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This work aims to enhance the surface wettability and adhesion of Parylene-C (poly-chloro-p-xylylene C) thin film on PMMA, glass and aluminum substrates by chemical vapor deposition. The results show that: (1) 0.56, 1, and 1.55g Parylene-C powders can deposit 200, 400, and 600nm films, respectively. (2) After oxygen-plasma pretreatment, the surface roughness of the 200nm-thickness film on glass substrate specimens decreases from 18nm to 7nm. (3) After dipped in prescription solution pretreatment, the residual stress reduces from 107MPa to 64MPa on glass substrate specimens. (4) In contact angle tests, the 600nm-thickness film on various flat substrates deposited process that has surface hydrophobic. (5) The critical load of 600nm-thickness film increases from 14.1 to 18.5mN, showing the substrate after dipped in prescription solution pretreatment can improve the adhesion of the Parylene-C thin film on flat glass substrate specimens.