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We measured the covariance matrix of the fields generated in an integrated third-order optical parametric oscillator operating above threshold. We observed up to $(2.3 \pm 0.3)$ dB of squeezing in amplitude difference, inferred $(4.9 \pm 0.7)$ dB of on-chip squeezing, while an excess of noise for the sum of conjugated quadratures hinders the entanglement. The degradation of amplitude correlations and state purity for the increasing of the pump power is consistent with the observed growth of the phase noise of the fields, showing the necessity of strategies for phase noise control aiming at entanglement generation in these systems., Comment: main text: 4 pages, 6 figures; supplemental material: 13 pages, 15 figures

Optical networks are the leading platform for the transfer of information due to their low loss and ability to scale to many information channels using optical frequency modes. To fully leverage the quantum properties of light in this platform, it is desired to manipulate higher-dimensional superpositions by orchestrating linear, beamsplitter-type interactions between several channels simultaneously. We propose a method of achieving simultaneous, all-to-all coupling between N optical frequency modes via N-way Bragg-scattering four-wave mixing. By exploiting the frequency degree of freedom, additional modes can be multiplexed in an interaction medium of fixed volume and loss, avoiding the introduction of excess noise. We generalize the theory of the frequency-encoded two-mode interaction to N modes under this four-wave mixing approach and experimentally verify the quantum nature of this scheme by demonstrating three-way multiphoton interference. The two input photons are shared among three frequency modes and display interference differing from that of two classical (coherent-state) inputs. These results show the potential of our approach for the scalability of photonic quantum information processing to general N-mode systems in the frequency domain.

The generation of spectrally pure high-frequency microwave signals is a critical functionality in fundamental and applied sciences, including metrology and communications. The development of optical frequency combs has enabled the powerful technique of optical frequency division (OFD) to produce microwave oscillations of the highest quality. The approaches for OFD demonstrated to date demand multiple lasers with space- and energy-consuming optical stabilization and electronic feedback components, resulting in device footprints incompatible with integration into a compact and robust photonic platform. Here, we demonstrate all-optical OFD on a single photonic chip driven with a single continuous-wave laser. We generate a dual-point frequency reference using the beat frequency of the signal and idler fields from a microresonator-based optical parametric oscillator (OPO), which achieves high phase stability due to the inherently strong signal-idler frequency correlations. We implement OFD by optically injecting the signal and idler fields from the OPO to a Kerr-comb microresonator on the same chip. We show that the two distinct dynamical states of Kerr cavities can be passively synchronized, allowing broadband frequency locking of the comb state, which transfers the stability of the OPO frequencies to the repetition rate of the Kerr comb. A 630-fold phase-noise reduction is observed when the Kerr comb is synchronized to the OPO, which represents the lowest noise generated on the silicon-nitride platform. Our work demonstrates a simple, effective approach for performing OFD and provides a pathway toward chip-scale devices that can generate microwave frequencies comparable to the purest tones produced in metrological laboratories. This technology can significantly boost the further development of data communications and microwave sensing., Comment: 17 pages, 8 figures

The fabrication processes of silicon nitride photonic devices used in foundries require low temperature deposition, which typically leads to high propagation losses. Here, we show that propagation loss as low as 0.42 dB/cm can be achieved using foundry compatible processes by solely reducing waveguide surface roughness. By post-processing the fabricated devices using rapid thermal anneal (RTA) and furnace anneal, we achieve propagation losses down to 0.28 dB/cm and 0.06 dB/cm, respectively. These low losses are comparable to the conventional devices using high temperature, high-stress low-pressure chemical vapor deposition (LPCVD) films. We also tune the dispersion of the devices, and proved that these devices can be used for linear and nonlinear applications. Low threshold parametric oscillation, broadband frequency combs and narrow-linewidth laser are demonstrated. Our work demonstrates the feasibility of scalable photonic systems based on foundries.

