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Rotating magnets have recently emerged as an efficient method for producing ultra-low frequency signals for through-earth and through-seawater communications. Magneto-mechanical resonator (MMR) arrays, which are magnetized torsional rotors with a restoring torque, are a promising implementation of this idea that use resonance to enhance the magnetic signal generation. The fundamental challenge for MMR design is to have a suspension system for the rotors capable of resisting large transverse magnetic forces while allowing for a large angle of motion at low dissipation and hence high efficiency. Here, we study flexure-based pivot bearings as compliant support elements for MMR rotors which address this challenge and demonstrate their efficient low damping operation. A crossed-flexure configuration enables large angular rotation around a central axis, large transverse stiffness, and compact assembly of closely spaced rotor arrays via geometric flexure interlocking. We characterize the eigen frequency performance and structural damping of MMR supported by these proposed pivot bearings. We develop analytical and numerical models to study their static and dynamic behaviors, including their coupled dynamic modes. We demonstrate that their damping coefficient is up to 80 times lower than corresponding ball bearing MMR. This study is broadly applicable to various systems that leverage arrays of coupled torsional oscillators such as magneto-mechanical transmitters, metamaterials, and energy harvesters., Comment: 26 pages, 12 figures

On-chip phononic circuits tailor the transmission of elastic waves, which can couple to electronic and photonic systems, enabling new signal manipulation capabilities. Phononic circuits rely on waveguides that transmit elastic waves within desired frequency passbands, typically designed based on the Bloch modes of the waveguide constitutive cell, assuming linearity and periodicity. MEMS waveguides composed of coupled drumhead (membrane) resonators offer tunable MHz operation frequencies for applications in nonlinear optomechanics, topological insulators, phononic cavities, and acoustic switching. Here, we construct a reduced-order model (ROM) to demonstrate the switching of signal transmission in drumhead-resonator waveguides due to thermoelastic buckling. The ROM shows that buckling amplifies existing structural disorders, breaking the periodicity required for waveguide transmission through the first passband. This periodicity breaking manifests in the localization of the first-passband modes, like classical Anderson localization caused by disorders. The proposed ROM is essential to study the investigated phenomena since Bloch mode analysis fails for weakly-disordered (< 5%) finite waveguides due to the disorder amplification caused by the thermoelastic buckling. The illustrated transmission control should be useful for logical acoustic operations, like switching, and can be extended to 2D circuits in the future., Comment: 32 pages, 10 figures

Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate and study drumhead resonators exhibiting strongly nonlinear dynamics and develop a reduced order model (ROM) to capture their response accurately. The resonators undergo electrostatically-mediated thermoelastic buckling which tunes their natural frequency from 4.7 to 11.3 MHz, a factor of 2.4x tunability. Moreover, the imposed buckling switches the nonlinearity of the resonators between purely stiffening, purely softening, and even softening-to-stiffening. Accessing these exotic dynamics requires precise control of the temperature and the DC electrostatic forces near the resonator's critical-buckling point. To explain the observed tunability, we develop a one-dimensional physics-based ROM that predicts the linear and nonlinear response of the fundamental bending mode of these drumhead resonators. The ROM captures the dynamic effects of the internal stresses resulting from three sources: The residual stresses from the fabrication process, the mismatch in thermal expansion between the constituent layers, and lastly, the applied electrostatic forces. The ROM replicates the observed tunability of linear (within 5.5% error) and nonlinear responses even near the states of critical buckling. These remarkable nonlinear and large tunability of the natural frequency are valuable features for on-chip acoustic devices in broad applications such as signal manipulation, filtering, and MEMS waveguides.

We present an analytical and experimental study of torsional magnetic mechanism where the restoring torque is due to magnetic field interactions between rotating and fixed permanent magnets. The oscillator consists of a ball bearing-supported permanent magnet, called the rotor, placed between two fixed permanent magnets called the stators. Perturbing the rotor from its equilibrium angle induces a restoring magnetic torque whose effect is modeled as a torsional spring. This restoring effect is accompanied by dissipation mechanisms arising from structural viscoelasticity, air and electromagnetic damping, as well as friction in the ball bearings. To investigate the system dynamics, we constructed an experimental setup capable of mechanical, electrical and magnetic measurements. For various rotor-stator gaps in this setup, we validated an analytical model that assumes viscous and dry (Coulomb) damping during the rotor free response. Moreover, we forced the rotor by a neighboring electromagnetic coil into high amplitude oscillations. We observed unusual resonator nonlinearity: at large rotor-stator gaps, the oscillations are softening; at reduced gaps, the oscillations stiffen-then-soften. The developed reduced-order models capture the nonlinear effects of the rotor-to-stator and the rotor-to-coil distances. These magnetic oscillators are promising in low-frequency electromagnetic signal transmission and in designing magneto-elastic metamaterials with tailorable nonlinearity., Comment: Journal manuscript submitted to Mechanical Systems and Signal Processing with 19 pages and 7 figures; The document includes supplemental material with 19 pages and 5 figures

Electromagnetic signals in the ultra-low frequency (ULF) range below 3 kHz are well suited for underwater and underground wireless communication thanks to low signal attenuation and high penetration depth. However, it is challenging to design ULF transmitters that are simultaneously compact and energy efficient using traditional approaches, e.g., using coils or dipole antennas. Recent works have considered magneto-mechanical alternatives, in which ULF magnetic fields are generated using the motion of permanent magnets, since they enable extremely compact ULF transmitters that can operate with low energy consumption and are suitable for human-portable applications. Here we explore the design and operating principles of resonant magneto-mechanical transmitters (MMT) that operate over frequencies spanning a few 10's of Hz up to 1 kHz. We experimentally demonstrate two types of MMT designs using both single-rotor and multi-rotor architectures. We study the nonlinear electro-mechanical dynamics of MMTs using point dipole approximation and magneto-static simulations. We further experimentally explore techniques to control the operation frequency and demonstrate amplitude modulation up to 10 bits-per-second., Comment: 10 pages, 9 figures

Low efficiency is the main drawback of many MEMS thermal energy harvesters. Recently, energy harvesting micro-devices that operate using the pyroelectric effect gained attention due to their potential superior performance. Operation of these devices is based on the cyclic motion of a pyroelectric capacitor that operates between a high temperature and a low temperature reservoirs. In this paper, we investigate the dynamics of oscillations of a pyroelectric capacitor self sustained by thermally actuated bimetal micro-cantilevers, a topic which is so far under investigated. In addition to highlighting key thermodynamic aspects of the operation, we explore conditions for self-sustained oscillations and discuss the viability of operation at the mechanical resonance frequency. The analysis is presented for a new design inspired by the device proposed in Refs.\cite{2011,2012}, where in contrast, our proposed design boasts the following features: The pyroelectric capacitor remains parallel to the heat reservoirs, by virtue of its symmetric support by two bimetallic cantilever beams; In addition, the cyclic operation of the device does not require physical contact, thus lowering the risk of mechanical failure; To adjust the damping force imparted by the surrounding gas, the thermal reservoirs are equipped with trenches. To study the dynamic operation of the device, we developed a physically based reduced order, yet accurate, model that accounts for the heat transfer between and within the different components, and for the various forces including the gas damping force. The model is embedded within an optimization algorithm to produce optimal designs over the range 26-38 C of temperature difference between the two reservoirs. The corresponding range of harvested power density is 0.4-0.65 mW/cm2.