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We performed an electrochromic investigation to optimize the composition of reactive magnetron-sputtered mixed layers of zinc oxide and tin oxide (ZnO-SnO2). Deposition experiments were conducted as a combinatorial material synthesis approach. The binary system for the samples of SnO2-ZnO represented the full composition range. The coloration efficiency (CE) was determined for the mixed oxide films with the simultaneous measurement of layer transmittance, in a conventional three-electrode configuration, and an electric current was applied by using organic propylene carbonate electrolyte cells. The optical parameters and composition were measured and mapped by using spectroscopic ellipsometry (SE). Scanning Electron Microscopy (SEM) and Energy-Dispersive X-ray Spectroscopy (EDS) measurements were carried out to check the SE results, for (TiO2-SnO2). Pure metal targets were placed separately from each other, and the indium–tin-oxide (ITO)-covered glass samples and Si-probes on a glass holder were moved under the two separated targets (Zn and Sn) in a reactive argon–oxygen (Ar-O2) gas mixture. This combinatorial process ensured that all the compositions (from 0 to 100%) were achieved in the same sputtering chamber after one sputtering preparation cycle. The CE data evaluated from the electro-optical measurements plotted against the composition displayed a characteristic maximum at around 29% ZnO. The accuracy of our combinatorial approach was 5%. [ABSTRACT FROM AUTHOR]

Thin films of mixed MoO3 and WO3 were obtained using reactive magnetron sputtering onto ITO-covered glass, and the optimal composition was determined for the best electrochromic (EC) properties. A combinatorial material synthesis approach was applied throughout the deposition experiments, and the samples represented the full composition range of the binary MoO3/WO3 system. The electrochromic characteristics of the mixed oxide films were determined with simultaneous measurement of layer transmittance and applied electric current through the using organic propylene carbonate electrolyte cells in a conventional three-electrode configuration. Coloration efficiency data evaluated from the primary data plotted against the composition displayed a characteristic maximum at around 60% MoO3. Our combinatorial approach allows the localization of the maximum at 5% accuracy. [ABSTRACT FROM AUTHOR]

We determined the optimal composition of reactive magnetron-sputtered mixed layers of Titanium oxide and Tin oxide (TiO2-SnO2) for electrochromic purposes. We determined and mapped the composition and optical parameters using Spectroscopic Ellipsometry (SE). Ti and Sn targets were put separately from each other, and the Si-wafers on a glass substrate (30 cm × 30 cm) were moved under the two separated targets (Ti and Sn) in a reactive Argon-Oxygen (Ar-O2) gas mixture. Different optical models, such as the Bruggeman Effective Medium Approximation (BEMA) or the 2-Tauc–Lorentz multiple oscillator model (2T–L), were used to obtain the thickness and composition maps of the sample. Scanning Electron Microscopy (SEM) with Energy-Dispersive X-ray Spectroscopy (EDS) has been used to check the SE results. The performance of diverse optical models has been compared. We show that in the case of molecular-level mixed layers, 2T–L is better than EMA. The electrochromic effectiveness (the change of light absorption for the same electric charge) of mixed metal oxides (TiO2-SnO2) that are deposited by reactive sputtering has been mapped too. [ABSTRACT FROM AUTHOR]

The initial phases of the ALD growth of ZnO have beenexamined.It is shown that ZnO exhibits an island-like growth on Si, layer-by-layeron GaN, whereas on sapphire, the growth mode can be tuned by the depositiontemperature. A new method for depositing ultrathin smooth polycrystallinefilms is presented. The growth rates on different substrates and atdifferent deposition temperatures were analyzed, and the possibilityof epitaxial growth was also examined. [ABSTRACT FROM AUTHOR]