Chip-based optical amplifiers can significantly expand the functionalities of photonic devices. In particular, optical-parametric amplifiers (OPAs), with engineerable gain-spectra, are well-suited for nonlinear-photonic applications. Chip-based OPAs typically require long waveguides that occupy a large footprint, and high pump powers that cannot be easily produced with chip-scale lasers. We theoretically and experimentally demonstrate a microresonator-assisted regenerative OPA that benefits from the large nonlinearity enhancement of microresonators and yields a high gain in a small footprint. We achieve 30-dB parametric gain with only 9 mW of cw-pump power and show that the gain spectrum can be engineered to cover telecom channels inaccessible with Er-based amplifiers. We further demonstrate the amplification of Kerr-soliton comb lines and the preservation of their phase properties. Additionally, we demonstrate amplification by injection locking of optical-parametric oscillators, which corresponds to a regenerative amplifier pumped above the oscillation threshold. Novel dispersion engineering techniques such as coupled cavities and higher-order-dispersion phase matching can further extend the tunability and spectral coverage of our amplification schemes. The combination of high gain, small footprint, low pump power, and flexible gain-spectra engineering of our regenerative OPA is ideal for amplifying signals from the nanowatt to microwatt regimes for portable or space-based devices where ultralow electrical power levels are required and can lead to important applications in on-chip optical- and microwave-frequency synthesis and precise timekeeping., Comment: 16 pages, 10 figures

The lack of high power integrated lasers have been limiting silicon photonics. Despite much progress made in chip-scale laser integration, power remains below the level required for key applications. The main inhibiting factor for high power is the low energy efficiency at high pumping currents, dictated by the small size of the active device. Here we break this power limitation by demonstrating a platform that relies on the coupling of a broad-area multimode gain to a silicon-nitride feedback chip, which acts as an external cavity. The feedback provided by the silicon-nitride chip is routed through a ring resonator and a single-mode filter, thus causing the otherwise multimode-gain chip to concentrate its power into a single highly-coherent mode. Our device produces more than 150 mW of power and 400 kHz linewidth. We achieve these high-performance metrics while maintaining a small footprint of 3 mm^2.

Widely-tunable and narrow-linewidth integrated lasers across all visible wavelengths are necessary to enable on-chip technologies such as quantum photonics, optical trapping, and biophotonics. However, such lasers have not been realized due to the strong wavelength sensitivity and high loss of integrated optical devices at short wavelengths. Here we overcome these challenges and demonstrate a chip-scale visible lasers platform by using tightly-confined, micrometer-scale silicon nitride resonators and commercial Fabry-Perot laser diodes. We achieve tunable and narrow-linewidth lasing in the deep blue (450 nm), blue (488 nm), green (520 nm), red (660 nm) and near-IR (785 nm) with coarse tuning up to 12 nm, fine tuning up to 33.9 GHz, linewidth down to sub-kHz, side-mode suppression ratio > 35 dB, and fiber-coupled power up to 10 mW. These specifications of our chip-scale lasers are comparable to those of state-of-the-art commercial laser systems, making them stand out as powerful tools for the next generation of visible-light technologies.

The exponential growth of computing needs for artificial intelligence and machine learning has had a dramatic impact on data centre energy consumption, which has risen to environmentally significant levels. Using light to send information between compute nodes can dramatically decrease this energy consumption while simultaneously increasing bandwidth. Through wavelength-division multiplexing with chip-based microresonator Kerr frequency combs, independent information channels can be encoded onto many distinct colours of light in the same optical fibre for massively parallel data transmission with low energy. While previous demonstrations have relied on benchtop equipment for filtering and modulating Kerr comb wavelength channels, data centre interconnects require a compact on-chip form factor for these operations. Here, we demonstrate the first integrated silicon photonic transmitter using a Kerr comb source. The demonstrated architecture is scalable to hundreds of wavelength channels, enabling a fundamentally new class of massively parallel terabit-scale optical interconnects for future green hyperscale data centres.

