1. An Effect of Layered Auxiliary Cathode on Thickness Uniformity in Micro Electroforming Process
- Author
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Huan Wang, Jianpeng Xing, Tao Fan, Jinhu Liu, Jing Xie, and Chaobo Li
- Subjects
micro-electroforming ,thickness uniformity ,auxiliary electrode ,edge effect ,Mechanical engineering and machinery ,TJ1-1570 - Abstract
Thickness nonuniformity is a bottleneck in the micro electroforming process of micro-metal devices. In this paper, a new method of fabricating a layered auxiliary cathode is proposed to improve the thickness uniformity of a micro-electroforming layer. In order to analyze the general applicability of the proposed method, four basic microstructures, namely circular, square, regular triangular, and regular hexagonal were used to study the effect of a layered auxiliary cathode on thickness uniformity through simulation and experimentation. The simulation results showed that with the help of the proposed auxiliary cathode, the thickness nonuniformity of four microstructures should decrease due to the reduced edge effect of the current density. The experimental results showed that the thickness uniformity of four microstructures fabricated via the proposed method was improved by 190.63%, 116.74%, 80.43%, and 164.30% compared to that fabricated via the traditional method, respectively. Meanwhile, the micro-gear was fabricated and the nonuniformity was reduced by 101.15% using the proposed method.
- Published
- 2023
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