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1. Length Sensing and Control in the Virgo Gravitational Wave Interferometer.

Author

Fausto Acernese, Paola Amico, M. Al-Shourbagy, Sofiane Aoudia, Saverio Avino, Danilo Babusci, G. Ballardin, R. Barillé, Fabrizio Barone, Lisa Barsotti, Matteo Barsuglia, F. Beauville, Marie-Anne Bizouard, C. Boccara, François Bondu, Leone Bosi, Carlo Bradaschia, Saverio Braccini, Alain Brillet, Violette Brisson, L. Brocco, Damir Buskulic, Enrico Calloni, E. Campagna, Fabien Cavalier, R. Cavalieri, Giancarlo Cella, Eric Chassande-Mottin, Christian Corda, A.-C. Clapson, Frédéric Cleva, Jean-Pierre Coulon, Elena Cuoco, V. Dattilo, Michel Davier, Rosario De Rosa, Luciano Di Fiore, Angela Di Virgilio, B. Dujardin, Antonio Eleuteri, D. Enard, Isidoro Ferrante, Francesco Fidecaro, Irene Fiori, R. Flaminio, Jean-Daniel Fournier, Sergio Frasca, Franco Frasconi, Andreas Freise, Luca Gammaitoni, Alberto Gennai, Adalberto Giazotto, Gianfranco Giordano, Lea Giordano, R. Gouaty, D. Grosjean, Gianluca Guidi, Srikanth Hebri, H. Heitmann, P. Hello, Leland E. Holloway, S. Kreckelbergh, Paolo La Penna, Vincent Loriette, M. Loupias, Giovanni Losurdo, Jean-Marie Mackowski, Ettore Majorana, C. N. Man, Marco Mantovani 0004, Fabio Marchesoni, Frédérique Marion, J. Marque, F. Martelli, A. Masserot, Massimo Mazzoni, Leopoldo Milano, C. Moins, J. Moreau, N. Morgado, Benoit Mours, A. Pai, C. Palomba, Federico Paoletti, Silvio Pardi, Antonio Pasqualetti, R. Passaquieti, D. Passuello, B. Perniola, F. Piergiovanni, Laurent Pinard, R. Poggiani, M. Punturo, Paola Puppo, K. Qipiani, P. Rapagnani, V. Reita, A. Remillieux, Fulvio Ricci, I. Ricciardi, P. Ruggi, Giovanni Russo, S. Solimeno, A. Spallicci, Ruggero Stanga, R. Taddei, D. Tombolato, Mauro Tonelli, Alessandra Toncelli, E. Tournefier, Flavio Travasso, Gabriele Vajente, D. Verkindt, Flavio Vetrano, Andrea Vicerè, Jean-Yves Vinet, Helios Vocca, M. Yvert, and Zhiqing Zhang

Published
2006
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2. Silica suspension and coating developments for Advanced LIGO

Author

S. Penn, N. A. Robertson, Roger K. Route, Stuart Reid, A. Cumming, A. M. Gretarsson, Sheila Rowan, C. A. Cantley, David Crooks, Michael Perreur-Lloyd, P. G. Murray, J. H. Hough, A. Heptonstall, Kenneth A. Strain, Peter H. Sneddon, Roger Jones, Martin M. Fejer, Gregory M. Harry, I. W. Martin, Gianpietro Cagnoli, Helena Armandula, E. J. Elliffe, and Jean-Marie Mackowski

Subjects
History, Materials science, business.industry, Heating element, Detector, engineering.material, LIGO, Computer Science Applications, Education, Upgrade, Optics, Coating, Dielectric mirror, engineering, Optoelectronics, Suspension (vehicle), business, Layer (electronics), Caltech Library Services, QC
Abstract

The proposed upgrade to the LIGO detectors to form the Advanced LIGO detector system is intended to incorporate a low thermal noise monolithic fused silica final stage test mass suspension based on developments of the GEO 600 suspension design. This will include fused silica suspension elements jointed to fused silica test mass substrates, to which dielectric mirror coatings are applied. The silica fibres used for GEO 600 were pulled using a Hydrogen-Oxygen flame system. This successful system has some limitations, however, that needed to be overcome for the more demanding suspensions required for Advanced LIGO. To this end a fibre pulling machine based on a CO2 laser as the heating element is being developed in Glasgow with funding from EGO and PPARC. At the moment a significant limitation for proposed detectors like Advanced LIGO is expected to come from the thermal noise of the mirror coatings. An investigation on mechanical losses of silica/tantala coatings was carried out by several labs involved with Advanced LIGO R&D. Doping the tantala coating layer with titania was found to reduce the coating mechanical dissipation. A review of the results is given here.

Published
2006
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3. Low-loss coatings for the VIRGO large mirrors

