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Abstract This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25–700 °C, 0–700 kPa, and 10–98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.

A thermoelectric generator (TEG) is one of the important energy harvesting sources for wearable electronic devices, which converts waste heat into electrical energy without any external stimuli, such as light or mechanical motion. However, the poor flexibility of traditional TEGs (e.g., Si-based TE devices) causes the limitations in practical applications. Flexible paper substrates are becoming increasingly attractive in wearable electronic technology owing to their usability, environmental friendliness (disposable, biodegradable, and renewable materials), and foldability. The high water-absorbing quality of paper restricts its scope of application due to water failure. Therefore, we propose a high-performance flexible waterproof paper-based thermoelectric generator (WPTEG). A modification method that infiltrates TE materials into cellulose paper through vacuum filtration is used to prepare the TE modules. By connecting the TE-modified paper with Al tape, as well as a superhydrophobic layer encapsulation, the WPTEG is fabricated. The WPTEG with three P–N modules can generate an output voltage of up to 235 mV at a temperature difference of 50 K, which can provide power to portable electronic devices such as diodes, clocks, and calculators in hot water. With the waterproof property, the WPTEG paves the way for achieving multi-scenario applications in humid environments on human skin.

A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry–Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transmittance ≥ 90%), MgO is chosen as the ideal material to be placed in the high-temperature testing area. The combination of wet chemical etching and direct bonding is used to construct an all-MgO sensor head, which is favorable to reduce the temperature gradient inside the sensor structure and avoid sensor failure. A temperature decoupling method is proposed to eliminate the cross-sensitivity between temperature and vibration, improving the accuracy of vibration detection. The experimental results show that the sensor is stable at 20–1000 °C and 2–20 g, with a sensitivity of 0.0073 rad (20 °C). The maximum nonlinearity error of the vibration sensor measurement after temperature decoupling is 1.17%. The sensor with a high temperature resistance and outstanding dynamic performance has the potential for applications in testing aero-engines and gas turbine engines.

Abstract The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented two different structures of MEMS infrared thermopiles based on suspended film structures. They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone, and the thermocouple strip was oriented in the same direction as the temperature gradient. The same MEMS preparation process was used and finally two different structures of the thermopile were characterized separately for testing to verify the impact of our design on the detector. The test results show that the circular and double-ended symmetrical thermopile detectors have responsivities of 27.932 V/W and 23.205 V/W, specific detectivities of 12.1×107 cm·Hz1/2·W−1 and 10.1×107 cm·Hz1/2·W−1, and response time of 26.2 ms and 27.06 ms, respectively. In addition, rectangular double-ended symmetric thermopile has a larger field of view than a circular thermopile detector, but is not as mechanically stable as a circular thermopile.

An extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated on a silicon wafer. The sensing head is fabricated by MEMS technology including dry etching, anodic bonding and dicing processing. And the optical fiber is intergrated in the sensing head by laser fusing. According to our calculation, the sensor has a resonance frequency of 10.008kHz. Experimental results indicated that the sensitivity of the sensor from 2g to 22g, with the frequency of 200Hz, was 2.48 nm/g at 20° and can work stably at 400°. The nonlinearity of the sensor was evaluated from 20° to 400° and the max nonlinear error was 1.88% at 300°. In addition, the temperature drift and temperature crossed sensitivity of the sensor agreed well with the theoretical analysis. We believe this proposed MEMS vibration sensor has a wide engineering high-temperature application prospect.

The process method of a Si3N4 ceramic sealed cavity is realized by vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa pressure. Through the combination of Si3N4 ceramic polishing and thinning, inductively coupled plasma etching, and high-temperature metal filler (Ti-Zr-Cu-Ni) brazing process, a vacuum-sealed cavity suitable for high-temperature environments was prepared. The cross section of the bonding interface was characterized by scanning electron microscope (SEM) and energy dispersive spectrometer (EDS), which indicated that the two Si3N4 ceramic were well bonded, the cavity structure remained intact, and the bonding interface strength exceeded 5.13 MPa. Furthermore, it retained its strong bonding strength after in high-temperature environments of 1,000, 1,050, and 1,100°C for 1 h. This indicates that a brazed vacuum-sealed cavity can be used in high-temperature environments. Through the proposed method, pressure sensor that can withstand high temperatures can be developed.

