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1. Single-crystal silicon high-Q torsional oscillators.

Author

Kleiman, R. N., Kaminsky, G. K., Reppy, J. D., Pindak, R., and Bishop, D. J.

Subjects
*CRYSTAL oscillators, *SILICON
Abstract

We describe techniques for constructing single-crystal silicon high-Q torsional oscillators. The oscillators are fabricated by the high-precision micromachining of silicon using orientationdependent etches. We describe methods for using these oscillators as very powerful probes of the mechanical properties of a variety of physical systems. [ABSTRACT FROM AUTHOR]

Published
1985
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