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Performances of diffractive and refractive microlens array have been studied and compared. Besides the diffractive microlens array which can be fabricated by means of the microfabrication technologies, method for manufacturing continuous profile refractive microlens array with larger sag depth has been developed for solving the unique problems like diode laser alignment. Both diffractive and refractive microlens array with different numerical aperture and other parameters are fabricated according to the application requirements, experimental results are given.

A new type of diffractive microlens array concentrator has been designed and fabricated for improving the performance of infrared detector array. An experiment was made by coupling the concentrator into a focal plane detector array, the detectivity of the coupled device was increased to nearly 2.8 fold.

In this paper, a method for improving the performance of unit infrared detector has been proposed. An experiment was carried out by putting micro-concentrator in front of the tested detector, micro-concentrators are diffractive microlens with different numerical aperture (N.A.) which were obtained by special design and fabrication. The performance has been evaluated for the coupled detector and compared with the simulation.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

The paper describes the non-contact ultra-high accurate three-dimensional surface profile measuring system for the microstructure, whose surface structure is probably deep and discontinuous. The system is based on the dual-path two-wavelength phase-shifting interferometry and data processing/analysis. To measure the deep microstructure, the generalized two-wavelength measuring method is adopted to expand the depth measuring range. To measure the microstructure whose surface is discontinuous, a new data analysis/processing method is presented, by which the discontinuous surface can be measured without the change of the measuring system. This system has already been applied to measure the surface profile of the various actual microstructures. The results show that the depth resolution of the system is 0.5nm, the depth measuring accuracy is better than 1.3nm. When 20X microscopic lenses (NA=0.4) is used, the transversal resolution of the system is about 0.5μm, the field is about o1.325mm.