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We demonstrate an on-chip lithium niobate micro-disk laser based on hydrogen cyanide (H13C14N) gas saturation absorption method for frequency stabilization. The laser chip consists of two main components: a micro-disk laser and a combined racetrack ring cavity. By operating on the H13C14N P12 absorption line at 1551.3 nm, the laser frequency can be precisely stabilized. The laser demonstrates remarkable stability, achieving a best stability value of 9*10^-9. Furthermore, the short-term stability, evaluated over continuous time intervals of 35 seconds, showcases exceptional performance. Additionally, the residual drift remains well below 30 MHz.

Multi-wavelength switchable single-frequency microlasers in a broad spectral range are highly desirable for integrated photonic applications due to their dynamic switching functionality, narrow linewidth, and high side-mode-suppression-ratio (SMSR). Here, a strategy based on highly efficient successive excitation of different stimulated multi-photon hyper-Raman scattering (SMPHRS) processes is proposed to generate multi-wavelength switchable single-frequency hyper-Raman microlasers. This is achieved through collective precise dispersion management for arranging excitation wavelengths to trigger different phase-matched SMPHRS processes in order, mode-hopping-free tuning of the pump wavelength within a wide range of 0.75 nm by leveraging strong thermo-optical broadening of ultra-high Q modes, and simultaneously suppressing harmonics generation in a lithium niobate microcavity with high second-order nonlinearity. As a result, under continuous-wave laser pump at a low level of only 3.9 mW, SMPHRS processes from two- to five-photons emerged step by step and almost depleted previously generated multi-photon Raman signal. Consequently, four-wavelength dynamically switchable single-mode lasing from near infrared (857 nm) to ultraviolet (350 nm) spanning beyond the record range (~500 nm) with high SMSRs >35 dB is reported., Comment: 17 pages,5 figures, and 1 table

Perfect absorption of light critically affects light-matter interaction for various applications. Coherent perfect absorbers (CPA) gain the unique capability of controlling light with light in a linear fashion. Multi-color CPAs [Phys. Rev. Lett. 107, 033901] are highly desirable for broadband and nonlinear light-to-light coherent control, however, the experimental demonstration has still remained elusive. Here we experimentally observe a dual-color version of CPA (DC-CPA) through a second harmonic generation in a single whispering-gallery-mode microcavity. The DC-CPA enables simultaneous perfect absorption of both the incoming fundamental wave and its second harmonic. Similar to its linear counterpart, coherent control in the DC-CPA can be also realized by tuning the relative phase and intensity between the two-colored waves through nonlinear interference instead of the linear one. This scheme breaks the linear boundary of the traditional CPA into a multi-frequency domain and paves the way toward all-optically signal processing and quantum information.

Subwavelength gratings play a fundamental and pivotal role in numerous science and applications for wave manipulation, exhibiting distinctive features such as filtering, phase manipulation, and anti-reflection. However, conventional fabrication methods for ultrasmall periodic structures are constrained by the fundamental optical diffraction limit, making it challenging to produce subwavelength gratings for optics. Here, we demonstrate a novel technique to build a reconfigurable subwavelength photorefractive grating (SPG) in a thin-film lithium niobate on the platform of an optical microcavity. Such SPGs are optically induced through the photorefractive effect and the subwavelength features originate from the spatial phase modulations of the pump's standing wave. The resulting SPGs lead to the mode splitting of two counter-propagating modes inside the microcavity, exhibiting an Electromagnetically Induced Transparency (EIT)-like transmission spectrum. Moreover, the unique subwavelength characteristic of SPGs enables first-order quasi-phase-matching for backward second-harmonic generation, a long-standing problem in nonlinear optics. Also, free-space-to-chip vertical nonlinear frequency conversion can be achieved in a similar manner. These results provide a flexible approach towards fabricating subwavelength gratings, which holds significant potential in various applications such as nonlinear frequency conversion, optical communication, sensing, and quantum technologies.