Electrochromic devices (ECDs) that display multicolor patterns have gradually attracted widespread attention. Considering the complexity in the integration of various electrochromic materials and multi-electrode configurations, the design of multicolor patterned ECDs based on simple approaches is still a big challenge. Herein, it is demonstrated vivid ECDs with broadened color hues via introducing carbon dots (CDs) into the ion electrolyte layer. Benefiting from the synergistic effect of electrodes and electrolytes, the resultant ECDs presented a rich color change. Significantly, the fabricated ECDs can still maintain a stable and reversible color change even in high temperature environments where operating temperatures are constantly changing from RT to 70°C. These findings represent a novel strategy for fabricating multicolor electrochromic displays and are expected to advance the development of intelligent and portable electronics.

In order to reduce the pumping threshold and achieve a short-cavity single-mode transmission with a narrow-linewidth random fiber laser, we propose a tunable random fiber laser based on the combination of random grating and highly reflective fiber Bragg grating (FBG). Theoretical modeling of a random refractive index-modulated fiber grating was carried out. Random grating is regarded as a linear combination of uniform fiber gratings with different periods. Simulation calculations were performed using the transfer matrix method to determine the preparation parameters. Under the premise of satisfying light localization, a point-by-point method was used to write a random grating in a single-mode fiber using a femtosecond laser according to the simulated parameters. We constructed a random fiber laser with a linewidth of 1.68 kHz and a threshold of 29.2 mW using a random grating and a highly reflective FBG combined with an erbium-doped fiber. Due to the broad scattered wavelength range of the random grating, by changing the central wavelength of the high-reflection FBG, the tunable wavelength of the output laser was realized, and the tunable range was 0.847 nm (1549.110–1549.957 nm). Moreover, the laser’s central wavelength and output power are stable for a long time. Compared with other lasers, the proposed laser has the advantages of a lower threshold, shorter cavity length, narrower linewidth, and a relatively simple structure.

In this paper, a fiber-optic Fabry–Perot (F–P) vibration sensor that can work at 800 °C is proposed. The F–P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.

To meet the needs of low-cost and easy-to-prepare surface enhanced Raman scattering (SERS) substrate in practical application, plasma technology was used to treat poly(methyl methacrylate) (PMMA) to form nanofiber structures on the surface, and combined with metal sputtering process, to prepare SERS substrate. On the basis of the theoretical analysis of the formation mechanism of PMMA nanofibers, rhodamine 6G (R6G) was used as the probe molecule to investigate the SERS performance of the substrate. The results show that the limit of detection of the SERS substrate is 10-10 mol/L, the enhancement factor is 1.75×106, and the relative standard deviation is 6.52%. Moreover, the SERS subsrtate can maintain good stability within 30 days, illustrating a great potential for practical application in the field of biochemical detection.

Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in detection, low in power consumption, and can work continuously. The sensor was fabricated through the MEMS process, a specific process which included photolithography, etching, anodic bonding, etc. The sensor is 5160 μm long, 5300 μm wide and 800 μm high. We built a test system to detect two typical VOC gases: isobutylene and acetone. The results show that in the detection of isobutylene gas and acetone gas, the sensor voltage value changes with the change of gas concentration. The linearity of testing isobutylene is 0.961, and the linearity of testing acetone is 0.987. When the isobutylene gas concentration is 50 ppm, the response time is 8 s and the recovery time is 6 s; when the acetone gas concentration is 50 ppm, the response time is 9 s and the recovery time is 10 s. In addition, the sensor demonstrates good repeatability and stability, which are conducive to the detection of VOCs in the environment.

This study proposes a split-type pressure sensor based on differential capacitance that can be applied to in-situ accurate pressure testing in high-temperature environments. The sensor is mainly composed of a high-temperature resistant chip and a high-temperature resistant encapsulation structure. The chip is made of a ceramic substrate and presents a differential capacitance structure that can withstand high temperatures and effectively restrain the temperature drift. The encapsulation presents a split-type structure, in which the chip and the test circuit board are placed at the front and back ends of the sensor, respectively. Therefore, the front end of the sensor can work in the high-temperature area for in-situ testing, while the back-end temperature remains below 60°C all the time, which ensures normal operation of the circuit board. Finally, the test results show that the pressure sensor's temperature drift coefficient is only 6.6% within the temperature range of 25°C-400°C. The sensor's sensitivity can reach 9.27 mV/kPa and the maximum repeatability error is less than 2.2% at 400°C, which shows that the proposed sensor has a higher working temperature and higher precision than the existing pressure sensors.

