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New slurry cementation method was used to produce silicide and silicide-aluminide protective coatings on molybdenum alloy (TZM). The slurry cementation processes were carried out at a temperature of 1000 °C in different time intervals with the use of varied slurry mass values. The microstructure and thickness of the coatings were studied by means of scanning microscopy. Chemical composition using X-ray microanalysis and phase composition using X-ray diffraction were also investigated. Coating microhardness was determined. The obtained coatings had a multilayer structure. Phases from the Al-Si-Mo system were observed in silicide-aluminide coatings and phases from the Si-Mo system were observed in silicide coatings. The microhardness strongly depended on the phase composition of the coating. It was demonstrated that slurry mass values had an important influence on the morphology and growth kinetics of silicide-aluminide coatings. In the case of a small amount of the slurry, the deficiency of alloying elements occurring during long processes reduces growth kinetics and can lead to void formation in the structure of silicide-aluminide coatings.