Atomic-level imperfections play an increasingly critical role in nanophotonic device performance. However, it remains challenging to accurately characterize the sidewall roughness with sub-nanometer resolution and directly correlate this roughness with device performance. We have developed a method that allows us to measure the sidewall roughness of waveguides made of any material (including dielectrics) using the high resolution of atomic force microscopy. We illustrate this method by measuring state-of-the-art photonic devices made of silicon nitride. We compare the roughness of devices fabricated using both DUV photo-lithography and electron-beam lithography for two different etch processes. To correlate roughness with device performance we describe what we call a new Payne-Lacey Bending model, which adds a correction factor to the widely used Payne-Lacey model so that losses in resonators and waveguides with bends can be accurately predicted given the sidewall roughness, waveguide width and bending radii. Having a better way to measure roughness and use it to predict device performance can allow researchers and engineers to optimize fabrication for state-of-the-art photonics using many materials., Comment: 16 pages, 10 figures

Synchronization is a ubiquitous phenomenon in nature that manifests as the spectral or temporal locking of coupled nonlinear oscillators. In the field of photonics, synchronization has been implemented in various laser and oscillator systems, enabling applications including coherent beam combining and high precision pump-probe measurements. Recent experiments have also shown time-domain synchronization of Kerr frequency combs via coupling of two separate oscillators operating in the dissipative soliton [i.e., anomalous group-velocity dispersion (GVD)] regime. Here, we demonstrate all-optical synchronization of Kerr combs in the non-solitonic, normal-GVD regime in which phase-locked combs with high pump-to-comb conversion efficiencies and relatively flat spectral profiles are generated. Our results reveal the universality of Kerr comb synchronization and extend its scope beyond the soliton regime, opening a promising path towards coherently combined normal-GVD Kerr combs with spectrally flat profiles and high comb-line powers in an efficient microresonator platform., Comment: 7 pages, 4 figures

Low propagation loss in high confinement waveguides is critical for chip-based nonlinear photonics applications. Sophisticated fabrication processes which yield sub-nm roughness are generally needed to reduce scattering points at the waveguide interfaces in order to achieve ultralow propagation loss. Here, we show ultralow propagation loss by shaping the mode using a highly multimode structure to reduce its overlap with the waveguide interfaces, thus relaxing the fabrication processing requirements. Microresonators with intrinsic quality factors (Q) of 31.8 $\pm$ 4.4 million are experimentally demonstrated. Although the microresonators support 10 transverse modes only the fundamental mode is excited and no higher order modes are observed when using nonlinear adiabatic bends. A record-low threshold pump power of 73 $\mu$W for parametric oscillation is measured and a broadband, almost octave spanning single-soliton frequency comb without any signatures of higher order modes in the spectrum spanning from 1097 nm to 2040 nm (126 THz) is generated in the multimode microresonator. This work provides a design method that could be applied to different material platforms to achieve and use ultrahigh-Q multimode microresonators.

The need for solving optimization problems is prevalent in a wide range of physical applications, including neuroscience, network design, biological systems, socio-economics, and chemical reactions. Many of these are classified as non-deterministic polynomial-time (NP) hard and thus become intractable to solve as the system scales to a large number of elements. Recent research advances in photonics have sparked interest in using a network of coupled degenerate optical parametric oscillators (DOPO's) to effectively find the ground state of the Ising Hamiltonian, which can be used to solve other combinatorial optimization problems through polynomial-time mapping. Here, using the nanophotonic silicon-nitride platform, we propose a network of on-chip spatial-multiplexed DOPO's for the realization of a photonic coherent Ising machine. We demonstrate the generation and coupling of two microresonator-based DOPO's on a single chip. Through a reconfigurable phase link, we achieve both in-phase and out-of-phase operation, which can be deterministically achieved at a fast regeneration speed of 400 kHz with a large phase tolerance. Our work provides the critical building blocks towards the realization of a chip-scale photonic Ising machine., Comment: 8 pages, 6 figures

Frequency encoding of quantum information together with fiber and integrated photonic technologies can significantly reduce the complexity and resource requirements for realizing all-photonic quantum networks. The key challenge for such frequency domain processing of single photons is to realize coherent and selective interactions between quantum optical fields of different frequencies over a range of bandwidths. Here, we report frequency-domain Hong-Ou-Mandel interference with spectrally distinct photons generated from a chip-based microresonator. We use four-wave mixing to implement an active frequency beam-splitter and achieve interference visibilities of $0.95 \pm 0.02$. Our work establishes four-wave mixing as a tool for selective high-fidelity two-photon operations in the frequency domain which, combined with integrated single-photon sources, provides a building block for frequency-multiplexed photonic quantum networks.

