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39 results on '"Ludovic Salvagnac"'

1. Layered Al/CuO Thin Films for Tunable Ignition and Actuations

Author

Ludovic Salvagnac, Sandrine Assie-Souleille, and Carole Rossi

Subjects
nanothermite, pyroMEMS, nanoenergetics, reactive thin film, Chemistry, QD1-999
Abstract

Sputter-deposited Al/CuO multilayers are used to manufacture tunable igniters and actuators, with applications in various fields such as defense, space and infrastructure safety. This paper describes the technology of deposition and the characteristics of Al/CuO multilayers, followed by some examples of the applications of these energetic layers.

Published
2020
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3. How positioning of a hard ceramic TiB2 layer in Al/CuO multilayers can regulate the overall energy release behavior

Author

Vidushi Singh, Tao Wu, Erik Hagen, Ludovic Salvagnac, Christophe Tenailleau, Alain Estéve, Michael R. Zachariah, Carole Rossi, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), University of California [Riverside] (UC Riverside), University of California (UC), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and European Project: 832889

Subjects
ternary nanothermites, Fuel Technology, Titanium diboride, General Chemical Engineering, thin-films, Organic Chemistry, Energy Engineering and Power Technology, reactive materials, [CHIM.MATE]Chemical Sciences/Material chemistry
Abstract

International audience; This study reports on a new ternary thermite comprising of Al-TiB 2 /CuO multilayers, designed to take advantage of the high ignitability of titanium (Ti), high volumetric density of boron (B), and low melting point of aluminum (Al). Results demonstrate synergetic effects leading to an energetic layer outperforming single fuel counterparts, Al/CuO or TiB 2 /CuO, while being safe to handle. The additive TiB 2 not only lowers the ignition energy by 100%, but also enhances the burn rate by more than a factor of two compared to the single fuel samples (Al/CuO and TiB 2 /CuO). The thermite reaction sequences and synergy of Ti, B and Al oxidation, examined by thermo-analytical analyses coupled with X-ray spectroscopy and high-resolution electron energy loss spectroscopy, demonstrate the strong affinity of TiB 2 to oxygen that catalyzes CuO decomposition at temperatures as low as 380 °C; followed by a dual-step TiB 2 oxidation: first to TiO, and then to TiO 2 led by a reaction limiting step of oxidizer availability. Finally, Al undergoes oxidation via liquid boron oxide as well as gaseous oxygen. This study also underlines the crucial effect of the nanolayer morphology in the thin-film technology: when Al is sputter-deposited onto the TiB 2 layer, Al ions penetrate into the grain boundaries penalizing the TiB 2 reactivity. The results demonstrate the advantages of using TiB 2 fuel to improve the ignitability and combustion performance of Al based thermite and offers some means to finely tune their energetic properties.

Published
2023

4. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

Author

Dolores Manrique Juarez, Fabrice Mathieu, Guillaume Libaude, David Bourrier, Samuel Charlot, Laurent Mazenq, Véronique Conédéra, Ludovic Salvagnac, Isabelle Dufour, Liviu Nicu, Thierry Leïchlé, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Georgia Tech Lorraine [Metz], Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), IMS-Bordeaux laboratory, and Université de Bordeaux (UB)

Subjects
[SPI]Engineering Sciences [physics]
Abstract

International audience; The present work introduces a simple and rapid process for the fabrication of MEMS resonators with electrostaticactuation and capacitive detection. Gold thermocompression is used to anchor the free-standing structure, provideelectrical connections and seal the chip to protect the structure to be released during wet etching, in a single step. Theadditional advantage of this process is the ability to simply adjust the gap of the parallel-plate capacitor through thethickness of electroplated gold. Squeeze damping is reduced by fabricating devices with increasing gaps.

Published
2023

5. High surface area TiO2 photocatalyst for H2 production through silicon micromachining

Author

Maria-Isabel Mendoza-Diaz, Aurélie Lecestre, Ludovic Salvagnac, Botayna Bounor, David Pech, Mehdi Djafari-Rouhani, Alain Esteve, Carole Rossi, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)

Subjects
DRIE, H 2 production, photocatalyst, General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, 3D microstructure, Condensed Matter Physics, TiO 2, water splitting, Surfaces, Coatings and Films, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; The development of an efficient photocatalyst capable of producing enough hydrogen for applications in everyday life under direct sunlight exposure is still challenging. In this work, a new concept for a three-dimensional microstructured photocatalyst is proposed, in which a standard deep-reactive ion etching process allows for the optimization, fabrication and subsequent deposition of TiO2 thin films by physical vapor deposition for H2 production by direct water splitting. After the development of enlarged surface microstructures, the composition and morphology of the 3D TiO2 photocatalyst were characterized by XRD, XPS, UV/Vis spectroscopy and SEM. Furthermore, the influence of the area enlargement factor on the 3D photocatalyst surface morphology and its photocatalytic performance under UV–visible irradiation was thoroughly analyzed and corroborated by electrochemical experiments. The photocatalyst exhibited an increase in H2 production by almost a factor of 12 compared to conventional planar TiO2 films. The H2 production was further improved by a factor of 4 through the introduction of Au nanoparticles grown on top of the TiO2 layer. The advantages and development of robust and hierarchical photocatalysts using microelectromechanical fabrication techniques are highlighted as potential solutions for a broad range of applications from photocatalysis, electronics, and sensing elements to 3D metamaterials.

Published
2022

6. Influence of process parameters on energetic properties of sputter-deposited Al/CuO reactive multilayers

Author

Vidushi Singh, Baptiste Julien, Ludovic Salvagnac, Sylvain Pelloquin, Teresa Hungria, Claudie Josse, Mohamed Belhaj, Carole Rossi, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre de microcaractérisation Raimond Castaing (Centre Castaing), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), ONERA / DPHY, Université de Toulouse [Toulouse], and ONERA-PRES Université de Toulouse

Subjects
sputtering deposition, Nanothermite, thin film, Mechanics of Materials, Mechanical Engineering, Al/CuO nanolaminates, General Materials Science, Bioengineering, General Chemistry, Electrical and Electronic Engineering, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

In this study, we demonstrate the effect of change of the sputtering power and the deposition pressure on the ignition and the combustion properties of Al/CuO reactive thin films. A reduced sputtering power of Al along with the deposition carried out at a higher-pressure result in a high-quality thin film showing a 200% improvement in the burn rate and a 50% drop in the ignition energy. This highlights the direct implication of the change of the process parameters on the responsivity and the reactivity of the reactive film while maintaining the Al and CuO thin-film integrity both crystallographically and chemically. Atomically resolved structural and chemical analyzes enabled us to qualitatively determine how the microstructural differences at the interface (thickness, stress level, delamination at high temperatures and intermixing) facilitate the Al and O migrations and impact the overall nano-thermite reactivity. We found that the deposition of CuO under low pressure produces well-defined and similar Al-CuO and CuO-Al interfaces with the least expected intermixing. Our investigations also showed that the magnitude of residual stress induced during the deposition plays a decisive role in influencing the overall nano-thermite reactivity. Higher is the magnitude of the tensile residual stress induced, stronger is the presence of gaseous oxygen at the interface. By contrast, high compressive interfacial stress aids in preserving the Al atoms for the main reaction while not getting expended in the interface thickening. Overall, this analysis helped in understanding the effect of change of deposition conditions on the reactivity of Al/CuO nanolaminates and several handles that may be pulled to optimize the process better by means of physical engineering of the interfaces.

