Search

Your search keyword '"Kajiyama, Kenji"' showing total 135 results
Start Over Author "Kajiyama, Kenji"
135 results on '"Kajiyama, Kenji"'

36. The anomalous refractive index in the ellipsometric evaluation of an inhomogeneous film

Author

Nakata, Jyoji and Kajiyama, Kenji

Abstract

When the refractive index of a surface film is a function n(x) of x, where xis the coordinate normal to the film surface, the values of the film thickness d̄and the film index n̄determined ellipsometrically by assuming that the film is homogeneous can be significantly different from the real thickness dand the mean index 〈n〉 = 1d∫0dn(x)dxrespectively. In this work the relative differences εd= (d̄−d)dand εn= (n̄−〈n〉)〈n〉were computed as functions of the film thickness dfor SiO2films on silicon substrates. Three types of refractive index profile n(x) were assumed. It is shown that εdand εncan become quite large when the optical path length difference between the light reflected at the air-film interface and that reflected at the film-substrate interface approaches mλ(m= 1, 2, 3, …). A method is proposed by which a better estimate of film thickness can be obtained from a single observation of Δ and Ψ. This method is useful when εnis small.

Published
1981
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results