Author

Roland Geyl, Laurent Mazuray, Jean Pierre Chatard, Claude Amra, F. Beauville, D. Buskulic, R. Flaminio, F. Marion, A. Masserot, L. Massonnet, B. Mours, F. Moreau, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, Regis Barille, Vincenzino Dattilo, Daniel Enard, Franco Frasconi, Alberto Gennai, Paolo La Penna, Magali Loupias, Federico Paoletti, L. Bracci, Giovanni Calamai, E. Campagna, G. Conforto, E. Cuoco, I. Fiori, G. Guidi, G. Losurdo, Fabrizio Martelli, Massimo Mazzoni, B. Perniola, Ruagero N. Stanga, Flavio Vetrano, A. Vicere, D. Babusci, Gianfranco Giordano, Jean Marie Mackowski, Nazario Morgado, Laurent Pinard, Alban Remillieux, Fausto Acernese, Fabrizio Barone, Luciano Di Fiore, Antonio Eleuteri, Leopoldo Milano, Ketevan Qipiani, Iolanda Ricciardi, RUSSO, GUIDO, Salvatore Solimeno, M. Varvella, Francois Bondu, Alain Brillet, Eric Chassande Mottin, Frederic Cleva, T. Cokelaer, J. P. Coulon, B. Dujardin, J. D. Fournier, H. Heitmann, Catherine N. Man, F. Mornet, J. Pacheco, A. Pai, Herve Trinquet, J. Y. Vinet, N. Arnaud, M. Barsuglia, M. A. Bizouard, V. Brisson, F. Cavalier, M. Davier, P. Hello, P. Heusse, S. Kreckelberg, A. Claude Boccara, Vincent Loriette, J. Moreau, V. Reita, P. Amico, L. Bosi, Luca Gammaitoni, M. Punturo, F. Travasso, H. Vocca, L. Barsotti, S. Braccini, C. Bradaschia, G. Cella, C. Corda, A. Di Virgilio, I. Ferrante, F. Fidecaro, Adalberto Giazotto, E. Majorana, L. Holloway, R. Passaquieti, D. Passuello, R. Poggiani, A. Toncelli, M. Tonelli, L. Brocco, S. Frasca, C. Palomba, P. Puppo, P. Rapagnani, F. Ricci, David Rimmer, Philip J. Rogers, Norbert Kaiser, Peter N. J. Dennis, Lingli Wang, H. Angus Macleod, Rolf Wartmann, CALLONI, ENRICO, DE ROSA, ROSARIO, Roland, Geyl, Laurent, Mazuray, Jean Pierre, Chatard, Claude, Amra, F., Beauville, D., Buskulic, R., Flaminio, F., Marion, A., Masserot, L., Massonnet, B., Mour, F., Moreau, J., Ramonet, E., Tournefier, D., Verkindt, O., Veziant, M., Yvert, Regis, Barille, Vincenzino, Dattilo, Daniel, Enard, Franco, Frasconi, Alberto, Gennai, Paolo La, Penna, Magali, Loupia, Federico, Paoletti, L., Bracci, Giovanni, Calamai, E., Campagna, G., Conforto, E., Cuoco, I., Fiori, G., Guidi, G., Losurdo, Fabrizio, Martelli, Massimo, Mazzoni, B., Perniola, Ruagero N., Stanga, Flavio, Vetrano, A., Vicere, D., Babusci, Gianfranco, Giordano, Jean Marie, Mackowski, Nazario, Morgado, Laurent, Pinard, Alban, Remillieux, Fausto, Acernese, Fabrizio, Barone, Calloni, Enrico, DE ROSA, Rosario, Luciano Di, Fiore, Antonio, Eleuteri, Leopoldo, Milano, Ketevan, Qipiani, Iolanda, Ricciardi, Russo, Guido, Salvatore, Solimeno, M., Varvella, Francois, Bondu, Alain, Brillet, Eric Chassande, Mottin, Frederic, Cleva, T., Cokelaer, J. P., Coulon, B., Dujardin, J. D., Fournier, H., Heitmann, Catherine N., Man, F., Mornet, J., Pacheco, A., Pai, Herve, Trinquet, J. Y., Vinet, N., Arnaud, M., Barsuglia, M. A., Bizouard, V., Brisson, F., Cavalier, M., Davier, P., Hello, P., Heusse, S., Kreckelberg, A., Claude Boccara, Vincent, Loriette, J., Moreau, V., Reita, P., Amico, L., Bosi, Luca, Gammaitoni, M., Punturo, F., Travasso, H., Vocca, L., Barsotti, S., Braccini, C., Bradaschia, G., Cella, C., Corda, A., Di Virgilio, I., Ferrante, F., Fidecaro, Adalberto, Giazotto, E., Majorana, L., Holloway, R., Passaquieti, D., Passuello, R., Poggiani, A., Toncelli, M., Tonelli, L., Brocco, S., Frasca, C., Palomba, P., Puppo, P., Rapagnani, F., Ricci, David, Rimmer, Philip J., Roger, Norbert, Kaiser, Peter N. J., Denni, Lingli, Wang, H., Angus Macleod, Rolf, Wartmann, Amra, Claude, Beauville, F., Buskulic, D., Flaminio, R., Marion, F., Masserot, A., Massonnet, L., Mours, B., Moreau, F., Ramonet, J., Tournefier, E., Verkindt, D., Veziant, O., Yvert, M., Barillé, R., Dattilo, V., Enard, D., Frasconi, F., Gennai, A., la Penna, P., Loupias, M., Paoletti, F., Bracci, L., Calamai, G., Campagna, E., Conforto, MARIA LETIZIA, Cuoco, E., Fiori, I., Guidi, G., Losurdo, G., Martelli, F., Mazzoni, M., Perniola, B., Stanga, R., Vetrano, F., Viceré, A., Babusci, D., Giordano, G., Mackowski, J. -M., Morgado, N., Pinard, L., Remillieux, A., Acernese, F., Barone, F., Calloni, E., de Rosa, R., di Fiore, L., Eleuteri, A., Milano, L., Qipiani, K., Ricciardi, I., Russo, G., Solimeno, S., Varvella, M., Bondu, F., Brillet, A., Chassande-Mottin, E., Cleva, F., Cokelaer, T., Coulon, J. -P., Dujardin, B., Fournier, J. -D., Heitmann, H., Man, C. N., Mornet, F., Pacheco, J., Pai, A., Trinquet, H., Vinet, J. -Y., Arnaud, N., Barsuglia, M., Bizouard, M. A., Brisson, V., Cavalier, F., Davier, M., Hello, P., Heusse, P., Kreckelberg, S., Boccara, C., Loriette, V., Moreau, J., Reita, V., Amico, P., Bosi, L., Gammaitoni, L., Punturo, M., Travasso, F., Vocca, H., Barsotti, L., Braccini, S., Bradaschia, C., Celia, G., Corda, C., di Virgilio, A., Ferrante, I., Fidecaro, F., Giazotto, A., Majorana, E., Holloway, L., Passaquieti, R., Passuello, D., Poggiani, R., Toncelli, A., Tonelli, M., Brocco, L., Frasca, S., Palomba, C., Puppo, P., Rapagnani, P., Ricci, F., Beauville, F, Buskulic, D, Flaminio, R, Marion, F, Masserot, A, Massonnet, L, Mours, B, Moreau, F, Ramonet, J, Tournefier, E, Verkindt, D, Veziant, O, Yvert, M, Barille, R, Dattilo, V, Enard, D, Frasconi, F, Gennai, A, La Penna, P, Loupias, M, Paoletti, F, Bracci, L, Calamai, G, Campagna, E, Conforto, G, Cuoco, E, Fiori, I, Guidi, G, Losurdo, G, Martelli, F, Mazzoni, M, Perniola, B, Stanga, R, Vetrano, F, Vicere, A, Babusci, D, Giordano, G, Mackowski, Jm, Morgado, N, Pinard, L, Remillieux, A, Acernese, F, Barone, F, Di Fiore, L, Eleuteri, A, Milano, L, Qipiani, K, Ricciardi, I, Solimeno, S, Varvella, M, Bondu, F, Brillet, A, Chassande Mottin, E, Cleva, F, Cokelaer, T, Coulon, Jp, Dujardin, B, Fournier, Jd, Heitmann, H, Man, Cn, Mornet, F, Pacheco, J, Pai, A, Trinquet, H, Vinet, Jy, Arnaud, N, Barsuglia, M, Bizouard, Ma, Brisson, V, Cavalier, F, Davier, M, Hello, P, Heusse, P, Kreckelberg, S, Boccara, C, Loriette, V, Moreau, J, Reita, V, Amico, P, Bosi, L, Gammaitoni, L, Punturo, M, Travasso, F, Vocca, H, Barsotti, L, Braccini, S, Bradaschia, C, Cella, G, Corda, C, Di Virgilio, A, Ferrante, I, Fidecaro, F, Giazotto, A, Majorana, E, Holloway, L, Passaquieti, R, Passuello, D, Poggiani, R, Toncelli, A, Tonelli, M, Brocco, L, Frasca, S, Palomba, C, Puppo, P, and Rapagnani, P

