference device (SQUID) multiplexing is promising technique and expected to achieve a large scale readout of more than 30,000 pixels. We describe our development of a 40-channel microwave SQUID multiplexer with low-noise characteristics∗ and a demonstration of simultaneously reading out 40-pixel TESs. Finally, we discuss a future prospect and a feasibility of reading out an array of more than 30,000 pixels.

Hot Universe Baryon Surveyor (HUBS), a Chinese space mission, is proposed to find a large fraction of the so-called missing baryons, which would help us to understand more about the structure formation and evolution of the universe. Both theoretical and experimental results show that developing a highly efficient soft X-ray spectrometer over a large field of view and with a high energy resolution is the key to detect the “missing baryons”. X-ray microcalorimeters based on a transition-edge sensor (TES) array is required for HUBS, which aims to have 1 deg2 field of view (FoV) with 1’ angular resolution and 2 eV energy resolution optimized around 0.6 keV. Taking the high throughput X-ray optical focusing system on HUBS into account, the TES array is designed to have 60 x 60 pixels with an area of 1 mm2 for each pixel. The microcalorimeter consists of a TES, a weak thermal link to a heat bath, and a semi-metal or normal metal absorber to increase the X-ray absorption efficiency. When an X-ray photon with a given energy is absorbed, the temperature of the absorber increase, that can be monitored by measuring the resistance change of the TES. A bilayer of a superconductor and a normal metal is used to fabricate a TES with a critical temperature (Tc) of ~100 mK. The latter is set for the required energy resolution. For HUBS, both MoCu and TiAu TES technologies are considered in its development phase. Here we will focus on TiAu TES calorimeters designed and partially fabricated at SRON for HUBS. Recent demonstration of a resolution of 2.5 eV at 5.9 keV in an AC readout at SRON for X-IFU on board of Athena illustrates the promising of this technology. However, the challenging for the HUBS array is the large pixel size. We will report the design and fabrication of prototype HUBS calorimeters.

We present the conceptual design and initial development of the Hysteretic Deformable Mirror (HDM). The HDM is a completely new approach to the design and operation of deformable mirrors for wavefront correction in advanced imaging systems. The key technology breakthrough is the application of highly hysteretic piezoelectric material in combination with a simple electrode layout to efficiently define single actuator pixels. The set-and-forget nature of the HDM, which is based on the large remnant deformation of the newly developed piezo material, facilitates the use of time division multiplexing (TDM) to address the single pixels without the need for high update frequencies to avoid pixel drift. This, in combination with the simple electrode layout, paves the way for upscaling to extremely high pixel numbers ($\geq 128\times 128$) and pixel density ($100/mm^2$) deformable mirrors (DMs), which is of great importance for high spatial frequency wavefront correction in some of the most advanced imaging systems in the world.

We present the design and implementation of a thermal model, developed in COMSOL, aiming to probe the wafer-scale thermal response arising from realistic rates and energies of cosmic rays at L2 impacting the detector wafer of Athena X-IFU. The wafer thermal model is a four-layer 2D model, where 2 layers represent the constituent materials (Si bulk and Si$_{3}$N$_{4}$ membrane), and 2 layers represent the Au metallization layer's phonon and electron temperatures. We base the simulation geometry on the current specifications for the X-IFU detector wafer, and simulate cosmic ray impacts using a simple power injection into the Si bulk. We measure the temperature at the point of the instrument's most central TES detector. By probing the response of the system and pulse characteristics as a function of the thermal input energy and location, we reconstruct cosmic ray pulses in Python. By utilizing this code, along with the results of the GEANT4 simulations produced for X-IFU, we produce realistic time-ordered data (TOD) of the temperature seen by the central TES, which we use to simulate the degradation of the energy resolution of the instrument in space-like conditions on this wafer. We find a degradation to the energy resolution of 7 keV X-rays of $\approx$0.04 eV. By modifying wafer parameters and comparing the simulated TOD, this study is a valuable tool for probing design changes on the thermal background seen by the detectors., accepted for publication in the Journal of Low Temperature Physics

Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

We are developing kilo-pixel arrays of transition-edge sensors (TESs) for the X-ray Integral Field Unit on ESA’s Athena observatory. Previous measurements of AC-biased Mo/Au TESs have highlighted a frequency-dependent loss mechanism that results in broader transitions and worse spectral performance compared to the same devices measured under DC bias. In order to better understand the nature of this loss, we are now studying TES pixels in different geometric configurations. We present measurements on devices of different sizes and with different metal features used for noise mitigation and X-ray absorption. Our results show how the loss mechanism is strongly dependent upon the amount of metal in close proximity to the sensor and can be attributed to induced eddy current coupling to these features. We present a finite element model that successfully reproduces the magnitude and geometry dependence of the losses. Using this model, we present mitigation strategies that should reduce the losses to an acceptable level.

