5 results on '"Koak, B.-H."'
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2. Effects of Post Etch Treatments on Contaminated Silicon Surface Due to CHF3/C2F6 Reactive Ion Etching
3. Characteristics and Recovery of SI Surfaces Plasma Etching in CHF3 / C2F6
4. Characteristics and Recovery of SI Surfaces Plasma Etching in CHF3 / C2F6.
5. Effects of the V/III ratio on Si doping in InGaAs lattice-matched to InP grown by organometallic vapor phase epitaxy
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