Subjects
Wavefront, Physics, Scattering, business.industry, Electronic, Optical and Magnetic Material, Virgo interferometer, Computer Science Applications1707 Computer Vision and Pattern Recognition, Condensed Matter Physic, Sputter deposition, optics, Applied Mathematic, Interferometry, Optics, Optical coating, Astronomical interferometer, Optical system design, Electrical and Electronic Engineering, business, Absorption (electromagnetic radiation)
Abstract

The goal of the VIRGO program is to build a giant Michelson type interferometer (3 kilometer long arms) to detect gravitational waves. Large optical components (350 mm in diameter), having extremely low loss at 1064 nm, are needed. Today, the Ion beam Sputtering is the only deposition technique able to produce optical components with such performances. Consequently, a large ion beam sputtering deposition system was built to coat large optics up to 700 mm in diameter. The performances of this coater are described in term of layer uniformity on large scale and optical losses (absorption and scattering characterization). The VIRGO interferometer needs six main mirrors. The first set was ready in June 2002 and its installation is in progress on the VIRGO site (Italy). The optical performances of this first set are discussed. The requirements at 1064 nm are all satisfied. Indeed, the absorption level is close to 1 ppm (part per million), the scattering is lower than 5 ppm and the R.M.S. wavefront of these optics is lower than 8 nm on 150 mm in diameter. Finally, some solutions are proposed to further improve these performances, especially the absorption level (lower than 0.1 ppm) and the mechanical quality factor Q of the mirrors (thermal noise reduction).

Published
2004

4. EUV near normal incidence collector development at SAGEM

Author

R. Mercier Ythier, Andre Rinchet, Benoit Sassolas, Jean-Marie Mackowski, Marie-Françoise Ravet-Krill, Christophe Michel, Roland Geyl, Laurent Pinard, Elodie Roméo, Xavier Bozec, R. Flaminio, Christophe Hecquet, N. Morgado, Franck Delmotte, J.-L. Montorio, SAGEM Défense Sécurité [Massy], Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, Computer cooling, business.industry, Extreme ultraviolet lithography, Polishing, 02 engineering and technology, Surface finish, 021001 nanoscience & nanotechnology, 7. Clean energy, 01 natural sciences, Design for manufacturability, 010309 optics, chemistry.chemical_compound, Optics, chemistry, Extreme ultraviolet, 0103 physical sciences, Water cooling, Silicon carbide, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS
Abstract

Through its participation to European programs, SAGEM has worked on the design and manufacturing of normal incidence collectors for EUV sources. By opposition to grazing incidence, normal incidence collectors are expected to collect more light with a simpler and cheaper design. Designs are presented for the two current types of existing sources: Discharge Produced Plasma (DPP) and Laser Produced Plasma (LPP). Collection efficiency is calculated in both cases. It is shown that these collectors can achieve about 10 % efficiency for DPP sources and 40 % for LPP sources. SAGEM works on the collectors manufacturability are also presented, including polishing, coating and cooling. The feasibility of polishing has been demonstrated with a roughness better than 2 angstroms obtained on several materials (glass, silicon, Silicon Carbide, metals...). SAGEM is currently working with the Institut d'Optique and the Laboratoire des Materiaux Avances on the design and the process of EUV coatings for large mirrors. Lastly, SAGEM has studied the design and feasibility of an efficient thermal control, based on a liquid cooling through slim channels machined close to the optical surface.

Published
2008
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5. The BMV experiment : a novel apparatus to study the propagation of light in a transverse magnetic field

Author

Jacques Vigué, Benoit Pinto Da Souza, Carlo Rizzo, Laurent Pinard, Marc Nardone, Cécile Robilliard, Sebastien Batut, G. Trénec, Jean-Marie Mackowski, Christophe Michel, Oliver Portugall, Gilles Bailly, Remy Battesti, Geert L. J. A. Rikken, Laboratoire National des Champs Magnétiques Pulsés (LNCMP), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Interférométrie (LCAR), Laboratoire Collisions Agrégats Réactivité (LCAR), Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, business.industry, FOS: Physical sciences, 01 natural sciences, Atomic and Molecular Physics, and Optics, High Energy Physics - Experiment, Finesse, High Energy Physics - Experiment (hep-ex), Optics, Transverse magnetic field, Magnet, 0103 physical sciences, Current (fluid), 010306 general physics, business, Optics (physics.optics), Physics - Optics
Abstract

In this paper, we describe in detail the BMV (Bir\'efringence Magn\'etique du Vide) experiment, a novel apparatus to study the propagation of light in a transverse magnetic field. It is based on a very high finesse Fabry-Perot cavity and on pulsed magnets specially designed for this purpose. We justify our technical choices and we present the current status and perspectives., Comment: To be published in the European Physical Journal D

Published
2008
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6. Experimental optomechanics with silicon micromirrors

Author

Lionel Rousseau, Pierre-François Cohadon, Tristan Briant, Olivier Français, Laurent Pinard, Olivier Arcizet, Jean-Marie Mackowski, Christophe Michel, Antoine Heidmann, C. Molinelli, Laboratoire Kastler Brossel (LKB (Jussieu)), Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Electronique, Systèmes de communication et Microsystèmes (ESYCOM), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris, Université Pierre et Marie Curie - Paris 6 (UPMC)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris-Conservatoire National des Arts et Métiers [CNAM] (CNAM)

Subjects
Silicon, Measure (physics), General Physics and Astronomy, chemistry.chemical_element, Physics::Optics, 02 engineering and technology, Dielectric, 7. Clean energy, 01 natural sciences, Noise (electronics), Resonator, Optics, 0103 physical sciences, [SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph], [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, Optomechanics, Quantum optics, Physics, business.industry, 021001 nanoscience & nanotechnology, chemistry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, Ground state
Abstract

We experimentally demonstrate the high-sensitivity optical monitoring of moving micromirrors, made of low-loss dielectric coatings upon silicon resonators of various shapes and sizes. The very high optical finesses obtained (\mathcal{F}\simeq 30\,000 ) have allowed us to measure the thermal noise of the micromirrors at room temperature with a shot-noise limited sensitivity at the 10^{-19}\,{\rm m}/\sqrt{\rm Hz} level and to completely characterize their mechanical behavior, in excellent agreement with the results of a finite-element computation. Applications of such optomechanical systems range from quantum optics experiments to the experimental demonstration of the quantum ground state of a macroscopic mechanical resonator.