Rotational speed and temperature measurements of an engine blade surface play a vital role in the performance detection of an engine. We proposed a wireless passive LC sensor based on thick-film integration technology to integrate the sensor in situ on the surface of the rotating part, which can be used to monitor the rotational speed and temperature of the rotating part. The reflection signal generated by the impedance mismatch is output in the form of voltage through the detection circuit such that the synchronous online measurement of rotational speed and temperature is realized by analyzing the time slot of adjacent troughs and the amplitude of the output voltage. In addition, we used laser drilling, screen printing, high-temperature sintering, and other technologies to integrate the sensor in situ on the surface of the ceramic turntable, which is lightweight. Finally, the test was conducted by setting up a rotational speed-high-temperature composite experimental platform, and the results showed that the sensor can work normally in the range of 25–830°C, and the rotational speed measurement range was 50–400rpm. The consistency of the rotational speed measurement was suitable, the maximum error was less than 1%, and the work was stable within 180 min.

Abstract Background This review and meta-analysis aims to evaluate the analgesic efficacy of continuous transversus abdominis plane (TAP) block compared with epidural analgesia (EA) in adults after abdominal surgery. Methods The databases PubMed, Embase and Cochrane Central Register were searched from inception to June 2019 for all available randomized controlled trials (RCTs) that evaluated the analgesic efficacy of continuous TAP block compared with EA after abdominal surgery. The weighted mean differences (WMDs) were estimates for continuous variables with a 95% confidence interval (CI) and risk ratio (RR) for dichotomous data. The pre-specified primary outcome was the dynamic pain scores 24 h postoperatively. Results Eight trials including 453 patients (TAP block:224 patients; EA: 229 patients) ultimately met the inclusion criteria and seven trials were included in the meta-analysis. Dynamic pain scores after 24 h were equivalent between TAP block and EA groups (WMD:0.44; 95% CI: 0.1 to 0.99; I2 = 91%; p = 0.11). The analysis showed a significant difference between the subgroups according to regularly administering (4 trials; WMD:-0.11; 95% CI: − 0.32 to 0.09; I2 = 0%; p = 0.28) non-steroidal anti-inflammatory drugs (NSAIDs) or not (3 trials; WMD:1.02; 95% CI: 0.09 to 1.96; I2 = 94%; p = 0.03) for adjuvant analgesics postoperatively. The measured time of the urinary catheter removal in the TAP group was significantly shorter (3 trials, WMD:-18.95, 95% CI:-25.22 to − 12.71; I2 = 0%; p

Single-crystalline magnesium oxide (MgO) is an attractive material of substrates for high-temperature devices and high-temperature superconducting films. However, it is difficult to achieve the direct bonding of MgO/MgO because of its high brittleness and hardness, as well as the weak bonding force between the crystal faces. In this paper, we presented a hydrophilic direct bonding method of MgO by using two-step surface activation and a high-temperature annealing process. The bonding strengths under different annealing temperatures, pressures and times were measured. A high bonding strength (~7 MPa) and a fine bonding interface without any microcracks and voids were obtained after annealing at 1200 °C, 140 min and 4 MPa. The bonding interface was characterized by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The bonding mechanism of MgO/MgO was also clearly clarified. For the demo application, a MgO sealed cavity was formed by using the direct bonding method which is commonly used in the microelectromechanical systems (MEMS) devices for harsh environment applications.

In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated using high-temperature-resistant electronic components and a PCB board, and a thermal-insulation shell fabricated from a high-temperature-resistant alloy and aerogel. Due to the aerogel, which is a thermal-insulation material, being filled between the circuit board and the rear-end shell, when the air intake temperature reaches 350°C, the temperature transmitted to the C-V conversion circuit board can be kept below 60°C; this ensures normal operation of the C-V converter circuit. The developed sensor can record pressure values from room temperature to 350 °C. According to the pressure-voltage curves at different temperatures obtained from tests, the sensor's sensitivity is 38 mV/bar, and its repeatability error is less than 1.948%. The results show that the proposed sensor has a high operating temperature and is more reliable and linear than existing sensors.

The interest in the field electron emission cathode nanomaterials is on the rise due to the wide applications, such as electron sources, miniature X-ray devices, display materials, etc. In particular, nanodiamond (ND) film is regarded as an ideal next-generation cathode emitter in the field emission devices, due to the low or negative electron affinity, small grain size, high mechanical hardness, low work function, and high reliability. Increasing efforts are conducted on the investigation of the emission structures, manufacturing cost, and field emission properties improvement of the ND films. This review aims to summarize the recent research, highlight the new findings, and provide a roadmap for future developments in the area of ND film electron field emitter. Specially, the optimizing methods of large-scale, high-quality, and cost-effective synthesis of ND films are discussed to achieve more stable surface structure and optimal physical properties. Additionally, the mainstream strategies applied to produce high field emission performance of ND films are analyzed in detail, including regulating the grain size/boundary, hybrid phase carbon content, and doping element/type of ND films; meanwhile, the problems existing in the related research and the outlook in this area are also discussed.

