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5. Advanced CMOS device technologies for 45 nm node and below

Author

A. Veloso, T. Hoffmann, A. Lauwers, H. Yu, S. Severi, E. Augendre, S. Kubicek, P. Verheyen, N. Collaert, P. Absil, M. Jurczak and S. Biesemans

Subjects
Materials of engineering and construction. Mechanics of materials, TA401-492, Biotechnology, TP248.13-248.65
Abstract

We review and discuss the latest developments and technology options for 45 nm node and below, with scaled planar bulk MOSFETs and MuGFETs as emerging devices. One of the main metal gate (MG) candidates for scaled CMOS technologies are fully silicided (FUSI) gates. In this work, by means of a selective and controlled poly etch-back integration process, dual work-function Ni-based FUSI/HfSiON CMOS circuits with record ring oscillator performance (high-VT) are reported (17 ps at VDD=1.1 V and 20 pA/μm Ioff), meeting the ITRS 45 nm node requirement for low-power (LP) CMOS. Compatibility of FUSI and other MG with known stress boosters like stressed CESL (contact-etch-stop-layer with high intrinsic stress) or embedded SiGe in the pMOS S/D regions is validated. To obtain MuGFET devices that are competitive, as compared to conventional planar bulk devices, and that meet the stringent drive and leakage current requirements for the 32 nm node and beyond, higher channel mobilities are required. Results obtained by several strain engineering methods are presented here.

Published
2007

13. Arteriolar and glomerular dimensions in the porcine renal cortex: a morphometric study on corrosion casts and histologic sections

Author

Simoens, P., Vodenicharov, A., Dimitrov, D., van den Broeck, W, and Lauwers, H.

Subjects
kidney, renal arterioles, pigs, glomeruli, morphometry
Abstract

The diameters of 650 superficial cortical and 650 juxtamedullary glomeruli as well as the calibres of their afferent and efferent arterioles were measured on vascular corrosion casts and histologic sections from fifteen kidneys of 6 months old Belgian Landrace pigs weighing 100 ± 5 kg. The statistical analysis of data for glomerular diameters and arteriolar calibres demonstrated significant differences among various types of casting polymers and histologic procedures. Despite the differences due to technical processing, several constant vascular characteristics were found in all kidneys examined. The glomeruli in the superficial cortical zone were significantly smaller than the juxtamedullary glomeruli. The average diameter of afferent arterioles was significantly higher than that of efferent arterioles. This difference was present in both the superficial cortical and juxtamedullary zones, but was more pronounced in the former zone.

Published
2000

44. The hyaloid vascular system of the pig.

Author

Schaepdrijver, L., Simoens, P., Lauwers, H., Geest, J., and Charlier, G.

Abstract

The hyaloid vascular system of the pig was studied from 4 weeks of gestation until 2 weeks after birth by means of semithin sections and vascular corrosion casts. The vascular tunic of the lens is supplied by the posterior lens branches of the hyaloid artery (at the posterior lens pole), by the intermediate lens branches of the proper hyaloid arteries (at the lens equator) and by the anterior lens branches of the radial iridial arteries (at the anterior lens pole). Venous drainage takes place via the venous lens branches which leave the lens anteriorly and drain into the radial iridial veins. Regression of the vascular tunic of the lens occurs during the second half of fetal life and is nearly completed in the first postnatal days. The involution first affects the proper hyaloid arteries and their intermediate lens branches. Subsequently, the posterior lens branches regress, whereas the anterior lens branches in the pupillary membrane disappear in the perinatal period only. [ABSTRACT FROM AUTHOR]

Published
1989
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