Published
2008
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7. Titania-doped tantala/silica coatings for gravitational-wave detection

Author

Ian MacLaren, Steven D. Penn, Chinyere Nwabugwu, Laurent Pinard, A. E. Villar, Martin M. Fejer, Peter H. Sneddon, Gregory M. Harry, Gianpietro Cagnoli, Christophe Michel, Roger K. Route, K. L. Dooley, Andres E. Becerra-Toledo, Helena Armandula, Jean-Marie Mackowski, Matt Eichenfield, Sheila Rowan, Matthew R. Abernathy, Alban Remillieux, Eric D. Black, Colin R. How, P. G. Murray, J. H. Hough, David Crooks, P. Ganau, Stuart Reid, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics and Astronomy (miscellaneous), Physics::Instrumentation and Detectors, FOS: Physical sciences, Physics::Optics, General Relativity and Quantum Cosmology (gr-qc), 7. Clean energy, 01 natural sciences, General Relativity and Quantum Cosmology, 04.80.Nn, 62.40.+i, 95.55.Ym, Condensed Matter::Materials Science, 0103 physical sciences, Astrophysics::Solar and Stellar Astrophysics, Sensitivity (control systems), 010306 general physics, Silica coating, Absorption (electromagnetic radiation), Physics, 010308 nuclear & particles physics, business.industry, Gravitational wave, Detector, Doping, Interferometry, Optical coating, [PHYS.GRQC]Physics [physics]/General Relativity and Quantum Cosmology [gr-qc], Optoelectronics, business, Caltech Library Services
Abstract

Reducing thermal noise from optical coatings is crucial to reaching the required sensitivity in next generation interferometric gravitational-waves detectors. Here we show that adding TiO$_2$ to Ta$_2$O$_5$ in Ta$_2$O$_5$/SiO$_2$ coatings reduces the internal friction and in addition present data confirming it reduces thermal noise. We also show that TiO$_2$-doped Ta$_2$O$_5$/SiO$_2$ coatings are close to satisfying the optical absorption requirements of second generation gravitational-wave detectors.

Published
2007
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8. Measurement of the optical parameters of the Virgo interferometer

Author

Vicenzo Datillo, Christophe Moins, L. Giordano, E. Cuoco, Laurent Pinard, G. Giordano, F. Martelli, Gianluca Guidi, M. Punturo, Leopoldo Milano, F. Marion, Luciano Di Fiore, B. Mours, A. Masserot, F. Garufi, Olivier Francois, Luca Gammaitoni, Bénédicte Dujardin, F. Frasconi, Francesco Cottone, G. Vajente, L. Bosi, M. Mazzoni, M. Del Prete, S. Frasca, R. Flaminio, D. Passuello, Nicolas Leroy, M. Barsuglia, Nelson Christensen, Laura Brocco, R. Passaquieti, Archana Pai, F. Paoletti, F. Cavalier, H. Heitmann, P. Ruggi, Sonia Karkar, A. Viceré, Salem Hebri, Elena Cesarini, F. Menzinger, D. Babusci, Iolanda Ricciardi, Fabrice Beauville, F. Carbognani, A. Pasqualetti, E. Genin, Alessandra Corsi, Mohamed Alshourbagy, Mikael Laval, F. Fidecaro, B. Perniola, P. Rapagnani, M. Davier, Matteo Lorenzini, C. Tremola, Angela Di Virgilio, V. Brisson, Rosario De Rosa, C. Palomba, Rosa Poggiani, Enrico Campagna, Fabrizio Barone, Jean Yves Vinet, G. Ballardin, A. Gennai, Saverio Avino, Paolo La Penna, Stephane Kreckelbergh, Salvatore Solimeno, Irene Fiori, Federica Antonucci, Daniel Grosjean, N. Morgado, F. Ricci, V. Loriette, Guido Russo, P. Puppo, H. Vocca, R. Gouaty, A. Giazotto, I. Ferrante, Cleva Frédéric, Catherine Nary-Man, N. Letendre, Fausto Acernese, Stefano Bigotta, Giancarlo Cella, Antonio Eleuteri, M. Mantovani, R. Cavalieri, Jean Daniel Fourier, M. Yvert, Ruggero Stanga, Albert-Claude Boccara, Alban Remillieux, D. Verkindt, Lisa Barsotti, Marco G. Tarallo, Alessandra Toncelli, Julien Moreau, J.-P. Coulon, F. Piergiovanni, François Bondu, Edwige Tournefier, Alessandro D. A. M. Spallicci, F. Travasso, Ketevan Qipiani, P. Amico, D. Buskulic, Silvio Pardi, B. Lopez, Fabio Marchesoni, Mauro Tonelli, Flavia Vetrano, V. Reita, G. Losurdo, C. Bradaschia, P. Astone, Jean-Marie Mackowski, Sofiane Aoudia, Eric Chassande-Motin, Marie-Anne Bizouard, Christian Corda, Enrico Calloni, J. Marque, F. Nocera, S. Braccini, Simona Birindelli, Ettore Majorana, Patrice Hello, Andre-Claude Clapson, A. Brillet, Anna Dari, Acernese, F, Alshourbagy, M, Amico, P, Aoudia, S, Antonucci, F, Astone, P, Avino, S, Babusci, D, Ballardin, G, Barone, F, Barsuglia, M, Barsotti, L, Beauville, F, Bigotta, S, Birindelli, S, Bizouard, Ma, Boccara, Ac, Bondu, F, Bosi, L, Braccini, S, Bradaschia, C, Brillet, A, Brisson, V, Brocco, L, Buskulic, D, Calloni, Enrico, Campagna, E, Cavalier, F, Carbognani, F, Cavalieri, R, Cella, G, Cesarini, E, Chassande Motin, E, Christensen, N, Clapson, Ac, Frédéric, C, Corda, C, Corsi, A, Cottone, F, Coulon, Jp, Cuoco, E, Dari, A, Datillo, V, Davier, M, del Prete, M, DE ROSA, Rosario, Di Fiore, L, Di Virgilio, A, Dujardin, B, Eleuteri, A, Ferrante, I, Fidecaro, F, Fiori, I, Flaminio, R, Fourier, Jd, Frasca, S, Frasconi, F, Francois, O, Gammaitoni, L, Garufi, Fabio, Genin, E, Gennai, A, Giazotto, A, Giordano, G, Giordano, L, Gouaty, R, Grosjean, D, Guidi, Gm, Hebri, S, Heitmann, H, Hello, P, Karkar, S, Kreckelbergh, S, La Penna, P, Laval, M, Leroy, N, Letendre, N, Lopez, B, Lorenzini, M, Loriette, V, Losurdo, G, Mackowski, Jm, Majorana, E, Mantovani, M, Marchesoni, F, Marion, F, Marque, J, Martelli, F, Masserot, A, Mazzoni, M, Menzinger, F, Moreau, J, Milano, Leopoldo, Moins, C, Morgado, N, Mours, B, Nary Man, C, Nocera, F, Pai, A, Palomba, C, Paoletti, F, Pardi, S, Pasqualetti, A, Passaquieti, R, Passuello, D, Perniola, B, Piergiovanni, F, Pinard, L, Poggiani, R, Punturo, M, Puppo, P, Qipiani, K, Rapagnani, P, Ricci, F, Reita, V, Remillieux, A, Ricciardi, I, Ruggi, P, Russo, Guido, Solimeno, Salvatore, Spallicci, A, Stanga, R, Tarallo, M, Toncelli, A, Tonelli, M, Tournefier, E, Travasso, F, Tremola, C, Vajente, G, Verkindt, D, Vetrano, F, Viceré, A, Vinet, Jy, Vocca, H, and Yvert, M.