As the key component of aero-engines and industrial gas turbines, a bearing’s working temperature at high speed is close to 300 ℃. The measurement of an engine bearing’s temperature is of great significance to ensure flight safety. In this study, we present a wireless LC conformal temperature sensor for bearing temperatures, which integrates silver on the bearing surface in situ through a screen-printing process. This process makes Ag film (9912-K FL) firmly adhere to the bearing surface and realizes wireless measurements for bearing temperatures in situ. A high-temperature holding experiment of the prepared sensor was conducted, and the results showed that the sensor can work stably for 10 h at 300 ℃. We tested the designed wireless LC conformal temperature sensor at 20–270 ℃. The results showed that the proposed temperature sensor attained as good accuracy and stability in the temperature range 20–270 ℃. The sensitivity of the temperature measurements was 20.81 KHz/℃ when the bearing rotateds, the maximum repeatability was 0.039%, the maximum uncertainty was 0.081%, and the relative error was stable within 0.08%.

In this paper, we propose a Fano-resonance-based refractive index sensor with ultra-high sensitivity. The sensor comprises a metal–insulator-metal (MIM) waveguide with two rectangular stubs coupled with a circular resonator embedded with a defective metal nanocube (CRMN). The transmission characteristics of the structure are simulated using the 2D finite element method. This analysis reveals that the Fano resonance mode splitting is affected by the geometry of the sensor. In addition, the modulation depth and position of the Fano resonance can be tuned by adjusting the width and length of the stub on the CRMN. Optimizing the structural parameters results in a peak sensing sensitivity of 10200 nm∙RIU−1 under the ultra-compact sensor size. This sensitivity allows the sensor to be used in the detection of hemoglobin concentration (HC). By processing simulation data, the linear relationship between the refractive index of three different blood groups (A, B, and O) and HC is obtained. Based on the sensing principle of the designed device, HC can be calculated from measuring the shift of the Fano resonance wavelength. These results provide critical developments for the application of nanoscale refractive index sensors in the biomedical field.

In this paper, a ceramic-based thick film heat flux sensor (TFHFS) to monitor the heat flux in high-temperature environments is described. The TFHFS consists of 130 pairs of Pt-Pt/Rh thermocouples distributed in a serpentine form on a ceramic substrate. An insulator was used to generate the temperature difference, which increases the thermoelectric potential (output voltage) and improves the sensitivity of the proposed TFHFS. There are two pairs of independent thermocouples for temperature monitoring. The screen-printing process is used as the fabrication process. The characterization results indicate that the Pt electrodes and the Pt/Rh electrodes were well connected after sintering at 1350°C, and the thickness and width of the thermocouple electrodes were approximately $20~\mu \text{m}$ and $300~\mu \text{m}$ , respectively. The test results indicate that the proposed heat flux sensor has a maximum output voltage of approximately 1.44 mV, and the heat flux sensitivities for 3-57 kW/m2were well distributed in the range of 0.025-0.030 mV/(kW/m2), thereby demonstrating that the fabricated sensor exhibits high sensitivities in the given heat flux range. Furthermore, the reusability investigation indicated that the prepared TFHFS achieves a stable output voltage and a low error level at 50-900 °C. Therefore, we assume that the proposed sensor can be used for monitoring the heat flux in harsh applications such as turbomachinery and aerospace industries.

Ceramic materials are high-temperature resistant materials with promising prospects. In some applications, semiconductor devices need to be integrated with a ceramic substrate. Herein, we report on the stable operation of an Al2O3 ceramic-based amorphous-Indium gallium zinc oxide (a-IGZO) thinfilm transistor (TFT) at room temperature up to 523 K. Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize the a-IGZO film. A mixed solution was printed on the surface of an insulating layer of alumina. After the combustion reaction, the metal electrode was printed on the surface of a-IGZO to obtain a TFT. The ION/IOFF ratio was 6.04 × 106 at 293 K, and it was maintained at 1.44 × 105 at 523 K. It was demonstrated that the parameters of a-IGZO TFTs such as the subthreshold swing (SS), gm and μsat changed at different temperatures. As such, they can be used as building blocks for integrated circuits that can operate at high temperatures. The fabrication of TFT-based inverters, NAND and NOR gate circuits facilitate the exploration of the possibility of more complex digital circuits that operate at high temperatures, based on hybrid circuit design.

