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In this work, we report an effective approach based on an artificial intelligence technique to investigate the secondary ions mass spectroscopy (SIMS) profiles of boron, phosphorus and arsenic ions. Those dopant ions were implanted into n- and p-type (100) Silicon substrate using the ion implantation technique with energy of 100 and 180 keV. Annealing treatment was conducted at various temperatures ranging from 900 to 1030 °C for 30 min. The doping profile parameters such as the activation energy, diffusion coefficient, junction depth, implant dose, projected range and standard deviation were determined using particle swarm optimization (PSO) algorithm. The efficiency of this strategy was experimentally verified by the fitting between both real measured SIMS profile and predicted ones. In addition, a set of simulated doping profiles was generated for different annealing time to prove the ability of this approach to accurately estimate the above parameters even when changing the experimental conditions.

Ag–TiO2–Fe composite thin films with different Ag contents are deposited onto a glass substrate by a thermal evaporation method. TiO2, TiO2–Fe, and Ag–TiO2–Fe thin films are characterized by X‐ray diffraction (XRD), Raman spectroscopy, scanning electron microscopy (SEM), UV–vis–NIR spectroscopy, and photoluminescence (PL) to study the relation between their structural, morphological, optical, and luminescent properties with their antibacterial activities. XRD and Raman measurements show the formation of the anatase phase with increasing silver content in Ag–TiO2–Fe composite thin films. SEM images show the presence of silver in the metallic form. Optical measurements display a redshift in the optical absorption edge of TiO2–Fe and Ag–TiO2–Fe composite films with a decrease in the energy bandgap compared to pure TiO2. The antibacterial activity of the films against Escherichia coliis investigated both in the dark and under UV light. It is found that Ag plays a major role on the antibacterial efficiency in the dark. Ag–TiO2–Fe composite thin films exhibit a synergistic antibacterial effect under UV light, resulting an excellent antibacterial coating. TiO2, TiO2–Fe, and Ag–TiO2–Fe composite thin films are successfully prepared via a thermal evaporation technique. The inactivation of Escherichia coliin the dark and under UV light of the films with different silver content is tested. The structural, morphological, and optical properties are investigated. The composite coatings with high silver content display excellent antibacterial activity.