Subjects
Physics, Gravitational wave, business.industry, Astrophysics::High Energy Astrophysical Phenomena, Materials Science (miscellaneous), Astrophysics::Instrumentation and Methods for Astrophysics, Phase (waves), Virgo interferometer, Astrophysics::Cosmology and Extragalactic Astrophysics, Industrial and Manufacturing Engineering, parametri ottici, General Relativity and Quantum Cosmology, Optics, Onde gravitazionali, interferometri, Business and International Management, business, Astrophysics::Galaxy Astrophysics
Abstract

The Virgo interferometer, aimed at detecting gravitational waves, is now in a commissioning phase. Measurements of its optical properties are needed for the understanding of the instrument. We present the techniques developed for the measurement of the optical parameters of Virgo. These parameters are compared with the Virgo specifications.

Published
2007

9. Comparison of specularly-reflecting mirrors for GRANIT

Author

P. Ganau, Laurent Pinard, Valery Nesvizhevsky, Alban Remillieux, K.V. Protasov, Jean-Marie Mackowski, D. Forest, N. Morgado, J. L. Montorio, G. Quéméner, Guillaume Pignol, Christine Michel, Institut Laue-Langevin (ILL), ILL, Laboratoire de Physique Subatomique et de Cosmologie (LPSC), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut Polytechnique de Grenoble - Grenoble Institute of Technology-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and GRANIT

Subjects
Nuclear and High Energy Physics, Specular reflection, Physics::Instrumentation and Detectors, Physics::Optics, Surface finish, 01 natural sciences, 7. Clean energy, Condensed Matter::Materials Science, Optics, 03.65.−w, 28.20.−v, Coatings, 0103 physical sciences, Neutron, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, Nuclear Experiment, Instrumentation, Physics::Atmospheric and Oceanic Physics, Physics, Elastic scattering, 010308 nuclear & particles physics, business.industry, Specularity, Sapphire, Ultracold neutrons, Reflection (physics), business
Abstract

The specularity of ultracold neutron reflection was compared for different “promising” surfaces, including sapphire, silica, silica with carbon (diamond-like), and copper coatings with very small roughness. The probability of total losses of ultracold neutrons (UCN) from a specular trajectory was dominated by diffusive (non-specular) elastic scattering of UCN. In all the cases considered the quality of reflection was sufficiently high for storage of UCN at specular trajectories for the first stage of GRANIT experiment.

Published
2007
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11. Rayleigh scattering, absorption, and birefringence of large-size bulk single-crystal sapphire

Author

Zewu Yan, David Blair, Kazuaki Kuroda, Slawomir Gras, Li Ju, Jean-Marie Mackowski, Chunnong Zhao, Alban Remillieux, Masao Tokunari, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Materials : Optical properties, Scattering : Scattering measurements, Materials Science (miscellaneous), and metrology : Optical inspection, 01 natural sciences, Two-photon absorption, Industrial and Manufacturing Engineering, Light scattering, 010309 optics, and metrology : Scattering measurements, symbols.namesake, Optics, Imaging systems : Image detection systems, Physical optics : Birefringence, 0103 physical sciences, Business and International Management, Rayleigh scattering, Materials : Optical materials, 010306 general physics, Absorption (electromagnetic radiation), Instrumentation, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Phonon scattering, Scattering, business.industry, and metrology : Phase measurement, X-ray Raman scattering, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], measurement, Biological small-angle scattering, business
Abstract

While the thermomechanical properties of sapphire make it an excellent candidate of test mass for advanced laser interferometers, its optical quality is not well understood or well controlled. We have studied the results from high-resolution measurements of scattering, absorption, and birefringence in test-mass samples to better understand issues of quality. Samples show large-scale scattering structures clearly linked to the crystal-growth process. Samples characterized by the presence of point defects have significantly lower scattering (except at the point defects). In general on a large scale, high scattering also correlates with higher absorption and higher average birefringence inhomogeneity. However, on a smaller scale there is not a clear point-to-point correlation between scattering and absorption. Often a large-scale scattering structure is spatially displaced by tens of millimeters from a similar absorption structure, indicating that quite separate microscopic mechanisms give rise to scattering and absorption. The spatial displacements indicate that absorption centers and scattering centers are laid down during crystal growth at different distances from the solid-liquid interface. We suggest that absorption may be linked to F centers, while scattering may be linked to impurities such as iron.