Non-Hermitian degeneracies reveal intriguing and non-trivial behaviors in open physical systems. Examples like Parity-Time (PT) symmetry breaking, topological encircling chirality, and enhanced sensing near an exceptional point (EP) are often associated with the abrupt nature of the phase transition around these degeneracies. Here we experimentally observe a cavity-enhanced second-harmonic frequency (SHG) conversion on a PT symmetry line, i.e. a set consisting of open-ended isofrequency or isoloss lines, both terminated at EPs on the Riemann surface in parameter space. The enhancement factor can reach as high as 300, depending on the crossing point whether in the symmetry or the broken phase of the PT line. Moreover, such enhancement of SHG enables sensitive distance sensing with a nanometer resolution. Our works may pave the way for practical applications in sensing, frequency conversion, and coherent wave control.

Photonic integrated Raman microlasers, particularly discrete multi-color lasers which are crucial for extending the emission wavelength range of chip-scale laser sources to much shorter wavelength, are highly in demand for various spectroscopy, microscopy analysis, and biological detection. However, integrated multi-color Raman microlasers have yet to be demonstrated because of the requirement of high-Q microresonators possessing large second-order nonlinearity and strong Raman phonon branches and the challenging in cavity-enhanced multi-photon hyper-Raman scattering parametric process. In this work, integrated multi-color Raman lasers have been demonstrated for the first time at weak pump levels, via the excitation of high-Q (>6 X 10^6) phase-matched modes in single thin-film lithium niobate (TFLN) microresonators by dispersion engineering. Raman lasing was observed at 1712 nm for a 1546-nm pump threshold power of only 620 uW. Furthermore, multi-color Raman lasers were realized at discrete wavelengths of 1712 nm, 813 nm, 533 nm and 406 nm with pump levels as low as 1.60 mW, which is more than two order of magnitude lower than the current records (i.e., 200 mW) in bulk resonators, allowed by the fulfillment of the requisite conditions consisting of broadband natural phase match, multiple-resonance and high Q-factors., Comment: 16 pages,4 figures

We demonstrate single-mode microdisk lasers in the telecom band with ultra-low thresholds on erbium-ytterbium co-doped thin-film lithium niobate (TFLN). The active microdisk were fabricated with high-Q factors by photo-lithography assisted chemo-mechanical etching. Thanks to the erbium-ytterbium co-doping providing high optical gain, the ultra-low loss nanostructuring, and the excitation of high-Q coherent polygon modes which suppresses multi-mode lasing and allows high spatial mode overlap factor between pump and lasing modes, single-mode laser emission operating at 1530 nm wavelength was observed with an ultra-low threshold, under 980-nm-band optical pump. The threshold was measured as low as 1 uW, which is one order of magnitude smaller than the best results previously reported in single-mode active TFLN microlasers. And the conversion efficiency reaches 0.406%, which is also the highest value reported in single-mode active TFLN microlasers., Comment: 5 pages,3 figures

Anomalous microresonator dispersion is mandatory for Kerr soliton microcomb formation, which depends critically on the geometry of the microresonator and can hardly be tuned after the structure is made. To date, cavity-based microcombs have only been generated with fundamental whispering gallery modes (WGMs) of anomalous dispersion in microresonators. Moreover, microcomb generation in highly Raman-active platforms such as lithium niobate (LN) microresonators frequently suffers from stimulated Raman scattering and mode crossing due to the existence of multiple families of high-order WGMs. Here, we reveal a unique Kerr soliton microcomb generation mechanism through mode trimming in a weakly perturbed LN microdisk resonator. Remarkably, the soliton comb is generated with fundamental WGMs of normal dispersion and free from the mode crossing and Raman scattering effects. A robust soliton with a spectrum spanning from 1450 nm to 1620 nm at an on-chip pump power of 35 mW. Our discovery offers a powerful solution to circumvent the stringent requirements on high-precision dispersion engineering and termination of Raman excitation for soliton generation in the high-Q microdisk., Comment: 16 pages,and 5 figures

Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform., Comment: 6 pages,3 figures,1 table

Polygon and star modes enable unidirectional emission and single-frequency lasing in whispering gallery microcavities. To understand their properties and facilitate design, we have adopted both two-dimensional and three-dimensional full-wave perturbation methods to simulate these modes. Our simulation demonstrates that a tapered optical fiber can be used as a weak perturbation to coherently combine multiple whispering gallery modes into a polygon or star mode. Additionally, our simulation predicts an optical quality factor as high as $10^7$ for the polygon modes, which is in good agreement with the experiment results.

In general, a high-Q microresonator can accommodate abundant whispering gallery modes (WGMs) with the mode number increasing with the dimensional sizes of the microresonator. Removing the unnecessary modes while reorganizing the remaining modes is of vital importance, which, however, has been proved challenging and usually results in a tradeoff with the Q of the microresonator. Here, we reveal an effective and controllable mode trimming and clustering mechanism underlying the generation of polygon and star modes in weakly perturbed tapered fiber-coupled lithium niobate whispering gallery microresonators. Experimentally, various polygon and star modes are observed in sequence within a single microresonator by tuning the excitation wavelength or varying the coupling position between a tapered fiber and the circular microresonator, which can be well reproduced with our theoretical model. The finding offers a ubiquitous solution for a broad range of applications requiring elaborate selection and organization of the high-Q WGMs.

Photonic-based low-phase-noise microwave generation with real-time frequency tuning is crucial for a broad spectrum of subjects, including next-generation wireless communications, radar, metrology, and modern instrumentation. Here, for the first time to the best of our knowledge, narrow-bandwidth dual-wavelength microlasers are generated from nearly degenerate polygon modes in a high-Q active lithium niobate microdisk. The high-Q polygon modes formation with independently controllable resonant wavelengths and free spectral ranges is enabled by the weak perturbation of the whispering gallery microdisk resonators using a tapered fiber. The stable beating signal confirms the low phase-noise achieved in the tunable laser. Owing to the high spatial overlap factors between the two nearly degenerate lasing modes as well as that between the two lasing modes and the pump mode, gain competition between the two modes is suppressed, leading to stable dual-wavelength laser generation and in turn the low noise microwave source. The measured microwave signal shows a linewidth of ~6.87 kHz, a phase noise of ~-123 dBc/Hz, and an electro-optic tuning efficiency of -1.66 MHz/V., Comment: 13 pages, 5 figures

Erbium doped integrated waveguide amplifier and laser prevail in power consumption, footprint, stability and scalability over the counterparts in bulk materials, underpinning the lightwave communication and large-scale sensing. Subject to the highly confined mode and moderate propagation loss, gain and power scaling in such integrated micro-to-nanoscale devices prove to be more challenging compared to their bulk counterparts. In this work, stimulated by the prevalent success of double-cladding optical fiber in high-gain/power operation, a Ta2O5 cladding is employed in the erbium doped lithium niobate (LN) waveguide amplifier fabricated on the thin film lithium niobate on insulator (LNOI) wafer by the photolithography assisted chemomechanical etching (PLACE) technique. Above 20 dB small signal internal net gain is achieved at the signal wavelength around 1532 nm in the 10 cm long LNOI amplifier pumped by the diode laser at ~980 nm. Experimental characterizations reveal the advantage of Ta2O5 cladding in higher optical gain compared with the air-clad amplifier, which is further explained by the theoretical modeling of the LNOI amplifier including the guided mode structures and the steady-state response of erbium ions., Comment: 11 pages, 5 figures