The current status of lithographic superconducting LC filters for use in the Athena-X-IFU instrument is described. We present the fabrication process and characterization results at room temperature, 4 K and 50 mK. We also present an optimization study of the quality topics, where finite element modeling is used together with experimental validation structures. For the a-Si:H-based capacitors and Nb-based coils, presently the component fabrication yield is about 99% and the effective series resistance at 50 mK is lower than 1.5 mΩ.

Dilution and adiabatic demagnetization refrigerators based on pulse tube cryocoolers are nowadays used in many low temperature physics experiments, such as atomic force and scanning tunneling microscopy, quantum computing, radiation detectors, and many others. A pulse tube refrigerator greatly simplifies the laboratory activities being a cryogen-free system. The major disadvantage of a pulse tube cooler is the high level of mechanical vibrations at the warm and cold interfaces that could substantially affect the performance of very sensitive cryogenic instruments. In this paper, we describe the performance of a very simple mechanical attenuation system used to eliminate the pulse-tube-induced low frequency noise of the superconducting transition-edge sensors under development for the instruments of the next generation of infra-red and X-ray space observatories.

We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm2 TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 $$\times $$ 10 $$^{-19}$$ W/Hz $$^{1/2 }$$ have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 $${\upmu } $$ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

We report very-low-noise, fast-response, middle-scale multiplexing in a microwave superconducting quantum interference device multiplexer (MW-Mux) as a transition-edge sensor (TES) readout. Our MW-Mux is able to read 40 channels with 500 kHz sampling and has a low readout noise of 0.9 μ Φ 0 / Hz (where Φ 0 is the magnetic flux quantum), equivalent to 9 pA / Hz. By contrast, a multiplexer of less than 10 pixels with 500 kHz sampling and ∼ 2 μ Φ 0 / Hz readout noise has so far been reported in the literature. Owing to the 500 kHz sampling, our MW-Mux exhibits a fast response to detect a TES pulse with a rise time around 12 μ s. We demonstrated simultaneous readout of 38 pixels from an array of x-ray TES microcalorimeters. The measured full-width values at half-maximum spectral resolution ranged from 2.79 to 4.56 eV, with a median value of 3.30 eV at 5.9 keV, including a ∼ 10 % contribution of readout noise, i.e., 0.9–1.7 eV.

The X-ray Integral Field Unit (X-IFU) is an imaging microcalorimeter being developed for ESA's Athena X-ray observatory to providing high spectral resolution imaging between 0.2-12 keV, with moderate count-rate capability and a large field-of-view. The X-IFU focal plane assembly (FPA) will contain the instrument's large-format transition edge sensor (TES) microcalorimeter array and its superconducting readout electronics, plus a second TES detector, located behind the main sensor array, is used to detect high-energy cosmic rays and secondary particles passing through the sensor array and enable the rejection of false events that they generate in the sensor array's event list. A Kevlar thermal suspension is used to isolate the detectors at 55 mK from the 2 K environment of the X-IFU instrument cryostat's cold stage, while three layers of shielding are used to allow the detector's to achieve their low-noise performance in the expected on-ground and in-flight electromagnetic and microvibration environment. This paper will describe the preliminary design concept of the X-IFU focal plane assembly and its critical technology building blocks.