Published
2006

12. I.B.S. coatings on large substrates: Towards an improvement of the mechanical and optical performances

Author

Jean-Luc Montorio, Alban Remillieux, Bernard Lagrange, P. Ganau, Danièle Forest, Renée Pignard, N. Morgado, Laurent Pinard, Jean-Marie Mackowski, Christophe Michel, Girod, Dominique, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Wavefront, [PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Scattering, Virgo interferometer, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Optics, Phase shifting interferometry, [PHYS.PHYS.PHYS-INS-DET] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Q factor, 0103 physical sciences, Optoelectronics, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Thin film, 0210 nano-technology, business, Absorption (electromagnetic radiation)
Abstract

présenté par A. Remillieux; Large mirrors (350 mm), having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new mirror generation needs better wavefront and lower mechanical loss. The first results are discussed.

Published
2004

13. Original optical metrologies of large components

Author

B. Lagrange, Renée Pignard, Bernard Cimma, Alban Remillieux, J.-L. Montorio, P. Ganau, N. Morgado, Christophe Michel, Laurent Pinard, Danielle Forest, Jean-Marie Mackowski, Girod, Dominique, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Materials science, Optical metrology, stitching interferometry, Surface finish, [SDU.ASTR] Sciences of the Universe [physics]/Astrophysics [astro-ph], 01 natural sciences, 010309 optics, Image stitching, [PHYS.ASTR.CO]Physics [physics]/Astrophysics [astro-ph]/Cosmology and Extra-Galactic Astrophysics [astro-ph.CO], Optics, 0103 physical sciences, Astronomical interferometer, Calibration, 010306 general physics, roughness, [SDU.ASTR]Sciences of the Universe [physics]/Astrophysics [astro-ph], birefringence, business.industry, scattering, Metrology, Interferometry, [PHYS.ASTR.CO] Physics [physics]/Astrophysics [astro-ph]/Cosmology and Extra-Galactic Astrophysics [astro-ph.CO], Profilometer, Spatial frequency, business, absorption
Abstract

présentée par A. Remillieux; The coating deposition on large optical components (diameter 350 mm) has required the development of new metrology tools at 1064 nm. To give realistic values of the optical performances, the whole surface of the component needs to be scanned. Our scatterometer (commercial system) has been upgraded to support large and heavy samples. The other metrology tools are prototypes we have developed. We can mention the absorption (photothermal effect) and birefringence bench, a control interferometer equipped with an original stitching option, the optical profilometer (RMS roughness and small defect measurements). A detailed description of these metrology benches will be exposed. Their sensitivity, accuracy and capability to map the optical properties of substrates or mirrors will be discussed. We will describe the recent developments: the stitching option adapted to the Micromap profilometer to measure the RMS roughness on larger area (exploration of a new spatial frequency domain), the accurate bulk absorption calibration.

Published
2004

14. Virtual gravitational wave interferometer with actual mirrors

Author

Laurent Pinard, V. Loriette, A. Brillet, Jean-Marie Mackowski, J. Y. Vinet, Alban Remillieux, Institut de Physique Nucléaire de Lyon (IPNL), Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3), Astrophysique Relativiste Théories Expériences Métrologie Instrumentation Signaux (ARTEMIS), Université Nice Sophia Antipolis (... - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire de la Côte d'Azur, and Université Côte d'Azur (UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Université Côte d'Azur (UCA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, Nuclear and High Energy Physics, Atom interferometer, Gravitational-wave observatory, Einstein Telescope, 010308 nuclear & particles physics, business.industry, Gravitational wave, Mathematics::History and Overview, 01 natural sciences, Computer Science::Computers and Society, Metrology, [PHYS.ASTR.CO]Physics [physics]/Astrophysics [astro-ph]/Cosmology and Extra-Galactic Astrophysics [astro-ph.CO], Physics::Popular Physics, Surface coating, Optics, Classical mechanics, 0103 physical sciences, Measuring instrument, Astronomical interferometer, business, 010303 astronomy & astrophysics
Abstract

Phys. Rev. D, vol. 67, n. 102006, pp. , 2003, 2003; International audience

Published
2003
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15. Round robin of painted targets BRDF measurements

Author

Jean-Francois Perelgritz, Jean-Marie Mackowski, Laurent Hespel, Laurent Pinard, Carole Deumie, Claude Amra, Stephane Mainguy, and Yannick Boucher

Subjects
Spectralon, business.industry, Repeatability, Laser, Sample (graphics), law.invention, Speckle pattern, Geography, Optics, law, Goniometer, Calibration, Bidirectional reflectance distribution function, business, Remote sensing
Abstract

Several French research laboratories set up goniometers allowing BRDF measurements at different laser wavelengths in the infrared. On the effor of the Delegation Generale de l'Armement (DGA/STTC), a round robin set of painted targets BRDF measurements was undertaken, under the ONERA expertise. The laboratories participating in this round robin were the Aerospatiale Matra CCR Suresnes, The IPN SMA-Virgo Lyon, the Institut Fresnel Marseille, and the CEA DAM CESTA Le Barp. The goniometers of the four laboratories are firstly described. The targets studied are seven 5cm diameter painted disks of aluminum or steel, a spectralon reference sample, and a sandpaper sample. We have first demonstrated that the pollution of painted targets with dust has a very weak influence on the BRDF. Before and after each measurement series, the directional-hemispherical reflectance of the samples was measured at ONERA. The measurements have been achieved according to a protocol specifying the sample position and laser probe size. Chosen wavelengths for the inter-comparison are 1.064 micrometers . For both wavelengths, the characteristics of the different goniometers are compared in term of noise and repeatability. The difference between the painted targets BRDF measured with the various devices are relatively limited at 1.06 micrometers , and mainly induced by speckle. More important differences are obtained at 10.6 micrometers , particularly for a BRDF measurement device using an absolute calibration method. In order to explain these differences, few hypotheses are advanced. Information on the absolute accuracy is obtained by the comparison of the measured directional-hemispherical reflectance and the one computed from BRDF measurements.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Published
2000
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16. High-laser-damage-threshold HfO 2 /SiO 2 mirrors manufactured by sputtering process

Author

Jean-Marie Mackowski, Odile Lam, Jerome Neauport, Anne Fornier, Francois Dufour, D. Bernardino, and Bernard Schmitt

Subjects
Optics, Materials science, Laser damage, Sputtering, business.industry, law, Sputter deposition, business, Laser, law.invention
Abstract

A major preoccupation for the design of the LMJ laser is the mirrors laser damage threshold. SAGEM SA, in collaboration with the CEA, has conducted a study in order to improve the laser induced damage threshold under operational conditions.