On-chip bright quantum sources with multiplexing ability are extremely high in demand for the integrated quantum networks with unprecedented scalability and complexity. Here, we demonstrate an ultrabright and broadband biphoton quantum source generated in a lithium niobate microresonator system.Without introducing the conventional domain poling, the on-chip microdisk produces entangled photon pairs covering a broad bandwidth promised by natural phase matching in spontaneous parametric down conversion.Experimentally, the multiplexed photon pairs are characterized by $30\ \rm nm$ bandwidth limited by the filtering system, which can be furthered enlarged.Meanwhile, the generation rate reaches $5.13\ {\rm MHz}/\upmu \rm W$ with a coincidence-to-accidental ratio up to $804$.Besides, the quantum source manifests the prominent purity with heralded single photon correlation $g_H^{(2)}(0)=0.0098\pm0.0021$ and energy-time entanglement with excellent interference visibility of $96.5\%\pm1.9\%$. Such quantum sources at the telecommunication band pave the way for high-dimensional entanglement and future integrated quantum information systems., Comment: 8 pages,4 figures

We demonstrate an on-chip Yb3+-doped lithium niobate (LN) microdisk laser. The intrinsic quality factors of the fabricated Yb3+-doped LN microdisk resonator are measured up to 3.79x10^5 at 976 nm wavelength and 1.1x10^6 at 1514 nm wavelength. The multi-mode laser emissions are obtained in a band from 1020 nm to 1070 nm pumped by 984 nm laser and with the low threshold of 103 {\mu}W, resulting in a slope efficiency of 0.53% at room temperature. Furthermore, the second-harmonic frequency of pump light and the sum-frequency of the pump light and laser emissions are both generated in the on-chip Yb3+-doped LN microdisk benefited from the strong \c{hi}(2) nonlinearity of LN. These microdisk lasers are expected to contribute to the high-density integration of LNOI-based photonic chip., Comment: 4 pages, 5 figures

Integrated single-mode microlasers with ultra-narrow linewidths play a game-changing role in a broad spectrum of applications ranging from coherent communication and LIDAR to metrology and sensing. Generation of such light sources in a controllable and cost-effective manner remains an outstanding challenge due to the difficulties in the realization of ultra-high Q active micro-resonators with suppressed mode numbers. Here, we report a microlaser generated in an ultra-high Q Erbium doped lithium niobate (LN) micro-disk. Through the formation of coherently combined polygon modes at both pump and laser wavelengths, the microlaser exhibits single mode operation with an ultra-narrow-linewidth of 98 Hz. In combination with the superior electro-optic and nonlinear optical properties of LN crystal, the mass-producible on-chip single-mode microlaser will provide an essential building block for the photonic integrated circuits demanding high precision frequency control and reconfigurability.

We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to times ten to the power of 8th at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion induced lattice damage, indicating an ultra-low waveguide propagation loss of about 0.28 dB per meter. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes., Comment: 6 pages, 3 figures

We report an on-chip single mode microlaser with low-threshold fabricated on Erbium doped lithium niobate on insulator (LNOI). The single mode laser emission at 1550.5 nm wavelength is generated in a coupled photonic molecule, which is facilitated by Vernier effect when pumping the photonic molecule at 970 nm. A threshold pump power as low as 200 uW is demonstrated thanks to the high quality factor above 10^6. Moreover, the linewidth of the microlaser reaches 4 kHz, which is the best result in LNOI microlasers. Such single mode micro-laser lithographically fabricated on chip is highly in demand by photonic community.

We demonstrated broadband highly efficient optical nonlinear processes in on-chip integrated lithium niobate (LN) microdisk resonators. The Q factors of the micro-resonators fabricated by femtosecond laser writing and chemo-mechanical polishing are reliably above 10^8, approaching the intrinsic material absorption limit of LN. Broadband nonlinear processes, including optical parametric oscillation (OPO), second harmonic generation (SHG), third harmonic generation, and fourth harmonic generation, were observed with ultrahigh efficiencies in the same LN microdisk without introducing domain inversion, thanks to the natural quasi phase-matching and the dense spectral modes of the X-cut LN microdisk with millimeter diameter. The threshold of OPO and the absolute conversion efficiency of SHG are 19.6 microwatt and 66%, both surpass the state-of-the-art values among on-chip LN micro-resonators demonstrated so far. The broadband and highly efficient nonlinear frequency conversions achieved with the ultrahigh-Q LN microdisk resonators promise high-density integration of nonlinear photonic devices such as frequency convertors and entangled photon sources., Comment: 27 pages, 9 figures