A novel temperature and pressure measuring scheme based on LC sensor for ultra-high temperature environment is presented here. This method resolves the interference of the temperature drift of the HTCC LC pressure sensor and avoids magnetic field crosstalk between two sets of LC circuits. The scheme is that the temperature is expressed by the amplitude of the resonant frequency of an input return loss curve (S11). And then, the temperature and the resonant frequency are combined to calculate the pressure value. According to this idea, the sensor is manufactured. The sensor is composed of high temperature co-fired ceramics (HTCC) substrate and platinum LC circuit based on screen-printing technology. The platinum circuit consists of a planar spiral inductor(L) and four parallel plate capacitors(C). The external antenna is coupled to the inductor of the sensor to form a device whose impedance is measured by the network analyzer to generate an input return loss curve (S11). The testing principle is to utilize the thermistor characteristics of platinum and the pressure-sensitive properties of airtight cavities. The amplitude of the resonant frequency of S11 is mainly affected by the platinum resistance of the sensor, and the pressure has a reduced influence on the amplitude with elevating temperature. The maximum pressure sensitivity measured is 23.735kHz / kPa at 1200°C in the pressure range of 50kPa to 300kPa. The temperature sensitivity is 0.009dB/°C from 25°C to 1200°C. The impedance variation of the sensor and the XRD and SEM analysis of the platinum film conductor were analyzed.

We studied the Classical electromagnetically induced transparency (Cl-EIT) of a non-centrosymmetric metamaterial structure based on Dirac semimetal films (DSFs), which is polarization-insensitive and tunable. It is composed of a square ring and two U-shaped rings. By analyzing the distribution and intensity of the current, we find that Cl-EIT is caused by destructive interference between the resonators that produce near-field coupling. As the Fermi level of DSFs increases, the transparent window of the Cl-EIT structure blueshifts and has a good linear relationship with the Fermi level. For DSFs with different Fermi levels, we calculated their transmission phases and group delays where the maximum group delay is 31.35 ps, and the delay-bandwidth product (DBP) at this point can reach 0.658. The proposed metamaterial structure opens up a new path for various terahertz applications, such as optical storage and slow-light devices.

Based on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, and a microelectromechanical system (MEMS) process was used to prepare the interdigital electrodes. The dispersions were then drop-coated on the interdigital electrodes and dried on a heated plate at 100 °C. The surface characteristics of the rGO-SDS films transferred onto SiO2-Si substrates were analyzed by scanning electron microscopy, raman spectroscopy and atomic force microscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and tested by a correlation system, which showed a linear relationship between humidity variation and the resistance variation of the sensor in the ambient humidity range of 25–95% RH. At room temperature, the linearity of the sensor is about 0.98431 and the sensitivity is about 11.41432 Ω/% RH. At 100 °C, the correlation of the sensor is about 0.95046 and the sensitivity is about 1.0145 Ω/% RH; with a response time of only 9 s at ambient humidity from 25% RH to 95% RH, the sensor has very good repeatability and stability.

High-temperature accelerometers have been widely used in aerospace, nuclear reactors, automobile technologies, etc. In this paper, a fiber-optic Fabry–Perot accelerometer (FOFPA) with a cantilever beam for high temperature is designed and experimentally demonstrated. The FOFPA is formed by bonding an all-silica in-line fiber Fabry–Perot etalon (ILFFPE) to one surface of the uniform cantilever beam with the lumped mass at the free end for acceleration measurement. The all silica in-line fiber FP etalon is made by welding two gold-coat single-mode fiber (GSMF) and a hollow silica glass tube (HST). The research results indicate that the sensitivity of the FOFPA is 0.02328rad/g, and the resonance frequency is 1146.6 Hz in the range of 1 g ~ 10 g. The high-temperature performance of the FOFPA was also evaluated. From 20 °C to 800 °C, the temperature drift is about 0.3178 nm/°C. The FOFPA has the potential of being applicable in higher temperatures compared to conventional accelerometers.

