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The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances becomes increasingly critical. Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the continued scaling of quantum processors. However, these industrial processes are currently not optimized to produce high coherence devices, nor are they a priori compatible with the commonly used approaches to make superconducting qubits. In this work, we demonstrate for the first time superconducting transmon qubits manufactured in a 300 mm CMOS pilot line, using industrial fabrication methods, with resulting relaxation and coherence times already exceeding 100 microseconds. We show across-wafer, large-scale statistics studies of coherence, yield, variability, and aging that confirm the validity of our approach. The presented industry-scale fabrication process, using exclusively optical lithography and reactive ion etching, shows performance and yield similar to the conventional laboratory-style techniques utilizing metal lift-off, angled evaporation, and electron-beam writing. Moreover, it offers potential for further upscaling by including three-dimensional integration and additional process optimization using advanced metrology and judicious choice of processing parameters and splits. This result marks the advent of more reliable, large-scale, truly CMOS-compatible fabrication of superconducting quantum computing processors., Comment: main text: 7 pages, 4 figures. bibliography: 55 references. supplement: 8 sections, 8 figures, 2 tables

Scaling superconducting digital circuits requires fundamental changes in the current material set and fabrication process. The transition to 300 mm wafers and the implementation of advanced lithography are instrumental in facilitating mature CMOS processes, ensuring uniformity, and optimizing the yield. This study explores the properties of NbxTi(1-x)N films fabricated by magnetron DC sputtering on 300 mm Si wafers. As a promising alternative to traditional Nb in device manufacturing, NbxTi(1-x)N offers numerous advantages, including enhanced stability and scalability to smaller dimensions, in both processing and design. As a ternary material, NbxTi(1-x)N allows engineering material parameters by changing deposition conditions. The engineered properties can be used to modulate device parameters through the stack and mitigate failure modes. We report characterization of NbxTi(1-x)N films at less than 2% thickness variability, 2.4% Tc variability and 3% composition variability. The films material properties such as resistivity (140-375 {\Omega}cm) and critical temperature Tc (4.6 K - 14.1 K) are correlated with stoichiometry and morphology of the films. Our results highlight the significant influence of deposition conditions on crystallographic texture along the films and its correlation with Tc., Comment: 8 pages 8 figures

A distributed quantum computing system requires a quantum communication channel between spatially separated processing units. In superconducting circuits, such a channel can be realized by using propagating microwave photons to encode and transfer quantum information between an emitter and a receiver node. Here we experimentally demonstrate a superconducting circuit that deterministically transfers the state of a data qubit into a propagating microwave mode, with a process fidelity of 94.5%. We use a time-varying parametric drive to shape the temporal profile of the propagating mode to be time-symmetric and with constant phase, so that reabsorption by the receiving processor can be implemented as a time-reversed version of the emission. We demonstrate a self-calibrating routine to correct for time-dependent shifts of the emitted frequencies due to the modulation of the parametric drive. Our work provides a reliable method to implement high-fidelity quantum state transfer and remote entanglement operations in a distributed quantum computing network.

Large-scale superconducting quantum computing systems entail high-fidelity control and readout of large numbers of qubits at millikelvin temperatures, resulting in a massive input-output bottleneck. Cryo-electronics, based on complementary metal-oxide-semiconductor (CMOS) technology, may offer a scalable and versatile solution to overcome this bottleneck. However, detrimental effects due to cross-coupling between the electronic and thermal noise generated during cryo-electronics operation and the qubits need to be avoided. Here we present an ultra-low power radio-frequency (RF) multiplexing cryo-electronics solution operating below 15 mK that allows for control and interfacing of superconducting qubits with minimal cross-coupling. We benchmark its performance by interfacing it with a superconducting qubit and observe that the qubit's relaxation times ($T_1$) are unaffected, while the coherence times ($T_2$) are only minimally affected in both static and dynamic operation. Using the multiplexer, single qubit gate fidelities above 99.9%, i.e., well above the threshold for surface-code based quantum error-correction, can be achieved with appropriate thermal filtering. In addition, we demonstrate the capability of time-division-multiplexed qubit control by dynamically windowing calibrated qubit control pulses. Our results show that cryo-CMOS multiplexers could be used to significantly reduce the wiring resources for large-scale qubit device characterization, large-scale quantum processor control and quantum error correction protocols., Comment: 16+6 pages, 4+1+5 figures, 1 table