Published
1999
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17. Optical and mechanical behavior of GeC and BP antireflection coatings under rain erosion tests

Author

J. Lacuve, Jean-Marie Mackowski, Patrice Laprat, and Bernard Cimma

Subjects
Materials science, Metallurgy, chemistry.chemical_element, Germanium, Sputter deposition, Zinc sulfide, chemistry.chemical_compound, Optical coating, chemistry, Sputtering, Composite material, Boron phosphide, Boron, Absorption (electromagnetic radiation)
Abstract

Thick germanium carbide (GeC) and boron phosphide (BP) films are successfully grown on various zinc sulfide and germanium substrates at temperatures up to 450 degree(s)C by reactive radio-frequency sputtering (RRFS). The sputtering conditions are respectively a germanium target within a medium of methane-argon for GeC films and a high density boron target in a sputtering medium of phosphine-argon for BP films. The rain erosion resistance of GeC and BP films protected or not by diamond-like carbon (DLC) coating on top are measured for water drop diameter of 1.2 mm or 2 mm with an impact velocity ranging from 210 m/s to 265 m/s on the Saab-Scania whirling-arm rig facilities (Linkoping, Sweden). Rain erosion resistance of BP films for a wavelength band in the 8 micrometers to 10 micrometers range shows no damage for a speed up to 250 m/s with an exposure time up to 10 min, whereas the GeC rain erosion resistance shows no damage up to 235 m/s for the same exposure time. The transmission of each film is well correlated to its optical absorption at 10.6 micrometers . The GeC absorption can be reduced down to 40 cm-1 whereas the BP absorption stays around 220 cm-1 for sputtered films. So the compromise between the optical performance and the rain erosion resistance can be achieved by the use of GeC or BP films.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Published
1994
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18. Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

Author

Renée Pignard, B. Lagrange, Danièle Forest, P. Ganau, N. Morgado, Alban Remillieux, Laurent Pinard, J.-L. Montorio, Bernard Cimma, Jean-Marie Mackowski, Christophe Michel, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Materials science, Materials Science (miscellaneous), Virgo interferometer, engineering.material, Optics at surfaces : Thin films, 01 natural sciences, Industrial and Manufacturing Engineering, 010309 optics, chemistry.chemical_compound, Optics, Coating, 0103 physical sciences, Tantalum pentoxide, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Materials : Optical materials, Business and International Management, Thin film, Absorption (electromagnetic radiation), Wavefront, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, business.industry, Scattering, Instrumentation measurement and metrology : Interferometry, Interferometry, chemistry, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], engineering, business
Abstract

Large mirrors (∅350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.

Published
2006
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19. Synthesis and physicochemical characterization of silicon oxynitride thin films prepared by rf magnetron sputtering

Author

Laurent Pinard and Jean-Marie Mackowski

Subjects
010302 applied physics, Materials science, Silicon oxynitride, Photothermal spectroscopy, business.industry, Materials Science (miscellaneous), 02 engineering and technology, Partial pressure, Sputter deposition, 021001 nanoscience & nanotechnology, 01 natural sciences, Industrial and Manufacturing Engineering, Amorphous solid, chemistry.chemical_compound, Optics, chemistry, Physical vapor deposition, 0103 physical sciences, Optoelectronics, Business and International Management, Thin film, 0210 nano-technology, business, Refractive index
Abstract

SiO(x)N(y) thin films deposited by rf magnetron sputtering to realize low-loss optical multilayers have been studied. We have analyzed the variations of the optical and physicochemical properties of oxynitride layers according to the deposition parameters: the gas partial pressures, the rf power, and the target composition. A linear variation of the layer refractive index as a function of the oxygen partial pressure was observed as well as a strict substitution of O atoms by N atoms. Thanks to IR spectrophotometric analyses, a model of the oxynitride amorphous structure was proposed and confirmed by Bruggeman and Gained approximation methods. Finally, the absorption level of the oxynitride layers was studied by photothermal deflection spectroscopy.

Published
1997
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20. On possible binary molecular structure in the AsTeSe amorphous system

Author

J.J. Samueli, Jean-Marie Mackowski, and P. Kumurdjian

Subjects
Quenching, Chemistry, Mineralogy, Thermodynamics, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Amorphous solid, law.invention, law, Electrical resistivity and conductivity, Differential thermal analysis, Thermal, Materials Chemistry, Ceramics and Composites, Vitrification, Crystallization, Ternary operation
Abstract

We present here experimental results on sixty different compositions of the ternary arsenic-tellurium-selenium system. The parameters considered here are: electrical conductivity and its thermal dependence, and transformation temperatures deduced from differential thermal analysis measurements. The synthesis of results leads to the vitrification area for glasses obtained by air quenching and gives rise to an analysis of the influence of the relative concentration of two elements with respect to the third considered as a parameter. DTA studies permit the separation of two different areas in the vitrification surface, corresponding to materials involving or not involving crystallization processes. We have investigated the possible existence of binary or ternary molecular structures in the vitrification region. The results presented here lead to the conclusion that no ternary molecular structure occurs in the AsTeSe system. Nevertheless it seems possible to conclude that one binary molecular structure can be built around As2Se3.

Published
1974
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21. Viscosity and Structural Transition in As1-xSxGlass Forming Liquids

Author

G. Chaussemy, Jean-Marie Mackowski, and Jean Fornazero

Subjects
Arrhenius equation, Chemistry, Mineralogy, Thermodynamics, Activation energy, Condensed Matter Physics, Glass forming, Electronic, Optical and Magnetic Materials, symbols.namesake, Viscosity, Structural change, Materials Chemistry, symbols, Structural transition, Physical and Theoretical Chemistry
Abstract

The kinematic viscosity of As1-x Sx liquids exhibits a strong continuous change when x reaches a critical value xc s = 0.525. In the Arrhenius' representation the apparent activation energy changes abruptly at x = xc s this transition is attributed to a structural change from a dissociated to a polymeric associated liquid. The high viscosity range corresponds exactly to the easy glass forming compositions. La viscosite cinematique des liquides As1-x Sx presente une transition importante a x = xc s = 0.525. En representation d'Arrhenius, l'energie d'activation change brusquement pour x = xc s Cette transition indique une profonde modification de structure correspondant au passage d'une zone polymerique a forte association vers une zone fortement dissociee. Les compositions correspondant a la zone fortement associee a haute viscosite sont aussi celles qui permettent d'obtenir des verres homogenes par refroidissement lent du liquide.