In this paper, to address the problems of large blood draws, long testing times, and the inability to achieve dynamic detection of invasive testing for diabetes, stemming from the principle that type 1 diabetic patients exhale significantly higher levels of acetone than normal people, a FAIMS-MEMS gas sensor was designed to detect acetone, which utilizes the characteristics of high sensitivity, fast response, and non-invasive operation. It is prepared by MEMS processes, such as photolithography, etching, and sputtering, its specific dimensions are 4000 μm in length, 3000 μm in width and 800 μm in height and the related test system was built to detect acetone gas. The test results show that when acetone below 0.8 ppm is introduced, the voltage value detected by the sensor basically does not change, while when acetone gas exceeds 1.8 ppm, the voltage value detected by the sensor increases significantly. The detection accuracy of the sensor prepared by this method is about 0.02 ppm/mV, and the voltage change can reach 1 V with a response time of 3 s and a recovery time of 4 s when tested under 20 ppm acetone environment; this has good repeatability and stability, and has great prospects in the field of non-invasive detection of type 1 diabetes.

An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 °C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22–900 °C and 0–700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments.

In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, in addition to eliminating the absorption region, silicon nitride is deposited on the whole device surface as a passivated absorption layer. This reduces the cost while maintaining the voltage response and is suitable for mass production. The optimized detector had a 22.6% improvement in the response rate to 34.2 V/W, a detection rate of 1.02 × 108 cm·Hz1/2/W, and a response time of 26.9 ms. The design optimization of this detector provides a reference for further development of IR detectors.

Abstract A new demodulation algorithm of the fiber-optic Fabry-Perot cavity length based on the phase generated carrier (PGC) is proposed in this paper, which can be applied in the high-temperature pressure sensor. This new algorithm based on arc tangent function outputs two orthogonal signals by utilizing an optical system, which is designed based on the field-programmable gate array (FPGA) to overcome the range limit of the original PGC arc tangent function demodulation algorithm. The simulation and analysis are also carried on. According to the analysis of demodulation speed and precision, the simulation of different numbers of sampling points, and measurement results of the pressure sensor, the arc tangent function demodulation method has good demodulation results: 1 MHz processing speed of single data and less than 1% error showing practical feasibility in the fiber-optic Fabry-Perot cavity length demodulation of the Fabry-Perot high-temperature pressure sensor.

Abstract Background Cytoskeleton is a highly dynamic network that helps to maintain the rigidity of a cell, and the mechanical properties of a cell are closely related to many cellular functions. This paper presents a new method to probe and characterize cell mechanical properties through dielectrophoresis (DEP)-based cell stretching manipulation and actin cytoskeleton modeling. Methods Leukemia NB4 cells were used as cell line, and changes in their biological properties were examined after chemotherapy treatment with doxorubicin (DOX). DEP-integrated microfluidic chip was utilized as a low-cost and efficient tool to study the deformability of cells. DEP forces used in cell stretching were first evaluated through computer simulation, and the results were compared with modeling equations and with the results of optical stretching (OT) experiments. Structural parameters were then extracted by fitting the experimental data into the actin cytoskeleton model, and the underlying mechanical properties of the cells were subsequently characterized. Results The DEP forces generated under different voltage inputs were calculated and the results from different approaches demonstrate good approximations to the force estimation. Both DEP and OT stretching experiments confirmed that DOX-treated NB4 cells were stiffer than the untreated cells. The structural parameters extracted from the model and the confocal images indicated significant change in actin network after DOX treatment. Conclusion The proposed DEP method combined with actin cytoskeleton modeling is a simple engineering tool to characterize the mechanical properties of cells.

A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor’s resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.

In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additionally, the excellent ohmic contact was formed by annealing at 950 °C between Ni/Al/Ni/Au and p-type SiC with a doping concentration of 1018cm−3. The aging sensor was tested for varistors in the air of 25 °C–600 °C. The resistance value of the varistors initially decreased and then increased with the increase of temperature and reached the minimum at ~450 °C. It could be calculated that the varistors at ~100 °C exhibited the maximum temperature coefficient of resistance (TCR) of ~−0.35%/°C. The above results indicated that the sensor had a stable electrical connection in the air environment of ≤600 °C. Finally, the encapsulated sensor was subjected to pressure/depressure tests at room temperature. The test results revealed that the sensor output sensitivity was approximately 1.09 mV/V/bar, which is better than other SiC pressure sensors. This study has a great significance for the test of mechanical parameters under the extreme environment of 600 °C.

