1. TEM Studies on the Microstructure of m-Face Grown 4H-SiC by Solution Growth
- Author
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Kazuhiko Kusunoki, Kazuhito Kamei, Tomoyuki Ueyama, Junro Takahashi, and Kotaro Kawaguchi
- Subjects
Materials science ,Mechanics of Materials ,Mechanical Engineering ,Face (geometry) ,General Materials Science ,Composite material ,Condensed Matter Physics ,Microstructure - Abstract
We have studied the microstructure of the growth surface of the 4H-SiC grown by the m-face solution growth. Atomic Force Microscopy (AFM) revealed the micro-striped morphology with the asperity of several nm in the band-like morphology region. The cross-sectional Transmission Electron Microscopy (XTEM) showed that the growth surface consisted of a bunch of nanofacets and vicinal surface. This peculiar morphology is totally different from that of conventional spiral growth on c-face, which can be closely related with the growth mechanism of the m-face solution growth.
- Published
- 2020
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