Squeezed states are a primary resource for continuous-variable (CV) quantum information processing. To implement CV protocols in a scalable and robust way, it is desirable to generate and manipulate squeezed states using an integrated photonics platform. In this Letter, we demonstrate the generation of quadrature-phase squeezed states in the radio-frequency carrier sideband using a small-footprint silicon-nitride microresonator with a dual-pumped four-wave-mixing process. We record a squeezed noise level of 1.34 dB ($\pm$0.16 dB) below the photocurrent shot noise, which corresponds to 3.09 dB ($\pm$0.49 dB) of quadrature squeezing on chip. We also show that it is critical to account for the nonlinear behavior of the pump fields to properly predict the squeezing that can be generated in this system. This technology represents a significant step toward creating and manipulating large-scale CV cluster states that can be used for quantum information applications including universal quantum computing., Comment: 13 pages, 7 figures

We present a chip-scale scanning dual-comb spectroscopy (SDCS) approach for broadband ultrahigh-resolution spectral acquisition. SDCS uses Si3N4 microring resonators that generate two single soliton micro-combs spanning 37 THz (300 nm) on the same chip from a single 1550-nm laser, forming a high-mutual-coherence dual-comb. We realize continuous tuning of the dual-comb system over the entire optical span of 37.5 THz with high precision using integrated microheater-based wavelength trackers. This continuous wavelength tuning is enabled by simultaneous tuning of the laser frequency and the two single soliton micro-combs over a full free spectral range of the microrings. We measure the SDCS resolution to be 319+-4.6 kHz. Using this SDCS system, we perform the molecular absorption spectroscopy of H13C14N over its 2.3 THz (18 nm)-wide overtone band, and show that the massively parallel heterodyning offered by the dual-comb expands the effective spectroscopic tuning speed of the laser by one order of magnitude. Our chip-scale SDCS opens the door to broadband spectrometry and massively parallel sensing with ultrahigh spectral resolution.

We demonstrate various regimes of synchronization in systems of two coupled cavity soliton-based Kerr frequency combs. We show sub-harmonic, harmonic and harmonic-ratio synchronization of coupled microresonators, and reveal their dynamics in the form of Arnold tongues, structures that are ubiquitous in nonlinear dynamical systems. Our experimental results are well corroborated by numerical simulations based on coupled Lugiato-Lefever equations. This study illustrates the newfound degree of flexibility in synchronizing Kerr combs across a wide range of comb spacings and could find applications in time and frequency metrology, spectroscopy, microwave photonics, optical communications, and astronomy.

We demonstrate an approach for automated Kerr comb generation in the normal group-velocity dispersion (GVD) regime. Using a coupled-ring geometry in silicon nitride, we precisely control the wavelength location and splitting strength of avoided mode crossings to generate low-noise frequency combs with pump-to-comb conversion efficiencies of up to 41%, which is the highest reported to date for normal-GVD Kerr combs. Our technique enables on-demand generation of a high-power comb source for applications such as wavelength-division multiplexing in optical communications., Comment: 5 pages, 5 figures

Over the past decade, remarkable advances have been realized in chip-based nonlinear photonic devices for classical and quantum applications in the near- and mid-infrared regimes. However, few demonstrations have been realized in the visible and near-visible regimes, primarily due to the large normal material group-velocity dispersion (GVD) that makes it challenging to phase match third-order parametric processes. In this paper, we show that exploiting dispersion engineering of higher-order waveguide modes provides waveguide dispersion that allows for small or anomalous GVD in the visible and near-visible regimes and phase matching of four-wave mixing processes. We illustrate the power of this concept by demonstrating in silicon nitride microresonators a near-visible modelocked Kerr frequency comb and a narrow-band photon-pair source compatible with Rb transitions. These realizations extend applications of nonlinear photonics towards the visible and near-visible regimes for applications in time and frequency metrology, spectral calibration, quantum information, and biomedical applications., Comment: 15 pages, 9 figures