Published
2022

7. Effect of Substrate–Induced Localized Stress on the Combustion Properties of Al/CuO Reactive Multilayer Films

Author

Pascal Dubreuil, Baptiste Julien, Ludovic Salvagnac, Claudie Josse, Sylvain Pelloquin, Alain Estève, Carole Rossi, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre de microcaractérisation Raimond Castaing (CMCR), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de microcaractérisation Raimond Castaing (Centre Castaing), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), and Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP)

Subjects
Materials science, Scanning electron microscope, 02 engineering and technology, Substrate (electronics), Combustion, Stress, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Stress (mechanics), Thermal conductivity, 0103 physical sciences, Multilayer, Materials Chemistry, Thin film, Composite material, Reactive thin film, Energy electron loss spectroscopy, 010302 applied physics, Combustion velocity, Metals and Alloys, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Adiabatic flame temperature, Aluminum/cupric oxide, Thermite, Nanometre, 0210 nano-technology, Plasma-enhanced chemical vapour deposition
Abstract

International audience; Reactive multilayer films are a high energy dense configuration for energetics widely studied for various pyrotechnic applications. The objective of this study is to investigate the influence of substrate-induced localized stress on the combustion properties of Al/CuO reactive thin films. Square microbumps are patterned on glass substrates to serve as embedded stressor elements. Stress-induced structural or morphological changes of the materials deposited around the microbumps are characterized using high-magnification transmission and scanning electron microscopy, providing simultaneous nanometer imaging resolution and detailed chemical analysis. The structural and chemical changes (appearance of reactant intermixing and voids) around the microbumps modify the energetic reservoir and the thermophysical properties of the film. The heat of reaction, the flame temperature and the effective thermal conductivity of the film are altered (loss of ~15%), leading to a global decrease in the material reactivity. The flame velocity of the film deposited on the substrate with microbumps drops by 9.2%, 32.4% and 48.7% for microbump heights of 0.15, 0.35 and 0.83 µm, respectively. This work helps deepen the understanding of the effect of stress-induced strain on reactive film combustion properties and provides perspectives for controlling the reaction of reactive thin films by tailoring the strain distributions within the films.

Published
2021

8. Microelectromechanical devices driven by thermosalient effects

Author

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Thierry Leïchlé, Daisuke Saya, Fabrice Mathieu, Benjamin Duployer, Durga Prasad Karothu, Liviu Nicu, Panče Naumov, New York University [Abu Dhabi], NYU System (NYU), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Georgia Tech Lorraine [Metz], Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Équipe Microsystèmes électromécaniques (LAAS-MEMS), Service Instrumentation Conception Caractérisation (LAAS-I2C), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Renatech, bourse Horizon GSAS de l'Université de New YorkCore Technology Platform (CTP)

Subjects
General Energy, General Engineering, General Physics and Astronomy, General Materials Science, General Chemistry, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Abstract

International audience; The state-of-the-art microelectromechanical systems (MEMSs) technology faces challenges in meeting the requirements of the next decade regarding improved performance, functionality, and power consumption, which can be addressed by resorting to new actuating materials. Dynamic molecular single crystals have been explored as actuating elements; however, difficulties with control over the geometry and fabrication of these materials has limited their scalability and application. Here, we present dynamic molecular crystals driven by thermosalient phase transitions as alternative materials in MEMSs technology with swift and amplified mechanical response. This work employs a thermally deposited stable polycrystalline thin film of L-pyroglutamic acid to fabricate a prototypical thermosalient organic crystal-MEMS (TS-OC-MEMS). The organic thin film undergoes a reversible and cyclable martensitic phase transition that drives the deformation. The TS-OC-MEMSs provide a reliable and scalable solution to utilize dynamic molecular crystals in robust applications and circumvent the challenges that have long stifled their application as actuating materials.

Published
2022

10. Accurate physiological monitoring using lab-on-a-chip platform for aquatic micro-organisms growth and optimized culture

Author

Pierre Temple-Boyer, S. Assié Souleille, Jérôme Launay, Eléna Bedel-Pereira, Ludovic Salvagnac, F. Sekli Belaidi, Isabelle Séguy, Marie-Charline Blatché, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Chlamydomonas reinhardtii, electrochemical sensor, 02 engineering and technology, 010402 general chemistry, Photosynthesis, 01 natural sciences, Acclimatization, law.invention, [SPI]Engineering Sciences [physics], Nutrient, Exponential growth, law, Materials Chemistry, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, Pollutant, biology, Chemistry, Metals and Alloys, Oxygen evolution, algal metabolisms, Lab-on-a-chip, 021001 nanoscience & nanotechnology, Condensed Matter Physics, biology.organism_classification, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, lab-on-chip, 13. Climate action, Environmental chemistry, green microalgae culture, 0210 nano-technology, Biosensor
Abstract

International audience; The present work was dedicated to the development of a lab-on-chip microsystem for the monitoring of microalgal photosynthetic activity. Thanks to integrated electrochemical microcells, dissolved oxygen O2 concentrations due to photosynthetic microalgal activity were measured in a continuous way and oxygen production rates of microalgae cultures were finally determined in the frame of artificial night/day cycles. Application was performed by studying the physiological metabolisms of the green microalga Chlamydomonas reinhardtii. First, the different growth dynamics of microalgal cultures were characterized, enabling the determination of the induction, "exponential growth", "declining growth rate" and stationary phases. Then, the influences of carbon-based nutrients, such as sodium bicarbonate HCO3Na and methanol CH3OH, as well as of pollutants, such as silver nitrate AgNO3, were studied, evidencing contradictory behaviors according to the competition between nutritional properties, toxicity effects and acclimation phenomena. This paves the way to the development of analysis microsystems for the understanding of microalgal metabolisms as well as for the improvement of microalgae growth processes and associated industrial production.

Published
2020

11. Integration of Gold Nanoparticles to Modulate the Ignitability of Nanothermite Films

Author

Ludovic Salvagnac, Alain Estève, Jérémy Cure, Carole Rossi, Julien Baptiste, Claudie Josse, Laboratoire pluridisciplinaire de recherche en ingénierie des systèmes, mécanique et énergétique (PRISME), Université d'Orléans (UO)-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de microcaractérisation Raimond Castaing (Centre Castaing), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), grant agreement No 832889 - PyroSafe, Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Centre de microcaractérisation Raimond Castaing (CMCR), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3)

Subjects
energetic materials, Materials science, Oxide, Nanotechnology, 02 engineering and technology, 010402 general chemistry, Thermal diffusivity, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, chemistry.chemical_compound, STEM-EELS, Al, law, Microelectronics, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thin layers, business.industry, Thermite, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Ignition system, CuO, chemistry, Colloidal gold, [PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph], 0210 nano-technology, business, Layer (electronics), thermite multilayered films
Abstract

International audience; Thermite multilayered films composed of alternating thin layers of metal/oxidizers have various uses in microelectromechanical systems (MEMS), microelectronics, and materials bonding applications. Recently, applied research especially on the microinitiator applications has engendered an urgent need to improve ignitability without changing the layering and reactant spacing that both affect the combustion characteristics. This work describes an innovative nanoengineering solution to reduce the energy barriers for mass transport, making it possible to substantially lower ignition energy of CuO/Al reactive multilayers without manipulating the fuel and oxide layers thickness. To that end, gold nanoparticles exhibiting high thermal diffusivity properties are in situ grown uniformly inside the first CuO layer to produce localized hot-spots and promote the Al + CuO reaction. The CuO/Al reactive films with embedded gold nanoparticles exhibit earlier and optimized reaction than standard ones. The effect of gold nanoparticles on the thermite ignition mechanisms and the detailed reaction pathways were characterized by a host of characterization techniques including microscopy, thermal analysis, spectroscopy, and X-ray diffractometry. Altogether, results show that the gold nanoparticles are seeding nodular defects with conical shapes provoking (under thermal stimulation) high stressed zones in the multilayer where the Al + CuO reaction is quickly triggered. The analysis of reaction products showed that the multilayers break the unreacted Al droplets early allowing them to burn into the environment. The results provide a behavioral baseline for future studies of interface engineering to tune internal stress-induced reaction in reactive thin films at large.