We are developing the frequency domain multiplexing (FDM) read-out of transition-edge sensor (TES) microcalorimeters for the X-ray Integral Field Unit (X-IFU) instrument on board of the future European X-Ray observatory Athena. The X-IFU instrument consists of an array of $\sim$3840 TESs with a high quantum efficiency (>90 % at 7 keV) and spectral resolution $\Delta E$=2.5 eV @ 7 keV ($E/\DeltaE\sim$2800). FDM is the baseline readout system for the X-IFU instrument. In FDM, TESs are coupled to a passive LC filter and biased with alternating current (AC bias) at MHz frequencies. Each resonator should be separated beyond their detector thermal response (< 10 kHz) to avoid crosstalk between neighboring resonators. To satisfy the requirement of the X-IFU, a multiplexing factor of 40 pixels/channel in a frequency range from 1 to 5 MHz required. Using high-quality factor LC filters and room temperature electronics developed at SRON and low-noise two-stage SQUID amplifiers provided by VTT, we have recently demonstrated good performance with the FDM readout of Mo/Au TES calorimeters with Au/Bi absorbers. We have achieved a performance requested for the demonstration model (DM) with the single pixel AC bias mode. We have also demonstrated 6-pixel multiplexing with an average energy resolution of 3.4 eV, which is currently limited by non-fundamental issues related to FDM readout in our current lab setup. In parallel to technology developments, we are also constructing a set-up which can be readout 2x40 pixels as the precursor of the DM. In this paper we report on the concept of the focal plane assembly, their requirements, detector performance under FDM scheme, recent results from pre-demonstration model setup and future prospect.

SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

We describe a new fabrication process for a superconducting, flexible, and demountable connector to a kilo-pixel transition edge sensor. The demountable part contains planar coils for inductive coupling, in particular suited for AC-biased frequency domain multiplexed readout. A fixed connection to a chip with superconducting LC filters and SQUID readout is made by gold bump bonding with a connection resistance of $$1.1\,{\times }\,10^{-4}\, \Omega $$ . The Nb-based connecting lines on the flexible part show a superconducting transition around 7 K, which enables testing of connectors and LC filters in a simple L-He setup.

Arrays of transition-edge sensors (TESs) X-ray microcalorimeters can provide high energy resolution and a large area necessary for the future X-ray mission Athena (2028~). An array with 4000 TESs will be employed on the X-ray satellite for the first time. The detector can achieve energy resolution of 2.5-3.0 eV and a high quantum efficiency in the energy range of 0.3-12 keV. Multiplexing the readout is necessary to minimize the number of readout amplifiers, the amount of wiring in the cryostat, and the cooling power required at the base-temperature. We are developing frequency-domain multiplexing (FDM) readout of TES microcalorimeters. In the FDM configuration, the TES is ac voltage biased at well-defined frequencies (between 2 and 6 MHz). For the development of the readout of the Athena instrument, we are using a nearly quantum-limited high-dynamic-range two-stage superconducting quantum interference device amplifier from VTT and high-Q lithographical LC resonators. In this paper, we will present the current status of the development of FDM readout of TES microcalorimeters. We will report on the results obtained using arrays fabricated at the NASA/Goddard Space Flight Center group.

The frequency domain multiplexing (FDM) readout of arrays of transition edges sensors for the X-IFU/Athena and SAFARI/SPICA instruments requires SQUID amplifiers with low input inductance, low flux noise, high-dynamic range and low power consumption. We report the performance of two-stage SQUID amplifiers developed at VTT coupled to multiple high-Q LC resonators of the SRON FDM readout operating in the frequency range from 2 to 5 MHz. The SQUIDs have been tested in the following configurations: 1) the two SQUIDs at base temperature with open input; 2) the amplifier SQUID at 1K temperature and the front-end SQUID at base temperature in the FDM readout of low-G TES bolometers; and 3) and in the FDM readout of X-ray microcalorimeter arrays with both SQUIDS at base temperature. We measured an input flux noise equal to 0.18 μΦ 0 /Hz 1/2 at 20 mK, equivalent to an energy resolution of 9 b. The measured current noise at the SQUID input is ~1 pA/Hz 1/2 at 20 mK, which corresponds to a coupled energy resolution of about 15 b.

Large Transition Edge Sensor (TES) arrays, required for the SAFARI imaging spectrometer on a planned SPICA space telescope, will be read out by Frequency Division Multiplexing (FDM). All the pixels are connected with densely packed and equally long superconducting wires. Inductive coupling between wire pairs forms critical performance issues. Mutual inductance is one of the origins of electronic crosstalk among pixels. We find that available literature is not complete in providing suitable calculation methods for the required modelling. In this paper, we describe a relatively fast inductance calculation method for long, arbitrary wires, which can be useful for analyzing crosstalk between pixels and can also be important for guiding wiring layout design. The mutual inductance between two wire loops is calculated using Neumann's formula by a double summation of analytical expressions implemented in Python. Self-inductance for a multi-segment wire can be calculated by the summation of self-inductance of each wire segment and the mutual inductance between all segments. Combining this method with other modelling techniques, we have simulated the inductances of an entire 160 pixel FDM test setup.

