1. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
- Author
-
Zhe Wang, Qing-Tang Xue, Yuan-Quan Chen, Yi Shu, He Tian, Yi Yang, Dan Xie, Jian-Wen Luo, and Tian-Ling Ren
- Subjects
ultrasonic ,flexible ultrasound transducer ,ultrasound imaging ,flexible device ,PZT ,Chemical technology ,TP1-1185 - Abstract
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.
- Published
- 2015
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