1. Effect of metal (Ti) interlayer on fracture toughness of TiN thin films
- Author
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Mathews, Nidhin George, Lambai, Aloshious, Hans, Marcus, Schneider, Jochen M., Mohanty, Gaurav, and Jaya, Balila Nagamani
- Subjects
Condensed Matter - Materials Science - Abstract
Titanium nitride (TiN) is widely used as a protective coating due to its high hardness, but suffers from inherent brittleness and low fracture toughness, limiting its applicability. The layering of TiN films with metallic titanium (Ti) improves the overall fracture behaviour of the architecture by modifying the crack driving force due to elastic-plastic mismatch between the layers. Microcantilever fracture tests were carried out on bilayer (Ti-TiN, TiN-Ti) and trilayer (Ti-TiN-Ti) architectures to determine the fracture toughness and study the fundamental crack growth behaviour. The initiation fracture toughness in bilayer architecture with crack in Ti layer is almost 70% higher, when compared to crack in TiN layer. In Ti-TiN bilayer the crack propagated catastrophically post linear elastic deformation, whereas the crack was arrested at the TiN/Ti interface in both TiN-Ti and Ti-TiN-Ti architectures due to plastic energy dissipation in the Ti layer. Crack tip plasticity originated in the metallic Ti layer in TiN-Ti and Ti-TiN-Ti architectures increased the total fracture resistance by more than eight-fold compared to the Ti-TiN bilayer., Comment: 15 pages, 5 figures
- Published
- 2025