This paper summarizes a preliminary design concept for the focal plane assembly of the X-ray Integral Field Unit on the Athena spacecraft, an imaging microcalorimeter that will enable high spectral resolution imaging and point-source spectroscopy. The instrument's sensor array will be a ~ 3840-pixel transition edge sensor (TES) microcalorimeter array, with a frequency domain multiplexed SQUID readout system allowing this large-format sensor array to be operated within the thermal constraints of the instrument's cryogenic system. A second TES detector will be operated in close proximity to the sensor array to detect cosmic rays and secondary particles passing through the sensor array for off-line coincidence detection to identify and reject events caused by the in-orbit high-energy particle background. The detectors, operating at 55 mK, or less, will be thermally isolated from the instrument cryostat's 2 K stage, while shielding and filtering within the FPA will allow the instrument's sensitive sensor array to be operated in the expected environment during both on-ground testing and in-flight operation, including straylight from the cryostat environment, low-energy photons entering through the X-ray aperture, low-frequency magnetic fields, and high-frequency electric fields.

Athena is a European X-ray observatory, scheduled for launch in $$\sim $$ 2028. Athena will employ a high-resolution imaging spectrometer called X-ray integral field unit (X-IFU), consisting of an array of $$\sim $$ 4000 transition edge sensor (TES) microcalorimeter pixels. For the readout of X-IFU, we are developing frequency domain multiplexing, which is the baseline readout system. In this paper, we report on the performance of a TES X-ray calorimeter array fabricated at Goddard Space Flight Center (GSFC) at MHz frequencies for the baseline of X-IFU detector. During single-pixel AC bias characterization, we measured X-ray energy resolutions (at 6 keV) of about 2.9 eV at both 2.3 and 3.7 MHz. Furthermore, in the multiplexing mode, we measured X-ray energy resolutions of about 2.9 eV at 1.3 and 1.7 MHz.

The Advanced Telescope for High-Energy Astrophysics (Athena) has been selected by ESA as its second large-class mission. The future European X-ray observatory will study the hot and energetic Universe with its launch foreseen in 2028. Microcalorimeters based on superconducting Transition-edge sensor (TES) are the chosen technology for the detectors array of the X-ray Integral Field Unit (X-IFU) on board of Athena. The X-IFU is a 2-D imaging integral-field spectrometer operating in the soft X-ray band (0.3 -12 keV). The detector consists of an array of 3840 TESs coupled to X-ray absorbers and read out in the MHz bandwidth using Frequency Domain Multiplexing (FDM) based on Superconducting QUantum Interference Devices (SQUIDs). The proposed design calls for devices with a high filling-factor, high quantum efficiency, relatively high count-rate capability and an energy resolution of 2.5 eV at 5.9 keV. The paper will review the basic principle and the physics of the TES-based microcalorimeters and present the state-of-the art of the FDM read-out., 4 pages,4 figures, available on line (http://www.sciencedirect.com/science/article/pii/S0168900215011274)

Transition edge sensors (TES) are the chosen detector technology for the SAFARI imaging spectrometer on the SPICA telescope. The TES are required to have an NEP of 2–3 × 10?19 W/? Hz to take full advantage of the cooled mirror. SRON has developed TiAu TES bolometers for the short wavelength band (30–60 ?m). The TES are on SiN membranes, in which long and narrow legs act as thermal links between the TES and the bath. We present a distributed model that accounts for the heat conductance and the heat capacity in the long legs that provides a guideline for designing low noise detectors. We report our latest results that include a measured dark NEP of 4.2×10?19 W/? Hz and a saturation power of about 10 fW.

We have developed a coplanar waveguide (CPW) Kinetic Inductance Detector consisting of Al and NbTiN, coupled at its shorted end to a planar antenna. To suppress the odd mode due to direct coupling to sky radiation by the KID we have also developed freestanding metal air bridges

We present new results on the development of larger arrays (presently 72 channels, goal of multiple units of 160 channels) of superconducting LC filters. The a-Si:H based resonators show a quality factor above 10.000. The latest design utilizes oppositely wound planar coil pairs which enable close packing with low magnetic cross talk. We present results on the obtained center frequency distribution within the range of 1 to 3 MHz.