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We describe a robust manufacturing process for single-mode photonic crystal (PhC) vertical-cavity surface-emitting lasers (VCSELs). Various PhC designs are investigated to determine endlessly single-mode designs, whereby the same PhC design yields single-mode operation for three different wavelengths (780, 850, and 980 nm). The fabrication of the PhC pattern is based on a self-aligned optical lithography process. The fabrication process results in VCSELs with a maximum output power greater than 1 mW under continuous-wave (CW) operation with side-mode suppression ratio greater than 35 dB. We also show microfluidic laser structures that are enabled by our fabrication process, which integrate fluid channels into VCSELs. Optical and electrical properties of these microfluidic VCSELs are investigated with and without fluids present under CW and pulsed operation. A shift of the lasing wavelength is found with fluid insertion. [ABSTRACT FROM PUBLISHER]

We report on two-dimensional photonic crystal designs in vertical-cavity surface-emitting lasers that yield single-transverse mode operation over a wide range of wavelengths (780, 850, and 980 nm). These single-mode photonic crystal designs are consistent with predictions of a theoretical model that considers design parameters such as hole diameter, lattice constant, and etching depth. The single-mode lasers demonstrate side mode suppression of > 35 dB and > 1 mW output power using the same photonic crystal pattern. [ABSTRACT FROM PUBLISHER]