The Optical coherence tomography (OCT) is a powerful interferometric imaging technique widely used in medical fields such as ophthalmology, cardiology and dermatology, for which footprint and cost are becoming increasingly important. Here we present a platform for miniaturized sources for OCT based on chip-scale lithographically-defined microresonators. We show that the proposed platform is compatible with standard commercial spectral domain (SD) OCT systems and enable imaging of human tissue with an image quality comparable to the one achieved with tabletop commercial sources. This platform provides a path towards fully integrated OCT systems.

The phenomenon of synchronization occurs universally across the natural sciences and provides critical insight into the behavior of coupled nonlinear dynamical systems. It also offers a powerful approach to robust frequency or temporal locking in diverse applications including communications, superconductors, and photonics. Here we report the experimental synchronization of two coupled soliton modelocked chip-based frequency combs separated over distances of 20 m. We show that such a system obeys the universal Kuramoto model for synchronization and that the cavity solitons from the microresonators can be coherently combined which overcomes the fundamental power limit of microresonator-based combs. This study could significantly expand applications of microresonator combs, and with its capability for massive integration, offers a chip-based photonic platform for exploring complex nonlinear systems.

We present a novel approach to realize microresonator-comb-based high resolution spectroscopy that combines a fiber-laser cavity with a microresonator. Although the spectral resolution of a chip-based comb source is typically limited by the free spectral range (FSR) of the microresonator, we overcome this limit by tuning the 200-GHz repetition-rate comb over one FSR via control of an integrated heater. Our dual-cavity scheme allows for self-starting comb generation without the need for conventional pump-cavity detuning while achieving a spectral resolution equal to the comb linewidth. We measure broadband molecular absorption spectra of acetylene by interleaving 800 spectra taken at 250-MHz per spectral step using a 60-GHz-coarse-resolution spectrometer and exploits advances of integrated heater which can locally and rapidly change the refractive index of a microresonator with low electrical consumption (0.9 GHz/mW), which is orders of magnitude lower than a fiber-based comb. This approach offers a path towards a simple, robust and low-power consumption CMOS-compatible platform capable of remote sensing.

Nanophotonics provides the ability to rapidly and precisely reconfigure light beams on a compact platform. Infrared nanophotonic devices are widely used in data communications to overcome traditional bandwidth limitations of electrical interconnects. Nanophotonic devices also hold promise for use in biological applications that require visible light, but this has remained technically elusive due to the challenges of reconfiguring and guiding light at these smaller dimensions. In neuroscience, for example, there is a need for implantable optical devices to optogenetically stimulate neurons across deep brain regions with the speed and precision matching state-of-the-art recording probes. Here we demonstrate the first platform for reconfigurable nanophotonic devices in the visible wavelength range and show its application in vivo in the brain. We demonstrate an implantable probe endowed with the ability to rapidly switch and route multiple optical beams using a nanoscale switching network. Each switch consists of a silicon nitride waveguide structure that can be reconfigured by electrically tuning the phase of light and is designed for robustness to fabrication variation, enabling scalable devices. By implanting our probe in mouse visual cortex, we demonstrate in vivo the ability to stimulate identified sets of neurons across layers to produce multi-neuron spike patterns and record them simultaneously with sub-millisecond temporal precision. This nanophotonic platform can be scaled up and integrated with high-density neural recording technologies, opening the door to implantable probe technologies that are able to simultaneously record and stimulate the activity of large neural populations at distant regions of the brain with sub-millisecond precision. We expect this platform will enable researchers to gain a deeper understanding into the spatio-temporal precision of the neural code., Comment: 14 pages, 11 figures

