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Emphasis on effect of oxygen on structural and ferroelectric properties of lead zirconia titanate thin film is reported. The thin film is prepared using RF sputtering and annealed in air atmosphere to introduce oxygen vacancies. The photoelectron spectroscopy data reveal lead rich film, which decreases with annealing temperature, while oxygen content decreases from 59.32–55.82% after annealing. The decrease in oxygen causes pyrochlore formation along with perovskite phase in annealed film. The polarization graph shows reduction in domain wall mobility and film polarization due to oxygen vacancy. The pure perovskite phase is achieved using CFA by inserting O2in annealing chamber. [ABSTRACT FROM AUTHOR]