Published
2020

12. AL/CUO SPUTTERED NANOTHERMITES AS NEW ENERGETIC THIN FILMS FOR TUNABLE IGNITION AND ACTUATIONS

Author

Andréa Nicollet, Florent Sevely, Séverine Vivies, Ludovic Salvagnac, carole Rossi, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
ComputerApplications_COMPUTERSINOTHERSYSTEMS, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Abstract

International audience; Sputter-deposited Al/CuO multilayers are used to manufacture tunable igniters and actuators with applications in various fields of application such as defense, space and infrastructure safety. This paper describes the technology of deposition and characteristics of Al/CuO multilayers followed by some examples of applications of these energetic layers.

Published
2019

13. Dispositif de Cellule Solaire Hydrogène intégrant des Matériaux dits Triptyques

Author

Jérémy Cure, Kévin COCQ, Andréa Nicollet, Sarah Bailly, Fabien Mesnilgrente, Sandrine Assié-Souleille, Séverine Vivies, Ludovic Salvagnac, Véronique Conédéra, Adnen Mlayah, Pierre Alphonse, Valérie Maraval, Rémi Chauvin, Alain Estève, Carole Rossi, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Laboratoire de chimie de coordination (LCC), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie de Toulouse (ICT-FR 2599), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Nano-Optique et Nanomatériaux pour l'optique (CEMES-NeO), Centre d'élaboration de matériaux et d'études structurales (CEMES), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie de Toulouse (ICT-FR 2599), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Procédés, Matériaux et Energie Solaire (PROMES), Université de Perpignan Via Domitia (UPVD)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut de Chimie de Toulouse (ICT), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse)

Subjects
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [CHIM]Chemical Sciences, [CHIM.MATE]Chemical Sciences/Material chemistry, [CHIM.CATA]Chemical Sciences/Catalysis
Abstract

National audience; La photocatalyse, à distinguer de la photo-électro-catalyse, permet de produire de l'hydrogène par photo-réduction de l'eau, tout en s'affranchissant de l'utilisation d'électrodes, d'un courant électrique, ou encore de l'utilisation d'un bain électrochimique. [1] Dans ce cadre, nous avons développé un dispositif de panneau solaire hydrogène (Figure 1a) assurant la transformation de l'eau liquide contenue dans le panneau en hydrogène sans la nécessité d'être raccordé au réseau électrique. [2-3] Le coeur actif du panneau hydrogène est constitué d'un matériau hybride photocatalytique innovant, qualifié de matériau triptyque du fait des trois composants le constituant (Figure 1b) : (1) un film mince semiconducteur de TiO 2 déposé par PVD ; (2) des nanoparticules d'Au ou Ag déposées par un procédé de photo-dépôt; [4] (3) Un film mince photosensible d'une macromolécule de type carbo-benzène (Cbz), présentant des propriétés uniques de conductivité sur molécule unique ( ~100 nS), [5] et d'absorption dans le visible ( = 131 000 L mol-1 cm-1) à max = 493 nm. [6] Nous observons une synergie de ~33% pour le matériau triptyque TiO 2 /Ag/Cbz par rapport à son analogue diptyque TiO 2 /Ag et démontrons qu'un lien entre le métal et le semiconducteur est d'importance primordiale pour exalter les propriétés photocatalytiques dans le cadre de films minces par analogie avec les nanopoudres. [7]

Published
2019

14. Towards integrated multi-sensor platform using dual electrochemical and optical detection for on-site pollutant detection in water

Author

Pierre Temple-Boyer, F. Sekli Belaidi, Jean-Louis Heully, Fabienne Alary, Eléna Bedel-Pereira, Jérôme Launay, Isabelle Séguy, L. Farouil, Ludovic Salvagnac, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Photochimie théorique et computationnelle (LCPQ) (PTC), Laboratoire de Chimie et Physique Quantiques (LCPQ), Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe MICrosystèmes d'Analyse ( LAAS-MICA ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP ), Équipe Matériaux et Procédés pour la Nanoélectronique ( LAAS-MPN ), Laboratoire de Chimie et Physique Quantiques ( LCPQ ), Université Toulouse III - Paul Sabatier ( UPS ), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique ( CNRS ), Service Techniques et Équipements Appliqués à la Microélectronique ( LAAS-TEAM ), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), and Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)

Subjects
Environmental analysis, Chlorella vulgaris, Biomedical Engineering, Biophysics, Photodetector, 02 engineering and technology, Biosensing Techniques, Photosynthesis, 01 natural sciences, Fluorescence, Lab-On-A-Chip Devices, [ SPI ] Engineering Sciences [physics], Electrochemistry, Microalgae, Sample preparation, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Pollutant, Herbicides, 010401 analytical chemistry, Oxygen evolution, General Medicine, Electrochemical Techniques, Equipment Design, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Oxygen, Diuron, Environmental science, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Biological system, Chlamydomonas reinhardtii, Water Pollutants, Chemical, Biotechnology
Abstract

International audience; The present work is dedicated to the development of a lab-on-chip (LOC) device for water toxicity environmental analysis and more especially herbicide detection. The final goal is focused on the functional integration of three-electrode electrochemical microcells (ElecCell) and organic photodetectors (OPD) in order to perform simultaneously electrochemical and optical detection in the frame of algal metabolism monitoring. Considering three different algae, i.e. Chlamydomonas reinhardtii, Pseudokirchneriella subcapitata and Chlorella vulgaris while dealing with photosynthesis, the multi-microsensor platform enables to measure the variations of microalgae fluorescence as well as oxygen production. It is applied to study the Diuron herbicide influences on algal metabolism, evidencing fluorescence enhancement and oxygen production inhibition for concentrations as low as few tens of nanomoles. These results are performed with unconcentrated and six time concentrated algae solutions respectively, to estimate the ability of this dual-sensor system to conduct measurements without any sample preparation. Thus, according to the obtained results, the proposed LOC device is fully adapted to the electrochemical/optical dual detection for on-site pollutant analysis, i.e. without sample pre-treatment. 2 Keywords Compact fluidic platform, LED excitation, electrochemical detection, organic photo-detection.algal metabolism, herbicide detection.

Published
2019

15. A Beehive Inspired Hydrogen Photocatalytic Device Integrating a Carbo‐Benzene Triptych Material for Efficient Solar Photo‐Reduction of Seawater

Author

Teresa Hungria, Kévin Cocq, Carole Rossi, Andréa Nicollet, Sandrine Assié-Souleille, Valérie Maraval, Séverine Vivies, Kui Tan, Manuel Quevedo-Lopez, Jérémy Cure, Ludovic Salvagnac, Remi Chauvin, Alain Estève, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Laboratoire de chimie de coordination (LCC), Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), University of Texas at Dallas [Richardson] (UT Dallas), Centre de microcaractérisation Raimond Castaing (Centre Castaing), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Service Instrumentation Conception Caractérisation (LAAS-I2C), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Région Occitanie (project MHytyque), LAAS-CNRS, European Commission and Region Occitanie for their FEDER support (THERMIE grant), European Research Council / Université Fédérale de Toulouse : PyroSafe project (grant number 832889), U.S. Department of Energy, Office of Science, Basic Energy Sciences (DE-SC0019902), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie de Toulouse (ICT-FR 2599), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Centre de microcaractérisation Raimond Castaing (CMCR), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Exothermic reaction, Copper oxide, Materials science, Hydrogen, photocatalytic device, hydrogen production, chemistry.chemical_element, 02 engineering and technology, 010402 general chemistry, water splitting, 01 natural sciences, 7. Clean energy, Chemical reaction, chemistry.chemical_compound, Coordination complex, carbo- benzene dye, Airbag, [CHIM]Chemical Sciences, Chemical decomposition, General Environmental Science, Hydrogen production, titanium dioxide film, Renewable Energy, Sustainability and the Environment, Non-toxic gas generator, Thermite, [CHIM.CATA]Chemical Sciences/Catalysis, [CHIM.MATE]Chemical Sciences/Material chemistry, Energetic materials, 021001 nanoscience & nanotechnology, 0104 chemical sciences, chemistry, Chemical engineering, 13. Climate action, Flame propagation, triptych system, Water splitting, 0210 nano-technology, gold nanoparticle
Abstract