We observe high optical quality factor (Q) polygonal and star coherent optical modes in a lithium niobate microdisk. In contrast to the previous polygon modes achieved by deformed microcavities at lower mechanical and optical Q, we adopted weak perturbation from a tapered fiber for the polygon mode formation. The resulting high intracavity optical power of the polygon modes triggers second harmonic generation at high efficiency. With the combined advantage of high mechanical Q cavity optomechanical oscillation was observed for the first time. Finally, we observe frequency microcomb generation from the polygon modes with an ultra stable taper-on-disk coupling mechanism.

We report fabrication of low loss single mode waveguides on lithium niobate on insulator (LNOI) cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching (PLACE), relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.13 dB/cm. Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency., Comment: 4 pages, 5 figures

A lithium niobate on insulator ridge waveguide allows constructing high-density photonic integrated circuits thanks to its small bending radius offered by the high index contrast. Meanwhile, the significant mode-field mismatch between an optical fiber and the single-mode lithium niobate waveguide leads to low coupling efficiencies. Here, we demonstrate, both numerically and experimentally, that the problem can be solved with a tapered single mode fiber of an optimized mode field profile. Numerical simulation shows that the minimum coupling losses for the TE and TM mode are 0.32 dB and 0.86 dB, respectively. Experimentally, though without anti-reflection coating, the measured coupling losses for TE and TM mode are 1.32 dB and 1.88 dB, respectively. Our technique paves a way for a broad range of on-chip lithium niobate applications., Comment: 8 pages, 5 figures

Microfluidic mixing is a fundamental functionality in most lab on a chip (LOC) systems,whereas realization of efficient mixing is challenging in microfluidic channels due to the small Reynolds numbers. Here, we design and fabricate a compact three-dimensional (3D) micromixer to enable efficient mixing at various flow rates. The performance of the fabricated micromixer was examined using blue and red inks. The extreme flexibility in fabricating microfluidic structures of arbitrary 3D geometries using femtosecond laser micromachining allows us to tackle the major disadvantageous effects for optimizing the mixing efficiency., Comment: 18 pages, 5 figures

The significant imbalance between power generation and load caused by severe disturbance may make the power system unable to maintain a steady frequency. If the post-disturbance dynamic frequency features can be predicted and emergency controls are appropriately taken, the risk of frequency instability will be greatly reduced. In this paper, a predictive algorithm for post-disturbance dynamic frequency features is proposed based on convolutional neural network (CNN) . The operation data before and immediately after disturbance is used to construct the input tensor data of CNN, with the dynamic frequency features of the power system after the disturbance as the output. The operation data of the power system such as generators unbalanced power has spatial distribution characteristics. The electrical distance is presented to describe the spatial correlation of power system nodes, and the t-SNE dimensionality reduction algorithm is used to map the high-dimensional distance information of nodes to the 2-D plane, thereby constructing the CNN input tensor to reflect spatial distribution of nodes operation data on 2-D plane. The CNN with deep network structure and local connectivity characteristics is adopted and the network parameters are trained by utilizing the backpropagation-gradient descent algorithm. The case study results on an improved IEEE 39-node system and an actual power grid in USA shows that the proposed method can predict the lowest frequency of power system after the disturbance accurately and quickly.