Iron oxide (Fe2O3) nanopowder was prepared by a precipitation method and then mixed with different proportions of carbon nanotubes. The composite materials were characterized by X-ray powder diffraction, Fourier transform infrared spectroscopy and scanning electron microscopy. A fabricated heater-type gas sensor was compared with a pure Fe2O3 gas sensor under the influence of acetone. The effects of the amount of doping, the sintering temperature, and the operating temperature on the response of the sensor and the response recovery time were analyzed. Experiments show that doping of carbon nanotubes with iron oxide effectively improves the response of the resulting gas sensors to acetone gas. It also reduces the operating temperature and shortens the response recovery time of the sensor. The response of the sensor in an acetone gas concentration of 80 ppm was enhanced, with good repeatability.

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.

An in-line fiber optic Fabry−Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.

In order to identify suitable substrate materials for sue in high-temperature pressure sensors that can operate above 1000°C, the high-temperature properties of four high-performance ceramics (99% pure Al2O3 (99Al2O3), 97% pure Al2O3 (97Al2O3), sapphire, and ZrO2) were investigated. Three-point bend testing was used to measure the flexural strengths and flexural moduli of these ceramics, and transient laser emission was used to measure their thermal conductivities. The samples were prepared by hot-press sintering: plates with the dimensions of 3.5 × 5 × 50 mm3 for the bend testing and rods of φ12.5 × 1.5 mm3 for the thermal conductivity measurements. Curves showing the dependence of flexural strength, flexural modulus, and thermal conductivity on temperature were obtained. The results show that the flexural strength and thermal conductivity of sapphire are much greater than those of the other ceramics tested. Thus, we conclude that sapphire is the most appropriate of these materials for use in high-temperature pressure sensors for operation at up to 1000°C.

The accurate characterization of the temperature-dependent permittivity of aluminum nitride (AlN) ceramic is quite critical to the application of wireless passive sensors for harsh environments. Since the change of the temperature-dependent permittivity will vary the ceramic-based capacitance, which can be converted into the change of the resonant frequency, an LC resonator, based on AlN ceramic, is prepared by the thick film technology. The dielectric properties of AlN ceramic are measured by the wireless coupling method, and discussed within the temperature range of 12 °C (room temperature) to 600 °C. The results show that the extracted relative permittivity of ceramic at room temperature is 2.3% higher than the nominal value of 9, and increases from 9.21 to 10.79, and the quality factor Q is decreased from 29.77 at room temperature to 3.61 at 600 °C within the temperature range.

Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively.

In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young’s modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young’s modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

Measurement technology for various key parameters in harsh environments (e.g., high-temperature and biomedical applications) continues to be limited. Wireless passive LC resonant sensors offer long service life and can be suitable for harsh environments because they can transmit signals without battery power or wired connections. Consequently, these devices have become the focus of many current research studies. This paper addresses recent research, key technologies, and practical applications relative to passive LC sensors used to monitor temperature, pressure, humidity, and harmful gases in harsh environments. The advantages and disadvantages of various sensor types are discussed, and prospects and challenges for future development of these sensors are presented.

A wireless passive pressure measurement system for an 800 °C high-temperature environment is proposed and the impedance variation caused by the mutual coupling between a read antenna and a LC resonant sensor is analyzed. The system consists of a ceramic-based LC resonant sensor, a readout device for impedance phase interrogation, heat insulating material, and a composite temperature-pressure test platform. Performances of the pressure sensor are measured by the measurement system sufficiently, including pressure sensitivity at room temperature, zero drift from room temperature to 800 °C, and the pressure sensitivity under the 800 °C high temperature environment. The results show that the linearity of sensor is 0.93%, the repeatability is 6.6%, the hysteretic error is 1.67%, and the sensor sensitivity is 374 KHz/bar. The proposed measurement system, with high engineering value, demonstrates good pressure sensing performance in a high temperature environment.

An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar.

This paper systematically studied the simultaneous measurement of two parameters by a LC-type passive sensor from the theoretical perspective. Based on the lumped circuit model of the typical LC-type passive dual-parameter sensor system, the influencing factors of the signal strength of the sensor as well as the influencing factors of signal crosstalk were both analyzed. It is found that the influencing factors of the RF readout signal strength of the sensor are mainly quality factors (Q factors) of the LC tanks, coupling coefficients, and the resonant frequency interval of the two LC tanks. And the influencing factors of the signal crosstalk are mainly coupling coefficient between the sensor inductance coils and the resonant frequency interval of the two LC tanks. The specific influence behavior of corresponding influencing factors on the signal strength and crosstalk is illustrated by a series of curves from numerical results simulated by using MATLAB software. Additionally, a decoupling scheme for solving the crosstalk problem algorithmically was proposed and a corresponding function was derived out. Overall, the theoretical analysis conducted in this work can provide design guidelines for making the dual-parameter LC-type passive sensor useful in practical applications.