International audience; To reduce the size inconvenience of airbag systems employed in human-body protection devices while maintaining comparable gas generation performance, a new family of gas-generating energetic composites are proposed mixing Al/CuO nanothermite with copper complex (Cu(NH 3) 4 (NO 3) 2) known for its propensity to generate gases (0.03 mol/g) such as , , through exothermic chemical decomposition (300 J/g). The aluminum (Al)/Copper oxide (CuO) couple, known as the most widely studied nanomaterial for thermite reactions, releasing a high energy, mostly heat, through chemical reaction, is employed as a source of heat to trigger and sustain the decomposition of Cu(NH 3) 4 (NO 3) 2 complex. This work permits developing a new family of gas-generating energetic composites that takes advantage of specific chemical and thermal properties of both materials. We demonstrate its capability to tune the pressurization rate, burn rate and pressure peak by varying the Al/CuO over Cu(NH 3)(NO 2) 2 mass ratio. The peak pressure of Cu(NH 3) 4 (NO 3) 2 /Al/CuO energetic composites reaches 12 MPa/g.cm 3 in a close volume, which is 3.3 higher than that of traditional Al/CuO nanothermite. They achieve much longer high-pressure duration (~ 30 ms). They also exhibit very intense burning with velocity reaching hundreds of m/s in opening burning experiments. These new materials appear very promising for green gas generation.

Published
2020

16. Lateral Porous Silicon Interferometric Transducer for Sensing Applications

Author

Adrian Laborde, Thierry Leichle, Yingning He, Xavier Dollat, Ludovic Salvagnac, Douglas Silva de Vasconcellos, David Bourrier, Eric Imbernon, Véronique Bardinal, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and ANR-17-CE09-0024,LabPSi,Membranes de silicium poreux latérales comme solution générique de préparation d'échantillon et biodétection pour les laboratoires sur puce(2017)

Subjects
Microscope, Materials science, business.industry, 010401 analytical chemistry, 02 engineering and technology, 021001 nanoscience & nanotechnology, Porous silicon, 01 natural sciences, Signal, 0104 chemical sciences, law.invention, Interferometry, [SPI]Engineering Sciences [physics], Transducer, Interference (communication), law, Optoelectronics, 0210 nano-technology, business, Biosensor, Refractive index
Abstract

International audience; In this work, we demonstrate the transducing ability of lateral porous silicon membranes (LPSi) using optical interferometry. To this aim, we carry out Fourier-transform infrared spectroscopy measurements using a microscope equipped with an appropriate objective in order to overcome the difficulty to obtain interference signal from LPSi membranes with small dimensions. Reflectance spectra are recorded while filling the membrane with various solvents and their analysis provide estimations of the effective optical thicknesses and the resulting index of refraction of the fillers in the NIR range. The results show that the various solvents can appropriately be identified and discriminated through the derived refractive indices, thus providing a proof-of-concept of the LPSi interferometric transducer.

Published
2018

17. Fast circuit breaker based on integration of Al/CuO nanothermites

Author

Vincent Baijot, Carole Rossi, Andréa Nicollet, Alain Estève, Ludovic Salvagnac, Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces (LAAS-NEO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-15-LCV2-0002,IMPYACT,Microsystèmes innovants pour des applications pyrotechniques à technologies combinées(2015), European Project: FEDER, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, Circuit Breaker, pyroMEMS, Al/CuO nanothermites, 02 engineering and technology, 7. Clean energy, 01 natural sciences, Automotive engineering, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, law, 0103 physical sciences, Electronics, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, Circuit breaker, Electronic circuit, 010304 chemical physics, Metals and Alloys, Response time, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Chip, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Overcurrent, Ignition system, 0210 nano-technology, Short circuit
Abstract

International audience; Pyroswitches and circuit breakers play an important safety role in electrical systems. A miniature one-shot circuit breaker based on the violent reaction of a nanothermite is presented for safety application as protection against overcurrent, external perturbation and short circuit of a broad range of equipment and systems. This device consists of two circuits assembled together to define a cavity. An ignition chip is placed into this cavity and ignites, within less than 100 µs, a few milligrams of nanothermites powder. The resulting violent reaction interrupts a thick copper connection within 1 ms. After the presentation of the device design, fabrication and assembly, we demonstrate the good operation and reproducibility of the device (100 % of success rate) with a response time much lower than that of classical mechanical circuit breakers, which are slow. The response time can be tuned from 1.02 ms to 0.57 ms just by adjusting the mass of nanothermites from 5.59 to 13.24 mg, i.e., adjusting the volumetric solid loadings from 5.6 to 19 %. The nanothermite-based circuit breaker presented in this paper offers unprecedented advantages: it is built using only safe substances and is based on a low-2 cost mass fabrication process that is compatible with electronics. The proposed concept is generic and can be applied to a large number of applications (electrical storage, aerospace manufacturing, human safety, demolition parachute opening, road vehicles, battery powered machines…).

Published
2018

18. Lab-on-chip with microalgal based biosensor for water assessment

Author

Ludovic Salvagnac, Pierre Temple-Boyer, Eléna Bedel-Pereira, Jérôme Launay, F. Sekli Belaidi, Véronique Bardinal, Aliki Tsopela, Vincent Ventalon, Isabelle Séguy, Philippe Juneau, Ricardo Izquierdo, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université du Québec à Montréal = University of Québec in Montréal (UQAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, [SDE.IE]Environmental Sciences/Environmental Engineering, Microfluidics, Nanotechnology, Electrochemical detection, Lab-on-a-chip, 01 natural sciences, 6. Clean water, law.invention, 010309 optics, law, 0103 physical sciences, OLED, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Biosensor
Abstract

International audience; The integration of optical source with microfluidics leads to promising low-cost, rapid and sensitive lab-on-a-chip analytical systems. This work deals with the optimization of the electrochemical sensors and the dedicated organic light-emitting diode (OLED) for the monitoring of herbicides though algal photosynthetic activities disturbances.. Various blue OLED are considered in order to achieve highest sensitivity in O 2 electrochemical detection during micro-algae photosynthesis.

Published
2016

19. Organic photodiode for detection of herbicides in water using microalgal photosynthesis

Author

Pierre Temple-Boyer, Ricardo Izquierdo, Eléna Bedel-Pereira, Isabelle Séguy, Aliki Tsopela, Philippe Juneau, V. Ventalon, F. Sekli, Véronique Bardinal, Ludovic Salvagnac, Jérôme Launay, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université du Québec à Montréal = University of Québec in Montréal (UQAM), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Fullerene, Materials science, 010401 analytical chemistry, Analytical chemistry, 02 engineering and technology, Lab-on-a-chip, 021001 nanoscience & nanotechnology, Photosynthesis, 01 natural sciences, Acceptor, 6. Clean water, 0104 chemical sciences, law.invention, Photodiode, [SPI]Engineering Sciences [physics], 13. Climate action, law, [SDE]Environmental Sciences, 0210 nano-technology, Luminescence, Diode, Dark current
Abstract

International audience; The growing interest for monitoring the quality of water has triggered the need of fast, portable and cheap detection systems. To answer this problematic, we developed a lab on a chip for herbicide detection based on micro algal photosynthesis. A blue organic light-emitting diode is used as the excitation source while the resulting algae luminescence is monitored using an organic photodiode (OPD). During the OPD optimization process, a correlation between fullerene acceptor concentration and dark current was supposed. Using a blend of DTS(PTTh2)2:PC60BM without interfacial layers result in dark current lower than 10-6 mA/cm2 at-2 V and EQE higher than 50% in the region of interest.