Optical frequency combs are broadband sources that offer mutually-coherent, equidistant spectral lines with unprecedented precision in frequency and timing for an array of applications. Kerr frequency combs in microresonators require a single-frequency pump laser and have offered the promise of highly compact, scalable, and power efficient devices. Here, we realize this promise by demonstrating the first fully integrated Kerr frequency comb source through use of extremely low-loss silicon nitride waveguides that form both the microresonator and an integrated laser cavity. Our device generates low-noise soliton-modelocked combs spanning over 100 nm using only 98 mW of electrical pump power. Our design is based on a novel dual-cavity configuration that demonstrates the flexibility afforded by full integration. The realization of a fully integrated Kerr comb source with ultra-low power consumption brings the possibility of highly portable and robust frequency and timing references, sensors, and signal sources. It also enables new tools to investigate the dynamics of comb and soliton generation through close chip-based integration of microresonators and lasers., Comment: 12 pages, 6 figures

Second-order optical processes lead to a host of applications in classical and quantum optics. With the enhancement of parametric interactions that arise due to light confinement, on-chip implementations promise very-large-scale photonic integration. But as yet there is no route to a device that acts at the single photon level. Here we exploit the $\chi^{(3)}$ nonlinear response of a Si$_{3}$N$_{4}$ microring resonator to induce a large effective $\chi^{(2)}$. Effective second-order upconversion (ESUP) of a seed to an idler can be achieved with 74,000 %/W efficiency, indicating that single photon nonlinearity is within reach of current technology. Moreover, we show a nonlinear coupling rate of seed and idler larger than the energy dissipation rate in the resonator, indicating a strong coupling regime. Consequently we observe a Rabi-like splitting, for which we provide a detailed theoretical description. This yields new insight into the dynamics of ultrastrong effective nonlinear interactions in microresonators, and access to novel phenomena and applications in classical and quantum nonlinear optics., Comment: 9 pages, 6 figures, 1 table. Comments and remarks are highly welcome - please contact us!

We demonstrate the generation of counter-rotating cavity solitons in a silicon nitride microresonator using a fixed, single-frequency laser. We demonstrate a dual 3-soliton state with a difference in the repetition rates of the soliton trains that can be tuned by varying the ratio of pump powers in the two directions. Such a system enables a highly compact, tunable dual comb source that can be used for applications such as spectroscopy and distance ranging., Comment: 5pages, 5 figures

We demonstrate a novel approach to producing coherent, directional supercontinuum via cascaded dispersive wave generation. By pumping in the normal group-velocity dispersion regime, pulse compression of the first dispersive wave results in the generation of a second dispersive wave, resulting in an octave-spanning supercontinuum generated primarily to one side of the pump spectrum. We theoretically investigate the dynamics and show that the generated spectrum is highly coherent. We experimentally confirm this dynamical behavior and the coherence properties in silicon nitride waveguides by performing direct detection of the carrier-envelope-offset frequency of our femtosecond pump source using an f-2f interferometer. Our technique offers a path towards a stabilized, high-power, integrated supercontinuum source with low noise and high coherence, with applications including direct comb spectroscopy.

Broadband mid-infrared (mid-IR) spectroscopy applications could greatly benefit from today's well-developed, highly scalable silicon photonics technology; however, this platform lacks broadband transparency due to its reliance on absorptive silicon dioxide cladding. Alternative cladding materials have been studied, but the challenge lies in decreasing losses while avoiding complex fabrication techniques. Here, in contrast to traditional assumptions, we show that silicon photonics can achieve low-loss propagation in the mid-IR from 3 - 6 um wavelength, thus providing a highly scalable, well-developed technology in this spectral range. We engineer the waveguide cross section and optical mode interaction with the absorptive cladding oxide to reduce loss at mid-IR wavelengths. We fabricate a microring resonator and measure an intrinsic quality (Q) factor of 10^6 at wavelengths from 3.5 to 3.8 um. This is the highest Q demonstrated on an integrated mid-IR platform to date. With this high-Q silicon microresonator, we also demonstrate a low optical parametric oscillation threshold of 5.2 mW, illustrating the utility of this platform for nonlinear chip-scale applications in the mid-IR.

