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To produce high-end products, clean vacuum is often required. Even small amounts of high-mass molecules can reduce product yield. The challenge is to timely detect the presence of relevant contaminants. Here is where MFIG can help1. The massfiltered ion gauge sensor (MFIG) continuously and selectively monitors the presence of high-mass contaminant molecules with a sensitivity down to 1E-13 mbar at total pressuresup to 1E-5mbar. This contribution presents field-test data to demonstrate the capabilities of the latest MFIG sensor in continuously and selectively detecting high-mass contaminant moleculesin (U)HVvacuum.

To produce high-end products, clean vacuum is often required. Even small amounts of high-mass molecules can reduce product yield. The challenge is to timely detect the presence of relevant contaminants. Here is where MFIG can help1. The massfiltered ion gauge sensor (MFIG) continuously and selectively monitors the presence of high-mass contaminant molecules with a sensitivity down to 1E-13 mbar at total pressuresup to 1E-5mbar. This contribution presents field-test data to demonstrate the capabilities of the latest MFIG sensor in continuously and selectively detecting high-mass contaminant moleculesin (U)HVvacuum.

The Dutch government regards electric driving as a very promising option to make our future automobility more sustainable, to strenghten the Dutch energy position and to give our economy a structural boost. Therefore, it was decided to gain experience of electric driving through field tests with the Dutch Government's Public Works Department. Rijkswaterstaat (RWS), the aim being twofold: as a highways authority RWS wants to learn more about future mobility and by 2015 RWS wants to have a quarter of its vehicle fleet consisting of electric vehicles. This study has revealed that this second objective is indeed feasible.

TNO has developed the Rapid Nano scanner to detect nanoparticles on EUVL mask blanks. This scanner was designed to be used in particle qualifications of EUV reticle handling equipment. In this paper we present an end-to-end model of the Rapid Nano detection process. All important design parameters concerning illumination, detection and noise are included in the model. The prediction from the model matches the performance that was experimentally determined (59 nm LSE). The model will be used to design and predict the performance of future generations of particle scanners.

This paper describes an on-line instrument, capable of measuring the size and chemical composition of single aerosol particles. Possible applications include monitoring aerosol reactors and studying atmospheric chemistry. The main conclusion is that a working prototype has been built and tested. It uses a three stage vacuum system to generate an aerosol beam with a low divergence angle and a high transmittance. The pressure is reduced sufficiently to allow the application ofa time-of-f1ight mass analyzer. The aerosol beam is probed in the analysis section by the focused beam of a low-power helium-neon laser. Every particle crossing the laser beam scatters light, which is detected by two photomultiplier tubes, mounted at angles of 45 and 90". The signal is stored when both detectors produce a pulse simultaneously, and tbis event triggers the chemical analysis cycle. A pulsed Nd: YAG laser vaporizes the particle and generates ions, which are next analyzed by a time-of-flight mass spectrometer. In this way combined information on the size and the composition of the particleis obtained.