Published
2016

20. A new route for the integration of a graphene/diazonium/PEDOTelectrode towards antioxidant biomarker detection

Author

David Evrard, Pierre Temple-Boyer, Ludovic Salvagnac, Marc Monthioux, Véronique Conédéra, Brigitte Caussat, Laure Noé, Pierre Gros, Nicolas Massonnet, Hugues Vergnes, Loïc Assaud, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Laboratoire de Génie Chimique (LGC), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre d'élaboration de matériaux et d'études structurales (CEMES), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Laboratoire de génie chimique [ancien site de Basso-Cambo] (LGC), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie de Toulouse (ICT-FR 2599), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Université Toulouse - Jean Jaurès - UT2J (FRANCE), Université Toulouse 1 Capitole - UT1 (FRANCE), and Institut National Polytechnique de Toulouse - INPT (FRANCE)

Subjects
Cyclic voltammetry, Silicon, General Chemical Engineering, Inorganic chemistry, chemistry.chemical_element, 02 engineering and technology, Substrate (electronics), 010402 general chemistry, Diazonium, 01 natural sciences, 7. Clean energy, Analytical Chemistry, law.invention, [CHIM.GENI]Chemical Sciences/Chemical engineering, PEDOT:PSS, law, Electrochemistry, Génie chimique, [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Génie des procédés, PEDOT, Graphene, Differential pulse voltammetry, 021001 nanoscience & nanotechnology, CVD, 0104 chemical sciences, chemistry, Electrode, Ascorbic acid, 0210 nano-technology, Platinum, Uric acid
Abstract

International audience; A new route for the integration of a graphene-based electrode on a silicon substrate was studied for the simultaneous detection and assay of ascorbic (AA) and uric (UA) acids. Graphene was synthesized by catalytic chemical vapour deposition (CVD) from methane as carbon feedstock onto both platinum foils and supported thin platinum films on silicon wafers which were used as catalyst. Graphene was characterized by Raman spectroscopy and electron microscopies. The resulting electrodes were further functionalized by successive electrodeposition of a stabilizing diazoniumlayer and a poly(3,4-ethylenedioxythiophene) (PEDOT) conductive film. AA and UA determination on such modified electrodewas performed either by cyclic voltammetry or by differential pulse voltammetry. In the latter case, the selectivity was about 380 mV and the sensitivity was 2.40 and 2.75 μA cm−2 μM−1 for AA and UA, respectively. The present study shows that monolayer graphene allows a greater sensitivity of AA and UA detection than that observed with modified glassy carbon electrode.

Published
2016

21. Mixed diazonium/PEDOT-functionalized graphene electrode for antioxidant biomarkers detection: proof-of-concept for integration on silicon substrate

Author

Loïc Assaud, Nicolas Massonnet, David Evrard, Hugues Vergnes, Ludovic Salvagnac, Véronique Conédéra, Laure Noé, Marc Monthioux, Pierre Temple-Boyer, Brigitte Caussat, Pierre GROS, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Laboratoire de Génie Chimique (LGC), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Centre d'élaboration de matériaux et d'études structurales (CEMES), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie de Toulouse (ICT-FR 2599), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Laboratoire de génie chimique [ancien site de Basso-Cambo] (LGC), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[CHIM.MATE]Chemical Sciences/Material chemistry
Abstract

International audience; During the last two decades, a growing number of research works has been devoted to oxidative stress, which represents a major problem with respect to healthiness, as it is known to be involved in ageing processes and has been suggested to be one of the potential causes for cataract, cancers, cardiovascular and degenerative diseases (Parkinson, Alzheimer) and even male infertility [1]. Among the low molecular weight antioxidant species, ascorbic (AA) and uric (UA) acids are of particular interest since they are present in most biological fluids and thus may be considered as biochemical markers in a lot of pathologies related to oxidative stress (preeclampsia disease, neonatal hypoxia, coronary heart diseases…) [2]. Recently, we have reported on a sensor based on a gold electrode functionalized by an electrogenerated polymer, namely poly[3,4-ethylenedioxythiophene] (PEDOT), for the simultaneous assay of UA and AA [3-5]. This sensor exhibited very good analytical performances including selectivity. We further improved the sensor by using a glassy carbon (GC) electrode functionalized by successive electrodeposition of 4-thiophenylbenzene diazonium (TBD) and (PEDOT) [6]. The use of the TBD layer induced an enhancement of the sensitivity, a lower detection limit for AA and an improved lifetime of the sensor. However, GC is hardly compatible with the silicon technologies required for a cost-effective mass production of integrated microelectrodes and the associated electrochemical microcells. In the present work, we have developed the proof-of-concept of a mixed TBD/ PEDOT functionalized graphene electrode integrated on a silicon substrate for the simultaneous detection and assay of UA and AA. The catalytic chemical vapour deposition (CVD) synthesis of graphene on either platinum (Pt) foils or thin films will be detailed, together with its electrochemical functionalization by both TBD salt grafting and EDOT electropolymerization. The characterization of the resulting modified electrodes by Raman spectroscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM) and cyclic voltammetry (CV) will be presented. The analytical performances obtained for AA and UA detection and quantification will be also discussed, and a focus will be given to graphene advantages over GC in terms of selectivity and sensitivity. [1] A.H. Colagar, E.T. Marzony, J. Clin.

Published
2016

23. Management of the electrical injection uniformity in broad-area top-emitting VCSELs

Author

Jean-Baptiste Doucet, Ludovic Salvagnac, Véronique Bardinal, M. Condé, E. Havard, Thierry Camps, Guilhem Almuneau, Sébastien Pinaud, and Chantal Fontaine

Subjects
Physics, Optics, business.industry, Optical physics, Nonlinear optics, Plasma, business, Layer (electronics), Atomic and Molecular Physics, and Optics, Power (physics)
Abstract

The electrical properties of broad-area 850 nm top emitting VCSELs have been investigated in order to improve carrier injection uniformity in their active zone. First, we have demonstrated using an electrical simulation tool that a multi-point localized injection design associated with a spreading layer at the top of the device (ITO) can lead to a significant improvement of carrier injection and on its spatial distribution. Secondly, the electrical contrast achievable by applying this method with localized etchings has been experimentally measured. Finally, stripe-shaped devices with output power up to 50 mW in a continuous-wave operation at room temperature have been demonstrated.

Published
2010

24. Integration of a MEMS based safe arm and fire device

Author

Véronique Conédéra, Samuel Charlot, Xavier Dollat, Ludovic Salvagnac, Carole Rossi, Fabrice Mathieu, Helene Pezous, and Marjorie Sanchez

Subjects
Microelectromechanical systems, Engineering drawing, Engineering, business.industry, Metals and Alloys, Condensed Matter Physics, Chip, Automotive engineering, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Ignition system, law, Electrical and Electronic Engineering, business, Instrumentation, Robotic arm
Abstract

The paper describes a new architecture of a Safe Arm and Fire device (SAF) that could constitute a real breakthrough for safe miniature fuzing device. On the one hand, it takes all the functions embodied in a conventional mechanical arm and fire system and integrates them in a single 1 cm 3 package made of assembly of different parts. On the other hand, for the first time, it combines a mechanical arming unit with electrical safety functionalities on the same silicon initiator's chip. It respects the STANAG 4187 norm (1 A/W during 5 min of not fire) and requires only 635 mW for ignition. The paper presents the design, fabrication and test of one miniature SAF device integrating a micropyrotechnical actuation.