Dual-comb spectroscopy is a powerful technique for real-time, broadband optical sampling of molecular spectra which requires no moving components. Recent developments with microresonator-based platforms have enabled frequency combs at the chip scale. However, the need to precisely match the resonance wavelengths of distinct high-quality-factor microcavities has hindered the development of an on-chip dual comb source. Here, we report the first simultaneous generation of two microresonator combs on the same chip from a single laser. The combs span a broad bandwidth of 51 THz around a wavelength of 1.56 $\mu$m. We demonstrate low-noise operation of both frequency combs by deterministically tuning into soliton mode-locked states using integrated microheaters, resulting in narrow ($<$ 10 kHz) microwave beatnotes. We further use one mode-locked comb as a reference to probe the formation dynamics of the other comb, thus introducing a technique to investigate comb evolution without auxiliary lasers or microwave oscillators. We demonstrate broadband high-SNR absorption spectroscopy of dichloromethane spanning 170 nm using the dual comb source over a 20 $\mu$s acquisition time. Our device paves the way for compact and robust dual-comb spectrometers at nanosecond timescales.

We experimentally and theoretically investigate the dynamics of microresonator-based frequency comb generation assisted by mode coupling in the normal group-velocity dispersion (GVD) regime. We show that mode coupling can initiate intracavity modulation instability (MI) by directly perturbing the pump-resonance mode. We also observe the formation of a low-noise comb as the pump frequency is tuned further into resonance from the MI point. We determine the phase-matching conditions that accurately predict all the essential features of the MI and comb spectra, and extend the existing analogy between mode coupling and high-order dispersion to the normal GVD regime. We discuss the applicability of our analysis to the possibility of broadband comb generation in the normal GVD regime., Comment: 10 pages, 6 figures

On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline materials and flowable glass. Silicon nitride (Si3N4) ring resonators open up capabilities for optical routing, frequency comb generation, optical clocks and high precision sensing on an integrated platform. However, simultaneously achieving high quality factor and high confinement in Si3N4 (critical for nonlinear processes for example) remains a challenge. Here, we show that addressing surface roughness enables us to overcome the loss limitations and achieve high-confinement, on-chip ring resonators with a quality factor (Q) of 37 million for a ring with 2.5 {\mu}m width and 67 million for a ring with 10 {\mu}m width. We show a clear systematic path for achieving these high quality factors. Furthermore, we extract the loss limited by the material absorption in our films to be 0.13 dB/m, which corresponds to an absorption limited Q of at least 170 million by comparing two resonators with different degrees of confinement. Our work provides a chip-scale platform for applications such as ultra-low power frequency comb generation, high precision sensing, laser stabilization and sideband resolved optomechanics.

The generation of temporal cavity solitons in microresonators results in low-noise optical frequency combs which are critical for applications in spectroscopy, astronomy, navigation or telecommunications. Breather solitons also form an important part of many different classes of nonlinear wave systems with a localized temporal structure that exhibits oscillatory behavior. To date, the dynamics of breather solitons in microresonators remains largely unexplored, and its experimental characterization is challenging. Here, we demonstrate the excitation of breather solitons in two different microresonator platforms based on silicon nitride and on silicon. We investigate the dependence of the breathing frequency on pump detuning and observe the transition from period-1 to period-2 oscillation in good agreement with the numerical simulations. Our study presents experimental confirmation of the stability diagram of dissipative cavity solitons predicted by the Lugiato-Lefever equation and is importance to understanding the fundamental dynamical properties of solitons within the larger context of nonlinear science., Comment: 18 pages, 5 figures

We report the first demonstration of thermally controlled soliton modelocked frequency comb generation in microresonators. By controlling the electric current through heaters integrated with silicon nitride microresonators, we demonstrate a systematic and repeatable pathway to single- and multi-soliton modelocked states without adjusting the pump laser wavelength. Such an approach could greatly simplify the generation of modelocked frequency combs and facilitate applications such as chip-based dual-comb spectroscopy., Comment: 5 pages, 6 figures