1. A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions
- Author
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Zachary H. Levine, Bradley K. Alpert, Amber L. Dagel, Joseph W. Fowler, Edward S. Jimenez, Nathan Nakamura, Daniel S. Swetz, Paul Szypryt, Kyle R. Thompson, and Joel N. Ullom
- Subjects
Technology ,Engineering (General). Civil engineering (General) ,TA1-2040 - Abstract
Abstract We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit’s design file.
- Published
- 2023
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