Published
2010

25. High aspect ratio GaAs nanowires made by ICP-RIE etching using Cl2/N2 chemistry

Author

Laurent Jalabert, Pascal Dubreuil, Franck Carcenac, Hugues Granier, Ludovic Salvagnac, Chantal Fontaine, and Sébastien Pinaud

Subjects
Materials science, Plasma etching, business.industry, Nanowire, Analytical chemistry, Substrate (electronics), Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Etching (microfabrication), Miniaturization, Optoelectronics, Electrical and Electronic Engineering, Inductively coupled plasma, Reactive-ion etching, business, Electron-beam lithography
Abstract

We report an experimental study of GaAs etching by ICP-RIE based on Cl2:N2 chemistry. The influence of the RF source power, the chlorine dilution, the RF platen power, and the process pressure at several substrate temperatures are investigated. An optimized process is proposed to get routinely GaAs nanowires of 1µm high and about 30nm in diameter with a full top-down approach combining electron beam lithography and Ni lift-off steps.

Published
2008

26. Surface micromachining technology with two SU-8 structural layers and sol–gel, SU-8 or SiO2/sol–gel sacrificial layers

Author

Véronique Conédéra, Norbert Fabre, Frederic Zamkotsian, Ludovic Salvagnac, and Henri Camon

Subjects
Surface micromachining, chemistry.chemical_compound, Materials science, Structural material, chemistry, Mechanics of Materials, Silicon dioxide, Mechanical Engineering, Electrical and Electronic Engineering, Composite material, Layer (electronics), Electronic, Optical and Magnetic Materials, Sol-gel
Abstract

The development reported herein is that of a surface micromachining technology using two SU-8 layers as a structural material. Three different processes are presented and discussed: the first process makes use of a sol–gel as the sacrificial layer; the second process utilizes the SU-8 itself as the sacrificial layer; the third process utilizes silicon dioxide as the first sacrificial layer and the sol–gel as the second sacrificial layer. These three processes are adapted for one structural layer structure. With a two-layer structure and when release is long, the third process is more adapted.

Published
2007

27. Development of a lab-on-chip electrochemical biosensor for water quality analysis based on microalgal photosynthesis

Author

Adrian Laborde, Isabelle Séguy, Jérôme Launay, Pierre Temple-Boyer, Eléna Bedel-Pereira, Vincent Ventalon, Aliki Tsopela, Ricardo Izquierdo, Philippe Juneau, Ludovic Salvagnac, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université du Québec à Montréal = University of Québec in Montréal (UQAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, algal metabolism, Absorption spectroscopy, Biomedical Engineering, Biophysics, Analytical chemistry, electrochemical sensor, 02 engineering and technology, Biosensing Techniques, Photosynthesis, Electrochemistry, 01 natural sciences, law.invention, law, Herbicide detection, Lab-On-A-Chip Devices, Water Quality, ultramicroelectrodes, OLED, Microalgae, Detection limit, OLED 2, business.industry, [SDE.IE]Environmental Sciences/Environmental Engineering, Herbicides, 010401 analytical chemistry, Substrate (chemistry), General Medicine, Electrochemical Techniques, Lab-on-a-chip, 021001 nanoscience & nanotechnology, 6. Clean water, 0104 chemical sciences, Electrochemical gas sensor, Diuron, Optoelectronics, 0210 nano-technology, business, fluidic platform, Water Pollutants, Chemical, Biotechnology
Abstract

International audience; The present work was dedicated to the development of a lab-on-chip device for water toxicity analysis and more particularly herbicide detection in water. It consists in a portable system for on-site detection composed of three-electrode electrochemical microcells, integrated on a fluidic platform constructed on a glass substrate.The final goal is to yield a system that gives the possibility of conducting double, complementary detection: electrochemical and optical and therefore all materials used for the fabrication of the lab-on-chip platform were selected in order to obtain a device compatible with optical technology. The basic detection principle consisted in electrochemically monitoring disturbances in metabolic photosynthetic activitiesof algae induced by the presence of Diuron herbicide. Algal response, evaluated through oxygen (O 2) monitoring through photosynthesis was different for each herbicide concentration in the examined sample. A concentration-dependent inhibition effect of the herbicide on photosynthesis was demonstrated. Herbicide detection was achieved through a range (blank – 1µM Diuron herbicide solution) covering the limit of maximum acceptable concentration imposed by Canadian government (0.64 µM), using a halogen white light source for the stimulation of algal photosynthetic apparatus.Superior sensitivity results (limit of detection of around 0.1 µM) were obtained with an organic light emitting diode (OLED), having an emission spectrum adapted to algal absorption spectrum and assembled on the final system.

Published
2015

28. Light emitting devices and integrated electrochemical sensors on lab-on-chip for toxicity bioassays based on algal physiology

Author

Adrian Laborde, Pierre Temple-Boyer, Philippe Juneau, Isabelle Séguy, Jérôme Launay, Ricardo Izquierdo, Ludovic Salvagnac, Aliki Tsopela, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université du Québec à Montréal = University of Québec in Montréal (UQAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, O2-related algal metabolism, Nanotechnology, 02 engineering and technology, Electrochemistry, 01 natural sciences, law.invention, law, White light, OLED, Bioassay, water toxicity analysis, Lab-on-chip, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, [SDE.IE]Environmental Sciences/Environmental Engineering, 010401 analytical chemistry, Oxygen evolution, herbicide detection, Lab-on-a-chip, 021001 nanoscience & nanotechnology, 0104 chemical sciences, microelectrode, Microelectrode, 0210 nano-technology
Abstract

International audience; In the frame of water toxicity analysis, a portable, glass-based, lab-on-chip was developed, integrating three-electrode electrochemical microsensors and organic light-emitting diodes (OLED). The basic detection principle consists in monitoring electrochemically O2-related, algal metabolism in presence of herbicides. Thus, aiming on Diuron herbicide detection, a concentration-dependent inhibition effect on photosynthetic oxygen production rate was evidenced in the [0-1 M] range. Finally, OLED-based integrated system demonstrates higher detection characteristics than those using external white light source (sensitivity: 0.48 versus 0.26 nA/s/M) and is highly promising for further integration of optical and electrochemical sensors enabling double complementary detection.

Published
2015

29. Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors

Author

Pierre Temple-Boyer, Ludovic Salvagnac, Ahmet Lale, Jérôme Launay, Aurélie Civélas, Aliki Tsopela, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] (LAAS), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UPS), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique [Toulouse] (INP)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UPS), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique [Toulouse] (INP)

Subjects
Fabrication, Materials science, Silicon, [SDV]Life Sciences [q-bio], Potentiometric titration, Inorganic chemistry, chemistry.chemical_element, microelectrodes, Tungsten, Electrochemistry, physical vapour deposition PVD, tungsten oxide, [SPI]Engineering Sciences [physics], Materials Chemistry, [CHIM]Chemical Sciences, Electrical and Electronic Engineering, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, physical vapour deposition, pH measurement, Metals and Alloys, tungsten oxide WO3, Sputter deposition, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Microelectrode, tungsten W thin films, chemistry, thin films, tungsten W, potentiometric microdevices, iridium oxide IrO2
Abstract

International audience; (W/WO3 –Ag/AgCl) and (Pt/IrO2 – Ag/AgCl) potentiometric microdevices were developed for pH measurement in liquid phase using a (Pt – Pt – Ag/AgCl) electrochemical microcells (ElecCell) silicon-based technological platform. A special emphasis was placed on the mass fabrication of the W/WO3 microelectrode using sputtering deposition and oxygen plasma processes. Compared to the Pt/IrO2-based one, the W/WO3-based microelectrodes showed lower performances regarding the pH measurement. Nevertheless, since W/WO3 microelectrodes yielded quasi-Nernstian sensitivity (around 55 mV/pH) in the [2-12] pH range, tungsten oxide WO3 can be considered as a good candidate for the mass fabrication of pH microsensors using silicon technologies, even if important temporal drift (at least 6 millivolts per hour) and high hysteresis (around 50 mV) were also evidenced.

