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Using resonance and bulge techniques, the mechanical properties of free standing Si-rich SiN"x membranes were precisely measured to evaluate the effect of deposition conditions on them over a narrow range of particular technological interest. Values of the elastic modulus, the residual stress and the thermal expansion coefficient were obtained. It was found that even small differences in gas composition in low pressure CVD deposition make substantial changes in residual stress and significant but much smaller changes in the elastic modulus.

While rubber components are extensively used in automobile vehicle, there are still a lot of difficulties in designing the rubber components applied in complex shapes and preloaded states because of the complicated material properties. In this paper, an efficient experimental method is suggested, which estimates the dynamic stiffness of a rubber component using rubber material test and static stiffness of the bush. And it is verified by comparing with FEM predictions and experimental results. This method is capable of predicting the dynamic stiffness of a rubber bush under various load conditions from minimized test data. Also it estimates dynamic characteristics of a rubber component using rubber material test and FEM calculation.