We demonstrate efficient tuning of a monolithically integrated lithium niobate microdisk (LN) optical frequency microcomb. Utilizing the high optical quality (Q) factor (i.e., Q~7.1*10^6) of the microdisk, the microcomb spans over a spectral bandwidth of ~200 nm at a pump power as low as 20.4 mW. Combining the large eletro-optic coefficient of LN and optimum design of the geometry of microelectrodes, we demonstrate electro-optical tuning of the comb with a spectral range of 400 pm and a tuning efficiency of ~38 pm/100V.

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit., Comment: 6 pages, 5 figures

We demonstrate fabrication of single-mode optical waveguides on lithium niobate on insulator (LNOI) by optical patterning combined with chemo-mechanical polishing. The fabricated LNOI waveguides have a nearly symmetric mode profile of a mode field size of ~2.5 micron (full-width at half maximum). We develop a high-precision measurement approach by which the single mode waveguides are characterized to have a propagation loss of ~0.042 dB/cm., Comment: 4 pages, 5 figures

Three-dimensional (3D) printing has allowed for production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansions in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser induced chemical etching (FLICE) has proved itself a powerful approach. Here, we demonstrate fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with a well-balanced (i.e., lateral vs longitudinal) spatial resolution of ~20 {\mu}m. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica which results in aberration-free focusing of the laser pulses deeply inside fused silica., Comment: 13 pages, 7 figures

Cavity optomechanics, the study of the interplay between light and mechanical properties of matter, has triggered a wide range of groundbreaking researches from cavity quantum electrodynamics, label free single molecule detection to the creation of phonon laser. Using femtosecond laser direct writing followed by chemo-mechanical polishing, here we report an ultrahigh quality (Q~10^7) factor lithium niobate (LN) whispering gallery microresonator monolithically integrated with in-plane microelectrodes. Coherent regenerative optomechanical oscillation with an effective mechanical quality (Qm) factor as high as 2.86*10^8 is observed in air. We demonstrate real-time electrical tuning of the optomechanical frequency with an electro-mechanical tuning efficiency around -134 kHz/100V., Comment: 4 pages, 6 figures

We develop a technique for realizing lithium niobate on insulator (LNOI) waveguides of a multi-centimeter-length with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium (Cr) thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by the chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides is determined to be 0.452 nm with an atomic force microscope (AFM). The approach is compatible with other surface patterning technologies such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits., Comment: 9 pages, 4 figures

Nonlinear optics in whispering-gallery-mode (WGM) microresonators have attracted much attention. Owing to strong confinement of the light in a small volume, a WGM microresonator can dramatically boost the strength of light field, giving rise to enhancement of the nonlinear interactions of light with the resonator material. Here, we demonstrate highly efficient second harmonic generation (SHG) and third harmonic generation (THG) in an on-chip monocrystalline lithium niobate (LN) microresonator. Benefitting from a cyclic phase matching scheme for the transverse-electric WGMs, nonlinear wavelength conversion utilizing the largest second-order nonlinear coefficient d33, which has not been demonstrated until now despite of its obvious advantage, is successfully achieved in an X-cut LN microresonator. We obtain high conversion efficiencies in not only the SHG (3.8% mW^-1) but also the THG (0.3% mW^-2) realized through a cascaded sum-frequency process. Our results represent a major step toward the classical and quantum photonic integrated circuits., Comment: 23 pages, 4 figures

We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk., Comment: 3 pages, 4 figures

High quality lithium niobate thin film microresonators provide an ideal platform for on-chip nonlinear optics applications. However, the phase matching condition for efficient parametric process sets a high requirement for fabrication control. Here we demonstrate a photonic molecular structure composed of two strongly coupled lithium niobate microdisks of different diameters fabricated using femtosecond laser micromachining and focused ion beam milling. With a continuous wave excitation, rich nonlinear optical processes including cascaded four-wave mixing and stimulated Raman scattering were observed around the second harmonic wavelength. Our results indicate that the coupled microdisks form a superior system for nonlinear optical process., Comment: 17 pages, 4 figures