Published
2015

30. Study of Langmuir and Langmuir−Blodgett Films of Odorant-Binding Protein/Amphiphile for Odorant Biosensors

Author

Chaker Tlili, Pierre Temple-Boyer, Jean-Claude Pernollet, Loïc Briand, Benoit Torbiero, Yanxia Hou, Abdelhamid Errachid, Aidong Zhang, Claude Martelet, Gabriel Gomila, Ludovic Salvagnac, Nicole Jaffrezic-Renault, Josep Samitier, Chimie pour la Reconnaissance et l’Etude d’Assemblages Biologiques (CREAB), SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé (SYMMES), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Sciences Analytiques (SA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Centre de génie électrique de Lyon (CEGELY), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École Centrale de Lyon (ECL), Université de Lyon, Key Lab Pesticides & Chem Biol, Central China Normal University, Unité de Recherches de Biochimie et Structure des Protéines (INRA UR 477), Institut National de la Recherche Agronomique (INRA), lab. Nanobioenginyeria, Institut de Bioenginyeria de Catalunya (IBEC), Lab NanoBioEngn, Universitat de Barcelona (UB), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Équipe MICrosystèmes d'Analyse (LAAS-MICA), École Centrale de Lyon (ECL), Central China Normal University [Wuhan, China], Neurobiologie de l'Olfaction et de la Prise Alimentaire (NOPA), Laboratory of NanoBioEngineering, Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Chimie pour la Reconnaissance et l’Etude d’Assemblages Biologiques [?-2019] (CREAB [?-2019]), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Centre National de la Recherche Scientifique (CNRS), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), and Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse)

Subjects
Langmuir, Time Factors, ADSORPTION, Analytical chemistry, PROTEIN, GOLD SURFACES, Biosensing Techniques, 02 engineering and technology, Microscopy, Atomic Force, Receptors, Odorant, 01 natural sciences, Langmuir–Blodgett film, chemistry.chemical_compound, Pentanols, SELF-ASSEMBLED MONOLAYERS, Biomimetic Materials, Electric Impedance, Electrochemistry, General Materials Science, ComputingMilieux_MISCELLANEOUS, Spectroscopy, Chemistry, ODORANT BIOSENSORS, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, [SDV.BBM.BC]Life Sciences [q-bio]/Biochemistry, Molecular Biology/Biomolecules [q-bio.BM], Dielectric spectroscopy, INTERFACE, OCTADECYLAMINE, 0210 nano-technology, GLUCOSE-OXIDASE, Surface Properties, 010402 general chemistry, Monolayer, Amphiphile, [CHIM]Chemical Sciences, Sulfhydryl Compounds, ODORANT BINDING PROTEIN, ATOMIC-FORCE MICROSCOPY, [SPI.NRJ]Engineering Sciences [physics]/Electric power, technology, industry, and agriculture, Self-assembled monolayer, Buffer solution, ACID LB FILMS, Nanostructures, 0104 chemical sciences, Chemical engineering, Gold, Self-assembly, SURFACE PRESSURE
Abstract

International audience; To make ultrathin films for the fabrication of artificial olfactory systems, odorant biosensors, we have investigated mixed Langmuir and Langmuir-Blodgett films of odorant-binding protein/amphiphile. Under optimized experimental conditions (phosphate buffer solution, pH 7.5, OBP-1F concentration of 4 mg L-1, target pressure 35 mN m(-1)), the mixed monolayer at the air/water interface is very stable and has been efficiently transferred onto gold supports, which were previously functionalized by self-assembled monolayers (SAMs) with 1-octadecanethiol (ODT). Atomic force microscopy and electrochemical impedance spectroscopy were used to characterize mixed Langmuir-Blodgett (LB) films before and after contact with a specific odorant molecule, isoamyl acetate. AFM phase images show a higher contrast after contact with the odorant molecule due to the new structure of the OBP-1F/ODA LB film. Non-Faradaic electrochemical spectroscopy (EIS) is used to quantify the effect of the odorant based on the electrical properties of the OBP-1F/ODA LB film, as its resistance strongly decreases from 1.18 M Omega (before contact) to 25 k Omega (after contact).

Published
2005

31. Magnetron Sputtered Al-CuO Nanolaminates: Effect of Stoichiometry and Layers Thickness on Energy Release and Burning Rate

Author

Pierre Alphonse, Carole Rossi, Ludovic Salvagnac, Christophe Tenailleau, Mehdi Bahrami, Véronique Conédéra, Guillaume Taton, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université Toulouse III - Paul Sabatier (UT3), and Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP)

Subjects
Materials science, General Chemical Engineering, Bilayer, Matériaux, Nanoenergetics, Analytical chemistry, Al/CuO, General Chemistry, Calorimetry, Partial pressure, Nanothermites, [CHIM.MATE]Chemical Sciences/Material chemistry, Reactive material, 7. Clean energy, [SPI.MAT]Engineering Sciences [physics]/Materials, X-ray photoelectron spectroscopy, Sputtering, Cavity magnetron, High-resolution transmission electron microscopy, Stoichiometry
Abstract

International audience; This paper reports on the reaction characteristic of Al/CuO reactive nanolaminates for different stoichiometries and bilayer thicknesses. Al/CuO nanolaminates are deposited by a DC reactive magnetron sputtering method. Pure Al and Cu targets are used in argon-oxygen gas mixture plasma and an oxygen partial pressure of 0.13 Pa. This process produces low stress multilayered materials, each layer being in the range of 25 nanometers to one micrometer. Their structural, morphological, and chemical properties were characterized by high resolution transmission electron microscopy (HR-TEM), X-ray Diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The heat of reaction and onset temperature were measured using differential scanning calorimetry (DSC). Under stoichiometric conditions, the reactivity quickly increases with the decrease of Al/CuO bilayer thickness. The burning rate is 2 m s−1 for bilayer thickness of 1.5 μm and reaches 80 m s−1 for bilayer thickness of 150 nm. At constant heating rate, the Al/CuO heat of reaction depends on both stoichiometry and bilayer thickness. When the bilayer thickness exceeds 300 nm, the heat of reaction decreases; it seems that only the region near the interface reacts. The best nanolaminate configuration was obtained for Al/CuO bilayer thickness of 150 nm.

Published
2014

32. AZO electrodes deposited by atomic layer deposition for OLED fabrication

Author

Marc Ternisien, Thierry Camps, Jean Baptiste Doucet, Benoit Dugrenil, Y.-S. Chiu, Yu-Cheng Lin, Eléna Bedel-Pereira, Ludovic Salvagnac, Véronique Bardinal, Isabelle Séguy, Ching-Ting Lee, Hsin Ying Lee, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), National Cheng Kung University (NCKU), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Lumière et Matière (LAPLACE-LM), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Materials science, 02 engineering and technology, 7. Clean energy, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Atomic layer deposition, Organic Light Emitting Diodes, Transparent Conductive Oxide, 0103 physical sciences, aluminium-doped Zinc Oxide, OLED, Indium Tin Oxide, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Sheet resistance, Transparent conducting film, 010302 applied physics, Organic electronics, business.industry, 021001 nanoscience & nanotechnology, Indium tin oxide, Anode, [SPI.TRON]Engineering Sciences [physics]/Electronics, Atomic Layer Deposition, Electrode, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business
Abstract

International audience; In this work, we present a comparative study of optimized AZO electrodes deposited by Atomic Layer Deposition (ALD) with commercial ITO in terms of electrical, optical and structural properties. Despite a lower figure of merit mainly due to a higher sheet resistance, AZO-based OLEDs are shown to present a current density five times higher than ITO-based ones for the same applied voltage. These AZO electrodes fabricated by ALD could thus be promising substitutes for conventional ITO anodes in organic electronic devices.

