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Superconducting circuits have been demonstrated at the ~50 qubit scale, with gate fidelities approaching the thresholds required for error correction using surface codes. It is generally considered that maintaining and improving this performance while scaling to >100 qubits will require 3D integration of control wiring, and techniques to prevent or mitigate the effects of unwanted electromagnetic modes which emerge in the circuit environment at larger scales. At the present time, no single design has emerged as the clear scaling "winner'', and many different modalities are being explored. In this thesis, we describe one potential scaling architecture for superconducting circuits, which is based on a unit cell containing a set of controllable, measurable qubits. In analogy to the unit cell of a crystal, this unit cell can be tiled, in this case to form 2D arrays of individually controllable and measurable qubits. This is enabled by three key technologies: 3D integrated off-chip control wiring, reverse-side readout resonators, and inductive shunting of the device enclosure with micromachined pillars. To validate this approach, we design and build a demonstration device featuring four transmon qubits and containing within it a single unit cell of the architecture. The device construction involves the fabrication of reverse-side circuits and the use of novel CNC drilling of the circuit substrate. We measure coherence times and single-qubit gate fidelities comparable with the state-of-the-art for transmon qubits (avg. T1 = 149 µs, avg. echoed pure dephasing T2 = 189 µs, avg. F > 99.98%), establishing that the design is compatible with high coherence. An important feature of the design is that the infinite construct formed by tiling the plane with the unit cell possesses a cutoff frequency, below which the circuit environment cannot sustain any electromagnetic modes. We develop models to predict this cutoff frequency, and predict that environment mediated crosstalk between qubits inside this structure decays exponentially with spatial separation. This crosstalk can be viewed as being mediated by evanescent waveguide modes, or by bound states formed by the interaction of qubits with the environmental modes around the cutoff. Both models provide quantitative predictions for the rate of crosstalk decay, which are shown to be in good agreement. We propose this architecture as a promising candidate for building 2D arrays of hundreds or thousands of nearest neighbour coupled superconducting qubits, which could provide a testbed of quantum error correction schemes such as the surface code.

Circuit quantum electrodynamics has received an increasing amount of attention over the last decade in light of its potential use in quantum information processing. The underlying principle of this architecture is the coherent coupling between microwave photons stored in superconducting resonators and superconducting qubits made from non-linear, non-dissipative electrical circuits. This architecture can be extended to other solid-state systems with transition frequencies in the microwave regime, such as nuclear and electron spins or Andreev bound states. These hybrid devices would allow the coherent exchange of information between such systems and superconducting qubits mediated by a microwave resonator. This could lead to advances in quantum information processing and new insights in the physics governing these interacting systems. In this dissertation experimental work with different types of hybrid quantum circuits is presented. A first experiment investigates the coherent coupling of microwave photons with a spin ensemble in a correlated and uncorrelated state. The coupling strength and magnetic resonance is studied as a function of temperature and magnetic field direction. A pronounced temperature dependent anisotropy of the magnetic resonance is observed, which can be attributed to the onset of antiferromagnetic correlations in the spin ensemble when cooled below T=4 K. A simple one-dimensional model gives a good description of this anisotropy. A next experiment studies the transport characteristics of carbon nanotubes electrically accessed with normal and superconducting contacts. These devices were characterised using both DC and RF reflectometry techniques. The carbon nanotube devices with superconducting contacts exhibit transport characteristics of Josephson junctions with critical currents of up to Ic~18 nA, as well as multiple Andreev reflections. These semiconductor-superconductor hybrid Josephson junctions are then used to realise a carbon-nanotube-based superconducting qubit with voltage tunable transition frequency using a local electrostatic gate. Strong coupling (g~100 MHz) to a coplanar waveguide resonator is demonstrated via a resonator frequency shift dependent on applied gate voltage. Qubit parameters are extracted from spectroscopy and correspond well to the DC measurements of the carbon nanotube Josephson junctions. Qubit relaxation and coherence times in the range 10-100 ns are observed. The hybrid devices investigated in this work present potential building blocks for more extensive hybrid architectures for quantum information processing.

This thesis presents an effort towards integration of superconductor-contacted carbon nanotubes into microwave circuits, as a new tool for building quantum circuits. Carbon nanotubes show a wealth of quantum phenomena demonstrated in transport experiments by different groups in the last two decades. With the development of circuit QED, one can study these phenomena using on-chip microwave circuits. Moreover, in superconductor-contacted nanotubes, Andreev reflection of the particles at the interfaces leads to the formation of Andreev bound states. A pair of such states can potentially serve as a new type of a qubit. Here, fabrication and measurement techniques of superconductor contacted carbon nanotubes and superconductor/normal metal bilayer microwave circuits is developed, and their behaviour is studied. In superconductor-contacted nanotubes the full range of contact transparencies is investigated, showing different transport phenomena such as Coulomb blockade, Kondo effect and Fabry-Pérot interference. In addition, the interplay of these effects with multiple Andreev reflection phenomena and the superconducting proximityinduced non-dissipative current transport through the nanotube is studied. The proximity effect is studied using microwave resonators made of superconductor/ normal metal bilayers. Characteristic parameters of the bilayers, such as the critical temperature and the magnetic penetration depth are reliably extracted from the measurements. Finally, the two experiments are brought together in the first step towards using superconductor-contacted nanotubes in quantum microwave circuits. The successful realization of such circuit is achieved, where the Coulomb blockade in a nanotube quantum dot is probed with a microwave field.

In this thesis we investigate various aspects of SAW devices and strain sensitive spin species in ZnO and LiNbO3 for coupling surface acoustic waves to spin ensembles. Firstly, we performed a series of ESR experiments exploring the potential of Fe3+ impurities in ZnO for spin-lattice coupling. This spin system has already been identified as a high potential quantum technology component due to its long coherence time. We show that the system also has good properties for spin-lattice coupling experiments, with a strain-coupling parameter G33 = 280 ± 5GHz/strain, which is about 16 times larger than the largest reported for NV centres in diamond. We found that the LEFE effect as well as the spin Hamiltonian parameter D have a linear temperature dependence. As the relative change in each coincide, this strongly supports the notion that the modification of D by an electric field is a multiplicative effect rather than an additive one, D = D0(1 + κΕ). The LEFE coefficient we measured is several times larger for Fe3+:ZnO than for Mn2+:ZnO. Secondly, we have fabricated and characterised SAW devices on bulk ZnO crystals and Fe doped lithium niobate. We found that the nominally pure ZnO was conductive at room temperature due to n-type intrinsic doping, and electrical losses inhibited any transmission through a SAW delay line above T = 200K. The one-port resonator measured down to milli-Kelvin temperatures showed excellent quality factors of up to Q ≃ 1.5 x 105 in its superconducting state. Finally, we performed a surface acoustic wave spin resonance (SAWSR) experiment using a one-port SAW resonator fabricated on Fe2+:LN. We observed a clear signal at T ≃ 25 K, at a field near the expected one for a Δms = 2 transition between the |−1〉 and |+1〉 states. We concluded it to be a transition induced by acoustic coupling since the signal intensity did not tend to zero when the magnetic field was parallel to the crystal anisotropy axis. Furthermore, this tells us that the coupling is due to a modulation of the E zero-field splitting parameter rather than D. We investigated the dependence on microwave power and found the saturation limit. We performed a measurement of Fe3+:LN as well to reassure ourselves that the resonance is not magnetically excited by the field around the IDT.