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Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of n e ≈ 5 × 1017 m−3, and the inductive H-mode with densities of n e ⩾ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.

In this work we show how a continuous wave, low threshold and well collimated terahertz laser source can be obtained by coupling two sub-wavelength whispering galleries quantum cascade optical resonators with a suspended metallic bridge.