We have integrated single and coupled superconducting transmon qubits into flip-chip modules. Each module consists of two chips -- one quantum chip and one control chip -- that are bump-bonded together. We demonstrate time-averaged coherence times exceeding $90\,\mu s$, single-qubit gate fidelities exceeding $99.9\%$, and two-qubit gate fidelities above $98.6\%$. We also present device design methods and discuss the sensitivity of device parameters to variation in interchip spacing. Notably, the additional flip-chip fabrication steps do not degrade the qubit performance compared to our baseline state-of-the-art in single-chip, planar circuits. This integration technique can be extended to the realisation of quantum processors accommodating hundreds of qubits in one module as it offers adequate input/output wiring access to all qubits and couplers., Comment: 33 pages, 12 figures, includes supplementary materials, updated with further calculations on participation ratio and Purcell limit

Hosting non-classical states of light in three-dimensional microwave cavities has emerged as a promising paradigm for continuous-variable quantum information processing. Here we experimentally demonstrate high-fidelity generation of a range of Wigner-negative states useful for quantum computation, such as Schr\"{o}dinger-cat states, binomial states, Gottesman-Kitaev-Preskill (GKP) states, as well as cubic phase states. The latter states have been long sought after in quantum optics and were never achieved experimentally before. To do so, we use a sequence of interleaved selective number-dependent arbitrary phase (SNAP) gates and displacements. We optimize the state preparation in two steps. First we use a gradient-descent algorithm to optimize the parameters of the SNAP and displacement gates. Then we optimize the envelope of the pulses implementing the SNAP gates. Our results show that this way of creating highly non-classical states in a harmonic oscillator is robust to fluctuations of the system parameters such as the qubit frequency and the dispersive shift.

Engineering the electromagnetic environment of a quantum emitter gives rise to a plethora of exotic light-matter interactions. In particular, photonic lattices can seed long-lived atom-photon bound states inside photonic band gaps. Here we report on the concept and implementation of a novel microwave architecture consisting of an array of compact, high-impedance superconducting resonators forming a 1 GHz-wide pass band, in which we have embedded two frequency-tuneable artificial atoms. We study the atom-field interaction and access previously unexplored coupling regimes, in both the single- and double-excitation subspace. In addition, we demonstrate coherent interactions between two atom-photon bound states, in both resonant and dispersive regimes, that are suitable for the implementation of SWAP and CZ two-qubit gates. The presented architecture holds promise for quantum simulation with tuneable-range interactions and photon transport experiments in nonlinear regime.

Three-dimensional Mesoporous bioactive glasses (MBGs) scaffolds has been widely considered for bone regeneration purposes and additive manufacturing enables the fabrication of highly bioactive patient-specific constructs for bone defects. Commonly, this process is performed with the addition of polymeric binders that facilitate the printability of scaffolds. However, these additives cover the MBG particles resulting in the reduction of their osteogenic potential. The present work investigates a simple yet effective phosphate-buffered saline immersion method for achieving polyvinyl alcohol binder removal while enables the maintenance of the mesoporous structure of MBG 3D-printed scaffolds. This resulted in significantly modifying the surface of the scaffold via the spontaneous formation of a biomimetic mineralized layer which positively affected the physical and biological properties of the scaffold. The extensive surface remodeling induced by the deposition of the apatite-like layer lead to a 3-fold increase in surface area, a 5-fold increase in the roughness, and 4-fold increase in the hardness of the PBS-immersed scaffolds when compared to the as-printed counterpart. The biomimetic mineralization also occurred throughout the bulk of the scaffold connecting the MBGs particles and was responsible for the maintenance of structural integrity. In vitro assays using MC3T3-E1 pre-osteoblast like cells demonstrated a significant upregulation of osteogenic-related genes for the scaffolds previously immersed in PBS when compared to the as-printed PVA-containing scaffolds. Although the pre-immersion scaffolds performed equally towards osteogenic cell differentiation, our data suggest that a short immersion in PBS of MBG scaffolds is beneficial for the osteogenic properties and might accelerate bone formation after implantation., Comment: 38 pages, 8 figures