Published
1982
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22. Kinematic viscosity of AsxSe1−x glass forming liquids

Author

Jean Fornazero, A. Kadoun, G. Chaussemy, and Jean-Marie Mackowski

Subjects
chemistry.chemical_classification, Arrhenius equation, Mineralogy, Thermodynamics, Condensed Matter Physics, Glass forming, Electronic, Optical and Magnetic Materials, symbols.namesake, Liquid state, chemistry, Materials Chemistry, Ceramics and Composites, symbols, Molecule, Chemical composition, Inorganic compound
Abstract

The kinematic viscosity behaviour of As x Se 1− x molten chalcogenides is relatively well described by an Arrhenius equation: ν = ν 0 exp( W / kT ), for x between 0 and 0.8. The ν ( x ) and W ( x ) evolutions suggest that all these liquids present a polymeric structure, even outside the easy glass forming region. The tendency of atoms to form separate molecules, previously observed in the As-S system, remains small and only causes a slight inflexion in the ν ( x ) and W ( x ) isotherm curves near x = 0.5.

Published
1983
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23. Structural and electrical properties of some TeAsGeS glasses

Author

J.J. Samueli, G Bourdarios, Jean-Marie Mackowski, and P. Kumurdjian

Subjects
Materials science, X-ray photoelectron spectroscopy, Phase (matter), Diagram, Materials Chemistry, Ceramics and Composites, Analytical chemistry, Mineralogy, Condensed Matter Physics, Electronic, Optical and Magnetic Materials
Abstract

Electrical and DTA measurements have been performed on TeAsGeS glasses. In this group, As 2 Te n Ge (4 ⩽ n ⩽ 7) glasses are of particular interest since, in the AsTeGe vitrigfication diagram, they all are located on a straight line crossing completely one of the two vitrification regions. The comparison of the results of DTA on As 2 Te 3 , Te 4 Ge and As 2 Te n Ge (4 ⩽ n ⩽ 7) shows that the structure of the As 2 Te n Ge glasses is built around the Ge atoms. The electrical properties of a particular family whose composition is near As 2 Te 5 Ge + S as vitrificant agent are given. Photoelectron spectroscopy has also been used for an investigation of the structure of this last family and permits to conclude that in the crystallized state, phase separations occur.

Published
1972
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24. Amorphous semiconductor thin films characterization by nuclear microanalysis

Author

Jean-Marie Mackowski, Muryel Wehr, J. Tousset, Mireille Fallavier, Jean-Paul Thomas, Christophe Pijolat, Institut de Physique Nucléaire de Lyon (IPNL), Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), ATP Matériaux 2726, ATP Photovoltaïque A651 3865 et CEA DAM No 1350, Institut de Physique Nucléaire de Lyon, Institut National de Physique Nucléaire et de Physique des Particules, and Toucas, Andrée-Aimée

Subjects
Nuclear reaction, Materials science, Hydrogen, Chalcogenide, [SPI.GPROC] Engineering Sciences [physics]/Chemical and Process Engineering, Health, Toxicology and Mutagenesis, Analytical chemistry, chalcogenide films, Chalcogenide glass, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, 7. Clean energy, Microanalysis, Analytical Chemistry, Ion, chemistry.chemical_compound, 0103 physical sciences, Radiology, Nuclear Medicine and imaging, [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Thin film, nuclear microanalysis, metal electrodes, Spectroscopy, 010302 applied physics, diffusion, Public Health, Environmental and Occupational Health, 021001 nanoscience & nanotechnology, Pollution, Characterization (materials science), Nuclear Energy and Engineering, chemistry, 0210 nano-technology, Amorphous semiconductor thin films
Abstract

International audience; A review is presented summarizing the specific nuclear microanalysis methods applied in our laboratory to study amorphous semiconductor thin films. For backscattering, ~3 MeV Li ions are applicable when depth resolution and sensitivity are required while up to 8 MeV a-particles allow larger depths to be probed and elemental interferences to be solved. These features are predominant for diffusion studies between metal electrodes and chalcogenide films. On the other hand hydrogen profiling using the 1H(15N, αγ) resonant nuclear reactions is described and analytical problems associated with its use are discussed. Applications to the elaboration conditions of hydrogenated (a)Si is developed.

Published
1980

25. Study and realization of multilayers stacks on large aspherical optics for Extreme UV lithography applications at 13.5 nm

Author

Sassolas, Benoit, Sassolas, Benoit, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Université Claude Bernard - Lyon I, and Jean-Marie MACKOWSKI

Subjects
Pulvérisation par faisceau d'ions, Lithography, Ion beam sputtering, Multilayers, Extrême U.V, [PHYS.COND]Physics [physics]/Condensed Matter [cond-mat], Extrem Ultraviolet, Lithographie, Multicouches, [PHYS.COND] Physics [physics]/Condensed Matter [cond-mat]
Abstract

The development of large optics is a crucial point for the success of the EUV lithography at 13.5 nm. The integration of large collectors into steppers allows a gain in the collecting beam and thus improves the throughput. We have studied and developed reflecting molybdenum and silicon multilayers at 13.5 nm. Structures were analyzed using grazing incidence reflectometry and performances were measured under Synchrotron radiation at operating wavelength. The diffusion observed between the two materials at each interface severely reduces the total reflectivity at 13.5 nm. We have also studied coatings on large aspherical substrates. To control the gradient profile coatings on large concave collectors ( clear aperture of 500 mm and sag about 100 mm), we have used with success the masking technique., La réalisation d'optiques de grandes dimensions est un élément clé à la réussite de la lithographie Extrême-Ultraviolet à 13,5 nm. Leur intégration dans les appareils de production doit permettre d'acheminer un flux lumineux intense de la source jusqu'au wafer et ainsi d'augmenter la productivité. Nous avons étudié et développé des systèmes multicouches à base de molybdène et silicium. Leurs structures ont été étudiées par réflectométrie des rayons X et leurs performances mesurées à 13,5 nm sous rayonnement synchrotron. Les résultats ont révélé une réflectivité à 13,5 nm limitée principalement à cause de la faible qualité des interfaces due à l'inter-diffusion des 2 matériaux. Nous avons aussi porté une attention particulière au traitement de substrats asphériques de grandes dimensions. Nous avons notamment utilisé des techniques de masquage permettant de contrôler les épaisseurs déposées sur des diamètres de près de 500 mm et malgré des flèches proches de 100 mm.

Published
2008

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