A high-temperature pressure sensor realized by the post-fire metallization on zirconia ceramic is presented. The pressure signal can be read out wirelessly through the magnetic coupling between the reader antenna and the sensor due to that the sensor is equivalent to an inductive-capacitive (LC) resonance circuit which has a pressure-sensitive resonance frequency. Considering the excellent mechanical properties in high-temperature environment, multilayered zirconia ceramic tapes were used to fabricate the pressure-sensitive structure. Owing to its low resistivity, sliver paste was chosen to form the electrical circuit via post-fire metallization, thereby enhancing the quality factor compared to sensors fabricated by cofiring with a high-melting-point metal such as platinum, tungsten or manganese. The design, fabrication, and experiments are demonstrated and discussed in detail. Experimental results showed that the sensor can operate at 600 °C with quite good coupling. Furthermore, the average sensitivity is as high as 790 kHz/bar within the measurement range between 0 and 1 Bar.

In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LTCC sensor, the sensitive membrane of the proposed sensor is very flat, and the deformation of the sensitivity membrane is smaller. The proposed sensor also demonstrates a greater responsivity, which reaches as high as 13 kHz/kPa in range of 0–100 kPa. During experiments, the newly fabricated sensor, which is only about 6.5 cm2, demonstrated very good performance: the repeatability error, hysteresis error, and nonlinearity of the sensor are about 4.25%, 2.13%, and 1.77%, respectively.

To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

In this work, the piezoresistive properties of heavily doped p-type 4H-SiC at room temperature were investigated innovatively. It was verified by a field emission scanning electron microscope (FESEM), X-ray diffraction (XRD), and laser Raman spectroscopy (LRS) that the crystal quality of the epitaxial layer was good. The doping concentration and thickness of the epitaxial layer were measured by secondary ion mass spectrometry (SIMS) to be ~1.12 × 1019 cm−3 and ~1.1 µm, respectively. The 4H-SiC cantilever beam along [ 1 1 − 00 ] crystal orientation was fabricated, and the fixed end of the cantilever beam was integrated with longitudinal and transverse p-type 4H-SiC piezoresistors. A good ohmic contact was formed between Ni/Ti/Al/Au and a p-type 4H-SiC piezoresistor under nitrogen environment annealing at 1050 °C for 5 min. The free end of the cantilever beam was forced to cause strain on the p-type 4H-SiC piezoresistor, and then the resistances were measured by a high precision multimeter. The experimental results illustrated that longitudinal and transverse gauge factors (GFs) of the p-type 4H-SiC piezoresistors were 26.7 and −21.5, respectively, within the strain range of 0−336µε. In order to further verify the electro-mechanical coupling effect of p-type 4H-SiC, the piezoresistors on the beam were connected to the Wheatstone full-bridge circuit and the output changes were observed under cyclic loading of 0−0.5 N. The measuring results revealed that the transducer based on the 4H-SiC piezoresistive effect exhibited good linearity and hysteresis, which confirmed that p-type 4H-SiC has the potential for pressure or acceleration sensing applications.

In this study, an LC wireless passive humidity sensor based on MoS2 nanoflakes was proposed. The LC wireless passive humidity sensor was optimized by performing HFSS simulations and fabricated via a screen-printing technique. The MoS2 nanoflakes were characterized by laser scanning confocal microcopy, scanning electron microscope, and X-ray diffraction. The measurements show the sensor can operate stably for a long time with a hysteresis of 4% RH (relative humidity) in 10⁻95% RH. At low humidity environment (10⁻60% RH), the sensitivity of the as-prepared humidity sensor is 2.79 kHz/% RH, and a sensitivity of 76.04 kHz/% RH was realized in a high humidity environment (60⁻95% RH). In this regard, the sensing mechanism was discussed in the scope of proton transfer theory. The test results also indicate that the response time and recovery time of the prepared sensor are 10 s, 15 s, respectively and between 15~40 °C the sensitivity of sensor was not temperature-dependent in the range of 10~80% RH. In addition, the sensor shows less sensitivity to temperature in the 15⁻25 °C range at 90% RH. All of these experimental results show that the prepared LC wireless passive humidity sensor can stably monitor the rapidly changing humidity in a sealed and narrow environment for a long time.

A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.