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When carbon films are prepared using thermal CVD, the properties of carbon films are affected by many factors, such as the precursor gas, deposition temperature, and working pressure. It is believed that the substrate size is also an important factor in preparing carbon films by thermal CVD. Hence, this study investigates the effect of substrate size on the properties of carbon coatings that are deposited on glass plate substrates in a quartz tube furnace using thermal CVD. Experimental results show that the deposition thickness decreases with increasing silica glassplate width, indicating that the deposition rate of carbon coatings decreases with increasing deposition area of the glass plate substrate. Meanwhile, the ordered degree and crystallite size of carbon films increase with increasing glassplate width, while the number and size of particles on carboncoating surfaces, surface roughness, and electrical resistivity of carbon films decrease. © 2009 WILEYVCH Verlag GmbH & Co. KGaA, Weinheim