Published
2014

33. Multilayered Al/CuO thermite formation by reactive magnetron sputtering: Nano versus micro

Author

M. Petrantoni, Christophe Tenailleau, Ludovic Salvagnac, Yves J. Chabal, Alain Estève, Carole Rossi, Véronique Conédéra, Pierre Alphonse, Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Université Toulouse - Jean Jaurès - UT2J (FRANCE), Université Toulouse 1 Capitole - UT1 (FRANCE), University of Texas at Dallas (USA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Department of Materials Science and Engineering (Dallas, USA), and University of Texas at Dallas [Richardson] (UT Dallas)

Subjects
Materials science, Matériaux, Metallurgy, General Physics and Astronomy, Thermite, [CHIM.MATE]Chemical Sciences/Material chemistry, Partial pressure, Sputter deposition, [SPI.MAT]Engineering Sciences [physics]/Materials, Differential scanning calorimetry, Chemical engineering, Sputtering, Differential thermal analysis, Melting point, Thermal analysis
Abstract

International audience; Multilayered Al/CuO thermite was deposited by a dc reactive magnetron sputtering method. Pure Al and Cu targets were used in argon–oxygen gas mixture plasma and with an oxygen partial pressure of 0.13 Pa. The process was designed to produce low stress (

Published
2010

34. Germanium as an integrated resistor material in RF MEMS switches

Author

David Dubuc, C. Bordas, Katia Grenier, S. Pinaud, and Ludovic Salvagnac

Subjects
Microelectromechanical systems, Resistive touchscreen, Materials science, business.industry, Transistor, Integrated circuit, law.invention, Capacitor, Surface micromachining, law, Optoelectronics, Radio frequency, Resistor, business
Abstract

This paper introduces the use of germanium as resistive material in RF MicroElectroMechanical (MEMS) devices. Integrated resistors are indeed highly required into RF MEMS switches, in order to prevent any RF signal leakage in the bias lines and also to be compatible with ICs. Germanium material presents strong advantages compared to others. It is widely used in microtechnologies, notably as an important semi-conductor in SiGe transistors as well as sacrificial or structural layers and also mask layer in various processes (Si micromachining especially). But it also presents a great electrical characteristic with a very high resistivity value. This property is particularly interesting for the elaboration of integrated resistors for RF components as it assures miniaturised resistors in total agreement with electromagnetic requirements. Its compatibility as resistive material in MEMS has been carried out. Its integration in the entire MEMS process has been fruitfully achieved and led to the successful demonstration and validation of integrated Ge resistors into serial RF MEMS variable capacitors, without any RF perturbations.

Published
2007

35. Electrostatic polymer-based microdeformable mirror for adaptive optics

Author

Norbert Fabre, Frederic Zamkotsian, Arnaud Liotard, Henri Camon, Ludovic Salvagnac, Hugues Granier, Véronique Conédéra, and Patrick Lanzoni

Subjects
Polynomial, Materials science, Optics, business.industry, Calibration, Process (computing), Electronics, business, Adaptive optics, Actuator, Realization (systems), Deformable mirror
Abstract

Future adaptive optics (AO) systems require deformable mirrors with very challenging parameters, up to 250 000 actuators and inter-actuator spacing around 500 mm. MOEMS-based devices are promising for the development of a complete generation of new deformable mirrors. Our micro-deformable mirror (MDM) is based on an array of electrostatic actuators with attachments to a continuous mirror on top. The originality of our approach lies in the elaboration of layers made of polymer materials. Mirror layers and active actuators have been demonstrated. Based on the design of this actuator and our polymer process, realization of a complete polymer-MDM has been done using two process flows: the first involves exclusively polymer materials while the second uses SU8 polymer for structural layers and SiO 2 and sol-gel for sacrificial layers. The latest shows a better capability in order to produce completely released structures. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. Then, we have developed a dedicated 14-bit electronics in order to "linearize" the actuation, using a calibration and a sixth-order polynomial fitting strategy. The response is nearly perfect over our 3×3 MDM prototype with a standard deviation of 3.5 nm; the influence function of the central actuator has been measured. First evaluation on the cross non-linarities has also been studied on OKO mirror and a simple look-up table is sufficient for determining the location of each actuator whatever the locations of the neighbor actuators. Electrostatic MDM are particularly well suited for open-loop AO applications.

Published
2007

36. Biaxial initial stress characterization of bilayer gold RF-switches

Author

Xavier Lafontan, Patrick Pons, Ludovic Salvagnac, Lionel Buchaillot, Q.H. Duong, David Bourrier, P. Calmont, D. Peyrou, Robert Plana, F. Flourens, K. Yacine, Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Materials science, Cantilever, 02 engineering and technology, Photoresist, Stress (mechanics), 03 medical and health sciences, [SPI]Engineering Sciences [physics], 0302 clinical medicine, Sensitivity (control systems), Electrical and Electronic Engineering, Composite material, Safety, Risk, Reliability and Quality, ComputingMilieux_MISCELLANEOUS, business.industry, Bilayer, Biaxial tensile test, Structural engineering, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Finite element method, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, 0210 nano-technology, business, Layer (electronics), 030217 neurology & neurosurgery
Abstract

An analysis as been conducted to determine the biaxial initial stress state of gold bilayer switches. Results are shown that the sensitivity of the sacrificial photoresist layer to process parameters make the wafer curvature technique unreliable to determine the initial stress state of the evaporated gold seed layer. An analytical method based on the cantilever deflection method is proposed to determine the biaxial stress state on this layer. Assumptions were validated numerically using FEM and cantilevers gold bilayer of various length were elaborated and characterized.

Published
2005

37. Effect of thermal annealing on the electrical properties of indium tin oxide (ITO) contact on Be-doped GaAs for optoelectronic applications

Author

E. Havard, C Armand, Sébastien Pinaud, Véronique Bardinal, Chantal Fontaine, Ludovic Salvagnac, and Thierry Camps

Subjects
Dopant, business.industry, Annealing (metallurgy), Contact resistance, Doping, chemistry.chemical_element, Atmospheric temperature range, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Indium tin oxide, Semiconductor, chemistry, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, Beryllium, business
Abstract

The effects of thermal annealing on optically transparent electrodes of ITO (indium tin oxide) contact deposited on p-type Be-doped GaAs have been investigated by means of the transfer length method and secondary ion mass spectroscopy measurements. This study shows that the temperature that minimizes the specific contact resistance of ITO/GaAs (500 °C) greatly differs from the temperature that leads to a maximum conductivity of the ITO layer (600 °C) and from the values reported on ITO/GaAs in the literature. The oxygen diffusion in the semiconductor layer and its interaction with the beryllium dopant is pointed out to explain these differences.

Published
2008

38. Catalytic CVD synthesis of a graphene-based microelectrode as a biosensor

Author

Loïc Assaud, Hugues Vergnes, David Evrard, Ludovic Salvagnac, Véronique Conédéra, Gros, P., Pierre GROS, Marc Monthioux, Brigitte Caussat, Laboratoire de Génie Chimique (LGC), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Centre d'élaboration de matériaux et d'études structurales (CEMES), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie de Toulouse (ICT-FR 2599), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche pour le Développement (IRD)-Institut de Chimie du CNRS (INC)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut de Chimie de Toulouse (ICT), Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Institut de Recherche pour le Développement (IRD)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

39. VCSELs fabricated using self-aligned processing

Author

Ludovic Marigo-Lombart, Laurent Mazenq, Ludovic Salvagnac, Guillaume Libaude, Bernard Rousset, Benjamin Reig, Pascal Dubreuil, Nicolas Mauran, Alexandre Arnoult, Hugo Thienpont, Krassimir Panajotov, Guilhem Almuneau, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience

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